Method of calibrating a semiconductor wafer drying apparatus

    公开(公告)号:US06649883B2

    公开(公告)日:2003-11-18

    申请号:US09834118

    申请日:2001-04-12

    IPC分类号: H05B368

    CPC分类号: H01L21/67253 H01L21/67034

    摘要: A method for calibrating a semiconductor wafer drying apparatus including a heater and a vessel containing a solvent and capable of receiving semiconductor wafers comprises selecting a test heater temperature and a test processing time. A first set of wafers is placed in the vessel and the heater is operated at the test heater temperature so that a solvent vapor cloud is created in the vessel. The first set of wafers is monitored for substantial envelopment by the vapor cloud during the test processing time. Based on the monitoring step, at least one of the test heater temperature and the test processing time is adjusted to establish at least one operating parameter of an operating heater temperature parameter and an operating processing time parameter for processing successive sets of wafers so as to promote substantial vapor cloud envelopment of each set of wafers dried in the drying apparatus.

    Strip-pack manufacturing apparatus
    2.
    发明申请
    Strip-pack manufacturing apparatus 审中-公开
    剥线包装制造装置

    公开(公告)号:US20070261366A1

    公开(公告)日:2007-11-15

    申请号:US11797484

    申请日:2007-05-03

    IPC分类号: B65B61/00

    CPC分类号: B65B61/24 B65B15/04

    摘要: A strip-pack manufacturing apparatus is arranged to receive an article having a projecting portion at a prescribed receiving position and to affix the article to a tape at a prescribed affixing position, and includes a transporting mechanism, a grasping section, a transfer mechanism, an affixing mechanism, and a wrinkle smoothing mechanism. The transporting mechanism is arranged to transport the article to the receiving position with the projecting portion of the article being oriented in front. The transfer mechanism is arranged to transfer the article from the receiving position to the affixing position in a state wherein the article is grasped at the project portion by the grasping section. The affixing mechanism is arranged to affix the article to the tape at the affixing position. The wrinkle smoothing mechanism is disposed at the receiving position and arranged to smooth wrinkles of the projecting portion.

    摘要翻译: 带状包装制造装置被配置为容纳在规定的接收位置具有突出部的物品,并且在规定的固定位置将物品贴合在带上,并且包括搬送机构,把持部,搬送机构, 贴纸机构,皱纹平滑机构。 传送机构布置成将物品的前端部朝向前方的物品输送到接收位置。 传送机构被布置成在物品被抓握部分在工件部分被抓住的状态下将物品从接收位置转​​移到固定位置。 固定机构被设置成在固定位置将物品粘贴到带子上。 皱纹平滑机构设置在接收位置并且布置成平滑突出部分的皱纹。

    Attachment mechanism for a vibratory article transporting apparatus
    3.
    发明授权
    Attachment mechanism for a vibratory article transporting apparatus 失效
    振动物品输送装置的安装机构

    公开(公告)号:US5773765A

    公开(公告)日:1998-06-30

    申请号:US419125

    申请日:1995-04-10

    IPC分类号: B65G27/08 G01G13/00 G01G13/16

    CPC分类号: B65G27/08

    摘要: A mechanism for attaching a feeder to a vibrator, such as incorporated in a combinational weighing machine for transporting articles to a weighing device, includes a pair of lower and upper engaging members attached respectively to the vibrator and to the feeder, the latter being placed on top of the former. A generally annular clamp is wrapped around and engages with the peripheral parts of the engaging members, and a diameter control device is provided to it for reducing its diameter and to thereby apply an inwardly oriented force on peripheral parts of the engaging members. At least one of the surfaces of the engaging members or the clamp across which the engaging members and the clamp are in contact is tapered such that this inward force will cause the engaging members to be pressed against each other and hence to attach the feeder firmly to the vibrator.

    摘要翻译: 用于将馈送器附接到振动器的机构,例如结合在用于将物品运送到称重装置的组合式称重机中的一个下部和上部接合构件,分别附接到振动器和馈送器,后者被放置在 前者的顶部。 大致环形的夹具缠绕并与接合构件的周边部分接合,并且向其提供直径控制装置以减小其直径,从而在接合构件的周边部分上施加向内取向的力。 接合构件或夹具接触的接合构件或夹具的至少一个表面是锥形的,使得该向内的力将使得接合构件彼此压靠,并因此将进料器牢固地附接到 振动器。

    Carrier for cleaning silicon wafers
    4.
    发明授权
    Carrier for cleaning silicon wafers 失效
    用于清洗硅片的载体

    公开(公告)号:US06520191B1

    公开(公告)日:2003-02-18

    申请号:US09807907

    申请日:2001-06-08

    IPC分类号: B08B312

    CPC分类号: H01L21/67313 Y10S134/902

    摘要: A carrier for receiving and holding a plurality of semiconductor wafers and permitting surfaces of the wafers to receive maximum exposure to ultrasonic waves during a wafer cleaning process in which the carrier and the wafers are immersed in a liquid medium and ultrasonic waves are generated in the liquid medium. The carrier includes two vertical sidewalls and at least three horizontal supporting rods that interconnect the sidewalls and that are collectively positioned for supporting wafers in generally upright, face to face position generally parallel to each other. At least one stabilizing rod extends horizontally between the sidewalls for limiting wafer motion relative to the carrier to steady the wafers. A series of spaced apart teeth on the stabilizing rod define troughs for receiving wafers loosely therein to prevent substantial vibratory deflections of the wafers.

    摘要翻译: 用于接收和保持多个半导体晶片并且允许晶片表面在晶片清洁处理期间接收超声波的载体,其中载体和晶片浸入液体介质中并且在液体中产生超声波 中。 载体包括两个垂直侧壁和至少三个水平支撑杆,其互连侧壁并且被集中地定位成用于将大致平行的基本上直立的面对面位置的晶片支撑。 至少一个稳定杆在侧壁之间水平延伸,用于相对于载体限制晶片运动以稳定晶片。 在稳定杆上的一系列间隔开的齿限定了用于在其中松散地接收晶片的槽,以防止晶片的实质振动偏转。

    STRIP PACK DEVICE
    5.
    发明申请
    STRIP PACK DEVICE 审中-公开
    条包装置

    公开(公告)号:US20100229502A1

    公开(公告)日:2010-09-16

    申请号:US12682210

    申请日:2008-10-06

    申请人: Yoshio Iwamoto

    发明人: Yoshio Iwamoto

    IPC分类号: B65B61/00 B65B67/00

    CPC分类号: B65B15/04

    摘要: A strip pack device is adapted to manufacture a strip-pack product having an article attached to a strip. The strip pack device includes a conveying part, a drawing-in part, a moving part and an attachment part. The drawing-in part is configured and arranged to draw a front end of the article conveyed by the conveying part to a predetermined position. The front end is located frontward in a conveying direction. The moving part is configured and arranged to receive the article at the predetermined position in the drawing-in part, to move the article from the predetermined position in a generally opposite direction of a draw-in direction of the drawing-in part, and to move the article to an attaching position. The attachment part is configured and arranged to attach the front end of the article to the strip after the article has been moved to the attaching position.

    摘要翻译: 剥线装置适于制造具有连接到条带上的物品的剥离包装产品。 剥线装置包括输送部,拉入部,移动部和安装部。 该引入部分被构造和布置成将由输送部分输送的制品的前端拉到预定位置。 前端位于输送方向前方。 移动部件被构造和布置成在拉伸部分中的预定位置处接收物品,以沿着拉入方向的大致相反的方向将物品从预定位置移动,并且 将物品移动到附着位置。 附件部分被构造和布置成在制品已经移动到附接位置之后将制品的前端附接到条带。

    Article feeding apparatus
    6.
    发明授权
    Article feeding apparatus 失效
    物品送料装置

    公开(公告)号:US4552262A

    公开(公告)日:1985-11-12

    申请号:US522303

    申请日:1983-07-27

    摘要: An article feeding apparatus capable of reliably feeding articles one by one to the next process. It comprises a plurality of feed troughs (5) adapted to be individually vibrated and disposed side by side with each other with their take-in ends formed as flat surfaces in juxtaposed relation in a plane, a plurality of arranging conveyors (10) disposed adjacent the feed troughs in the direction of feed of articles, each conveyor serving to arrange articles in a line which are being fed from its associated feed trough and feed them, pool hoppers (14) installed at the take-out ends of the arranging conveyors and adapted to open and close, a bucket conveyor (15) for transferring to the next process the articles dropped from the pool hoppers one by one into buckets supported to turn around the axes of pivots, and means disposed at a predetermined position in the path of travel of the bucket conveyor for separating a plurality of articles from each other if such plurality are charged into a bucket. The feeding apparatus is very useful for sorting agricultural products for classification.

    摘要翻译: PCT No.PCT / JP83 / 00012 Sec。 371日期:1983年7月27日 102(e)日期1983年7月27日PCT提交1983年1月13日PCT公布。 出版物WO83 / 02407 日期:1983年7月21日。一种能够可靠地将物品一个接一个地送入下一个处理的物品送入装置。 它包括多个进料槽(5),其适于独立地振动并且彼此并排设置,其入口端在平面中以并列关系形成为平坦表面;多个排列输送机(10)邻近设置 每个输送机用于将物品从其相关联的进料槽进给并进料,排出的物料沿安排在排出的输送机的取出端的出料口和 适于打开和关闭的斗式输送机(15),用于将从池池料斗中逐滴落入的物品一个一个地转移到下一个处理过程中,所述料斗被支撑以转动枢轴的轴线,并且设置在设置在 如果将多个物品装入桶中,则用于将多个物品彼此分离的斗式输送机的行程。 喂食装置对于分类农产品非常有用。