Methods of forming dual-damascene interconnect structures on semiconductor substrates using multiple planarization layers having different porosity characteristics
    4.
    发明申请
    Methods of forming dual-damascene interconnect structures on semiconductor substrates using multiple planarization layers having different porosity characteristics 有权
    使用具有不同孔隙率特性的多个平坦化层在半导体衬底上形成双镶嵌互连结构的方法

    公开(公告)号:US20070184649A1

    公开(公告)日:2007-08-09

    申请号:US11348428

    申请日:2006-02-06

    IPC分类号: H01L21/4763

    CPC分类号: H01L21/76808 H01L21/31144

    摘要: Methods of forming integrated circuit devices include patterning an electrically insulating layer to support dual-damascene interconnect structures therein. The steps of patterning the electrically insulating layer include using multiple planarization layers having different porosity characteristics. Forming an interconnect structure within an integrated circuit device may include forming an electrically insulating layer on a substrate and forming at least one via hole extending at least partially through the electrically insulating layer. The at least one via hole is filled with a first electrically insulating material having a first porosity. The filled at least one via hole is then covered with a second electrically insulating material layer having a second porosity lower than the first porosity. The second electrically insulating material layer is selectively etched back to expose a first portion of the first electrically insulating material in the at least one via hole. The electrically insulating layer is selectively etched to define a trench therein that exposes a second portion of the first electrically insulating material in the at least one via hole. The first electrically insulating material, which has a relatively high degree of porosity, is then removed from the at least one via hole. This removal step may be performed using a relatively mild ashing process because of the high porosity of the first electrically insulating material.

    摘要翻译: 形成集成电路器件的方法包括图案化电绝缘层以支持其中的双镶嵌互连结构。 图案化电绝缘层的步骤包括使用具有不同孔隙特性的多个平坦化层。 在集成电路器件内形成互连结构可以包括在衬底上形成电绝缘层,并形成至少部分穿过电绝缘层延伸的至少一个通孔。 至少一个通孔填充有具有第一孔隙率的第一电绝缘材料。 填充的至少一个通孔然后被具有低于第一孔隙率的第二孔隙率的第二电绝缘材料层覆盖。 选择性地回蚀第二电绝缘材料层以暴露至少一个通孔中的第一电绝缘材料的第一部分。 电绝缘层被选择性蚀刻以在其中限定其中的沟槽,其暴露出至少一个通孔中的第一电绝缘材料的第二部分。 然后从该至少一个通孔去除具有较高孔隙率的第一电绝缘材料。 由于第一电绝缘材料的高孔隙率,该去除步骤可以使用相对温和的灰化过程进行。

    Laser induced thermal imaging apparatus and laser induced thermal imaging method and fabricating method of organic light-emitting diode using the same
    5.
    发明申请
    Laser induced thermal imaging apparatus and laser induced thermal imaging method and fabricating method of organic light-emitting diode using the same 有权
    激光感应热成像装置和激光感应热成像方法及其制造方法的有机发光二极管

    公开(公告)号:US20070109391A1

    公开(公告)日:2007-05-17

    申请号:US11508159

    申请日:2006-08-23

    摘要: A laser induced thermal imaging apparatus and a laser induced thermal imaging method capable of uniformly adhering a donor film to an acceptor substrate by use of a magnetic force to achieve an effective laser induced thermal imaging method; and a method for fabricating an organic light-emitting diode using the same. The laser induced thermal imaging apparatus includes: a chamber in which a contact frame having a magnetic substance is located, to press toward an acceptor substrate containing a magnet located on a substrate stage with an imaging layer of a donor film located between the acceptor substrate and the contact frame; and a laser oscillator to irradiate the donor film through openings in the contact frame. Accordingly, the laser induced thermal imaging apparatus applies an improved adhesion between the donor film and the substrate, producing an organic light-emitting diode having an improved life span, yield and reliability.

    摘要翻译: 激光诱导热成像装置和激光感应热成像方法,其能够通过使用磁力将施主膜均匀地附着到受主基板,以实现有效的激光诱导热成像方法; 以及使用该有机发光二极管制造有机发光二极管的方法。 所述激光感应热成像装置包括:具有磁性物质的接触框架所在的腔室,其朝向包含位于基底台上的磁体的受主衬底上,所述受体衬底具有位于受体衬底和受体衬底之间的施主膜的成像层, 接触框架 以及激光振荡器,以通过接触框架中的开口照射供体膜。 因此,激光感应热成像装置在施主膜和基板之间施加改善的粘附性,产生具有改善的寿命,产量和可靠性的有机发光二极管。

    Film donor device for laser induced thermal imaging
    6.
    发明申请
    Film donor device for laser induced thermal imaging 失效
    用于激光诱导热成像的薄膜供体装置

    公开(公告)号:US20070046762A1

    公开(公告)日:2007-03-01

    申请号:US11511153

    申请日:2006-08-28

    IPC分类号: B41J2/38

    摘要: A laser induced thermal imaging (LITI) apparatus and a method of making an electronic device using the same are disclosed. The LITI apparatus includes a chamber, a substrate support, a contact frame, and a laser source or oscillator. The LITI apparatus transfers a transferable layer from a film donor device onto a surface of an intermediate electronic device. The LITI apparatus uses a magnetic force to provide a close contact between the transferable layer and the surface of the intermediate device. The magnetic force is generated by magnetic materials formed in two components of the LITI apparatus that are spaced apart interposing transferable layer and the surface of the intermediate device. Magnets or magnetic materials are formed in the two following components of the LITI apparatus: 1) the intermediate device and the film donor device; 2) the intermediate device and the contact frame; 3) the substrate support and the film donor device; or 4) the substrate support and the contact frame.

    摘要翻译: 公开了一种激光诱导热成像(LITI)装置和使用其的电子装置的制造方法。 LITI装置包括腔室,衬底支撑件,接触框架和激光源或振荡器。 LITI装置将可转移层从成膜剂装置转移到中间电子装置的表面上。 LITI装置使用磁力来提供可转移层与中间装置的表面之间的紧密接触。 磁力由形成在LITI装置的两个部件中的磁性材料产生,该两个部件是间隔开的中间转印层和中间装置的表面。 在LITI装置的以下两个部件中形成磁体或磁性材料:1)中间装置和薄膜供体装置; 2)中间装置和接触框架; 3)基底支撑体和薄膜供体装置; 或4)衬底支撑件和接触框架。

    Polymer resin composition and method of preparing the same
    7.
    发明申请
    Polymer resin composition and method of preparing the same 有权
    聚合物树脂组合物及其制备方法

    公开(公告)号:US20060293433A1

    公开(公告)日:2006-12-28

    申请号:US11432000

    申请日:2006-05-11

    IPC分类号: C08K3/34

    摘要: Provided are a polymer resin composition and a method of preparing the same. The polymer resin composition includes: a polymer resin; 0.01-10.0 parts by weight of flaky pigment particles having an aspect ratio of 0.01-0.1 based on 100 parts by weight of the polymer resin; and 0.01-10.0 parts by weight of polyhedral pigment particles having an aspect ratio of 0.300-0.999 based on 100 parts by weight of the polymer resin. Using the polymer resin composition, a polymer resin molded product having excellent appearance, i.e., having a uniform color even in resin flow lines or resin weld lines, and in which there is no degradation in the physical properties of the polymer resin contained therein can be manufactured at a low cost.

    摘要翻译: 提供一种聚合物树脂组合物及其制备方法。 聚合物树脂组合物包括:聚合物树脂; 0.01-10.0重量份基于100重量份聚合物树脂的纵横比为0.01-0.1的片状颜料颗粒; 和0.01-10.0重量份基于100重量份聚合物树脂的纵横比为0.300-0.999的多面体颜料颗粒。 使用聚合物树脂组合物,即使在树脂流线或树脂熔接线中也具有优异的外观即均匀的颜色的聚合物树脂模塑制品,其中不含有其中所含的聚合物树脂的物理性能的降低可以是 以低成本制造。

    Seat apparatus having variable gap
    8.
    发明申请
    Seat apparatus having variable gap 有权
    具有可变间隙的座椅装置

    公开(公告)号:US20060152053A1

    公开(公告)日:2006-07-13

    申请号:US10560031

    申请日:2004-06-11

    申请人: Sun Kim

    发明人: Sun Kim

    IPC分类号: A47C1/022

    摘要: A seat apparatus provides a pair of separate seat units which is conveniently adjustable to fit according to the user's body shape. The device is comprised of: a pair of seats that can move in the opposite directions; a pair of moving plates attached under the seats that enables the movement of the seats; a base supporting the moving plates for the movement in the opposite directions; a shaft on the upper side of the base that is attached to rotate; a cylindrical shaped gap controller attached in the middle of the shaft with a pair of guidance grooves that have one narrow end and the other wide end; a motoring device attached on one end of the shaft to rotate the shaft; a pair of connectors with the one ends assembled on the guidance grooves on the gap controller and the other ends fixed on the moving plates at the corresponding positions to the guidance grooves of the gap controller; and a guiding mechanism to direct the movement of the moving plates on the base in the direction of the shaft.

    摘要翻译: 座椅装置提供一对单独的座椅单元,其可方便地调节以适应使用者的身体形状。 该装置包括:可沿相反方向移动的一对座位; 一对移动板,其附接在座椅下方,使座椅可以移动; 支撑用于相反方向运动的移动板的基座; 所述基座的上侧的轴被附接以旋转; 一个圆柱形间隙控制器,安装在轴的中间,一对导向槽具有一个窄端和另一个宽端; 安装在所述轴的一端以旋转所述轴的电动装置; 一对连接器,其一端组装在间隙控制器上的引导槽上,另一端在与间隙控制器的引导槽相对应的位置固定在移动板上; 以及引导机构,用于引导移动板在基座上沿着轴的方向的移动。

    Heat pump and structure of extraction heat exchanger thereof
    9.
    发明申请
    Heat pump and structure of extraction heat exchanger thereof 失效
    热泵及其提取热交换器的结构

    公开(公告)号:US20060107682A1

    公开(公告)日:2006-05-25

    申请号:US11231951

    申请日:2005-09-21

    IPC分类号: F25B13/00 F25B41/00

    摘要: A heat pump equipped with an extraction heat exchanger includes a compressor sucking low-temperature-and-low-pressure liquid refrigerant, and compressing and discharging the low-temperature-and-low-pressure liquid refrigerant into high-temperature-and-high-pressure liquid refrigerant, a condenser in which air passing therethrough absorbs heat from the liquid refrigerant to liquefy the liquid refrigerant, an evaporator in which refrigerant absorbs heat from indoor air and is evaporated to cool indoor air, a main electronic expansion valve connected between the condenser and the evaporator to decompress the liquid refrigerant liquefied in the condenser such that the decompressed refrigerant is easily evaporated in the evaporator and flows at a predetermined flow rate; and the extraction heat exchanger branching a part of the high-temperature-and-high-pressure liquid refrigerant, and performing and bypassing heat exchange between high-temperature-and-high-pressure super-cooled liquid refrigerant and high-temperature-and-high-pressure refrigerant passing through a heat exchanging refrigerant tube between the condenser and the main electronic expansion valve to an accumulator.

    摘要翻译: 配备有抽取热交换器的热泵包括:吸入低温低压液体制冷剂的压缩机,将低温低压液体制冷剂压缩并排出成高温高压液体制冷剂, 压缩液体制冷剂,其中通过的空气从液体制冷剂吸收热量以液化液体制冷剂;蒸发器,其中制冷剂从室内吸收热量并蒸发以冷却室内空气;主电子膨胀阀,连接在冷凝器 蒸发器对在冷凝器中液化的液体制冷剂进行减压,使得减压制冷剂容易在蒸发器中蒸发并以预定流量流动; 并且提取热交换器分支一部分高温高压液体制冷剂,并且执行和旁路高温和高压过冷却液体制冷剂与高温高压液体制冷剂之间的热交换, 高压制冷剂通过冷凝器和主电子膨胀阀之间的热交换制冷剂管道进入蓄能器。

    Semiconductor test apparatus for simultaneously testing plurality of semiconductor devices
    10.
    发明申请
    Semiconductor test apparatus for simultaneously testing plurality of semiconductor devices 有权
    用于同时测试多个半导体器件的半导体测试装置

    公开(公告)号:US20050283697A1

    公开(公告)日:2005-12-22

    申请号:US11152073

    申请日:2005-06-15

    申请人: Jong Kang Sun Kim

    发明人: Jong Kang Sun Kim

    CPC分类号: G01R31/31932 G06F11/263

    摘要: Disclosed herein is a semiconductor test apparatus for simultaneously testing a plurality of semiconductor devices. The semiconductor test apparatus includes a plurality of pattern generation boards, a DUT board, a backplane board, and a power supply unit. The pattern generation boards receive a test program, generate a test pattern signal and an expected signal, transmit the test pattern signal to the semiconductor devices, receive a test pattern result signal, compare the test pattern result signal with the expected signal, generate a Direct Current (DC) test signal and a DC test expected signal, transmit the DC test signal to the semiconductor devices, receive a DC test result signal and compare the DC test result signal with the DC test expected signal. The DUT board includes a plurality of sockets for connection to the semiconductor devices and a plurality of connectors for connection to the pattern generation boards. The DUT board receives the test pattern signal or the DC test signal, transmits the received signal to the semiconductor devices, receives the test pattern result signal or DC test result signal and transmits the received signal to the pattern generation boards. The backplane board includes a plurality of connectors for connection to the plurality of pattern generation boards and a communication interface unit, and mechanically supports the pattern generation boards. The power supply unit mechanically supports the backplane board and supplies power to the backplane board.

    摘要翻译: 这里公开了一种用于同时测试多个半导体器件的半导体测试装置。 半导体测试装置包括多个图案生成板,DUT板,背板和电源单元。 图案生成板接收测试程序,生成测试图形信号和预期信号,将测试图案信号发送到半导体器件,接收测试图案结果信号,将测试图案结果信号与预期信号进行比较,生成直接 电流(DC)测试信号和直流测试预期信号,将直流测试信号发送到半导体器件,接收直流测试结果信号,并将直流测试结果信号与直流测试预期信号进行比较。 DUT板包括用于连接到半导体器件的多个插座和用于连接到图案生成板的多个连接器。 DUT板接收测试图形信号或DC测试信号,将接收到的信号发送到半导体器件,接收测试图案结果信号或DC测试结果信号,并将接收的信号发送到模式生成板。 背板包括用于连接到多个图案生成板的多个连接器和通信接口单元,并且机械地支撑图案生成板。 电源单元机械地支撑背板并向背板供电。