公开(公告)号：US20130293880A1

公开(公告)日：2013-11-07

申请号：US13882547

申请日：2011-11-01

申请人： Toshifumi Honda ,  Yuta Urano ,  Yukihiro Shibata

发明人： Toshifumi Honda ,  Yuta Urano ,  Yukihiro Shibata

IPC分类号： G01N21/95

CPC分类号： G01N21/9501

摘要： In a defect inspection method and an apparatus of the same, for enabling to conduct an inspection of fine defects without applying thermal damages on a sample, the following steps are conducted: mounting a sample on a rotatable table to rotate; irradiating a pulse laser emitting from a laser light source upon the sample rotating; detecting a reflected light from the sample, upon which the pulse laser is irradiated; detecting the reflected light from the sample detected; and detecting a defect on the sample through processing of a signal obtained through the detection, wherein irradiation of the pulse laser emitting from the laser light source upon the sample rotating is conducted by dividing the one pulse emitted from the laser light source into plural numbers of pulses, and irradiating each of the divided pulse lasers upon each of separate positions on the sample, respectively.

摘要翻译： 在缺陷检查方法及其装置中，为了能够在对样品施加热损伤的情况下进行细小缺陷的检查，进行以下步骤：将样品安装在旋转台上旋转; 照射从激光光源发射的脉冲激光器对样品旋转; 检测来自所述脉冲激光器的样品的反射光; 检测检测到的样品的反射光; 并且通过处理通过检测获得的信号来检测样本上的缺陷，其中通过将从激光光源发射的一个脉冲除以多个数量来进行从样品旋转时从激光源发射的脉冲激光的照射 脉冲，并且分别在样品上的每个分离位置上照射每个分割的脉冲激光器。

公开(公告)号：US09291574B2

公开(公告)日：2016-03-22

申请号：US14232929

申请日：2012-06-28

申请人： Shunichi Matsumoto ,  Atsushi Taniguchi ,  Toshifumi Honda ,  Yukihiro Shibata ,  Yuta Urano

发明人： Shunichi Matsumoto ,  Atsushi Taniguchi ,  Toshifumi Honda ,  Yukihiro Shibata ,  Yuta Urano

IPC分类号： G01N21/00 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66

CPC分类号： G01N21/9501 ,  G01N21/956 ,  G01N2201/126 ,  G01N2201/127 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： A defect inspection method and device for irradiating a linear region on a surface-patterned sample mounted on a table, with illumination light from an inclined direction to the sample, next detecting in each of a plurality of directions an image of the light scattered from the sample irradiated with the illumination light, then processing signals obtained by the detection of the images of the scattered light, and thereby detecting a defect present on the sample; wherein the step of detecting the scattered light image in the plural directions is performed through oval shaped lenses in which elevation angles of the optical axes thereof are different from each other, within one plane perpendicular to a plane formed by the normal to the surface of the table on which to mount the sample and the longitudinal direction of the linear region irradiated with the irradiation light.

摘要翻译： 一种缺陷检查方法和装置，用于将安装在台上的表面图案样品上的线性区域照射到具有来自倾斜方向的样品的照明光，并在多个方向上检测从所述多个方向散射的光的图像 用照射光照射的样品，然后处理通过检测散射光的图像获得的信号，从而检测样品上存在的缺陷; 其特征在于，通过椭圆形透镜，其光轴的仰角彼此不同，在垂直于由所述平面形成的法线形成的平面的一个平面内，通过椭圆形透镜来检测多个方向上的散射光图像的步骤 用于安装样品的台面和用照射光照射的线性区域的纵向方向。

公开(公告)号：US08804110B2

公开(公告)日：2014-08-12

申请号：US13703414

申请日：2011-05-20

申请人： Yuta Urano ,  Shigenobu Maruyama ,  Toshiyuki Nakao ,  Toshifumi Honda ,  Yukihiro Shibata

发明人： Yuta Urano ,  Shigenobu Maruyama ,  Toshiyuki Nakao ,  Toshifumi Honda ,  Yukihiro Shibata

IPC分类号： G01N21/00 ,  G01N21/95 ,  G01N21/94 ,  G01N21/956

CPC分类号： G01N21/94 ,  G01N21/47 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/4711 ,  G01N2021/8867 ,  G01N2021/8874 ,  G01N2201/0806 ,  G01N2201/10

摘要： Proposed is a defect inspection method whereby: illuminating light having a substantially uniform illumination intensity distribution in one direction of a sample surface irradiated on the sample surface; multiple scattered light components, which are output in multiple independent directions, are detected among the scattered light from the sample surface and multiple corresponding scattered light detection signals are obtained; at least one of the multiple scattered light detection signals is processed and the presence of defects is determined; at least one of the multiple scattered light detection signals that correspond to each of the points determined by the processing as a defect is processed and the dimensions of the defect are determined; and the position and dimensions of the defect on the sample surface, at each of the points determined as a defect, are displayed.

摘要翻译： 提出了一种缺陷检查方法，其中：照射在样品表面上的样品表面的一个方向具有基本上均匀的照明强度分布的光; 在来自样品表面的散射光中检测多个独立方向输出的多个散射光分量，并获得多个相应的散射光检测信号; 处理多个散射光检测信号中的至少一个并确定缺陷的存在; 处理与通过处理确定的每个点对应的多个散射光检测信号中的至少一个作为缺陷，并确定缺陷的尺寸; 并且显示在被确定为缺陷的每个点处的样品表面上的缺陷的位置和尺寸。

公开(公告)号：US20130301042A1

公开(公告)日：2013-11-14

申请号：US13976178

申请日：2011-10-21

申请人： Yuta Urano ,  Toshifumi Honda ,  Yukihiro Shibata

发明人： Yuta Urano ,  Toshifumi Honda ,  Yukihiro Shibata

IPC分类号： G01N21/956

CPC分类号： G01N21/956 ,  G01B11/0608 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2021/8854 ,  G01N2201/1045

摘要： A defect inspection method includes: illuminating an area on surface of a specimen as a test object under a specified illumination condition; scanning a specimen to translate and rotate the specimen; detecting scattering lights to separate each of scattering lights scattered in different directions from the illuminated area on the specimen into pixels to be detected according to a scan direction at the scanning a specimen and a direction approximately orthogonal to the scan direction; and processing to perform an addition process on each of scattering lights that are detected at the step and scatter approximately in the same direction from approximately the same area of the specimen, determine presence or absence of a defect based on scattering light treated by the addition process, and compute a size of the determined defect using at least one of the scattering lights corresponding to the determined defect.

摘要翻译： 缺陷检查方法包括：在规定的照明条件下照射作为被检体的试样表面的面积; 扫描样品以平移和旋转样品; 检测散射光，根据扫描样本的扫描方向和与扫描方向大致正交的方向，将从样本上的照射区域向不同方向散射的散射光分离成要检测的像素; 对在步骤中检测到的每个散射光进行加法处理，并且从与样本的大致相同的区域大致相同的方向散射，基于通过加法处理的散射光确定缺陷的存在或不存在 并且使用与所确定的缺陷相对应的散射光中的至少一个来计算确定的缺陷的大小。

公开(公告)号：US20130155400A1

公开(公告)日：2013-06-20

申请号：US13700520

申请日：2011-05-20

申请人： Toshiyuki Nakao ,  Junguo Xu ,  Yuki Shimizu ,  Toshihiko Nakata ,  Toshifumi Honda ,  Yukihiro Shibata ,  Yuta Urano

发明人： Toshiyuki Nakao ,  Junguo Xu ,  Yuki Shimizu ,  Toshihiko Nakata ,  Toshifumi Honda ,  Yukihiro Shibata ,  Yuta Urano

IPC分类号： G01N21/95

CPC分类号： G01N21/95 ,  G01N21/9501 ,  G01Q60/22 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： A defect inspecting method is provided which comprises a pre-scan defect inspecting process including a pre-scan irradiating step for casting irradiation light onto the surface of a sample, a pre-scan detecting step for detecting the scattered lights, and a pre-scan defect information collecting step for obtaining information on preselected defects present on the sample surface on the basis of the scattered lights; a near-field defect inspecting process including a near-field irradiating step in which the distance between the sample surface and a near-field head is adjusted so that the sample surface is irradiated, a near-field detecting step for detecting near-field light response, and a near-field defect information collecting step for obtaining information on the preselected defects on the basis of the near-field light response; and a merging process for inspecting defects present on the sample surface by merging the pieces of information on the preselected defects.

摘要翻译： 提供一种缺陷检查方法，其包括预扫描缺陷检查处理，其包括用于将照射光投射到样品表面上的预扫描照射步骤，用于检测散射光的预扫描检测步骤，以及预扫描 缺陷信息收集步骤，用于基于散射光获得在样品表面上存在的预选缺陷的信息; 包括近场照射步骤的近场缺陷检查处理，其中调整样品表面和近场磁头之间的距离以照射样品表面;近场检测步骤，用于检测近场光 响应和近场缺陷信息收集步骤，用于基于近场光响应获得关于预选缺陷的信息; 以及通过合并关于预选缺陷的信息来检查存在于样品表面上的缺陷的合并过程。

公开(公告)号：US08922764B2

公开(公告)日：2014-12-30

申请号：US13976178

申请日：2011-10-21

申请人： Yuta Urano ,  Toshifumi Honda ,  Yukihiro Shibata

发明人： Yuta Urano ,  Toshifumi Honda ,  Yukihiro Shibata

IPC分类号： G01N21/956 ,  G01N21/95 ,  G01B11/06 ,  G01N21/88

CPC分类号： G01N21/956 ,  G01B11/0608 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2021/8854 ,  G01N2201/1045

摘要： A defect inspection method includes: illuminating an area on surface of a specimen as a test object under a specified illumination condition; scanning a specimen to translate and rotate the specimen; detecting scattering lights to separate each of scattering lights scattered in different directions from the illuminated area on the specimen into pixels to be detected according to a scan direction at the scanning a specimen and a direction approximately orthogonal to the scan direction; and processing to perform an addition process on each of scattering lights that are detected at the step and scatter approximately in the same direction from approximately the same area of the specimen, determine presence or absence of a defect based on scattering light treated by the addition process, and compute a size of the determined defect using at least one of the scattering lights corresponding to the determined defect.

摘要翻译： 缺陷检查方法包括：在规定的照明条件下照射作为被检体的试样表面的面积; 扫描样品以平移和旋转样品; 检测散射光，根据扫描样本的扫描方向和与扫描方向大致正交的方向，将从样本上的照射区域向不同方向散射的散射光分离成要检测的像素; 对在步骤中检测到的每个散射光进行加法处理，并且从与样本的大致相同的区域大致相同的方向散射，基于通过加法处理的散射光确定缺陷的存在或不存在 并且使用与所确定的缺陷相对应的散射光中的至少一个来计算确定的缺陷的大小。

公开(公告)号：US20140268122A1

公开(公告)日：2014-09-18

申请号：US14232929

申请日：2012-06-28

申请人： Shunichi Matsumoto ,  Atsushi Taniguchi ,  Toshifumi Honda ,  Yukihiro Shibata ,  Yuta Urano

发明人： Shunichi Matsumoto ,  Atsushi Taniguchi ,  Toshifumi Honda ,  Yukihiro Shibata ,  Yuta Urano

IPC分类号： G01N21/95

CPC分类号： G01N21/9501 ,  G01N21/956 ,  G01N2201/126 ,  G01N2201/127 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： A defect inspection method and device for irradiating a linear region on a surface-patterned sample mounted on a planarly movable table, with illumination light from an inclined direction relative to a direction of a line normal to the sample, next detecting in each of a plurality of directions an image of the light scattered from the sample irradiated with the illumination light, then processing signals obtained by the detection of the images of the scattered light, and thereby detecting a defect present on the sample; wherein the step of detecting the scattered light image in the plural directions is performed through elliptical lenses in which elevation angles of the optical axes thereof are different from each other, within one plane perpendicular to a plane formed by the normal to the surface of the table on which to mount the sample and the longitudinal direction of the linear region irradiated with the irradiation light, the elliptical lenses being formed of circular lenses having left and right portions thereof cut.

摘要翻译： 一种用于照射安装在平面可移动台上的表面图案样品上的线性区域的缺陷检查方法和装置，其具有相对于垂直于样品的线的方向的倾斜方向的照明光，接下来在多个 指示从照射光照射的样品散射的光的图像，然后处理通过检测散射光的图像而获得的信号，从而检测样品上存在的缺陷; 其特征在于，所述检测多个方向的散射光图像的步骤是通过椭圆形透镜进行的，所述椭圆透镜在光学轴的仰角彼此不同的垂直于与所述表的表面法线形成的平面的一个平面内 在其上安装样品和用照射光照射的线性区域的纵向方向，椭圆形透镜由其左侧和右侧部分切割的圆形透镜形成。

公开(公告)号：US20130141715A1

公开(公告)日：2013-06-06

申请号：US13703414

申请日：2011-05-20

申请人： Yuta Urano ,  Shigenobu Maruyama ,  Toshiyuki Nakao ,  Toshifumi Honda ,  Yukihiro Shibata

发明人： Yuta Urano ,  Shigenobu Maruyama ,  Toshiyuki Nakao ,  Toshifumi Honda ,  Yukihiro Shibata

IPC分类号： G01N21/88

CPC分类号： G01N21/94 ,  G01N21/47 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/4711 ,  G01N2021/8867 ,  G01N2021/8874 ,  G01N2201/0806 ,  G01N2201/10

摘要： Proposed is a defect inspection method whereby: illuminating light having a substantially uniform illumination intensity distribution in one direction of a sample surface irradiated on the sample surface; multiple scattered light components, which are output in multiple independent directions, are detected among the scattered light from the sample surface and multiple corresponding scattered light detection signals are obtained; at least one of the multiple scattered light detection signals is processed and the presence of defects is determined; at least one of the multiple scattered light detection signals that correspond to each of the points determined by the processing as a defect is processed and the dimensions of the defect are determined; and the position and dimensions of the defect on the sample surface, at each of the points determined as a defect, are displayed.

摘要翻译： 提出了一种缺陷检查方法，其中：照射在样品表面上的样品表面的一个方向具有基本上均匀的照明强度分布的光; 在来自样品表面的散射光中检测多个独立方向输出的多个散射光分量，并获得多个相应的散射光检测信号; 处理多个散射光检测信号中的至少一个并确定缺陷的存在; 处理与通过处理确定的每个点对应的多个散射光检测信号中的至少一个作为缺陷，并确定缺陷的尺寸; 并且显示在被确定为缺陷的每个点处的样品表面上的缺陷的位置和尺寸。

公开(公告)号：US20130114078A1

公开(公告)日：2013-05-09

申请号：US13701030

申请日：2011-05-25

申请人： Toshifumi Honda ,  Yuta Urano ,  Yukihiro Shibata ,  Toshiyuki Nakao

发明人： Toshifumi Honda ,  Yuta Urano ,  Yukihiro Shibata ,  Toshiyuki Nakao

IPC分类号： G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/9501 ,  G01N2021/8874

摘要： Disclosed is a defect inspection method which makes it possible to scan the entire surface of a sample and detect minute defects without causing thermal damage to the sample. A defect inspection method in which a pulse laser emitted from a light source is subjected to pulse division and irradiated on the surface of a sample which moves in one direction while the divided-pulse pulse laser is rotated, reflection light from the sample irradiated by the divided-pulse pulse laser is detected, the signal of the detected reflection light is processed to detect defects on the sample, and information regarding a detected defect is output to a display screen, wherein the barycentric position of the light intensity of the divided-pulse pulse laser is monitored and adjusted.

摘要翻译： 公开了一种缺陷检查方法，其可以扫描样品的整个表面并检测微小缺陷而不会对样品造成热损伤。 对从光源射出的脉冲激光进行脉冲分割并照射在分割脉冲激光器旋转时在一个方向上移动的样品的表面的缺陷检查方法中， 检测出分割脉冲脉冲激光，检测出反射光的信号，以检测样本上的缺陷，将与检测到的缺陷有关的信息输出到显示画面，其中分割脉冲的光强度的重心位置 脉冲激光被监测和调整。

公开(公告)号：US20140009755A1

公开(公告)日：2014-01-09

申请号：US13701834

申请日：2011-07-01

申请人： Yukihiro Shibata ,  Toshiyuki Nakao ,  Yuta Urano ,  Toshifumi Honda

发明人： Yukihiro Shibata ,  Toshiyuki Nakao ,  Yuta Urano ,  Toshifumi Honda

IPC分类号： G01N21/956

CPC分类号： G01N21/956 ,  G01N21/8806 ,  G01N21/9501

摘要： In order to enable inspections to be conducted at a sampling rate higher than the pulse oscillation frequency of a pulsed laser beam emitted from a laser light source, without damaging samples, a defect inspection method is disclosed, wherein: a single pulse of a pulsed laser beam emitted from the laser light source is split into a plurality of pulses; a sample is irradiated with this pulse-split pulsed laser beam; scattered light produced by the sample due to the irradiation is focused and detected; and defects on the sample are detected by using information obtained by focusing and detecting the scattered light from the sample. Said defect inspection method is configured such that the splitting a single pulse of the pulsed laser beam into a plurality of pulses is controlled in such a manner that the peak values of the split pulses are substantially uniform.

摘要翻译： 为了使得能够以高于从激光光源发射的脉冲激光束的脉冲振荡频率的采样率进行检查，而不损害样品，公开了一种缺陷检查方法，其中：脉冲激光的单个脉冲 从激光光源发射的光束被分成多个脉冲; 用脉冲分割脉冲激光束照射样品; 聚焦和检测由于照射产生的样品产生的散射光; 通过使用通过聚焦和检测来自样品的散射光获得的信息来检测样品上的缺陷。 所述缺陷检查方法被配置为使得将脉冲激光束的单个脉冲分裂成多个脉冲以使得分离脉冲的峰值基本上均匀的方式被控制。