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1.发明授权Methods and systems for testing digital-to-analog converter/amplifier circuits 有权用于测试数模转换器/放大器电路的方法和系统公开(公告)号：US07898447B2
公开(公告)日：2011-03-01
申请号：US12504428
申请日：2009-07-16
IPC分类号： H03M1/10
CPC分类号： H03M1/109 , G03F1/78 , H01J2237/1518 , H01J2237/2485 , H01J2237/3175 , H03M1/66
摘要： A digital-to-analog converter (DAC)/amplifier testing system for use in an electron-beam (e-beam) mask writer, the e-beam mask writer including a plurality of DAC/amplifier circuits to output analog voltage signals, each DAC/amplifier circuit having a first output terminal and a second output terminal, the first output terminals of the plurality of DAC/amplifier circuits being respectively coupled to deflection plates of the e-beam mask writer to provide the output analog voltages as deflection voltages, is provided. The testing system including a summation circuit to sum voltage signals and to output a summation signal indicating the sum of the received analog voltage signals and an analyzer circuit to digitize the summation signal and to detect to compare the digitized summation signal with an error tolerance range to detect whether at least one of the DAC/amplifier circuits is experiencing an operating error.
摘要翻译： 一种用于电子束（电子束）掩模写入器的数模转换器（DAC）/放大器测试系统，电子束掩模写入器包括多个DAC /放大器电路以输出模拟电压信号，每个 DAC /放大器电路具有第一输出端和第二输出端，多个DAC /放大器电路的第一输出端分别耦合到电子束掩模写入器的偏转板，以提供输出模拟电压作为偏转电压， 被提供。 该测试系统包括一个求和电路，用于求和电压信号，并输出一个表示所接收的模拟电压信号和分析电路之和的求和信号，以对加和信号进行数字化，并检测以将数字化求和信号与误差容差范围进行比较 检测至少一个DAC /放大器电路是否正在经历操作错误。
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2.发明申请METHODS AND SYSTEMS FOR TESTING DIGITAL-TO-ANALOG CONVERTER/AMPLIFIER CIRCUITS 有权用于测试数字到模拟转换器/放大器电路的方法和系统公开(公告)号：US20110012617A1
公开(公告)日：2011-01-20
申请号：US12504428
申请日：2009-07-16
IPC分类号： H01H31/02
CPC分类号： H03M1/109 , G03F1/78 , H01J2237/1518 , H01J2237/2485 , H01J2237/3175 , H03M1/66
摘要： A digital-to-analog converter (DAC)/amplifier testing system for use in an electron-beam (e-beam) mask writer, the e-beam mask writer including a plurality of DAC/amplifier circuits to output analog voltage signals, each DAC/amplifier circuit having a first output terminal and a second output terminal, the first output terminals of the plurality of DAC/amplifier circuits being respectively coupled to deflection plates of the e-beam mask writer to provide the output analog voltages as deflection voltages, is provided. The testing system including a summation circuit to sum voltage signals and to output a summation signal indicating the sum of the received analog voltage signals and an analyzer circuit to digitize the summation signal and to detect to compare the digitized summation signal with an error tolerance range to detect whether at least one of the DAC/amplifier circuits is experiencing an operating error.
摘要翻译： 一种用于电子束（电子束）掩模写入器的数模转换器（DAC）/放大器测试系统，电子束掩模写入器包括多个DAC /放大器电路以输出模拟电压信号，每个 DAC /放大器电路具有第一输出端和第二输出端，多个DAC /放大器电路的第一输出端分别耦合到电子束掩模写入器的偏转板，以提供输出模拟电压作为偏转电压， 被提供。 该测试系统包括一个求和电路，用于求和电压信号，并输出一个表示所接收的模拟电压信号和分析电路之和的求和信号，以对加和信号进行数字化，并检测以将数字化求和信号与误差容差范围进行比较 检测至少一个DAC /放大器电路是否正在经历操作错误。
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