公开(公告)号：US08834728B1

公开(公告)日：2014-09-16

申请号：US13045394

申请日：2011-03-10

申请人： Yufeng Hu ,  Shawn M. Tanner ,  Ut Tran ,  Zhongyan Wang ,  Mirzafer Abatchev

发明人： Yufeng Hu ,  Shawn M. Tanner ,  Ut Tran ,  Zhongyan Wang ,  Mirzafer Abatchev

IPC分类号： B44C1/22 ,  H01B13/00 ,  G11B7/1387 ,  G11B5/48

CPC分类号： G11B5/4866 ,  G11B7/1387

摘要： A method provides an EAMR transducer. The EAMR transducer is coupled with a laser and has an ABS configured to reside in proximity to a media during use. The method includes providing an NFT using an NFT mask. The NFT resides proximate to the ABS and focuses the laser energy onto the media. A portion of the NFT mask is removed, forming a heat sink mask covering part of the NFT. Optical material(s) are deposited, covering the heat sink mask and the NFT. The heat sink mask is removed, providing an aperture in the optical material(s). A heat sink corresponding to the aperture is provided. The heat sink bottom is thermally coupled with the NFT. A write pole for writing to the media and coil(s) for energizing the write pole are provided. The write pole has a bottom surface thermally coupled with the top surface of the heat sink.

摘要翻译： 一种方法提供一种EAMR传感器。 EAMR传感器与激光器耦合并且具有被配置为在使用期间驻留在介质附近的ABS。 该方法包括使用NFT掩码提供NFT。 NFT靠近ABS，并将激光能量聚焦到介质上。 去除NFT掩模的一部分，形成覆盖NFT部分的散热掩模。 沉积光学材料，覆盖散热掩模和NFT。 去除散热掩模，在光学材料中提供孔。 提供对应于孔的散热器。 散热器底部与NFT热耦合。 提供用于写入介质的写入极和用于激励写入极的线圈。 写极具有与散热器的顶表面热耦合的底表面。

公开(公告)号：US08721902B1

公开(公告)日：2014-05-13

申请号：US13046380

申请日：2011-03-11

申请人： Zhongyan Wang ,  Wei Gao ,  Shawn M. Tanner ,  Mirzafer Abatchev ,  Yanfeng Chen ,  Yufeng Hu

发明人： Zhongyan Wang ,  Wei Gao ,  Shawn M. Tanner ,  Mirzafer Abatchev ,  Yanfeng Chen ,  Yufeng Hu

IPC分类号： B44C1/22

CPC分类号： G11B5/314 ,  G11B5/6088 ,  G11B2005/0021

摘要： A method provides an EAMR transducer. The EAMR transducer is coupled with a laser and has an ABS configured to reside in proximity to a media during use. The EAMR transducer includes an NFT for focusing the energy onto the media. A sacrificial layer is deposited on the NFT and a mask having an aperture provided on the sacrificial layer. A portion of the sacrificial layer exposed by the aperture is removed to form a trench above the NFT. A heat sink is then provided. At least part of the heat sink resides in the trench. The heat sink is thermally coupled to the NFT. Optical material(s) are provided around the heat sink. A write pole configured to write to a region of the media is also provided. The write pole is thermally coupled with the top of the heat sink. Coil(s) for energizing the write pole are also provided.

摘要翻译： 一种方法提供一种EAMR传感器。 EAMR传感器与激光器耦合并且具有被配置为在使用期间驻留在介质附近的ABS。 EAMR传感器包括用于将能量聚焦到介质上的NFT。 牺牲层沉积在NFT上，并且具有设置在牺牲层上的孔的掩模。 被孔径暴露的牺牲层的一部分被去除以在NFT上方形成沟槽。 然后提供散热器。 散热片的至少一部分位于沟槽中。 散热器与NFT热耦合。 光学材料设置在散热器的周围。 还提供了被配置为写入介质的区域的写入极。 写柱与散热器的顶部热耦合。 还提供用于激励写入极的线圈。

公开(公告)号：US08749790B1

公开(公告)日：2014-06-10

申请号：US13314962

申请日：2011-12-08

申请人： Shawn M. Tanner ,  Yufeng Hu ,  Ut Tran ,  Zhongyan Wang ,  Zhong Shi ,  Sergei Sochava

发明人： Shawn M. Tanner ,  Yufeng Hu ,  Ut Tran ,  Zhongyan Wang ,  Zhong Shi ,  Sergei Sochava

IPC分类号： G01N21/55

CPC分类号： G01N21/553 ,  G01N21/7703

摘要： A structure for measuring energy absorption by a surface plasmon receptor or NFT on a waveguide comprises a first waveguide, a first input grating for coupling light comprising a first wavelength into the first waveguide, a first output grating for coupling light out of the first waveguide, a first plurality of surface plasmon receptors in cooperation with the first waveguide to receive light energy and located between the first input grating and the first output grating. The structure may further comprise a second waveguide, a second input grating for coupling light into the second waveguide, a second output grating for coupling light out of the second waveguide, a second plurality of surface plasmon receptors between the second input grating and the second output grating and in cooperation with the second waveguide to receive light energy, wherein the second plurality may be less than or greater than the first plurality.

摘要翻译： 用于测量波导上的表面等离子体激元受体或NFT的能量吸收的结构包括：第一波导，用于将包含第一波长的光引入第一波导的第一输入光栅，用于将光从第一波导耦合的第一输出光栅， 与第一波导协作以接收光能并位于第一输入光栅和第一输出光栅之间的第一多个表面等离子体激元受体。 该结构还可以包括第二波导，用于将光耦合到第二波导中的第二输入光栅，用于将光从第二波导耦合的第二输出光栅，在第二输入光栅和第二输出之间的第二多个表面等离子体激元 光栅并与第二波导配合以接收光能，其中第二多个可以小于或大于第一多个。

公开(公告)号：US08491801B1

公开(公告)日：2013-07-23

申请号：US13291702

申请日：2011-11-08

申请人： Shawn M. Tanner ,  Yufeng Hu ,  Ut Tran ,  Zhongyan Wang

发明人： Shawn M. Tanner ,  Yufeng Hu ,  Ut Tran ,  Zhongyan Wang

IPC分类号： B44C1/22 ,  G11B5/127

CPC分类号： G11B5/3133 ,  G11B5/6088 ,  G11B2005/0021 ,  Y10T29/49032 ,  Y10T29/49048

摘要： A method and system provides a near-field transducer (NFT) for an energy assisted magnetic recording (EAMR) transducer. The method and system include forming a sacrificial NFT structure having a shape a location corresponding to the NFT. A dielectric layer is deposited. A portion of the dielectric layer resides on the sacrificial NFT structure. At least this portion of the dielectric layer on the sacrificial structure is removed. The sacrificial NFT structure is removed, exposing an NFT trench in the dielectric layer. At least one conductive layer for the NFT is deposited. A first portion of the conductive layer(s) reside in the NFT trench. A second portion of the conductive layer(s) external to the NFT trench is removed to form the NFT.

摘要翻译： 一种方法和系统为能量辅助磁记录（EAMR）传感器提供近场换能器（NFT）。 该方法和系统包括形成具有对应于NFT的位置的形状的牺牲NFT结构。 沉积介电层。 电介质层的一部分位于牺牲NFT结构上。 至少该牺牲结构上介电层的这一部分被去除。 去除牺牲NFT结构，暴露电介质层中的NFT沟槽。 沉积至少一个用于NFT的导电层。 导电层的第一部分驻留在NFT沟槽中。 除去NFT沟槽外部的导电层的第二部分以形成NFT。

公开(公告)号：US08773956B1

公开(公告)日：2014-07-08

申请号：US13312925

申请日：2011-12-06

申请人： Zhongyan Wang ,  Hongxing Yuan ,  Shawn M. Tanner ,  Yufeng Hu

发明人： Zhongyan Wang ,  Hongxing Yuan ,  Shawn M. Tanner ,  Yufeng Hu

IPC分类号： G11B11/00

CPC分类号： G11B5/6088 ,  G11B5/314 ,  G11B2005/0021

摘要： Embodiments of the present invention are directed toward a bi-layer spacer structure and related fabrication processes for improving an interface between a near-field transducer (NFT) and a spacer on an optical waveguide core for an energy assisted magnetic recording (EAMR) system. The embodiments provide a solution for improving the adhesion between the NFT and the spacer.

摘要翻译： 本发明的实施例涉及一种用于改善用于能量辅助磁记录（EAMR）系统的光波导芯上的近场换能器（NFT）和间隔物之间​​的界面的双层间隔结构和相关制造工艺。 这些实施例提供了用于改善NFT和间隔物之间​​的粘附性的解决方案。

公开(公告)号：US08753903B1

公开(公告)日：2014-06-17

申请号：US13478058

申请日：2012-05-22

申请人： Shawn M. Tanner ,  Yufeng Hu ,  Sergei Sochava

发明人： Shawn M. Tanner ,  Yufeng Hu ,  Sergei Sochava

IPC分类号： H01L21/66

CPC分类号： H01L22/12

摘要： Improved pump-probe testing methods and apparatuses for measuring the performance of a plasmon element at wafer level are provided. In one embodiment, the apparatus includes a light source configured to output a first light beam on a grating located at a first end of a waveguide, the waveguide being configured to couple energy of the first light beam to the plasmon element located at a second end of the waveguide, and an optical probe assembly positioned above a top surface of the wafer. The optical probe assembly is configured to direct a second light beam on an area of the wafer including the plasmon element and detect a portion of the second light beam reflected from the area.

摘要翻译： 提供了用于测量晶圆级别的等离子体元件的性能的改进的泵浦探针测试方法和装置。 在一个实施例中，该设备包括配置成在位于波导的第一端的光栅上输出第一光束的光源，该波导被配置为将第一光束的能量耦合到位于第二端的等离子体元件 以及位于晶片顶表面上方的光学探头组件。 光探针组件被配置为将第二光束引导到包括等离子体元件的晶片的区域上，并检测从该区域反射的第二光束的一部分。

公开(公告)号：US08565049B1

公开(公告)日：2013-10-22

申请号：US13533150

申请日：2012-06-26

申请人： Shawn M. Tanner ,  Yufeng Hu

发明人： Shawn M. Tanner ,  Yufeng Hu

IPC分类号： G11B11/00

CPC分类号： G11B5/3136 ,  G11B5/314 ,  G11B5/3173 ,  G11B5/6088 ,  G11B2005/0021

摘要： A method and system provide a near-field transducer (NFT) for an energy assisted magnetic recording (EAMR) transducer. The method and system include forming an NFT having a disk and a pin. A dielectric layer that substantially covers the NFT is deposited. A portion of the dielectric layer is removed such that the dielectric layer has an aperture therein. The aperture exposes the pin of the NFT. The EAMR transducer is annealed at a temperature greater than the expected operating temperature of the EAMR transducer.

摘要翻译： 一种方法和系统为能量辅助磁记录（EAMR）传感器提供近场换能器（NFT）。 该方法和系统包括形成具有盘和销的NFT。 沉积基本覆盖NFT的电介质层。 介电层的一部分被去除，使得介电层在其中具有孔。 孔径暴露了NFT的引脚。 EAMR传感器在大于EAMR传感器的预期工作温度的温度下退火。

公开(公告)号：US08456963B1

公开(公告)日：2013-06-04

申请号：US12758319

申请日：2010-04-12

申请人： Yufeng Hu ,  Ruolin Li ,  Ut Tran ,  Jinshan Li

发明人： Yufeng Hu ,  Ruolin Li ,  Ut Tran ,  Jinshan Li

IPC分类号： G11B11/00

CPC分类号： G11B5/314 ,  G11B5/4866 ,  G11B5/6088 ,  G11B2005/0021

摘要： An energy assisted magnetic recording (EAMR) disk drive comprises a suspension and a slider having a back side, a laser-facing surface, and an air-bearing surface (ABS) opposite the back side. The slider is mounted to the suspension on the back side. The disk drive further comprises an EAMR transducer coupled with the slider, a portion of the EAMR transducer residing in proximity to the ABS and on the laser-facing surface of the slider. The disk drive further comprises a laser coupled with the suspension and having a light emitting surface facing the laser-facing surface of the slider. The laser has an optic axis substantially parallel to the suspension. The laser provides energy substantially along the optic axis and is optically coupled with the EAMR transducer via free space. The EAMR transducer receives the energy from the laser and writes to the media using the energy.

摘要翻译： 能量辅助磁记录（EAMR）盘驱动器包括悬架和具有背面，面向激光的表面和与背面相对的空气轴承表面（ABS）的滑块。 滑块安装在背面的悬架上。 磁盘驱动器还包括与滑动器耦合的EAMR换能器，位于ABS附近的EAMR换能器的一部分和滑块的面向激光的表面。 磁盘驱动器还包括与悬架连接并具有面向滑块的面向激光的表面的发光表面的激光器。 激光器具有基本上平行于悬架的光轴。 激光器基本沿光轴提供能量，并通过自由空间与EAMR传感器光学耦合。 EAMR传感器从激光器接收能量，并使用能量写入介质。

公开(公告)号：US08634280B1

公开(公告)日：2014-01-21

申请号：US13165017

申请日：2011-06-21

申请人： Zhongyan Wang ,  Hongxing Yuan ,  Zhong Shi ,  Yufeng Hu

发明人： Zhongyan Wang ,  Hongxing Yuan ,  Zhong Shi ,  Yufeng Hu

IPC分类号： G11B11/00

CPC分类号： G11B5/314 ,  G11B5/3116 ,  G11B2005/0021

摘要： A method and system provides an EAMR transducer. The transducer is coupled with a laser for providing energy and has an air-bearing surface (ABS) configured to reside in proximity to a media during use. The EAMR transducer includes a near field transducer (NFT) for focusing the energy onto the region of the media, a write pole, and at least one coil for energizing the write pole. The NFT includes a ring portion having an aperture therein and a pin portion proximate to the ABS. The write pole is configured to write to a region of the media.

摘要翻译： 一种方法和系统提供了一种EAMR传感器。 换能器与用于提供能量的激光器耦合，并且具有配置成在使用期间驻留在介质附近的空气轴承表面（ABS）。 EAMR传感器包括用于将能量聚焦到介质的区域上的近场传感器（NFT），写入极和用于激励写入极的至少一个线圈。 NFT包括其中具有孔的环部分和靠近ABS的销部分。 写入极配置为写入介质的一个区域。

公开(公告)号：US20110294398A1

公开(公告)日：2011-12-01

申请号：US12789813

申请日：2010-05-28

申请人： Yufeng Hu ,  Zhongyan Wang ,  Jinshan Li

发明人： Yufeng Hu ,  Zhongyan Wang ,  Jinshan Li

IPC分类号： B24B51/00

CPC分类号： G11B13/04 ,  B24B37/013 ,  G11B5/314 ,  G11B5/3169 ,  G11B2005/001 ,  G11B2005/0021 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for fabricating transducer having an air-bearing surface (ABS) is described. The method and system include providing at least one near-field transducer (NFT) film and providing an electronic lapping guide (ELG) film substantially coplanar with a portion of the at least one NFT film. The method and system also include defining a disk portion of an NFT from the portion of the at least one NFT film and at least one ELG from the ELG film. The disk portion corresponds to a critical dimension of the NFT from an ABS location. The method and system also include lapping the at least one transducer. The lapping is terminated based on a signal from the ELG.

摘要翻译： 描述了一种用于制造具有空气轴承表面（ABS）的换能器的方法和系统。 该方法和系统包括提供至少一个近场换能器（NFT）膜并提供与所述至少一个NFT膜的一部分基本共面的电子研磨导向器（ELG）膜。 该方法和系统还包括从至少一个NFT膜的部分和来自ELG膜的至少一个ELG限定NFT的盘部分。 盘部分对应于来自ABS位置的NFT的临界尺寸。 该方法和系统还包括研磨至少一个换能器。 基于ELG的信号终止研磨。