公开(公告)号：US08683420B2

公开(公告)日：2014-03-25

申请号：US12948257

申请日：2010-11-17

申请人： Yun Wang ,  Tony P. Chiang ,  Ryan Clarke ,  Chi-I Lang ,  Yoram Schwarz

发明人： Yun Wang ,  Tony P. Chiang ,  Ryan Clarke ,  Chi-I Lang ,  Yoram Schwarz

IPC分类号： G06F17/50

CPC分类号： H01L22/14

摘要： A method and system of improved reliability testing includes providing a first substrate and a second substrate, each substrate comprising only a first metallization layer; processing regions on a first substrate by combinatorially varying at least one of materials, unit processes, and process sequences; performing a first reliability test on the processed regions on the first substrate to generate first results; processing regions on a second substrate in a combinatorial manner by varying at least one of materials, unit processes, and process sequences based on the first results of the first reliability test; performing a second reliability test on the processed regions on the second substrate to generate second results; and determining whether the first substrate and the second substrate meet a predetermined quality threshold based on the second results.

摘要翻译： 改进的可靠性测试的方法和系统包括提供第一衬底和第二衬底，每个衬底仅包括第一金属化层; 通过组合地改变材料，单元过程和工艺顺序中的至少一个来处理第一衬底上的处理区域; 对所述第一基板上的所述经处理区域进行第一可靠性测试以产生第一结果; 基于第一可靠性测试的第一结果，通过改变材料，单元过程和过程序列中的至少一个来以组合的方式处理第二基板上的区域; 对所述第二基板上的所述经处理区域进行第二可靠性测试以产生第二结果; 以及基于所述第二结果来确定所述第一基板和所述第二基板是否满足预定质量阈值。

公开(公告)号：US20120136601A1

公开(公告)日：2012-05-31

申请号：US12957354

申请日：2010-11-30

申请人： Charlene Chen ,  Tony P. Chiang ,  Chi-I Lang ,  Yun Wang

发明人： Charlene Chen ,  Tony P. Chiang ,  Chi-I Lang ,  Yun Wang

IPC分类号： G06F19/00 ,  H01L21/66

CPC分类号： H01L22/20 ,  G01N21/59 ,  H01L21/02491 ,  H01L21/02527 ,  H01L21/0262 ,  H01L22/12 ,  H01L29/1606

摘要： A method and system includes a first substrate and a second substrate, each substrate comprising a predetermined baseline transmittance value at a predetermine wavelength of light, processing regions on the first substrate by combinatorially varying at least one of materials, process conditions, unit processes, and process sequences associated with the graphene production, performing a first characterization test on the processed regions on the first substrate to generate first results, processing regions on a second substrate in a combinatorial manner by varying at least one of materials, process conditions, unit processes, and process sequences associated with the graphene production based on the first results of the first characterization test, performing a second characterization test on the processed regions on the second substrate to generate second results, and determining whether at least one of the first substrate and the second substrate meet a predetermined quality threshold based on the second results.

摘要翻译： 一种方法和系统包括第一衬底和第二衬底，每个衬底在光的预定波长处包括预定的基线透射率值，第一衬底上的处理区域通过组合地改变材料，工艺条件，单元工艺中的至少一个和 与所述石墨烯生产相关联的工艺序列，对所述第一衬底上的所述经处理区域执行第一表征测试以产生第一结果，通过改变材料，工艺条件，单位过程中的至少一种以组合方式处理第二衬底上的区域， 以及基于第一表征测试的第一结果与石墨烯生产相关联的处理顺序，对第二衬底上的经处理区域执行第二表征测试以产生第二结果，以及确定第一衬底和第二衬底中的至少一个 基板满足预定的质量阈值 基于第二个结果。

公开(公告)号：US08580584B2

公开(公告)日：2013-11-12

申请号：US13624102

申请日：2012-09-21

申请人： Yun Wang ,  Tony P. Chiang ,  Chi-I Lang

发明人： Yun Wang ,  Tony P. Chiang ,  Chi-I Lang

IPC分类号： H01L21/00

CPC分类号： H01L51/0031 ,  H01L51/56

摘要： A system and method of increasing productivity of OLED material screening includes providing a substrate that includes an organic semiconductor, processing regions on the substrate by combinatorially varying parameters associated with the OLED device production on the substrate, performing a first characterization test on the processed regions on the substrate to generate first results, processing regions on the substrate in a combinatorial manner by varying parameters associated with the OLED device production on the substrate based on the first results of the first characterization test, performing a second characterization test on the processed regions on the substrate to generate second results, and determining whether the substrate meets a predetermined quality threshold based on the second results.

摘要翻译： 提高OLED材料筛选的生产率的系统和方法包括提供包括有机半导体的衬底，通过组合地改变与衬底上的OLED器件生产相关的参数来在衬底上处理区域，对处理的区域进行第一表征测试 所述衬底产生第一结果，基于所述第一表征测试的第一结果，通过改变与所述衬底上的OLED器件生产相关联的参数，以组合方式处理所述衬底上的区域，对所述衬底上的所述处理区域进行第二特性测试 衬底以产生第二结果，以及基于第二结果确定衬底是否满足预定质量阈值。

公开(公告)号：US08370096B2

公开(公告)日：2013-02-05

申请号：US12957354

申请日：2010-11-30

申请人： Charlene Chen ,  Tony P. Chiang ,  Chi-I Lang ,  Yun Wang

发明人： Charlene Chen ,  Tony P. Chiang ,  Chi-I Lang ,  Yun Wang

IPC分类号： G06F19/00

CPC分类号： H01L22/20 ,  G01N21/59 ,  H01L21/02491 ,  H01L21/02527 ,  H01L21/0262 ,  H01L22/12 ,  H01L29/1606

摘要： A method and system includes a first substrate and a second substrate, each substrate comprising a predetermined baseline transmittance value at a predetermine wavelength of light, processing regions on the first substrate by combinatorially varying at least one of materials, process conditions, unit processes, and process sequences associated with the graphene production, performing a first characterization test on the processed regions on the first substrate to generate first results, processing regions on a second substrate in a combinatorial manner by varying at least one of materials, process conditions, unit processes, and process sequences associated with the graphene production based on the first results of the first characterization test, performing a second characterization test on the processed regions on the second substrate to generate second results, and determining whether at least one of the first substrate and the second substrate meet a predetermined quality threshold based on the second results.

公开(公告)号：US20130023066A1

公开(公告)日：2013-01-24

申请号：US13624102

申请日：2012-09-21

申请人： Yun Wang ,  Tony P. Chiang ,  Chi-I Lang

发明人： Yun Wang ,  Tony P. Chiang ,  Chi-I Lang

IPC分类号： H01L21/66

CPC分类号： H01L51/0031 ,  H01L51/56

摘要： A system and method of increasing productivity of OLED material screening includes providing a substrate that includes an organic semiconductor, processing regions on the substrate by combinatorially varying parameters associated with the OLED device production on the substrate, performing a first characterization test on the processed regions on the substrate to generate first results, processing regions on the substrate in a combinatorial manner by varying parameters associated with the OLED device production on the substrate based on the first results of the first characterization test, performing a second characterization test on the processed regions on the substrate to generate second results, and determining whether the substrate meets a predetermined quality threshold based on the second results.

摘要翻译： 提高OLED材料筛选的生产率的系统和方法包括提供包括有机半导体的衬底，通过组合地改变与衬底上的OLED器件生产相关的参数来在衬底上处理区域，对处理的区域进行第一表征测试 所述衬底产生第一结果，基于所述第一表征测试的第一结果，通过改变与所述衬底上的OLED器件生产相关联的参数，以组合方式处理所述衬底上的区域，对所述衬底上的所述处理区域进行第二特性测试 衬底以产生第二结果，以及基于第二结果确定衬底是否满足预定质量阈值。

公开(公告)号：US08298837B2

公开(公告)日：2012-10-30

申请号：US13072083

申请日：2011-03-25

申请人： Yun Wang ,  Tony P. Chiang ,  Chi-I Lang

发明人： Yun Wang ,  Tony P. Chiang ,  Chi-I Lang

IPC分类号： H01L21/00

CPC分类号： H01L51/0031 ,  H01L51/56

摘要： A system and method of increasing productivity of OLED material screening includes providing a substrate that includes an organic semiconductor, processing regions on the substrate by combinatorially varying parameters associated with the OLED device production on the substrate, performing a first characterization test on the processed regions on the substrate to generate first results, processing regions on the substrate in a combinatorial manner by varying parameters associated with the OLED device production on the substrate based on the first results of the first characterization test, performing a second characterization test on the processed regions on the substrate to generate second results, and determining whether the substrate meets a predetermined quality threshold based on the second results.

摘要翻译： 提高OLED材料筛选的生产率的系统和方法包括提供包括有机半导体的衬底，通过组合地改变与衬底上的OLED器件生产相关的参数来在衬底上处理区域，对处理的区域进行第一表征测试 所述衬底产生第一结果，基于所述第一表征测试的第一结果，通过改变与所述衬底上的OLED器件生产相关联的参数，以组合方式处理所述衬底上的区域，对所述衬底上的所述处理区域进行第二特性测试 衬底以产生第二结果，以及基于第二结果确定衬底是否满足预定质量阈值。

公开(公告)号：US20120119768A1

公开(公告)日：2012-05-17

申请号：US12948257

申请日：2010-11-17

申请人： Yun Wang ,  Tony P. Chiang ,  Ryan Clarke ,  Chi-I Lang ,  Yoram Schwarz

发明人： Yun Wang ,  Tony P. Chiang ,  Ryan Clarke ,  Chi-I Lang ,  Yoram Schwarz

IPC分类号： G01R31/3187 ,  H01L21/66

CPC分类号： H01L22/14

摘要： A method and system of improved reliability testing includes providing a first substrate and a second substrate, each substrate comprising only a first metallization layer; processing regions on a first substrate by combinatorially varying at least one of materials, unit processes, and process sequences; performing a first reliability test on the processed regions on the first substrate to generate first results; processing regions on a second substrate in a combinatorial manner by varying at least one of materials, unit processes, and process sequences based on the first results of the first reliability test; performing a second reliability test on the processed regions on the second substrate to generate second results; and determining whether the first substrate and the second substrate meet a predetermined quality threshold based on the second results.

摘要翻译： 改进的可靠性测试的方法和系统包括提供第一衬底和第二衬底，每个衬底仅包括第一金属化层; 通过组合地改变材料，单元过程和工艺顺序中的至少一个来处理第一衬底上的处理区域; 对所述第一基板上的所述经处理区域进行第一可靠性测试以产生第一结果; 基于第一可靠性测试的第一结果，通过改变材料，单元过程和过程序列中的至少一个来以组合的方式处理第二基板上的区域; 对所述第二基板上的所述经处理区域进行第二可靠性测试以产生第二结果; 以及基于所述第二结果来确定所述第一基板和所述第二基板是否满足预定质量阈值。

公开(公告)号：US20110279810A1

公开(公告)日：2011-11-17

申请号：US12952855

申请日：2010-11-23

申请人： Yun Wang ,  Tony P. Chiang ,  Chi-I Lang

发明人： Yun Wang ,  Tony P. Chiang ,  Chi-I Lang

IPC分类号： G01N21/00

CPC分类号： G01R31/26 ,  G01N21/55 ,  G01R31/2607 ,  H02S50/10

摘要： Simultaneous measurement of an internal quantum efficiency and an external quantum efficiency of a solar cell using an emitter that emits light; a three-way beam splitter that splits the light into solar cell light and reference light, wherein the solar cell light strikes the solar cell; a reference detector that detects the reference light; a reflectance detector that detects reflectance light, wherein the reflectance light comprises a portion of the solar cell light reflected off the solar cell; a source meter operatively coupled to the solar cell; a multiplexer operatively coupled to the solar cell, the reference detector, and the reflectance detector; and a computing device that simultaneously computes the internal quantum efficiency and the external quantum efficiency of the solar cell.

摘要翻译： 使用发射光的同时测量太阳能电池的内部量子效率和外部量子效率; 三光束分离器，其将光分解成太阳能电池光和参考光，其中太阳能电池光照射到太阳能电池; 检测参考光的参考检测器; 反射光检测器，其检测反射光，其中所述反射光包括从太阳能电池反射的太阳能电池光的一部分; 可操作地耦合到太阳能电池的源计量器; 可操作地耦合到太阳能电池，参考检测器和反射检测器的多路复用器; 以及同时计算太阳能电池的内部量子效率和外部量子效率的计算装置。

公开(公告)号：US08836365B2

公开(公告)日：2014-09-16

申请号：US12957346

申请日：2010-11-30

申请人： Yun Wang ,  Tony P. Chiang ,  Chi-I Lang

发明人： Yun Wang ,  Tony P. Chiang ,  Chi-I Lang

IPC分类号： G01R31/02 ,  G01R31/28

CPC分类号： G01R31/2858

摘要： An apparatus and method for testing electromigration in semiconductor devices includes providing an electromigration test structure, where the electromigration test structure includes a first metal line; a metal bridge operatively coupled to the first metal line; a second metal line operatively coupled to the metal bridge; a barrier layer surrounding the electromigration test structure; current contact pads; and voltage contact pads. The current contact pads are connected to a current source and the voltage contact pads are connected to a voltage source. The barrier layer is exposed to the elevated current density as current travels from the first metal line across the barrier layer through the metal bridge to the second metal line.

摘要翻译： 一种用于测试半导体器件中的电迁移的装置和方法，包括提供电迁移测试结构，其中电迁移测试结构包括第一金属线; 操作地连接到第一金属线的金属桥; 可操作地耦合到所述金属桥的第二金属线; 围绕电迁移测试结构的阻挡层; 当前接触垫; 和电压接触垫。 当前接触焊盘连接到电流源，并且电压接触焊盘连接到电压源。 当电流从第一金属线穿过阻挡层穿过金属桥到第二金属线时，阻挡层暴露于升高的电流密度。

公开(公告)号：US08432177B2

公开(公告)日：2013-04-30

申请号：US12952983

申请日：2010-11-23

申请人： Yun Wang ,  Tony P. Chiang ,  Chi-I Lang

发明人： Yun Wang ,  Tony P. Chiang ,  Chi-I Lang

IPC分类号： G01R31/26

CPC分类号： G01R31/26 ,  G01N21/55 ,  G01R31/2607 ,  H02S50/10

摘要： Measuring current-voltage (I-V) characteristics of a solar cell using a lamp that emits light, a substrate that includes a plurality of solar cells, a positive electrode attached to the solar cells, and a negative electrode peripherally deposited around each of the solar cells and connected to a common ground, an articulation platform coupled to the substrate, a multi-probe switching matrix or a Z-stage device, a programmable switch box coupled to the multi-probe switching matrix or Z-stage device and selectively articulating the probes by raising the probes until in contact with at least one of the positive electrode and the negative electrode and lowering the probes until contact is lost with at least one of the positive electrode and the negative electrode, a source meter coupled to the programmable switch box and measuring the I-V characteristics of the substrate.