-
公开(公告)号：US08126167B2
公开(公告)日：2012-02-28
申请号：US11691943
申请日：2007-03-27
IPC分类号： H04R25/00
CPC分类号： H04R19/04 , H04R19/005 , H04R31/00
摘要： The present invention provides a condenser microphone, in which, with a simple manufacturing process, vibration characteristics of a diaphragm are improved, and a parasitic capacitance occurring between the diaphragm and a back plate is reduced, thus improving sensitivity. Specifically, the diaphragm having a gear-like shape including a center portion and a plurality of arms and the back plate having a gear-like shape including a center portion and a plurality of arms are positioned opposite to each other above a substrate, wherein the arms of the diaphragm and the arms of the back plate are not positioned opposite to each other. Alternatively, it is possible to independently support the diaphragm and the back plate above the substrate. Furthermore, it is possible to support the back plate above the substrate by means of a plurality of supports inserted into a plurality of holes formed in the center portion of the diaphragm.
摘要翻译： 本发明提供了一种电容麦克风，其中通过简单的制造工艺，提高了隔膜的振动特性，并且减小了在隔膜和背板之间产生的寄生电容，从而提高了灵敏度。 具体而言，具有中央部和多个臂的齿轮状的隔膜和具有中心部和多个臂的齿轮状的背板位于基板的上方相对的位置， 隔膜的臂和背板的臂不彼此相对定位。 或者，可以独立地支撑基板上方的隔膜和背板。 此外，可以通过插入形成在隔膜的中心部分中的多个孔中的多个支撑件来将基板支撑在基板上。
-
公开(公告)号：US08059842B2
公开(公告)日：2011-11-15
申请号：US11470991
申请日：2006-09-07
申请人： Yukitoshi Suzuki , Tamito Suzuki
发明人： Yukitoshi Suzuki , Tamito Suzuki
IPC分类号： H04R25/00
CPC分类号： H04R19/04 , H04R19/005
摘要： A capacitor microphone is constituted by a plate having a fixed electrode, a diaphragm including a center portion and at least one near-end portion that is fixed to the outer periphery, in which the center portion having a vibrating electrode, which is positioned relative to the fixed electrode and which vibrates in response to sound waves, is increased in rigidity in comparison with the near-end portion; and a spacer that is fixed to the plate and the near-end portion of the diaphragm and that has an air gap formed between the plate and the diaphragm. Alternatively, a diaphragm electrode is horizontally supported by extension arms extended from a circular plate thereof and is vertically held in a hanging state being apart from a fixed electrode with a controlled distance therebetween.
摘要翻译： 电容麦克风由具有固定电极的板，包括中心部分的膜片和固定在外周上的至少一个近端部分构成，其中具有振动电极的中心部分相对于 固定电极响应于声波振动，与近端部分相比刚性增加; 以及固定到隔膜的板和近端部分并且在板和隔膜之间形成气隙的间隔件。 或者，隔膜电极由从其圆形板延伸的延伸臂水平地支撑，并且垂直地保持在与固定电极分开的悬挂状态，并且其间具有受控的距离。
-
公开(公告)号：US20090200620A1
公开(公告)日：2009-08-13
申请号：US12317692
申请日：2008-12-23
申请人： Masayoshi Omura , Tamito Suzuki , Yukitoshi Suzuki
发明人： Masayoshi Omura , Tamito Suzuki , Yukitoshi Suzuki
CPC分类号： H01L29/84 , B81B3/0021 , B81B2201/0257 , B81B2203/0127 , B81B2203/04
摘要： An MEMS transducer is constituted of a diaphragm, a plate, a support structure for supporting the diaphragm and the plate with a gap layer surrounded by an interior wall, an electrode film (e.g. a pad conductive film) for covering a contact hole formed in the support structure, and a protective film (e.g. a pad protective film) which is formed on the support structure externally of the interior wall so as to cover the side surface of the electrode film having low chemical stability. The protective film is formed in the limited area including a part of the surface of the electrode film except for its center portion and the surrounding area of the electrode film. This allows the protective film to use materials having high membrane stress such as silicon nitride or silicon nitride oxide.
摘要翻译： MEMS换能器由隔膜，板，用于支撑隔膜的支撑结构和具有被内壁包围的间隙层的板构成，电极膜（例如，焊盘导电膜），用于覆盖形成在隔膜中的接触孔 支撑结构，以及形成在内壁外部的支撑结构上的保护膜（例如垫保护膜），以覆盖具有低化学稳定性的电极膜的侧表面。 保护膜形成在电极膜的除了中心部分和电极膜的周围区域之外的一部分表面的有限区域中。 这使得保护膜使用具有高膜应力的材料，例如氮化硅或氮氧化硅。
-
公开(公告)号：US20090190782A1
公开(公告)日：2009-07-30
申请号：US12284776
申请日：2008-09-25
IPC分类号： H04R11/04
CPC分类号： H04R19/005 , B81B3/0008 , B81B2201/0257 , H04R1/04 , H04R3/06 , H04R7/04 , H04R7/20 , H04R19/04 , H04R31/00 , H04R2307/201 , H04R2307/207
摘要： A vibration transducer includes a substrate, a diaphragm formed using deposited films having conductive property, which has a plurality of arms extended from the center portion in a radial direction, a plate formed using deposited films having conductive property, and a plurality of diaphragm supports formed using deposited films, which join the arms so as to support the diaphragm above the substrate with a prescribed gap therebetween. A plurality of bumps is formed in the arms of the diaphragm so as to prevent the diaphragm from being attached to the substrate or the plate. When the diaphragm vibrates relative to the plate, an electrostatic capacitance therebetween is varied so as to detect variations of pressure applied thereto. In addition, a plurality of diaphragm holes is appropriately aligned in the arms of the diaphragm so as to improve the sensitivity while avoiding the occurrence of adherence.
摘要翻译： 振动传感器包括：基板，使用具有导电性的沉积膜形成的隔膜，其具有从半径方向中央部延伸的多个臂，使用具有导电性的沉积膜形成的板，以及形成的多个隔膜支架 使用沉积膜，其连接臂，以便在基板之间以规定的间隙支撑隔膜。 在隔膜的臂上形成多个凸块，以防止隔膜附着在基板或板上。 当隔膜相对于板振动时，它们之间的静电电容变化，以便检测施加到其上的压力的变化。 此外，多个隔膜孔适当地对准在隔膜的臂中，以便提高灵敏度，同时避免粘附的发生。
-
公开(公告)号：US20070058825A1
公开(公告)日：2007-03-15
申请号：US11470991
申请日：2006-09-07
申请人： Yukitoshi Suzuki , Tamito Suzuki
发明人： Yukitoshi Suzuki , Tamito Suzuki
IPC分类号： H04R25/00
CPC分类号： H04R19/04 , H04R19/005
摘要： A capacitor microphone is constituted by a plate having a fixed electrode, a diaphragm including a center portion and at least one near-end portion that is fixed to the outer periphery, in which the center portion having a vibrating electrode, which is positioned relative to the fixed electrode and which vibrates in response to sound waves, is increased in rigidity in comparison with the near-end portion; and a spacer that is fixed to the plate and the near-end portion of the diaphragm and that has an air gap formed between the plate and the diaphragm. Alternatively, a diaphragm electrode is horizontally supported by extension arms extended from a circular plate thereof and is vertically held in a hanging state being apart from a fixed electrode with a controlled distance therebetween.
摘要翻译： 电容麦克风由具有固定电极的板，包括中心部分的膜片和固定在外周上的至少一个近端部分构成，其中具有振动电极的中心部分相对于 固定电极响应于声波振动，与近端部分相比刚性增加; 以及固定到隔膜的板和近端部分并且在板和隔膜之间形成气隙的间隔件。 或者，隔膜电极由从其圆形板延伸的延伸臂水平地支撑，并且垂直地保持在与固定电极分开的悬挂状态，并且其间具有受控的距离。
-
公开(公告)号：US08416970B2
公开(公告)日：2013-04-09
申请号：US13245696
申请日：2011-09-26
IPC分类号： H04R25/00
CPC分类号： H04R19/005 , B81B2201/0257 , B81C1/00666 , H04R7/26 , H04R31/00 , H04R2201/003 , H04R2201/401
摘要： A plurality of structures of condenser microphones is fabricated in a single condenser microphone array chip. The condenser microphone array chip includes a substrate having a plurality of openings serving as air cavities, a first insulating layer formed in the outer periphery of the openings, a first electrode layer stretched over each of the openings, a second insulating layer formed above the first electrode layer in the outer periphery of the openings, a second electrode layer formed above the second insulating layer relative to the first electrode layer via an air gap therebetween. The structures are connected via a plurality of bridges and separated via a plurality of channels therebetween. The channels circumvent the bridges so that at least the second insulating layer is partially removed from the channels. The bridges are formed using the second electrode layer serving as wiring for electrically connecting the structures of condenser microphones.
摘要翻译： 在单个电容式麦克风阵列芯片中制造多个电容式麦克风的结构。 电容麦克风阵列芯片包括具有多个用作空气腔的开口的基板，形成在开口外周的第一绝缘层，在每个开口上拉伸的第一电极层，形成在第一绝缘层上的第二绝缘层 电极层，第二电极层，通过其间的气隙相对于第一电极层形成在第二绝缘层的上方。 这些结构经由多个桥连接，并通过它们之间的多个通道分开。 通道绕过桥，使得至少第二绝缘层部分地从通道移除。 使用用作电连接电容式麦克风的结构的布线的第二电极层形成桥。
-
公开(公告)号：US20120082325A1
公开(公告)日：2012-04-05
申请号：US13245696
申请日：2011-09-26
IPC分类号： H04R1/00
CPC分类号： H04R19/005 , B81B2201/0257 , B81C1/00666 , H04R7/26 , H04R31/00 , H04R2201/003 , H04R2201/401
摘要： A plurality of structures of condenser microphones is fabricated in a single condenser microphone array chip. The condenser microphone array chip includes a substrate having a plurality of openings serving as air cavities, a first insulating layer formed in the outer periphery of the openings, a first electrode layer stretched over each of the openings, a second insulating layer formed above the first electrode layer in the outer periphery of the openings, a second electrode layer formed above the second insulating layer relative to the first electrode layer via an air gap therebetween. The structures are connected via a plurality of bridges and separated via a plurality of channels therebetween. The channels circumvent the bridges so that at least the second insulating layer is partially removed from the channels. The bridges are formed using the second electrode layer serving as wiring for electrically connecting the structures of condenser microphones.
摘要翻译： 在单个电容式麦克风阵列芯片中制造多个电容式麦克风的结构。 电容麦克风阵列芯片包括具有多个用作空气腔的开口的基板，形成在开口外周的第一绝缘层，在每个开口上拉伸的第一电极层，形成在第一绝缘层上的第二绝缘层 电极层，第二电极层，通过其间的气隙相对于第一电极层形成在第二绝缘层的上方。 这些结构经由多个桥连接，并通过它们之间的多个通道分开。 通道绕过桥，使得至少第二绝缘层部分地从通道移除。 使用用作电连接电容式麦克风的结构的布线的第二电极层形成桥。
-
公开(公告)号：US07888754B2
公开(公告)日：2011-02-15
申请号：US12317692
申请日：2008-12-23
申请人： Masayoshi Omura , Tamito Suzuki , Yukitoshi Suzuki
发明人： Masayoshi Omura , Tamito Suzuki , Yukitoshi Suzuki
IPC分类号： H01L29/84
CPC分类号： H01L29/84 , B81B3/0021 , B81B2201/0257 , B81B2203/0127 , B81B2203/04
摘要： An MEMS transducer is constituted of a diaphragm, a plate, a support structure for supporting the diaphragm and the plate with a gap layer surrounded by an interior wall, an electrode film (e.g. a pad conductive film) for covering a contact hole formed in the support structure, and a protective film (e.g. a pad protective film) which is formed on the support structure externally of the interior wall so as to cover the side surface of the electrode film having low chemical stability. The protective film is formed in the limited area including a part of the surface of the electrode film except for its center portion and the surrounding area of the electrode film. This allows the protective film to use materials having high membrane stress such as silicon nitride or silicon nitride oxide.
摘要翻译： MEMS换能器由隔膜，板，用于支撑隔膜的支撑结构和具有被内壁包围的间隙层的板构成，电极膜（例如，焊盘导电膜），用于覆盖形成在隔膜中的接触孔 支撑结构，以及形成在内壁外部的支撑结构上的保护膜（例如垫保护膜），以覆盖具有低化学稳定性的电极膜的侧表面。 保护膜形成在电极膜的除了中心部分和电极膜的周围区域之外的一部分表面的有限区域中。 这使得保护膜使用具有高膜应力的材料，例如氮化硅或氮氧化硅。
-
公开(公告)号：US20090136064A1
公开(公告)日：2009-05-28
申请号：US12284935
申请日：2008-09-26
申请人： Tamito Suzuki , Seiji Hirade , Yukitoshi Suzuki
发明人： Tamito Suzuki , Seiji Hirade , Yukitoshi Suzuki
IPC分类号： H04R25/00
摘要： A vibration transducer is constituted of a substrate, a diaphragm having a conductive property, a plate having a conductive property, and a plurality of first spacers having pillar shapes which are formed using a deposited film having an insulating property joining the plate so as to support the plate relative to the diaphragm with a gap therebetween. It is possible to introduce a plurality of second spacers having pillar shapes support the plate relative to the substrate with a gap therebetween, and/or a plurality of third spacers having pillar shapes which support the diaphragm relative to the substrate with a gap therebetween. When the diaphragm vibrates relative to the plate, an electrostatic capacitance formed therebetween is varied so as to detect vibration with a high sensitivity. The diaphragm has a plurality of arms whose outlines are curved so that the intermediate regions thereof are reduced in width.
摘要翻译： 振动传感器由基板，具有导电性的隔膜，具有导电性的板构成，多个具有柱形状的第一间隔件，该第一间隔件具有使用具有连接板的绝缘性的沉积膜形成，以便支撑 该板相对于隔膜具有间隙。 可以引入具有支柱形状的多个第二间隔件，其间具有间隙地相对于基板支撑板，和/或多个第三间隔件，其具有支撑隔膜相对于基板的间隔的间隔的柱形。 当隔膜相对于板振动时，其间形成的静电电容变化，以便以高灵敏度检测振动。 隔膜具有多个臂，其轮廓弯曲，使得其中间区域的宽度减小。
-
公开(公告)号：US20070286438A1
公开(公告)日：2007-12-13
申请号：US11691943
申请日：2007-03-27
IPC分类号： H04R19/04
CPC分类号： H04R19/04 , H04R19/005 , H04R31/00
摘要： The present invention provides a condenser microphone, in which, with a simple manufacturing process, vibration characteristics of a diaphragm are improved, and a parasitic capacitance occurring between the diaphragm and a back plate is reduced, thus improving sensitivity. Specifically, the diaphragm having a gear-like shape including a center portion and a plurality of arms and the back plate having a gear-like shape including a center portion and a plurality of arms are positioned opposite to each other above a substrate, wherein the arms of the diaphragm and the arms of the back plate are not positioned opposite to each other. Alternatively, it is possible to independently support the diaphragm and the back plate above the substrate. Furthermore, it is possible to support the back plate above the substrate by means of a plurality of supports inserted into a plurality of holes formed in the center portion of the diaphragm.
摘要翻译： 本发明提供了一种电容麦克风，其中通过简单的制造工艺，提高了隔膜的振动特性，并且减小了在隔膜和背板之间产生的寄生电容，从而提高了灵敏度。 具体而言，具有中央部和多个臂的齿轮状的隔膜和具有中心部和多个臂的齿轮状的背板位于基板的上方相对的位置， 隔膜的臂和背板的臂不彼此相对定位。 或者，可以独立地支撑基板上方的隔膜和背板。 此外，可以通过插入形成在隔膜的中心部分中的多个孔中的多个支撑件来将基板支撑在基板上。
-
-
-
-
-
-
-
-
-
搜索结果
21 条记录 (耗时 0.018 秒)