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公开(公告)号：US06988301B2
公开(公告)日：2006-01-24
申请号：US11007485
申请日：2004-12-08
CPC分类号： H01L27/20 , B41J2/14209 , H01L41/338 , H01L41/339 , H02N2/021 , Y10T29/42 , Y10T29/43 , Y10T29/435 , Y10T29/49078 , Y10T29/49126 , Y10T29/4913 , Y10T29/49833
摘要： A matrix type piezoelectric/electrostrictive (P/E) actuator includes a plurality of piezoelectric/electrostrictive elements, each including a piezoelectric/electrostrictive body and at least one pair of electrodes formed on a ceramic substrate. The matrix type P/E actuator is activated by the displacement of the piezoelectric/electrostrictive bodies. The piezoelectric/electrostrictive elements are joined to the ceramic substrate as respective unified bodies, and are two-dimensionally arranged independently from each other. The piezoelectric/electrostrictive actuator provides a greater displacement with a lower voltage, a high responsive speed, and a greater generating force, as well as enhancing the mounting ability and the integration. A method for manufacturing such a matrix type P/E actuator is also disclosed.
摘要翻译： 矩阵型压电/电致伸缩（P / E）致动器包括多个压电/电致伸缩元件，每个压电/电致伸缩元件包括压电/电致伸缩体和在陶瓷衬底上形成的至少一对电极。 矩阵型P / E致动器由压电/电致伸缩体的位移激活。 压电/电致伸缩元件作为各自的统一体接合到陶瓷基板，并且彼此独立地二维地排列。 压电/电致伸缩致动器提供具有较低电压，高响应速度和更大发电力的更大位移，以及增强安装能力和集成度。 还公开了一种用于制造这种矩阵型P / E致动器的方法。
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公开(公告)号：US20050102807A1
公开(公告)日：2005-05-19
申请号：US11007485
申请日：2004-12-08
CPC分类号： H01L27/20 , B41J2/14209 , H01L41/338 , H01L41/339 , H02N2/021 , Y10T29/42 , Y10T29/43 , Y10T29/435 , Y10T29/49078 , Y10T29/49126 , Y10T29/4913 , Y10T29/49833
摘要： A matrix type piezoelectric/electrostrictive (P/E) actuator includes a plurality of piezoelectric/electrostrictive elements, each including a piezoelectric/electrostrictive body and at least one pair of electrodes formed on a ceramic substrate. The matrix type P/E actuator is activated by the displacement of the piezoelectric/electrostrictive bodies. The piezoelectric/electrostrictive elements are joined to the ceramic substrate as respective unified bodies, and are two-dimensionally arranged independently from each other. The piezoelectric/electrostrictive actuator provides a greater displacement with a lower voltage, a high responsive speed, and a greater generating force, as well as enhancing the mounting ability and the integration. A method for manufacturing such a matrix type P/E actuator is also disclosed.
摘要翻译： 矩阵型压电/电致伸缩（P / E）致动器包括多个压电/电致伸缩元件，每个压电/电致伸缩元件包括压电/电致伸缩体和在陶瓷衬底上形成的至少一对电极。 矩阵型P / E致动器由压电/电致伸缩体的位移激活。 压电/电致伸缩元件作为各自的统一体接合到陶瓷基板，并且彼此独立地二维地排列。 压电/电致伸缩致动器提供具有较低电压，高响应速度和更大发电力的更大位移，以及增强安装能力和集成度。 还公开了一种用于制造这种矩阵型P / E致动器的方法。
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公开(公告)号：US06864620B2
公开(公告)日：2005-03-08
申请号：US10011259
申请日：2001-12-05
CPC分类号： H01L27/20 , B41J2/14209 , H01L41/338 , H01L41/339 , H02N2/021 , Y10T29/42 , Y10T29/43 , Y10T29/435 , Y10T29/49078 , Y10T29/49126 , Y10T29/4913 , Y10T29/49833
摘要： A matrix type piezoelectric/electrostrictive (PIE) actuator includes a plurality of piezoelectric/electrostrictive elements, each including a piezoelectric/electrostrictive body and at least one pair of electrodes formed on a ceramic substrate. The matrix type P/E actuator is activated by displacement of the piezoelectric/electrostrictive bodies. The piezoelectric/electrostrictive elements are joined to the ceramic substrate as respective unified bodies, and are two-dimensionally arranged independently from each other. The piezoelectric/electrostrictive actuator provides a greater displacement with a lower voltage, a high responsive speed, and a greater generating force, as well as enhancing the mounting ability and the integration. A method for manufacturing such a matrix type P/E actuator is also disclosed.
摘要翻译： 矩阵型压电/电致伸缩（PIE）致动器包括多个压电/电致伸缩元件，每个压电/电致伸缩元件包括压电/电致伸缩体和在陶瓷衬底上形成的至少一对电极。 基体型P / E致动器通过压电/电致伸缩体的位移而被激活。 压电/电致伸缩元件作为各自的统一体接合到陶瓷基板，并且彼此独立地二维地排列。 压电/电致伸缩致动器提供具有较低电压，高响应速度和更大发电力的更大位移，以及增强安装能力和集成度。 还公开了一种用于制造这种矩阵型P / E致动器的方法。
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公开(公告)号：US06933663B2
公开(公告)日：2005-08-23
申请号：US10117353
申请日：2002-04-05
CPC分类号： B41J2/1609 , B41J2/1632 , G02B26/0858 , H01L27/20 , H01L41/257 , H01L41/29 , H01L41/338 , H01L41/339 , H02N2/002 , Y10T29/42
摘要： A piezoelectric/electrostrictive actuator includes a plurality of piezoelectric/electrostrictive elements arranged in comb teeth-like alignment on a base plate. The actuator is driven by means of dislocation of the piezoelectric/electrostrictive elements. The cell driving type actuator is characterized in that each of the cells is formed independently from adjacent cells by positioning cover plates between two adjacent piezoelectric/electrostrictive elements. Thus, there is provided a piezoelectric/electrostrictive actuator wherein a heating process at a high temperature can be applied and mass production at low cost is possible. The actuator includes cells with slit portions having a width of 60 μm or less and a high aspect ratio and can be activated with high electric field strength, and great displacement can be obtained with small electric field strength.
摘要翻译： 压电/电致伸缩致动器包括在基板上以梳齿状对准布置的多个压电/电致伸缩元件。 致动器通过压电/电致伸缩元件的位错来驱动。 电池驱动型致动器的特征在于，通过将盖板定位在两个相邻的压电/电致伸缩元件之间，每个电池单元独立于相邻电池单元形成。 因此，提供了一种压电/电致伸缩致动器，其中可以应用高温下的加热过程，并且可以以低成本进行批量生产。 致动器包括具有宽度为60μm或更小并且具有高纵横比的狭缝部分的电池，并且可以以高电场强度被激活，并且可以以小的电场强度获得大的位移。
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公开(公告)号：US06752601B2
公开(公告)日：2004-06-22
申请号：US09935087
申请日：2001-08-22
IPC分类号： F04B3500
CPC分类号： F04B43/046 , B41J2/1609 , B41J2/1623 , B41J2/1632 , B41J2202/11 , F04B43/043
摘要： A micro pump having at least one pump member for conveying a fluid by action of pressure includes a pump unit formed by at least one actuator member for generating a pressure fluctuation and a fluid channel in which the fluid flows. The actuator member provided with a cell formed by disposing two side walls made of piezoelectric/electrostrictive elements or antiferrodielectric elements on a connecting plate, and covering a surface facing the connecting plate between the side walls with a cover plate. The actuator member selectively forms the fluid channel and generates pressure fluctuation in the fluid channel member due to displacement of the cell caused by expansion/contraction of the side walls. The micro pump is small and thin in size, while attaining increasing fluid ejection amounts, and a thigh speed in response.
摘要翻译： 具有用于通过压力作用输送流体的至少一个泵构件的微型泵包括由至少一个用于产生压力波动的致动器构件和流体流动的流体通道形成的泵单元。 致动器构件设置有通过将由压电/电致伸缩元件或反铁电元件制成的两个侧壁设置在连接板上而形成的单元，并且用盖板覆盖面对侧壁之间的连接板的表面。 致动器构件选择性地形成流体通道并且由于侧壁的膨胀/收缩引起的电池的位移而在流体通道构件中产生压力波动。 微型泵的尺寸小而薄，同时获得了增加的流体喷射量，并且响应速度很快。
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6.发明授权Multislit type actuator, inkjet head and method for manufacturing multislit type actuator 失效多点式致动器，喷墨头和制造多照明型致动器的方法公开(公告)号：US07025444B2
公开(公告)日：2006-04-11
申请号：US10679188
申请日：2003-10-03
IPC分类号： B41J2/045
CPC分类号： B41J2/1609 , B41J2/1632 , H01L27/20 , H01L41/339 , H02N2/021
摘要： A multislit type actuator including a plurality of piezoelectric actuators aligned and allocated like teeth of a comb formed on a substrate, wherein a condition of crystal grains in side surfaces of the piezoelectric actuators forming wall surfaces of a slit between the comb teeth is that the crystal grains under transgranular fracture are 1% or below.
摘要翻译： 一种多点式致动器，包括多个压电致动器，其排列和分配为类似于形成在基板上的梳状齿，其中形成在梳齿之间的狭缝的壁表面的压电致动器的侧表面中的晶粒的状态是晶体 晶粒断裂下的晶粒为1％以下。
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7.发明授权公开(公告)号：US06699018B2
公开(公告)日：2004-03-02
申请号：US09900742
申请日：2001-07-06
IPC分类号： F04B3500
CPC分类号： B41J2/14209 , B41J2/1609 , B41J2/1623 , B41J2/1632 , B41J2202/11 , F04B43/046 , H01L27/20 , H01L41/339 , H02N2/021 , Y10T156/1064 , Y10T156/1074
摘要： A micro pump member is provided, in which a plurality of cells formed in a base part are used as pressurizing chambers, and side walls forming the pressurizing chambers are constructed by piezoelectric/electrostrictive elements. The volume of the pressurizing chambers is changed by the displacement of the piezoelectric/electrostrictive elements to produce a pressure in the pressurizing chambers. The pressurizing chambers are formed independent of adjacent pressurizing chambers. Activation can be carried out by applying a driving electric field having a high field strength to the pressurizing chambers, so that a greater displacement and a higher response can be obtained with a smaller field strength.
摘要翻译： 提供了一种微型泵构件，其中形成在基部中的多个单元被用作加压室，并且形成加压室的侧壁由压电/电致伸缩元件构成。 通过压电/电致伸缩元件的位移改变加压室的体积，以在加压室中产生压力。 加压室独立于相邻的加压室形成。 可以通过向加压室施加具有高场强的驱动电场来进行激活，从而可以以更小的场强获得更大的位移和更高的响应。
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公开(公告)号：US20050273990A1
公开(公告)日：2005-12-15
申请号：US11158725
申请日：2005-06-22
IPC分类号： B41J2/14 , B41J2/16 , H01L41/083 , H01L41/22 , H01L41/339 , H01L41/39 , H04R17/00
CPC分类号： H01L41/083 , B41J2/14274 , B41J2/1612 , B41J2/1632 , B41J2/1637 , H01L27/20 , H01L41/273 , H01L41/339 , Y10T29/417 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49126
摘要： A piezoelectric actuator includes comb teeth-shaped piezoelectric actuators, each comprising plural piezoelectric layers. A side surface of each tooth is fired. Actuators are made by (1) preparing a plurality of piezoelectric material green sheets on which electrode films are formed and forming slits on a first green sheet using a punch and a die, (2) pulling up the first green sheet using a stripper, (3) pulling up a top portion of the punch slightly from the lowest portion of the pulled up first green sheet, (4) forming second slits in a second green sheet by the punch, (5) pulling up the second green sheet jointly with the first green sheet, and (6) pulling up the top portion of the punch slightly from the lowest portion of the pulled up second green sheet, and thereafter laminating green sheets by repeating steps (4) through (6). The layers can thereafter be fired.
摘要翻译： 压电致动器包括梳齿状压电致动器，每个包括多个压电层。 每个牙齿的侧面被烧。 致动器由（1）制备多个压电材料生片，其上形成电极膜并使用冲头和模具在第一生片上形成狭缝，（2）使用剥离器拉起第一生片; 3）从上拉的第一生坯的最下部稍微拉起冲头的上部，（4）通过冲头在第二生坯中形成第二狭缝，（5）将第二生片与 第一生片，和（6）从拉起的第二生片的最下部稍微拉起冲头的顶部部分，然后通过重复步骤（4）至（6）将生片层压。 之后可以点燃这些层。
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9.发明授权公开(公告)号：US06943483B2
公开(公告)日：2005-09-13
申请号：US10651769
申请日：2003-08-29
IPC分类号： B41J2/14 , B41J2/16 , H01L41/083 , H01L41/22 , H01L41/339 , H01L41/39
CPC分类号： H01L41/083 , B41J2/14274 , B41J2/1612 , B41J2/1632 , B41J2/1637 , H01L27/20 , H01L41/273 , H01L41/339 , Y10T29/417 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49126
摘要： A piezoelectric actuator includes comb teeth-shaped piezoelectric actuators, each comprising plural piezoelectric layers. A side surface of each tooth is fired. Actuators are made by (1) preparing a plurality of piezoelectric material green sheets on which electrode films are formed and forming slits on a first green sheet using a punch and a die, (2) pulling up the first green sheet using a stripper, (3) pulling up a top portion of the punch slightly from the lowest portion of the pulled up first green sheet, (4) forming second slits in a second green sheet by the punch, (5) pulling up the second green sheet jointly with the first green sheet, and (6) pulling up the top portion of the punch slightly from the lowest portion of the pulled up second green sheet, and thereafter laminating green sheets by repeating steps (4) through (6). The layers can thereafter be fired.
摘要翻译： 压电致动器包括梳齿状压电致动器，每个包括多个压电层。 每个牙齿的侧面被烧。 致动器由（1）制备多个压电材料生片，其上形成电极膜并使用冲头和模具在第一生片上形成狭缝，（2）使用剥离器拉起第一生片; 3）从上拉的第一生坯的最下部稍微拉起冲头的上部，（4）通过冲头在第二生坯中形成第二狭缝，（5）将第二生片与 第一生片，和（6）从拉起的第二生片的最下部稍微拉起冲头的顶部部分，然后通过重复步骤（4）至（6）将生片层压。 之后可以点燃这些层。
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公开(公告)号：US06507682B2
公开(公告)日：2003-01-14
申请号：US09915234
申请日：2001-07-25
IPC分类号： G02B626
CPC分类号： B41J2/1609 , B41J2/1623 , B41J2/1632 , B41J2202/11 , F04B43/046 , G02B6/3522 , G02B6/3538 , G02B6/3546 , G02B6/357 , G02B6/3572 , G02B6/3578 , G02B6/3582 , G02B6/3596 , Y10T29/49616
摘要： An optical switch disposed in intermediate positions of optical paths to define a channel of a light signal constitutes a cell member in whose interior cells are formed and a waveguide member having fine slits; and a gas is filled in cells of which side walls are formed by piezoelectric/electrostrictive elements or antiferroelectric elements, a liquid is filled in the fine slits, and the cells and the fine slits are communicated to each other via a communicating hole; optical waveguides intersect at the fine slits, and the cells are disposed at the crossing locations, and said side walls are expanded/constricted by applying an electric field to the piezoelectric/electrostrictive elements or antiferroelectric elements which form the side walls of the cells, and a part of the gas stored in each cell is ejected at a corresponding intersection area from said communicating hole into the corresponding fine slit.
摘要翻译： 设置在光路的中间位置以限定光信号的通道的光开关构成其内部单元形成的单元构件和具有细缝隙的波导构件; 并且在压电/电致伸缩元件或反铁电元件形成侧壁的单元中填充气体，在细狭缝中填充液体，并且电池和细狭缝经由连通孔彼此连通; 光波导在细缝处相交，并且电池设置在交叉位置处，并且通过向形成电池侧壁的压电/电致伸缩元件或反铁电元件施加电场而使所述侧壁膨胀/收缩，以及 存储在每个单元中的气体的一部分在与所述连通孔对应的交叉区域中喷射到相应的细缝中。
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