公开(公告)号：US20160086771A1

公开(公告)日：2016-03-24

申请号：US14960196

申请日：2015-12-04

申请人： Daisuke Shimizu ,  Jong Mun Kim

发明人： Daisuke Shimizu ,  Jong Mun Kim

IPC分类号： H01J37/32

CPC分类号： H01L21/3065 ,  B81C1/00531 ,  H01J37/32082 ,  H01J37/32146 ,  H01J37/32165 ,  H01J37/3244 ,  H01L21/0332 ,  H01L21/3081 ,  H01L21/31116 ,  H01L21/31122 ,  H01L21/31138 ,  H01L21/32137 ,  H01L21/32139 ,  H01L21/67069 ,  H01L27/11556 ,  H01L27/11582

摘要： Multilayered stacks having layers of silicon interleaved with layers of a dielectric, such as silicon dioxide, are plasma etched with non-corrosive process gas chemistries. Etching plasmas of fluorine source gases, such as SF6 and/or NF3 typically only suitable for dielectric layers, are energized by pulsed RF to achieve high aspect ratio etching of silicon/silicon dioxide bi-layers stacks without the addition of corrosive gases, such as HBr or Cl2. In embodiments, a mask open etch and the multi-layered stack etch are performed in a same plasma processing chamber enabling a single chamber, single recipe solution for patterning such multi-layered stacks. In embodiments, 3D NAND memory cells are fabricated with memory plug and/or word line separation etches employing a fluorine-based, pulsed-RF plasma etch.

摘要翻译： 具有与电介质层（诸如二氧化硅）交错的硅层的多层叠层用非腐蚀性工艺气体化学等离子体蚀刻。 氟源气体的蚀刻等离子体，例如通常仅适用于介电层的SF6和/或NF3，通过脉冲RF激励，以实现硅/二氧化硅双层堆叠的高纵横比蚀刻，而不加入腐蚀性气体，例如 HBr或Cl2。 在实施例中，掩模开口蚀刻和多层叠层蚀刻在相同的等离子体处理室中进行，从而能够实现用于图案化这种多层叠层的单室单配方解决方案。 在实施例中，使用采用氟基脉冲RF等离子体蚀刻的存储器插头和/或字线分离蚀刻来制造3D NAND存储器单元。

公开(公告)号：US20140213062A1

公开(公告)日：2014-07-31

申请号：US14157997

申请日：2014-01-17

申请人： Daisuke SHIMIZU ,  Jong Mun KIM

发明人： Daisuke SHIMIZU ,  Jong Mun KIM

IPC分类号： H01L21/3065

CPC分类号： H01L21/3065 ,  B81C1/00531 ,  H01J37/32082 ,  H01J37/32146 ,  H01J37/32165 ,  H01J37/3244 ,  H01L21/0332 ,  H01L21/3081 ,  H01L21/31116 ,  H01L21/31122 ,  H01L21/31138 ,  H01L21/32137 ,  H01L21/32139 ,  H01L21/67069 ,  H01L27/11556 ,  H01L27/11582

摘要： Multilayered stacks having layers of silicon interleaved with layers of a dielectric, such as silicon dioxide, are plasma etched with non-corrosive process gas chemistries. Etching plasmas of fluorine source gases, such as SF6 and/or NF3 typically only suitable for dielectric layers, are energized by pulsed RF to achieve high aspect ratio etching of silicon/silicon dioxide bi-layers stacks without the addition of corrosive gases, such as HBr or Cl2. In embodiments, a mask open etch and the multi-layered stack etch are performed in a same plasma processing chamber enabling a single chamber, single recipe solution for patterning such multi-layered stacks. In embodiments, 3D NAND memory cells are fabricated with memory plug and/or word line separation etches employing a fluorine-based, pulsed-RF plasma etch.

摘要翻译： 具有与电介质层（诸如二氧化硅）交错的硅层的多层叠层用非腐蚀性工艺气体化学等离子体蚀刻。 氟源气体的蚀刻等离子体，例如通常仅适用于介电层的SF6和/或NF3，通过脉冲RF激励，以实现硅/二氧化硅双层堆叠的高纵横比蚀刻，而不加入腐蚀性气体，例如 HBr或Cl2。 在实施例中，掩模开口蚀刻和多层叠层蚀刻在相同的等离子体处理室中进行，从而能够实现用于图案化这种多层叠层的单室单配方解决方案。 在实施例中，使用采用氟基脉冲RF等离子体蚀刻的存储器插头和/或字线分离蚀刻来制造3D NAND存储器单元。

公开(公告)号：US08603921B2

公开(公告)日：2013-12-10

申请号：US13190392

申请日：2011-07-25

申请人： Daisuke Shimizu ,  Jong Mun Kim

发明人： Daisuke Shimizu ,  Jong Mun Kim

IPC分类号： H01L21/302 ,  H01L21/461

CPC分类号： H01L21/76805 ,  H01L21/283 ,  H01L21/31116 ,  H01L21/31122 ,  H01L21/31138 ,  H01L21/31144 ,  H01L21/67069 ,  H01L21/76802 ,  H01L21/76879 ,  H01L21/76898

摘要： One or more openings in an organic mask layer deposited on a first insulating layer over a substrate are formed. One or more openings in the first insulating layer are formed through the openings in the organic mask using a first iodine containing gas. An antireflective layer can be deposited on the organic mask layer. One or more openings in the antireflective layer are formed down to the organic mask layer using a second iodine containing gas. The first insulating layer can be deposited on a second insulating layer over the substrate. One or more openings in the second insulating layer can be formed using a third iodine containing gas.

摘要翻译： 形成在衬底上沉积在第一绝缘层上的有机掩模层中的一个或多个开口。 使用第一含碘气体，通过有机掩模中的开口形成第一绝缘层中的一个或多个开口。 可以在有机掩模层上沉积抗反射层。 使用第二含碘气体，将抗反射层中的一个或多个开口形成为有机掩模层。 第一绝缘层可沉积在衬底上的第二绝缘层上。 可以使用第三含碘气体来形成第二绝缘层中的一个或多个开口。

公开(公告)号：US08119324B2

公开(公告)日：2012-02-21

申请号：US12375915

申请日：2007-07-27

申请人： Hikaru Sugita ,  Nobuji Matsumura ,  Daisuke Shimizu ,  Toshiyuki Kai ,  Tsutomu Shimokawa

发明人： Hikaru Sugita ,  Nobuji Matsumura ,  Daisuke Shimizu ,  Toshiyuki Kai ,  Tsutomu Shimokawa

IPC分类号： G03F7/00 ,  G03F7/004 ,  G03F7/20 ,  G03F7/26 ,  G03F7/40

CPC分类号： G03F7/11 ,  G03F7/0045 ,  G03F7/0757 ,  G03F7/265

摘要： A pattern formation method suitable for forming micro-patterns using electron beams (EB), X-rays, or extreme ultraviolet radiation (EUV) is provided. The method includes the following steps in the following order: (1) a step of forming and curing a under-layer film containing a radiation-sensitive acid generator which generates an acid upon exposure to radiation on a substrate, (2) a step of irradiating the under-layer film with radiation through a mask to cause an acid to be selectively generated in the exposed area of the under-layer film, (3) a step of forming an upper-layer film which does not contain a radiation-sensitive acid generator, but contains a composition capable of polymerization or crosslinking by the action of an acid, (4) a step of forming a cured film by polymerization or crosslinking selectively in the area of the upper-layer film corresponding to the area of the under-layer film in which the acid has been generated, and (5) a step of removing the area of the upper-layer film corresponding to the area of the under-layer film in which the acid has not been generated.

摘要翻译： 提供了适用于使用电子束（EB），X射线或极紫外线（EUV）形成微图案的图形形成方法。 该方法按以下顺序包括以下步骤：（1）形成和固化含有辐射敏感性酸产生剂的底层膜的步骤，所述辐射敏感酸产生剂在暴露于基材上时产生酸，（2）步骤 通过掩模用辐射照射底层膜以在底层膜的暴露区域中选择性地产生酸，（3）形成不含辐射敏感性的上层膜的步骤 酸产生剂，但含有能够通过酸的作用聚​​合或交联的组合物，（4）通过聚合或选择性地在上层膜对应于下面的区域的区域中选择性地交联固化膜的步骤 产生酸的层 - 膜，以及（5）除去与未生成酸的下层膜的面积对应的上层膜的面积的工序。

公开(公告)号：US08096549B2

公开(公告)日：2012-01-17

申请号：US11838633

申请日：2007-08-14

申请人： Daisuke Shimizu

发明人： Daisuke Shimizu

IPC分类号： B65H1/08

CPC分类号： B41J13/103 ,  B65H1/14 ,  B65H2402/31 ,  B65H2402/545 ,  B65H2403/51 ,  B65H2405/1117

摘要： In an image generating apparatus, a push-up member for pushing up a paper and bringing the same into contact with a paper feed roller includes a first push-up member, a second push-up member and a torsion coil spring, a second engaging portion of the second push-up member is rotatably engaged with a first engaging portion of the first push-up member, a second spring engaging portion of the second push-up member is engaged with a coil portion of the torsion coil spring, and a first spring engaging portion of the first push-up member is engaged with a first arm portion of the torsion coil spring.

摘要翻译： 在图像生成装置中，用于推动纸张并使其与送纸辊接触的上推构件包括第一上推构件，第二上推构件和扭力螺旋弹簧，第二接合 第二上推构件的部分与第一上推构件的第一接合部可旋转地接合，第二上推构件的第二弹簧接合部与扭转螺旋弹簧的线圈部接合， 第一上推构件的第一弹簧接合部与扭转螺旋弹簧的第一臂部接合。

公开(公告)号：US07802790B2

公开(公告)日：2010-09-28

申请号：US12110066

申请日：2008-04-25

申请人： Daisuke Shimizu

发明人： Daisuke Shimizu

IPC分类号： B65H9/10

CPC分类号： B65H1/266 ,  B65H2405/1134 ,  B65H2405/115 ,  B65H2405/31

摘要： In this image generating apparatus, a paper cassette mounted on an apparatus body includes a pressing portion employed for pressing a first side surface of a paper rearward with respect to a first direction for feeding the paper and so arranged that the distance from a second roller is smaller than the length of the paper in the first direction when the paper cassette is mounted on the apparatus body.

摘要翻译： 在该图像生成装置中，安装在装置主体上的纸盒包括用于将纸张的第一侧表面相对于用于供给纸的第一方向向后方按压的按压部，并且布置成距离第二辊的距离为 小于当纸盒安装在设备主体上时纸张在第一方向上的长度。

公开(公告)号：US07721563B2

公开(公告)日：2010-05-25

申请号：US11440452

申请日：2006-05-25

申请人： Eiji Takahashi ,  Masaki Kawachi ,  Masanori Ogawa ,  Hirofumi Muto ,  Daisuke Shimizu

发明人： Eiji Takahashi ,  Masaki Kawachi ,  Masanori Ogawa ,  Hirofumi Muto ,  Daisuke Shimizu

IPC分类号： F25B49/00 ,  F01B3/00 ,  F04B1/26

CPC分类号： B60H1/3208 ,  B60H2001/3266 ,  B60H2001/3275

摘要： An apparatus for calculating torque of a variable capacity compressor, including: a sensor configured to detect internal and external states of an air conditioner; an OFF-torque calculator configured to calculate and store a steady-state torque according to a state detected by the sensor just before a clutch is turned off; a start torque calculator configured to calculate a start torque according to a state detected by the sensor after the clutch is turned on; a steady-state full-stroke calculator configured to calculate a steady-state full-stroke torque based on an assumption that the compressor was in a full-stroke-state according to a state detected by the sensor after the clutch is turned on; and a determiner configured to provide, when an elapsed time after the clutch is turned on is less than a predetermined time, a maximum one of the torque values calculated by the OFF-torque calculator, start torque calculator, and steady-state full-stroke calculator.

摘要翻译： 一种用于计算可变容量压缩机的扭矩的装置，包括：传感器，被配置为检测空调的内部和外部状态; 离合转矩计算器，其被配置为根据在离合器关闭之前由传感器检测到的状态来计算和存储稳态转矩; 启动转矩计算器，被配置为根据在所述离合器接通之后由所述传感器检测到的状态来计算起动转矩; 稳态全行程计算器，被配置为基于在离合器接通之后根据由传感器检测到的状态使压缩机处于全行程状态的假设来计算稳态全行程转矩; 以及确定器，被配置为当所述离合器接通之后的经过时间小于预定时间时，提供由所述OFF转矩计算器计算出的所述转矩值中的最大值，起动转矩计算器和稳态全行程 计算器

公开(公告)号：US20090284668A1

公开(公告)日：2009-11-19

申请号：US12436501

申请日：2009-05-06

申请人： Kunio Sawai ,  Daisuke Shimizu

发明人： Kunio Sawai ,  Daisuke Shimizu

IPC分类号： H04N5/64 ,  A47B91/00 ,  F16H1/04

CPC分类号： F16M11/2014 ,  F16M11/10 ,  F16M11/18 ,  F16M2200/08 ,  Y10T16/2771 ,  Y10T74/1967

摘要： A display screen turning apparatus includes a display screen support member provided with a first gear and supporting a display screen portion rotatably in a horizontal plane and rotatably with respect to a vertical plane and a rack plate provided with a second gear meshing with the first gear, wherein the first gear meshed with the second gear moves by movement of the second gear following linear movement of the rack plate in the horizontal plane, thereby rotating the display screen support member in an anteroposterior direction by a prescribed angle with respect to the vertical plane.

摘要翻译： 显示屏转动装置包括：显示屏支撑构件，其具有第一齿轮，并且在水平面中可旋转地支撑显示屏部分并相对于垂直平面可旋转;以及齿条板，其具有与第一齿轮啮合的第二齿轮， 其中与所述第二齿轮啮合的所述第一齿轮通过所述齿条板在所述水平面中的线性移动而随着所述第二齿轮的移动而移动，从而使所述显示屏支撑构件在前后方向上相对于所述垂直平面旋转规定角度。

公开(公告)号：US07410162B2

公开(公告)日：2008-08-12

申请号：US11217335

申请日：2005-09-02

申请人： Daisuke Takasaka ,  Koichi Chikumoto ,  Daisuke Shimizu

发明人： Daisuke Takasaka ,  Koichi Chikumoto ,  Daisuke Shimizu

IPC分类号： B65H1/10 ,  B65H1/12

CPC分类号： B65H1/14 ,  B65H2402/542 ,  B65H2403/40 ,  B65H2403/512 ,  B65H2801/12 ,  Y10T16/544 ,  Y10T16/5443

摘要： An image forming apparatus has a chassis, a paper feed roller, a lifting member, and a biasing member. The chassis has a first side surface, a second side surface, and a bottom surface that connects the first and second side surfaces. The bottom surface has one of a first L-shaped projecting portion and a first coupling hole unitarily formed thereon. The paper feed roller is rotatably supported by the first and second side surfaces of the chassis and configured to convey paper. The lifting member is pivotably supported by the bottom surface of the chassis, and has a main portion and the other of the first L-shaped projecting portion and the first coupling hole unitarily formed on the main portion. The first L-shaped projection is pivotably coupled to the first coupling hole, such that the lifting member is pivotably coupled to the bottom surface.

摘要翻译： 图像形成装置具有底架，供纸辊，提升构件和偏置构件。 底盘具有第一侧表面，第二侧表面和连接第一和第二侧表面的底表面。 底面具有一体地形成在其上的第一L形突出部分和第一联接孔中的一个。 供纸辊由底盘的第一和第二侧表面可旋转地支撑并构造成传送纸。 提升构件由底盘的底面可枢转地支撑，并且在主体部分上整体形成有第一L形突出部分和第一联接孔的主体部分。 第一L形突起可枢转地联接到第一联接孔，使得提升构件可枢转地联接到底表面。

公开(公告)号：US07271820B2

公开(公告)日：2007-09-18

申请号：US11111730

申请日：2005-04-22

申请人： Daisuke Shimizu

发明人： Daisuke Shimizu

IPC分类号： B41J25/304

CPC分类号： B41J2/325 ,  B41J17/24 ,  B41J2202/31

摘要： Idler mechanism includes a pickup roller gear; a third pickup gear that meshes with the pickup roller gear; a pickup idler arm that is capable of pivoting around a pivot axis between the pickup roller gear side and the third pickup gear side; first and second pickup idler gears disposed at ends of the pickup idler arm; and a second pickup gear that rotates around a pivot axis and drives the first and second pickup idler gears. The first pickup idler gear meshes with the pickup roller gear when the pickup idler arm is pivoted toward the pickup roller gear, while the second pickup idler gear meshes with the third pickup gear when the pickup idler arm is pivoted toward the third pickup gear. At least one of the first and second pickup idler gears is always meshing with respective one of the pickup roller gear and the third pickup gear.

摘要翻译： 惰轮机构包括拾取辊齿轮; 与拾取辊齿轮啮合的第三拾取齿轮; 拾取器惰轮，其能够围绕拾取辊齿轮侧和第三拾取齿轮侧之间的枢转轴线枢转; 设置在拾取器惰轮臂的端部处的第一和第二拾取惰轮; 以及第二拾取齿轮，其围绕枢转轴线旋转并驱动第一和第二拾取惰轮。 当拾取惰轮臂朝向拾取辊齿轮枢转时，第一拾取空转齿轮与拾取辊齿轮啮合，而当拾取惰轮臂朝向第三拾取齿轮枢转时，第二拾取空转齿轮与第三拾取齿轮啮合。 第一和第二拾取空转齿轮中的至少一个始终与拾取辊齿轮和第三拾取齿轮中的相应一个啮合。