Electrochemical deposition method, electrochemical deposition apparatus, and microstructure
    1.
    发明申请
    Electrochemical deposition method, electrochemical deposition apparatus, and microstructure 审中-公开
    电化学沉积法,电化学沉积装置和微结构

    公开(公告)号:US20070240993A1

    公开(公告)日:2007-10-18

    申请号:US11731242

    申请日:2007-03-30

    IPC分类号: C25D5/18 C25D21/12

    摘要: An electrochemical deposition method in which the structure of a substance to be deposited on the surface of a working electrode is determined, an electrochemical deposition apparatus, and a microstructure are provided. A positive electrode 1 and a negative electrode 2 functioning as a working electrode are arranged oppositely in a liquid tank 5 containing an electrolytic (acid) solution (hereinafter referred to as “solution”) 4 in which plural substance are dissolved in an ionic state, and then a predetermined voltage is applied between the positive electrode 1 and the negative electrode 2. A reference electrode 3 is also arranged in the liquid tank 5 and the potential between the negative electrode 2 and the reference electrode 3 is measured. Since the solution 4 can be considered as a conductor, the potential V1 of the negative electrode 2 relative to the solution 4 can be determined. Furthermore, a reaction inhibitor is admixed in the liquid tank 5, spontaneous electrochemical oscillation (current oscillation in this case) is generated in the electrochemical deposition reaction of the substances in the presence of the reaction inhibitor. The waveform of the electrochemical oscillation is controlled by regulating the potential V1 of the negative electrode, the concentrations of the substances in the solution, and the kind and concentration of the reaction inhibitor, thereby the structure of a substance to be deposited on the surface of the working electrode is determined.

    摘要翻译: 确定要沉积在工作电极表面上的物质的结构,电化学沉积装置和微结构的电化学沉积方法。 作为工作电极起作用的正极1和负极2相对配置在含有多种物质以离子状态溶解的电解(酸)溶液(以下称为“溶液”)4的液体罐5中, 然后在正极1和负极2之间施加预定的电压。参考电极3也布置在液体罐5中,并且测量负极2和参考电极3之间的电位。 由于溶液4可以被认为是导体,所以可以确定负极2相对于溶液4的电位V 1。 此外,在液体罐5中混合反应抑制剂,在反应抑制剂存在下,在物质的电化学沉积反应中产生自发电化学振荡(在这种情况下为电流振荡)。 通过调节负极的电位V 1,溶液中物质的浓度以及反应抑制剂的种类和浓度,由此沉积在表面上的物质的结构来控制电化学振荡的波形 确定工作电极。

    POROUS SILICON MATERIAL
    2.
    发明申请
    POROUS SILICON MATERIAL 审中-公开
    多孔硅材料

    公开(公告)号:US20130292839A1

    公开(公告)日:2013-11-07

    申请号:US13990889

    申请日:2011-11-07

    IPC分类号: H01L21/768 H01L23/498

    摘要: Provided are a method for producing a porous silicon material filled with a metal, the method including the steps of rendering hydrophobic a porous silicon substrate having pores from 1 to 5 nm in diameter, and depositing a metal into the pores of the porous silicon substrate by the electrodeposition of the porous silicon substrate; a method for producing a metallic nanoparticle or a nanofiber, the method including the steps of producing a porous silicon material filled with a metal, dissolving the silicon contained in the porous silicon material filled with a metal; a metallic nanoparticle or a nanofiber obtained by using the method for producing a metallic nanoparticle or a nanofiber: and a porous silicon material formed from a porous silicon substrate having pores from 1 to 5 nm in diameter and a resistivity of 5 to 20 Ω·cm, the pores of which are filled with a metal.

    摘要翻译: 提供一种填充有金属的多孔硅材料的制造方法,该方法包括以下步骤:使具有1至5nm直径的孔的多孔硅衬底疏水化,并通过以下步骤将金属沉积到多孔硅衬底的孔中: 多孔硅基板的电沉积; 一种制造金属纳米颗粒或纳米纤维的方法,所述方法包括以下步骤:制备填充有金属的多孔硅材料,将包含在填充有金属的多孔硅材料中的硅溶解; 通过使用金属纳米粒子或纳米纤维的制造方法得到的金属纳米粒子或纳米纤维,以及由孔径为1〜5nm,电阻率为5〜20Ω·cm的多孔硅基板形成的多孔硅材料 ,其孔被金属填充。