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公开(公告)号：US06331780B1
公开(公告)日：2001-12-18
申请号：US09381780
申请日：1999-09-23
IPC分类号： G01R2726
CPC分类号： G01R27/2605
摘要： A static capacitance-to-voltage converter is capable of converting a static capacitance into a voltage without suffering from a stray capacitance formed between a signal and a shielding line or a stray capacitance formed between an exposed portion of the signal line and its surroundings. The static capacitance-to-voltage converter is formed of an operational amplifier placed in an imaginary short-circuit state between an inverting input and a non-inverting input thereof; a signal line having one end connected to the inverting input and the other end capable of being connected to a static capacitance; a shielding line surrounding the signal line and connected to the non-inverting input; an alternating current signal generator for applying the non-inverting input with an alternating current signal; and zero adjusters for adjusting the output of the static capacitance-to-voltage converter to minimum when no static capacitance is connected to the signal line.
摘要翻译： 静态电容 - 电压转换器能够将静态电容转换成电压，而不会在信号线与屏蔽线之间形成的寄生电容或信号线的暴露部分与其周围环境之间形成的杂散电容。 静态电容 - 电压转换器由在反相输入端和非反相输入端之间以假想短路状态放置的运算放大器形成; 信号线，其一端连接到反相输入，另一端能够连接到静态电容; 围绕信号线并连接到非反相输入的屏蔽线; 交流信号发生器，用于以交流信号施加所述非反相输入; 以及用于在静态电容连接到信号线时将静态电容 - 电压转换器的输出调整到最小的零点调整器。
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公开(公告)号：US06373264B1
公开(公告)日：2002-04-16
申请号：US09402724
申请日：1999-10-08
IPC分类号： G01R2726
CPC分类号： G01D5/2417 , G01D5/24 , G01D5/2405 , G01H11/06 , H04R5/04
摘要： An apparatus for detecting an impedance variable in response to a sensed physical amount of a sensor is provided which comprises an impedance-frequency conversion unit and a counter. The impedance-frequency conversion unit converts the sensor impedance to an oscillation signal a frequency of which corresponds to the sensor impedance. The impedance-frequency conversion unit comprises an impedance-voltage converter for providing a voltage corresponding to the sensor impedance, and a Wien bridge oscillator including an element an impedance of which varies in response to the voltage from the impedance-voltage converter, for generating the oscillation signal. The Wien bridge oscillator is capable of generating a square wave signal as the oscillation signal. The counter counts the number of waves (or wave number) of the oscillation signal in a predetermined time period to output a count value which can be handled as a digital signal.
摘要翻译： 提供了一种用于响应于感测到的传感器的物理量来检测阻抗变量的装置，其包括阻抗 - 频率转换单元和计数器。 阻抗 - 频率转换单元将传感器阻抗转换为与传感器阻抗相对应的频率的振荡信号。 阻抗 - 频率转换单元包括用于提供与传感器阻抗相对应的电压的阻抗 - 电压转换器，以及包括响应于来自阻抗 - 电压转换器的电压而变化的阻抗的元件的维恩桥式振荡器，用于产生 振荡信号。 维恩桥式振荡器能够产生方波信号作为振荡信号。 该计数器在预定时间周期内对振荡信号的波数（或波数）进行计数，以输出可作为数字信号处理的计数值。
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公开(公告)号：US06326795B1
公开(公告)日：2001-12-04
申请号：US09402699
申请日：1999-10-08
IPC分类号： G01R2726
CPC分类号： G01D5/2417 , G01D5/24 , G01D5/2405 , G01H11/06 , H04R5/04
摘要： A detection circuit which is capable of outputting a voltage proportional to a static capacitance of a sensor is provided, which comprises a voltage input terminal connected to receive an input voltage and an operational amplifier. The input voltage received at the voltage input terminal is changed between two different reference voltages. An inverting input terminal of the amplifier is connected to the voltage input terminal through a resistor, and a non-inverting input terminal of the amplifier is connected to the voltage input terminal through the sensor capacitance and to one of the reference voltages through a switch. An output voltage of the amplifier is connected to the inverting input terminal through a feedback circuit including a resistor and a switch. The switches are closed and the one of the reference voltages is supplied to the input terminal during an initialization cycle. The switches are opened and the other reference voltage is supplied to the input terminal during a measurement cycle. The operational amplifier outputs an output voltage which linearly varies in response to the sensor capacitance.
摘要翻译： 提供能够输出与传感器的静态电容成比例的电压的检测电路，其包括连接以接收输入电压的电压输入端子和运算放大器。 在电压输入端子处接收的输入电压在两个不同的参考电压之间变化。 放大器的反相输入端子通过电阻连接到电压输入端子，放大器的非反相输入端子通过传感器电容连接到电压输入端子，并通过开关连接到参考电压之一。 放大器的输出电压通过包括电阻和开关的反馈电路连接到反相输入端子。 在初始化周期期间，开关闭合，并且将参考电压中的一个提供给输入端。 开关断开，另一个参考电压在测量周期内提供给输入端。 运算放大器输出响应于传感器电容线性变化的输出电压。
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公开(公告)号：US06335642B1
公开(公告)日：2002-01-01
申请号：US09381673
申请日：1999-09-22
IPC分类号： H03D100
CPC分类号： G01R27/2605
摘要： A impedance-to-voltage converter for converting an impedance of a target to a voltage is described which comprises an operational amplifier (OP), a coaxial cable consisting a signal line and shielding element(s), and an AC signal generator. A feedback impedance circuit is connected between output and inverting terminals of the OP, and whereby a non-inverting terminal and the inverting terminal are an imaginal-short condition. One end of the signal line is connected to the inverting input terminal of the OP and the other end is connected to one electrode of the target and the AC signal generator is connected to the non-inverting input terminal of the OP. The shielding element comprises at least one shielding layer surrounding the signal line and is connected to the non-inverting input terminal of the OP, and thus the signal line and the shielding layer are the same voltage due to the imaginal-short of the input terminals of the OP, resulting in reduction of noise on the signal line.
摘要翻译： 描述了用于将目标的阻抗转换为电压的阻抗 - 电压转换器，其包括运算放大器（OP），由信号线和屏蔽元件组成的同轴电缆以及AC信号发生器。 反馈阻抗电路连接在OP的输出端和反相端之间，由此非反相端和反相端都是成像短路状态。 信号线的一端连接到OP的反相输入端子，另一端连接到目标的一个电极，并且AC信号发生器连接到OP的非反相输入端子。 屏蔽元件包括围绕信号线的至少一个屏蔽层，并且连接到OP的非反相输入端子，因此由于输入端子的想象缺陷，信号线和屏蔽层是相同的电压 的OP，导致信号线上的噪声降低。
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公开(公告)号：US06194888B1
公开(公告)日：2001-02-27
申请号：US09402385
申请日：1999-10-04
IPC分类号： H03H100
CPC分类号： G01R27/2605
摘要： An impedance-to-voltage converter utilizes an operational amplifier to convert an impedance into a voltage without suffering from the influence of stray capacitances. The impedance-to-voltage converter is formed of an operational amplifier which has an imaginary short-circuit state between an inverting input and a non-inverting input thereof when an impedance element is connected between an output and the inverting input, a shielding line for shielding a line for connecting the impedance element to the inverting input, an AC signal generator connected to the non-inverting input, and a shielding line for shielding the signal line. The shielding lines are connected to the non-inverting input.
摘要翻译： 阻抗 - 电压转换器利用运算放大器将阻抗转换成电压而不受杂散电容的影响。 阻抗 - 电压转换器由运算放大器形成，当在输出端和反相输入端之间连接有阻抗元件时，其运算放大器具有反相输入端和非反相输入端之间的假想短路状态， 屏蔽用于将阻抗元件连接到反相输入的线，连接到非反相输入的AC信号发生器和用于屏蔽信号线的屏蔽线。 屏蔽线连接到非反相输入。
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公开(公告)号：US5973538A
公开(公告)日：1999-10-26
申请号：US882224
申请日：1997-06-25
申请人： Guoliang Shou , Kazunori Motohashi , Shengmin Lin , Makoto Yamamoto , Toshiyuki Matsumoto , Muneo Harada , Takahiko Ooasa , Yoshihiro Hirota
发明人： Guoliang Shou , Kazunori Motohashi , Shengmin Lin , Makoto Yamamoto , Toshiyuki Matsumoto , Muneo Harada , Takahiko Ooasa , Yoshihiro Hirota
CPC分类号： G01D5/24 , G01D5/16 , G01D5/2417
摘要： A small sensor circuit with reducible electric power consumption is formed by connecting inverting amplifiers comprised of CMOS inverters connected in an odd number of stages, in series to guarantee the linearity of the relationship between inputs and outputs, and connecting an impedance as a sensor between the inputs and outputs, or to an input.
摘要翻译： 具有可降低功耗的小型传感器电路通过将由奇数级连接的CMOS反相器组成的反相放大器串联连接形成，以确保输入和输出之间的关系线性，并将阻抗作为传感器连接在 输入和输出，或输入。
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公开(公告)号：US20070181928A1
公开(公告)日：2007-08-09
申请号：US11508141
申请日：2006-08-23
申请人： Yoshiki Yamanishi , Muneo Harada , Takahiro Kitano , Tatsuzo Kawaguchi , Yoshihiro Hirota , Kinji Yamada , Tomotaka Shinoda , Katsuya Okumura , Shuichi Kawano
发明人： Yoshiki Yamanishi , Muneo Harada , Takahiro Kitano , Tatsuzo Kawaguchi , Yoshihiro Hirota , Kinji Yamada , Tomotaka Shinoda , Katsuya Okumura , Shuichi Kawano
IPC分类号： H01L29/94
CPC分类号： H01L23/50 , H01G4/228 , H01G4/33 , H01L23/481 , H01L24/81 , H01L2224/81801 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01029 , H01L2924/01033 , H01L2924/01056 , H01L2924/01072 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/14 , H01L2924/19041 , H01L2924/30105 , H05K1/162 , H05K3/002 , H05K2201/09509 , H05K2201/096 , H05K2201/10378
摘要： A capacitor having a high quality and a manufacturing method of the same are provided. A capacitor has a lower electrode formed on an oxide film, a dielectric layer formed on the lower electrode, an upper electrode formed so as to face the lower electrode with the dielectric layer between, and an upper electrode formed so as to cover the upper electrode, an opening portion of the upper electrode and an opening portion of the dielectric layer. By forming the upper electrode on the dielectric layer, it is possible to pattern the dielectric layer by using the upper electrode as a mask, and provide a capacitor having a high-quality dielectric layer by preventing impurity diffusion into the dielectric layer. By forming the upper electrode on the dielectric layer, it is possible to prevent the dielectric layer from being exposed to etching liquid, liquid developer, etc.
摘要翻译： 提供了具有高质量的电容器及其制造方法。 电容器具有形成在氧化膜上的下电极，形成在下电极上的电介质层，形成为与电极之间介电层相对的下电极的上电极和形成为覆盖上电极的上电极 ，上电极的开口部分和电介质层的开口部分。 通过在电介质层上形成上电极，可以通过使用上电极作为掩模对电介质层进行图案化，并且通过防止杂质扩散到电介质层中来提供具有高质量电介质层的电容器。 通过在电介质层上形成上部电极，可以防止电介质层暴露于蚀刻液体，液体显影剂等
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公开(公告)号：US20070126041A1
公开(公告)日：2007-06-07
申请号：US11508204
申请日：2006-08-23
申请人： Tomotaka Shinoda , Kinji Yamada , Takahiro Kitano , Yoshiki Yamanishi , Muneo Harada , Tatsuzo Kawaguchi , Yoshihiro Hirota , Katsuya Okumura , Shuichi Kawano
发明人： Tomotaka Shinoda , Kinji Yamada , Takahiro Kitano , Yoshiki Yamanishi , Muneo Harada , Tatsuzo Kawaguchi , Yoshihiro Hirota , Katsuya Okumura , Shuichi Kawano
CPC分类号： H01L28/65 , H01L27/11507 , H01L28/55 , Y10T29/435
摘要： A dielectric film capacitor includes a lower electrode having an opening and formed of a material including platinum, a dielectric film provided over the lower electrode and including an oxide having an ABOx crystal structure, and an upper electrode provided over the dielectric film. The planar area of the lower electrode is 50% or more of the area of a formation region of the dielectric film. A dielectric film capacitor includes a lower electrode formed of a material including platinum and having a thickness of 10 to 100 nm, a dielectric film provided over the lower electrode and including an oxide having an ABOx crystal structure, and an upper electrode provided over the dielectric film.
摘要翻译： 电介质膜电容器包括具有开口并由包括铂的材料形成的下电极，设置在下电极上并包括具有ABOx晶体结构的氧化物的电介质膜和设置在电介质膜上的上电极。 下部电极的平面面积为电介质膜的形成区域的面积的50％以上。 电介质膜电容器包括由包括铂的材料形成的厚度为10至100nm的下电极，设置在下电极上并包括具有ABOx晶体结构的氧化物的电介质膜，以及设置在电介质上的上电极 电影。
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公开(公告)号：US07742277B2
公开(公告)日：2010-06-22
申请号：US11508204
申请日：2006-08-23
申请人： Tomotaka Shinoda , Kinji Yamada , Takahiro Kitano , Yoshiki Yamanishi , Muneo Harada , Tatsuzo Kawaguchi , Yoshihiro Hirota , Katsuya Okumura , Shuichi Kawano
发明人： Tomotaka Shinoda , Kinji Yamada , Takahiro Kitano , Yoshiki Yamanishi , Muneo Harada , Tatsuzo Kawaguchi , Yoshihiro Hirota , Katsuya Okumura , Shuichi Kawano
CPC分类号： H01L28/65 , H01L27/11507 , H01L28/55 , Y10T29/435
摘要： A dielectric film capacitor includes a lower electrode having an opening and formed of a material including platinum, a dielectric film provided over the lower electrode and including an oxide having an ABOx crystal structure, and an upper electrode provided over the dielectric film. The planar area of the lower electrode is 50% or more of the area of a formation region of the dielectric film. A dielectric film capacitor includes a lower electrode formed of a material including platinum and having a thickness of 10 to 100 nm, a dielectric film provided over the lower electrode and including an oxide having an ABOx crystal structure, and an upper electrode provided over the dielectric film.
摘要翻译： 电介质膜电容器包括具有开口并由包括铂的材料形成的下电极，设置在下电极上并包括具有ABOx晶体结构的氧化物的电介质膜和设置在电介质膜上的上电极。 下部电极的平面面积为电介质膜的形成区域的面积的50％以上。 电介质膜电容器包括由包括铂的材料形成的厚度为10至100nm的下电极，设置在下电极上并包括具有ABOx晶体结构的氧化物的电介质膜，以及设置在电介质上的上电极 电影。
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公开(公告)号：US20070181556A1
公开(公告)日：2007-08-09
申请号：US11508156
申请日：2006-08-23
申请人： Yoshiki Yamanishi , Muneo Harada , Takahiro Kitano , Tatsuzo Kawaguchi , Yoshihiro Hirota , Kenji Matsuda , Kinji Yamada , Tomotaka Shinoda , Daohai Wang , Katsuya Okumura
发明人： Yoshiki Yamanishi , Muneo Harada , Takahiro Kitano , Tatsuzo Kawaguchi , Yoshihiro Hirota , Kenji Matsuda , Kinji Yamada , Tomotaka Shinoda , Daohai Wang , Katsuya Okumura
IPC分类号： F27B5/14
CPC分类号： H01L28/55
摘要： Atmosphere in processing apparatus is adjusted to, for example, oxygen atmosphere, by gas supply source and the like. Interior of thermal processing apparatus is set to oxygen atmosphere and raised to predetermined temperature. A wafer boat containing wafer W having dielectric precursor layer formed is loaded into thermal processing apparatus at speed at which no defects are produced in wafer W. Thereafter, reaction tube of thermal processing apparatus has its internal temperature raised to baking temperature, to perform baking for predetermined time. The wafer W is cooled to predetermined temperature in thermal processing apparatus and then to room temperature in processing apparatus, and carried out from processing apparatus. Before dielectric precursor layer is baked, it is maintained for predetermined time at temperature higher than temperature at which solvent in dielectric precursor layer is volatilized and lower than temperature at which dielectric precursor layer starts crystallization to vaporize residual solvent.
摘要翻译： 处理装置中的气氛通过气体供给源等调节为例如氧气氛。 热处理装置的内部设定为氧气氛并升温至规定温度。 包含形成有电介质前体层的晶片W的晶片舟以晶片W中没有产生缺陷的速度装载到热处理装置中。之后，热处理装置的反应管的内部温度升高到烘烤温度，进行烘烤 预定时间 将晶片W在热处理装置中冷却至规定温度，然后在处理装置中冷却至室温，并从处理装置进行。 在电介质前体层被烘烤之前，在高于电介质前体层中的溶剂挥发并且低于电介质前体层开始结晶以蒸发残留溶剂的温度的温度下将其保持预定时间。
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