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公开(公告)号：US07607914B2
公开(公告)日：2009-10-27
申请号：US11709811
申请日：2007-02-23
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
IPC分类号： F23D14/62
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译： 一种燃烧式废气处理系统，其能够在使废气与辅助燃烧气体高效混合的结构的同时有效地氧化分解有害的可燃性废气，而不会在废气导入管中发生回火。 燃烧式废气处理系统具有燃烧器部分和燃烧室。 燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。 流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。
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公开(公告)号：US06948929B2
公开(公告)日：2005-09-27
申请号：US09962117
申请日：2001-09-26
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system is capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译： 燃烧式废气处理系统能够在使废气与辅助燃烧气体混合的结构有效地加热的同时，有效地分解危险的可燃性废气，而不会在废气导入管中发生回火。 燃烧式废气处理系统具有燃烧器部分和燃烧室。 燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。 流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。
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公开(公告)号：US06796794B2
公开(公告)日：2004-09-28
申请号：US10214773
申请日：2002-08-09
IPC分类号： F23G706
CPC分类号： F23D14/26 , F23C2900/9901 , F23D14/20 , F23D2209/20 , F23G7/065 , F23G2209/142
摘要： A combustor for waste gas treatment having a flame stabilizing zone surrounded by a peripheral wall and closed with a bottom wall. The flame stabilizing zone is provided to face a combustion chamber. Burner ports for auxiliary combustible gas are provided in the peripheral wall to inject an auxiliary combustible gas into the flame stabilizing zone so as to produce swirling flows. Burner ports for waste gas are provided in the bottom wall to inject a gas into the flame stabilizing zone.
摘要翻译： 一种用于废气处理的燃烧器，具有由周壁包围并用底壁封闭的火焰稳定区。 火焰稳定区被设置为面对燃烧室。 用于辅助可燃气体的燃烧器端口设置在周壁中，以将辅助可燃气体喷射到火焰稳定区域中，以产生旋流。 用于废气的燃烧器端口设置在底壁中，以将气体注入到火焰稳定区域中。
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公开(公告)号：US06494711B1
公开(公告)日：2002-12-17
申请号：US09509995
申请日：2000-04-05
IPC分类号： F23G706
CPC分类号： F23D14/26 , F23C2900/9901 , F23D14/20 , F23D2209/20 , F23G7/065 , F23G2209/142
摘要： A combustor for waste gas treatment having a flame stabilizing zone 15 surrounded by a peripheral wall 13 and closed with a bottom wall 14. The flame stabilizing zone 15 is provided to face a combustion chamber 11. Burner ports 23 for auxiliary combustible gas are provided in the peripheral wall 13 to inject an auxiliary combustible gas B into the flame stabilizing zone 15 so as to produce swirling flows. Burner ports 22 for waste gas are provided in the bottom wall 14 to inject a waste gas A into the flame stabilizing zone 15.
摘要翻译： 用于废气处理的燃烧器具有由周壁13围绕并被底壁14封闭的火焰稳定区15.火焰稳定区15设置成面对燃烧室11.用于辅助可燃气体的燃烧器端口23设置在 外周壁13将辅助可燃性气体B注入火焰稳定区15，以产生回旋流。 用于废气的燃烧器端口22设置在底壁14中，以将废气A注入到火焰稳定区15中。
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公开(公告)号：US20070160946A1
公开(公告)日：2007-07-12
申请号：US11709811
申请日：2007-02-23
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译： 一种燃烧式废气处理系统，其能够在使废气与辅助燃烧气体高效混合的结构的同时有效地氧化分解有害的可燃性废气，而不会在废气导入管中发生回火。 燃烧式废气处理系统具有燃烧器部分和燃烧室。 燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。 流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。
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公开(公告)号：US20050271988A1
公开(公告)日：2005-12-08
申请号：US11206104
申请日：2005-08-18
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译： 一种燃烧式废气处理系统，其能够在使废气与辅助燃烧气体高效混合的结构的同时有效地氧化分解有害的可燃性废气，而不会在废气导入管中发生回火。 燃烧式废气处理系统具有燃烧器部分和燃烧室。 燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。 流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。
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公开(公告)号：US06682342B2
公开(公告)日：2004-01-27
申请号：US10284236
申请日：2002-10-31
IPC分类号： F23G706
CPC分类号： F23D14/26 , F23C2900/9901 , F23D14/20 , F23D2209/20 , F23G7/065 , F23G2209/142
摘要： A combustor for waste gas treatment having a flame stabilizing zone 15 surrounded by a peripheral wall 13 and closed with a bottom wall 14. The flame stabilizing zone 15 is provided to face a combustion chamber 11. Burner ports 23 for auxiliary combustible gas are provided in the peripheral wall 13 to inject an auxiliary combustible gas B into the flame stabilizing zone 15 so as to produce swirling flows. Burner ports 22 for waste gas are provided in the bottom wall 14 to inject a waste gas A into the flame stabilizing zone 15.
摘要翻译： 用于废气处理的燃烧器具有由周壁13围绕并被底壁14封闭的火焰稳定区15.火焰稳定区15设置成面向燃烧室11.用于辅助可燃气体的燃烧器端口23设置在 外周壁13将辅助可燃性气体B注入火焰稳定区15，以产生回旋流。 用于废气的燃烧器端口22设置在底壁14中，以将废气A注入到火焰稳定区15中。
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公开(公告)号：US06969250B1
公开(公告)日：2005-11-29
申请号：US09857025
申请日：1999-11-29
申请人： Kotaro Kawamura , Rikiya Nakamura , Yuji Shirao , Yoshiro Takemura , Kazutaka Okuda , Takeshi Tsuji
发明人： Kotaro Kawamura , Rikiya Nakamura , Yuji Shirao , Yoshiro Takemura , Kazutaka Okuda , Takeshi Tsuji
CPC分类号： B01D53/46 , B01D53/68 , B01D53/70 , B01D2257/00 , B01D2257/20 , B01D2257/204 , B01D2257/206 , B01D2257/2064 , B01D2257/2066 , F23G5/32 , F23G7/06 , F23G7/065 , F23J3/02 , F23J2219/70 , F23M5/085 , F23M2900/05004
摘要： A waste gas treatment system having a burner part and a combustion chamber provided at a downstream side of the burner part. Combustion flames are formed from the burner part toward the combustion chamber, and a waste gas is introduced into the combustion flames, thereby oxidatively decomposing the waste gas. The combustion chamber is formed from an inner wall made of a fiber-reinforced ceramic material. Therefore, the wear of the inner wall due to heat and corrosion is minimized, and thermal stress cracking is also reduced. Consequently, the lifetime of the system increases, and the cost of equipment and the availability factor can be improved. In addition, because the inner wall exhibits no catalytic effect, the formation of thermal NOx is suppressed, and it is possible to achieve environmental preservation and to simplify the treatment equipment.
摘要翻译： 一种具有燃烧器部分和设置在燃烧器部分的下游侧的燃烧室的废气处理系统。 燃烧火焰从燃烧器部分朝向燃烧室形成，并且废气被引入到燃烧火焰中，从而氧化分解废气。 燃烧室由纤维增强陶瓷材料制成的内壁形成。 因此，由于热和腐蚀使内壁的磨损最小化，并且热应力开裂也降低。 因此，系统的使用寿命增加，可以提高设备成本和可用性因素。 另外，由于内壁没有催化效果，所以能够抑制热NOx的形成，能够实现环境保护，简化处理设备。
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公开(公告)号：US07112060B2
公开(公告)日：2006-09-26
申请号：US10821980
申请日：2004-04-12
申请人： Yoshiro Takemura , Tetsuo Komai , Kotaro Kawamura , Takeshi Tsuji , Kazutaka Okuda , Rikiya Nakamura , Keiichi Ishikawa , Tomonori Ohashi , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao , Hiroyuki Yamada
发明人： Yoshiro Takemura , Tetsuo Komai , Kotaro Kawamura , Takeshi Tsuji , Kazutaka Okuda , Rikiya Nakamura , Keiichi Ishikawa , Tomonori Ohashi , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao , Hiroyuki Yamada
CPC分类号： F23L7/007 , F23C2900/9901 , F23G5/32 , F23G7/065 , F23G2209/142 , F23M11/04 , Y02E20/322 , Y02E20/344
摘要： The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH4 and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO2 to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (15), which is open toward a combustion chamber (11), surrounded by a peripheral wall (12), and closed by a plate (14) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (15), and the mixed gases are ejected toward the combustion chamber (11) perpendicularly to the plate (14).
摘要翻译： 本发明提供了一种用于燃烧型废气处理系统的燃烧器，用于燃烧由半导体制造系统排出的废气，特别是含有SiH 4和沉积气体的卤素基气体 在高效率的破坏下，使SiO 2粉末难以附着和沉积，进行低NOx燃烧，并保持所需的安全等级。 燃烧型废气处理系统具有朝向燃烧室（11）开口的阻燃稳定区（15），被周壁（12）包围，并且被远离燃烧室的板（14）封闭 。 废气，辅助可燃剂和空气在火焰稳定区（15）中引入并混合，并且混合气体垂直于板（14）朝向燃烧室（11）喷射。
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公开(公告)号：US06736635B1
公开(公告)日：2004-05-18
申请号：US10111382
申请日：2002-05-01
申请人： Yoshiro Takemura , Tetsuo Komai , Kotaro Kawamura , Takeshi Tsuji , Kazutaka Okuda , Rikiya Nakamura , Keiichi Ishikawa , Tomonori Ohashi , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao , Hiroyuki Yamada
发明人： Yoshiro Takemura , Tetsuo Komai , Kotaro Kawamura , Takeshi Tsuji , Kazutaka Okuda , Rikiya Nakamura , Keiichi Ishikawa , Tomonori Ohashi , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao , Hiroyuki Yamada
IPC分类号： F23G706
CPC分类号： F23L7/007 , F23C2900/9901 , F23G5/32 , F23G7/065 , F23G2209/142 , F23M11/04 , Y02E20/322 , Y02E20/344
摘要： The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH4 and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO2 to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (15), which is open toward a combustion chamber (11), surrounded by a peripheral wall (12), and closed by a plate (14) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (15), and the mixed gases are ejected toward the combustion chamber (11) perpendicularly to the plate (14).
摘要翻译： 本发明提供了一种用于燃烧型废气处理系统的燃烧器，用于以高效率的破坏同时燃烧从半导体制造系统排出的废气，特别是含有SiH 4和卤素基气体的沉积气体， SiO 2粉末难以附着和沉积，进行低NOx燃烧，并保持所需的安全水平。 燃烧型废气处理系统具有朝向燃烧室（11）开口的阻燃稳定区（15），被周壁（12）包围，并且被远离燃烧室的板（14）封闭 。 废气，辅助可燃剂和空气在火焰稳定区（15）中引入并混合，并且混合气体垂直于板（14）朝向燃烧室（11）喷射。
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