公开(公告)号：US5832843A

公开(公告)日：1998-11-10

申请号：US788075

申请日：1997-01-22

申请人： Young-bae Park ,  Sang-hoon Seo ,  Hyung-youl Kim

发明人： Young-bae Park ,  Sang-hoon Seo ,  Hyung-youl Kim

IPC分类号： B01D53/14 ,  B01D53/38 ,  B01D53/74 ,  F23G7/06 ,  F23J1/06 ,  B01D50/00 ,  F23B5/00

CPC分类号： F23G7/065 ,  B01D53/38 ,  B01D53/74 ,  F23G7/063 ,  F23J1/06 ,  F23G2209/142

摘要： Disclosed is a waste gas disposal apparatus and method of the same which eliminates efficiently toxic components of waste gas resulted from semiconductor manufacture process prior to waste gas emission to the atmosphere, showing improvements in disposal efficiency, safety and costs.This apparatus is comprised of an inlet head into which waste gas, inert gas and air are introduced, respectively; a heating chamber provided under the inlet head for heating up the incoming mixture gas from the inlet head to create reactant fine particles from a heating reaction; a reaction preventive unit provided in the heating chamber for making impossible to react the waste gas to the air at upper portion of the heating chamber; a scrubber unit connected to the heating chamber for scrapping off the solid dust particles adsorbed to the inner wall thereof; and a container connected to the scrubber unit by an engagement member for storing the off solid dust particles therein.

摘要翻译： 公开了一种废气处理装置及其方法，其在废气排放到大气之前消除了由半导体制造过程产生的废气的有毒成分，显示了处理效率，安全性和成本的提高。 该装置包括分别引入废气，惰性气体和空气的入口头; 加热室，设置在入口头下方，用于加热来自入口头的入口混合气体，以产生来自加热反应的反应物细颗粒; 反应防止单元，设置在所述加热室中，用于使所述废气不可能与所述加热室的上部的空气反应; 连接到加热室的洗涤器单元，用于废除吸附在其内壁上的固体尘埃颗粒; 以及通过用于将固体粉尘颗粒存储在其中的接合构件连接到洗涤器单元的容器。

公开(公告)号：US06171353B2

公开(公告)日：2001-01-09

申请号：US09072535

申请日：1998-05-04

申请人： Young-bae Park ,  Hyung-ryul Kim

发明人： Young-bae Park ,  Hyung-ryul Kim

IPC分类号： B01D4518

CPC分类号： B01D45/18

摘要： Disclosed is an apparatus for effectively treating waste gases which are discharged during a processing of manufacturing semiconductors. The apparatus for treating waste gases according to an embodiment of the present invention comprises a waste gases heating chamber, a waste gases collecting chamber, a waste gases collecting chamber cover, a scraping device for the waste gases collecting chamber cover, a scraping device for the waste gases collecting chamber, and a driving source for driving the scraping device for the waste gases collecting chamber cover, and the scraping device for the waste gases collecting chamber. The apparatus for treating waste gases further includes a cooling tube which is disposed on an outer surface of the waste gases collecting chamber, for cooling waste gases.

摘要翻译： 公开了一种有效处理在制造半导体的加工过程中排出的废气的装置。 根据本发明实施例的用于处理废气的设备包括废气加热室，废气收集室，废气收集室盖，用于废气收集室盖的刮擦装置，用于 废气收集室，以及用于驱动废气收集室盖的刮除装置的驱动源和废气收集室的刮除装置。 用于处理废气的设备还包括设置在废气收集室的外表面上用于冷却废气的冷却管。

公开(公告)号：US07474917B2

公开(公告)日：2009-01-06

申请号：US10624532

申请日：2003-07-23

申请人： Woo-young Jang ,  Young-bae Park ,  Sang-hoon Shin ,  Jin-wook Choi

发明人： Woo-young Jang ,  Young-bae Park ,  Sang-hoon Shin ,  Jin-wook Choi

IPC分类号： A61B5/05 ,  A61B5/04

CPC分类号： A61B5/415 ,  A61B5/0531 ,  A61B5/416 ,  A61B5/418

摘要： An impedance measurement system for measuring skin impedance in a small skin region includes an electrode unit having a plurality of current supply electrodes for supplying a constant current and a plurality of measurement electrodes separate from the current supply electrodes for measuring a response signal of skin, a current source for supplying the constant current to the current supply electrodes, a signal processing unit, connected to the measurement electrodes, for receiving response signals generated in the skin in response to the applied constant current, for generating a potential difference signal, for removing noise from the potential difference signal, and for amplifying the noise-removed potential difference signal, a signal conversion unit for converting the potential difference signal received from the signal processing unit from analog into digital format, and an image display unit for converting the digital potential difference signal into an image signal and for displaying the image signal.

摘要翻译： 用于测量小皮肤区域中的皮肤阻抗的阻抗测量系统包括具有用于提供恒定电流的多个电流供给电极的电极单元和与用于测量皮肤的响应信号的电流供给电极分开的多个测量电极， 用于向电流供给电极供给恒定电流的电流源，连接到测量电极的信号处理单元，用于响应于施加的恒定电流接收在皮肤中产生的响应信号，用于产生电位差信号，以消除噪声 用于将从信号处理单元接收的电位差信号从模拟转换为数字格式的信号转换单元，以及用于转换数字电位差的图像显示单元， 信号转换为图像信号和位移 影响图像信号。

公开(公告)号：US6051197A

公开(公告)日：2000-04-18

申请号：US072419

申请日：1998-05-04

申请人： Young-bae Park

发明人： Young-bae Park

IPC分类号： B01D53/34 ,  B01D45/12 ,  B01D53/74 ,  B01D53/38

CPC分类号： B01D45/12

摘要： Disclosed is a method for treating a waste gas and an apparatus thereof capable of reducing the space for establishing the apparatus for treating the waste gas and collecting minute particles formed by oxidizing and cooling the toxic waste gas flown into the apparatus for treating the waste gas through a collecting process without filtering the particles. When treating the waste gas generated in the semiconductor manufacturing process, it is not required to treat a byproduct as in the wet-type treating method and the polymers are collected effectively by means of cyclones separators having different diameters. As a result, as the filtering apparatus is not required excluding the cyclone separators, the cost for establishing the facilities can be reduced.

摘要翻译： 公开了一种处理废气的方法及其装置，其能够减少用于建立废气处理装置的空间并收集通过氧化和冷却流入用于处理废气的装置中的有毒废气形成的微小颗粒 不过滤颗粒的收集过程。 当处理在半导体制造过程中产生的废气时，不需要如湿式处理方法那样处理副产物，并且通过具有不同直径的旋风分离器有效地收集聚合物。 结果，由于不需要除去旋风分离器的过滤装置，因此能够降低建立设备的成本。