摘要:
A method of evaluating a separation and exhalation performance of volatile matters present in a wort boiling apparatus used in the production of beer or malt liquors. The evaluation is conducted using a volatilization rate coefficient of dimethyl sulfide converted into a gaseous phase in boiling a wort in the boiling apparatus.
摘要:
Provided are a contamination inspection method and a contamination inspection device for highly accurately detecting a defect in a wafer, a liquid crystal substrate and media or the like including patterns, for example, a semiconductor device or the like. The first aspect of the present invention is a contamination inspection device comprising: an irradiation optical system for irradiating lights on the inspection target substrate; and a spatial filter for shading diffracted lights form the inspection target substrate. Herein, the spatial filter comprises: a plurality of light shading materials; a control member for changing at least one of parameters selected from a shape, an angle and an interval with respect to the light shading material, and a control unit for controlling the control members.
摘要:
A charged particle beam reduces treatment time in the uniform scanning or in the conformal layer stacking irradiation. In the uniform scanning, an optimum charged particle beam scan path for uniformly irradiating a collimator aperture area is calculated. In the conformal layer stacking irradiation, an optimum charged particle beam scan path for uniformly irradiating a multi-leaf collimator aperture area of each layer for each of the layers obtained by partitioning the target volume is calculated. Alternatively, a minimum irradiation field size that covers the multi-leaf collimator aperture area of each layer is calculated, and a scan path corresponding to the irradiation field size, prestored in a memory of a particle therapy control apparatus, is selected. The charged particle beam scan path is optimally changed in the lateral directions in conformity with the collimator aperture area in the uniform scanning or in each layer in the conformal layer stacking irradiation.
摘要:
A coupling lens for coupling first light having a first wavelength from a first light source with a second light having a second wavelength from a second light source disposed adjacent to the first light source in substantially the same direction includes a first surface disposed to face the first and second light sources, the first surface including a first region transmitting the first light and having a first region curvature and a second region transmitting the second light and having a second region curvature, and a second surface opposite to the first surface and having a second-surface curvature. A position of a center of the first region curvature differs from a position of a center of the second region curvature. A center of the second surface curvature and the center of the first region curvature are disposed on an optical axis of the first or second light source.
摘要:
A projection-type image display apparatus for displaying an image on a projected plane, includes light sources each configured to emit a light, a light-path combining element configured to combine light paths of the lights each emitted from the light sources, a light path splitting element configured to split the lights on the combined light path into first and second lights, a scanning mirror configured to reflect the first lights to scan the projected plane with the first lights, a light receiving element configured to receive the second lights to detect light amounts of the received second lights, and a control circuit configured to control the scanning mirror to scan an image forming area of the projected plane with the first lights based on image data and control the light sources so as to reproduce a color based on the image data. The control circuit is configured to control the light receiving element to detect the light amounts of the light sources when the image forming area is scanned with the first light, and adjust emitting light amounts of the light sources based on the detected light amounts of the light sources.
摘要:
A method for adjusting an aberration is disclosed that adjusts the aberration existing in a light spot by using a control signal generated from a wobbling signal and a reproduction signal, and thereby maintaining an appropriate S/N ratio for both the wobbling signal and the reproduction signal even when astigmatism, spherical aberration, or other aberrations are present. In an optical pickup, by moving a collimator lens along a light path, a spherical aberration is generated on the light emitted from a light source, a reproduction signal (RF signal) is obtained from the light reflected from an optical disk, a wobbling signal is obtained from the light reflected from grooves on the optical disk, and the correction aberration is adjusted based on the RF signal and the wobbling signal.
摘要:
Small-sized and light-weighted optical pickup apparatus capable of eliminating the effect due to the flaring light rays and performing the signal detection of high reliability is provided.In the apparatus, the quarter-wave (λ/4) plate and the reflection-type birefringent prime provided with the deflecting function of deflecting the reflection light rays reflected on the optical information recording medium and the light rays flux separating function of separating the reflected light rays from the outgoing light rays are disposed in the optical path between the semiconductor laser constructing the optical pickup portion and the objective lens, and the light-receiving element for receiving the reflection light rays from the optical information recording medium which are defleced and separated by the reflection-type birefringent prism is disposed on a single (same) substrate together with the semiconductor laser.
摘要:
The invention provides a charged particle therapy system capable of increasing the number of patients treated. An irradiation filed forming apparatus for irradiating a charged particle beam extracted from a charged particle beam generator to an irradiation target includes an RMW device. The RMW device comprises a housing and an RMW disposed within the housing. A rotary shaft of the RMW is rotatably mounted to the housing. The RMW device is detachably installed in an RMW holding member providied in a casing of the irradiation filed forming apparatus. The housing can be placed in contact with the RMW holding member, and hence positioning of the rotary shaft of the RMW to a predetermined position can be performed in a short time. This contributed to cutting a time required for treatment per patient and increasing the number of patients treated.
摘要:
In performing plasma etching with the aim to form a gate electrode on a large-diameter substrate, it is difficult according to prior art methods to ensure the in-plane uniformity of CD shift of the gate electrode. The present invention solves the problem by supplying processing gases having different flow rates and compositions respectively through openings formed at positions opposing to the substrate and at the upper corner or side wall of the processing chamber.
摘要:
The invention aims at solving the problems of throughput deterioration, reproducibility deterioration and plasma discharge instability when performing continuous discharge during multiple steps of plasma etching. According to the present invention, the gas supply unit is operated while determining the timing for switching conditions of a plurality of plasma etching steps, and the gas flow rate and gas pressure are controlled so that the pressure of processing gas supplied from the gas supply unit to the processing chamber does not fall below a predetermined pressure immediately subsequent to switching steps. For example, upon switching processing gases, the end point of a step is predicted based on an interference film thickness meter, and prior to the end point by two seconds or more, the flow rate of MFC is set to the gas flow rate for the subsequent step and the gas is flown to the exhaust device, so that simultaneously as when the end point signal is received, the processing gases are switched by switching valves.