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公开(公告)号：US08482829B2
公开(公告)日：2013-07-09
申请号：US12566143
申请日：2009-09-24
申请人： Yuu Takiguchi , Naoya Matsumoto , Norihiro Fukuchi , Takashi Inoue , Tamiki Takemori , Naohisa Mukozaka
发明人： Yuu Takiguchi , Naoya Matsumoto , Norihiro Fukuchi , Takashi Inoue , Tamiki Takemori , Naohisa Mukozaka
IPC分类号： G03H1/08
CPC分类号： H01S3/0085 , B23K26/06 , B23K26/352 , G02B3/08 , G02B5/32 , G02B13/22 , G03H1/0005 , G03H1/08 , G03H1/0808 , G03H1/2294 , G03H2001/0094 , G03H2225/32
摘要： A laser processing apparatus 1 includes a laser light source 10, a phase modulation type spatial light modulator 20, a driving unit 21, a control unit 22, and an imaging optical system 30. The imaging optical system 30 may be a telecentric optical system. A storage unit 21A included in the driving unit stores a plurality of basic holograms corresponding to a plurality of basic processing patterns and a focusing hologram corresponding to a Fresnel lens pattern. The control unit 22 arranges in parallel two or more basic holograms selected from the plurality of basic holograms stored in the storage unit 21A, overlaps the focusing hologram with each of the basic holograms arranged in parallel to form the whole hologram, and presents the formed whole hologram to the spatial light modulator 20.
摘要翻译： 激光处理装置1包括激光源10，相位调制型空间光调制器20，驱动单元21，控制单元22和成像光学系统30.成像光学系统30可以是远心光学系统。 包括在驱动单元中的存储单元21A存储对应于多个基本处理模式的多个基本全息图和对应于菲涅耳透镜图案的聚焦全息图。 控制单元22平行地布置从存储在存储单元21A中的多个基本全息图中选择的两个或更多个基本全息图，与聚焦全息图重叠，每个基本全息图平行布置以形成整个全息图，并呈现形成的整体 全息图到空间光调制器20。
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公开(公告)号：US08957349B2
公开(公告)日：2015-02-17
申请号：US12496249
申请日：2009-07-01
IPC分类号： B23K26/00 , B41J2/44 , B23K26/06 , B41J2/465 , G02B26/06 , G02B27/42 , G03H1/00 , G03H1/08 , B41M5/24 , G03H1/02 , G03H1/22
CPC分类号： B41J2/442 , B23K26/066 , B41J2/465 , B41M5/24 , G02B26/06 , G02B27/42 , G02B27/4244 , G02B27/425 , G03H1/0005 , G03H1/0236 , G03H1/08 , G03H1/0808 , G03H1/2286 , G03H1/2294 , G03H2001/0094 , G03H2001/0816 , G03H2001/2218 , G03H2210/52 , G03H2225/32 , G03H2240/51 , G03H2240/53
摘要： A laser machining device is provided with a laser light source, a spatial light modulator, a driving unit, a control unit, and a condensing optical system. The control unit selects a basic hologram corresponding to each basic machining pattern included in a whole machining pattern in a workpiece from a plurality of basic holograms stored by the storage unit, and determines a display region of the basic hologram in the spatial light modulator so that the deviation of the value of “Iη/n” becomes small for the selected respective basic hologram when the intensity of a laser beam input to a display region of the basic hologram in the spatial light modulator is defined as I, the diffraction efficiency of the laser beam in the basic hologram is defined as η, and the number of condensing points in a basic machining pattern corresponding to the basic hologram is defined as n.
摘要翻译： 激光加工装置设置有激光光源，空间光调制器，驱动单元，控制单元和聚光光学系统。 控制单元从由存储单元存储的多个基本全息图中选择对应于工件中的整个加工图案中包括的每个基本加工图案的基本全息图，并且确定空间光调制器中的基本全息图的显示区域，使得 当输入到空间光调制器中的基本全息图的显示区域的激光束的强度被定义为I时，对于所选择的各个基本全息图，“I＆eegr / / n”的值的偏差变小， 基本全息图中的激光束被定义为＆eegr，并且与基本全息图对应的基本加工图案中的聚光点的数量被定义为n。
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公开(公告)号：US20100000978A1
公开(公告)日：2010-01-07
申请号：US12496249
申请日：2009-07-01
CPC分类号： B41J2/442 , B23K26/066 , B41J2/465 , B41M5/24 , G02B26/06 , G02B27/42 , G02B27/4244 , G02B27/425 , G03H1/0005 , G03H1/0236 , G03H1/08 , G03H1/0808 , G03H1/2286 , G03H1/2294 , G03H2001/0094 , G03H2001/0816 , G03H2001/2218 , G03H2210/52 , G03H2225/32 , G03H2240/51 , G03H2240/53
摘要： A laser machining device is provided with a laser light source, a spatial light modulator, a driving unit, a control unit, and a condensing optical system. The control unit selects a basic hologram corresponding to each basic machining pattern included in a whole machining pattern in a workpiece from a plurality of basic holograms stored by the storage unit, and determines a display region of the basic hologram in the spatial light modulator so that the deviation of the value of “Iη/n” becomes small for the selected respective basic hologram when the intensity of a laser beam input to a display region of the basic hologram in the spatial light modulator is defined as I, the diffraction efficiency of the laser beam in the basic hologram is defined as η, and the number of condensing points in a basic machining pattern corresponding to the basic hologram is defined as n.
摘要翻译： 激光加工装置设置有激光光源，空间光调制器，驱动单元，控制单元和聚光光学系统。 控制单元从由存储单元存储的多个基本全息图中选择对应于工件中的整个加工图案中包括的每个基本加工图案的基本全息图，并且确定空间光调制器中的基本全息图的显示区域，使得 当输入到空间光调制器中的基本全息图的显示区域的激光束的强度被定义为I时，对于所选择的各个基本全息图，“Ieta / n”的值的偏差变小， 将基本全息图中的激光束定义为η，将与基本全息图对应的基本加工图案中的聚光点的数量定义为n。
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4.发明授权Laser machining device with a converged laser beam and laser machining method 有权激光加工装置采用融合激光束和激光加工方法公开(公告)号：US08324529B2
公开(公告)日：2012-12-04
申请号：US12742491
申请日：2008-08-26
CPC分类号： B23K26/00 , B23K26/06 , B23K26/0624 , B23K26/064 , B23K26/0661 , B23K26/067 , B23K26/355 , G03H1/2294 , G03H2001/0094 , G03H2225/32
摘要： A laser machining device 1 includes a laser light source 10, a spatial light modulator 20, a controller 22, a converging optical system 30, and a shielding member 40. The phase-modulating spatial light modulator 20 inputs a laser beam outputted from the laser light source 10, displays a hologram modulating a phase of the laser beam at each of a plurality of pixels arranged two-dimensionally, and outputs the phase-modulated laser beam. The controller 22 causes the spatial light modulator 20 to display a plurality of holograms sequentially, lets the converging optical system 30 converge the laser beam outputted from the spatial light modulator 20 at converging positions having a fixed number of M, selectively places N converging positions out of the M converging positions into a machining region 91, and machines an object to be machined 90.
摘要翻译： 激光加工装置1包括激光源10，空间光调制器20，控制器22，会聚光学系统30和屏蔽构件40.相位调制用空间光调制器20输入从激光器输出的激光束 光源10显示调制在二维排列的多个像素中的每一个处的激光束的相位的全息图，并输出相位调制的激光束。 控制器22使空间光调制器20依次显示多个全息图，使会聚光学系统30将从空间光调制器20输出的激光束会聚在具有固定数量的M的会聚位置，选择性地将N个收敛位置放出 的M个会聚位置进入加工区域91，并且对要加工的物体进行加工90。
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公开(公告)号：US20100270277A1
公开(公告)日：2010-10-28
申请号：US12742491
申请日：2008-08-26
IPC分类号： B23K26/00
CPC分类号： B23K26/00 , B23K26/06 , B23K26/0624 , B23K26/064 , B23K26/0661 , B23K26/067 , B23K26/355 , G03H1/2294 , G03H2001/0094 , G03H2225/32
摘要： A laser machining device 1 comprises a laser light source 10, a spatial light modulator 20, a controller 22, a converging optical system 30, and a shielding member 40. The phase-modulating spatial light modulator 20 inputs a laser beam outputted from the laser light source 10, displays a hologram modulating a phase of the laser beam at each of a plurality of pixels arranged two-dimensionally, and outputs the phase-modulated laser beam. The controller 22 causes the spatial light modulator 20 to display a plurality of holograms sequentially, lets the converging optical system 30 converge the laser beam outputted from the spatial light modulator 20 at converging positions having a fixed number of M, selectively places N converging positions out of the M converging positions into a machining region 91, and machines an object to be machined 90.
摘要翻译： 激光加工装置1包括激光源10，空间光调制器20，控制器22，会聚光学系统30和屏蔽构件40.相位调制空间光调制器20输入从激光器输出的激光束 光源10显示调制在二维排列的多个像素中的每一个处的激光束的相位的全息图，并输出相位调制的激光束。 控制器22使空间光调制器20依次显示多个全息图，使会聚光学系统30将从空间光调制器20输出的激光束会聚在具有固定数量的M的会聚位置，选择性地将N个收敛位置放出 的M个会聚位置进入加工区域91，并且对要加工的物体进行加工90。
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6.发明申请OPTICAL MODULATION CONTROL METHOD, CONTROL PROGRAM, CONTROL DEVICE, AND LASER LIGHT IRRADIATION DEVICE 有权光学调制控制方法，控制程序，控制装置和激光光照射装置公开(公告)号：US20150219937A1
公开(公告)日：2015-08-06
申请号：US14427068
申请日：2012-09-13
申请人： Naoya Matsumoto , Takashi Inoue , Yuu Takiguchi
发明人： Naoya Matsumoto , Takashi Inoue , Yuu Takiguchi
CPC分类号： G02F1/292 , B23K26/032 , B23K26/035 , B23K26/0622 , B23K26/0643 , B23K26/0648 , B23K26/0853 , G02B21/0024 , G02F1/136277
摘要： In controlling light condensing irradiation with laser light using a spatial light modulator, an incident pattern of the laser light and respective refractive indices of first and second propagation media on a propagation path are acquired, the number of light condensing points, and the light condensing position and the light condensing intensity at each light condensing point are set, an aberration condition caused by the first and second propagation media is derived, and by taking the aberration condition into account, a modulation pattern to be presented in the spatial light modulator is designed. Further, in designing the modulation pattern, a design method focusing on an effect of a phase value at one pixel is used, and in evaluating the light condensing state at the light condensing point, a propagation function that takes the aberration condition into account is employed.
摘要翻译： 在使用空间光调制器控制激光的聚光照射时，获取激光的入射图案和传播路径上的第一和第二传播介质的折射率，聚光点数和聚光位置 并且在每个聚光点处的聚光强度被设定，得到由第一和第二传播介质引起的像差条件，考虑到像差条件，设计出在空间光调制器中呈现的调制图案。 此外，在设计调制图案时，使用集中在一个像素上的相位值的效果的设计方法，并且在评估聚光点处的聚光状态时，采用考虑像差条件的传播函数 。
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7.发明授权Optical modulation control method, control program, control device, and laser light irradiation device 有权光调制控制方法，控制程序，控制装置和激光照射装置公开(公告)号：US09383597B2
公开(公告)日：2016-07-05
申请号：US14427068
申请日：2012-09-13
申请人： Naoya Matsumoto , Takashi Inoue , Yuu Takiguchi
发明人： Naoya Matsumoto , Takashi Inoue , Yuu Takiguchi
IPC分类号： G02F1/01 , G02B26/08 , B23K26/03 , B23K26/06 , B23K26/08 , B23K26/02 , G02B21/00 , G02F1/29 , G02F1/1362
CPC分类号： G02F1/292 , B23K26/032 , B23K26/035 , B23K26/0622 , B23K26/0643 , B23K26/0648 , B23K26/0853 , G02B21/0024 , G02F1/136277
摘要： In controlling light condensing irradiation with laser light using a spatial light modulator, an incident pattern of the laser light and respective refractive indices of first and second propagation media on a propagation path are acquired, the number of light condensing points, and the light condensing position and the light condensing intensity at each light condensing point are set, an aberration condition caused by the first and second propagation media is derived, and by taking the aberration condition into account, a modulation pattern to be presented in the spatial light modulator is designed. Further, in designing the modulation pattern, a design method focusing on an effect of a phase value at one pixel is used, and in evaluating the light condensing state at the light condensing point, a propagation function that takes the aberration condition into account is employed.
摘要翻译： 在使用空间光调制器控制激光的聚光照射时，获取激光的入射图案和传播路径上的第一和第二传播介质的折射率，聚光点数和聚光位置 并且在每个聚光点处的聚光强度被设定，得到由第一和第二传播介质引起的像差条件，考虑到像差条件，设计出在空间光调制器中呈现的调制图案。 此外，在设计调制图案时，使用集中在一个像素上的相位值的效果的设计方法，并且在评估聚光点处的聚光状态时，采用考虑像差条件的传播函数 。
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公开(公告)号：US20140036206A1
公开(公告)日：2014-02-06
申请号：US13985214
申请日：2012-02-10
申请人： Tomoko Otsu , Naoya Matsumoto , Yuu Takiguchi
发明人： Tomoko Otsu , Naoya Matsumoto , Yuu Takiguchi
IPC分类号： G02F1/133
CPC分类号： G02F1/13306 , G09G3/3611 , G09G2320/0285 , G09G2320/041 , G09G2360/145
摘要： A spatial light modulation device includes a liquid crystal layer modulating a phase of incident light according to a level of an applied electric field, a temperature sensor generating a temperature signal corresponding to a temperature of the liquid crystal layer, a plurality of pixel electrodes provided for each of a plurality of pixels and applying a voltage to the liquid crystal layer, and a driving device providing a voltage to the plurality of pixel electrodes. The driving device has a nonvolatile storage element storing in advance a coefficient α included in a function expressing a correlation between a temperature change amount in the liquid crystal layer and a variation in phase modulation amount in the liquid crystal layer, and performs a calculation for correcting a level of voltage by use of a temperature indicated by the temperature signal and the coefficient α.
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公开(公告)号：US09250458B2
公开(公告)日：2016-02-02
申请号：US13985083
申请日：2012-02-10
申请人： Tomoko Otsu , Naoya Matsumoto , Yuu Takiguchi
发明人： Tomoko Otsu , Naoya Matsumoto , Yuu Takiguchi
CPC分类号： G02F1/13306 , G02F2203/12 , G02F2203/50 , G09G3/3611 , G09G2320/0285 , G09G2320/041 , G09G2360/145
摘要： A spatial light modulation device includes a liquid crystal layer modulating a phase of incident light according to a level of an applied electric field, a temperature sensor generating a temperature signal corresponding to a temperature of the liquid crystal layer, a plurality of pixel electrodes provided for each of a plurality of pixels and applying a voltage to the liquid crystal layer, and a driving device providing a voltage to the plurality of pixel electrodes. The driving device has a nonvolatile storage element storing in advance a coefficient α included in a function expressing a correlation between a temperature change amount in the liquid crystal layer and a variation in phase modulation amount in the liquid crystal layer, and performs a calculation for correcting a level of voltage by use of a temperature indicated by the temperature signal and the coefficient α.
摘要翻译： 空间光调制装置包括根据施加电场的电平调制入射光的相位的液晶层，产生与液晶层的温度对应的温度信号的温度传感器，设置用于 多个像素中的每一个并且向液晶层施加电压，以及向多个像素电极提供电压的驱动装置。 驱动装置具有预先存储表示液晶层的温度变化量与液晶层的相位调制量的变化之间的相关性的函数的系数α的非易失性存储元件，进行校正用的计算 通过使用由温度信号表示的温度和系数α的电压电平。
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公开(公告)号：US09223159B2
公开(公告)日：2015-12-29
申请号：US14000428
申请日：2012-02-13
申请人： Yuu Takiguchi , Naoya Matsumoto , Tomoko Otsu
发明人： Yuu Takiguchi , Naoya Matsumoto , Tomoko Otsu
CPC分类号： G02F1/13306 , G02B26/06 , G02F1/136 , G02F2203/12 , G02F2203/21 , G02F2203/50 , G02F2203/60 , G03H1/0808 , G03H1/2294 , G03H2001/0224 , G03H2225/32 , G09G3/36 , G09G2320/041
摘要： A spatial light modulation device includes a phase-modulation type spatial light modulator, a temperature sensor detecting a temperature of the spatial light modulator, and a control unit providing a drive signal to the spatial light modulator. The control unit has a storage unit. The storage unit stores N correction patterns created so as to correspond to N (N is an integer not less than 2) temperature values of the spatial light modulator in order to correct phase distortion of the spatial light modulator. The control unit selects one correction pattern according to a temperature value of the spatial light modulator, and generates the drive signal based on a phase pattern created by adding the one correction pattern to a desired phase pattern. Thereby, it becomes possible to suppress phase distortion according to a temperature change while suppressing a delay in operation.
摘要翻译： 空间光调制装置包括相位调制型空间光调制器，检测空间光调制器的温度的温度传感器和向空间光调制器提供驱动信号的控制单元。 控制单元具有存储单元。 存储单元存储为了校正空间光调制器的相位失真而产生的N个校正图案，以对应于空间光调制器的N（N为不小于2的整数）温度值。 控制单元根据空间光调制器的温度值选择一个校正图案，并且基于通过将一个校正图案相加到期望的相位图案而产生的相位图来生成驱动信号。 由此，能够抑制工作延迟，能够根据温度变化抑制相位变形。
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