Apparatus and method for etching the surface of a semiconductor substrate
    1.
    发明授权
    Apparatus and method for etching the surface of a semiconductor substrate 有权
    用于蚀刻半导体衬底的表面的设备和方法

    公开(公告)号:US08894803B2

    公开(公告)日:2014-11-25

    申请号:US12042584

    申请日:2008-03-05

    摘要: A process for etching the surfaces of semiconductor substrates utilizes a texturing tank which introduces a process fluid through a circulating system. The process fluid is heated to a desired temperature and maintained at a desired concentration prior to entering a processing area where laminar flow is produced to more quickly and uniformly roughen the surface of semiconductor substrates. The texturing tank permits removal of bubbles and eliminates temperature stratification in the processing area.

    摘要翻译: 用于蚀刻半导体衬底的表面的工艺利用了通过循环系统引入工艺流体的纹理槽。 将工艺流体加热到期望的温度并在进入生产层流的加工区域之前保持所需的浓度以更快速且均匀地粗糙化半导体衬底的表面。 纹理槽允许去除气泡并消除处理区域中的温度分层。

    POSITIONING APPARATUS FOR A LIQUID LEVEL SENSOR

    公开(公告)号:US20170160122A1

    公开(公告)日:2017-06-08

    申请号:US14957863

    申请日:2015-12-03

    IPC分类号: G01F23/26

    摘要: A positioning apparatus for a liquid level sensor includes a liquid level sensor support, such as a generally horizontal platform, having an aperture for receiving at least a portion of the liquid level sensor. An arm extends from the support and has an aperture for receiving a liquid outlet tube extending from an outlet of a liquid pass-through device. A hollow socket is spaced apart from the arm and removably attachable to the outlet of the liquid pass-through device. The apparatus maintains the relative position and orientation of the liquid level sensor to the liquid outlet tube extending from the outlet of the liquid pass-through device.

    IN-LINE HEATER
    4.
    发明申请
    IN-LINE HEATER 审中-公开

    公开(公告)号:US20170159970A1

    公开(公告)日:2017-06-08

    申请号:US15063184

    申请日:2016-03-07

    IPC分类号: F24H9/12 G01F23/26 F24H1/10

    摘要: An in-line heater having a heating vessel, defined at least in part by a wall, through which fluid to be heated flows. The wall of the vessel has at least one port formed therein. A fitting, having a body defining a pass-through passageway, is attachable to the port. An end of the body of the fitting has a groove or a ring which mates with a corresponding ring or groove of the port to form a liquid seal between the end of the fitting and the wall of the heating vessel.

    In-line heater
    6.
    发明授权

    公开(公告)号:US10139133B2

    公开(公告)日:2018-11-27

    申请号:US15063184

    申请日:2016-03-07

    IPC分类号: F24H1/10 F24H9/12 G01F23/26

    摘要: An in-line heater having a heating vessel, defined at least in part by a wall, through which fluid to be heated flows. The wall of the vessel has at least one port formed therein. A fitting, having a body defining a pass-through passageway, is attachable to the port. An end of the body of the fitting has a groove or a ring which mates with a corresponding ring or groove of the port to form a liquid seal between the end of the fitting and the wall of the heating vessel.

    Filter housing with removable multi-cartridge holder

    公开(公告)号:US10058802B2

    公开(公告)日:2018-08-28

    申请号:US14467931

    申请日:2014-08-25

    IPC分类号: B01D29/52

    摘要: The present invention is directed to a filter housing with a removable filter assembly having an elongated shell assembly, a removable head assembly, and a removable filter assembly. The shell assembly has an inlet section, an outlet section, and a filter assembly opening. The removable filter cartridge includes a top tube sheet, a bottom tube sheet and a plurality of filter cartridges. The filter cartridges provide the only fluid passage through the bottom tube sheet, which otherwise sealing engages a ring assembly within the shell assembly proximate to the outlet section.

    Heater for solvents and flammable fluids

    公开(公告)号:US09651276B2

    公开(公告)日:2017-05-16

    申请号:US14473148

    申请日:2014-08-29

    摘要: A heater for solvents and flammable fluids having a heater core, an hermetically sealed electrical chamber, and a housing cap. The heater core includes a process fluid tube, a heating element, and a thermal well, all enclosed within a cast aluminum billet. The heating element, the process fluid tube, and the thermal well are all thermally associated with one another. The electrical chamber is embedded in a first end of the cast aluminum billet. Electrodes from the heating element extend into the electrical chamber and are connected to electrical wires. The electrical chamber is filled with a non-conducting epoxy that covers and encloses the electrical connections. The housing cap is sealingly disposed on the first end of the cast aluminum billet covering the electrical chamber.

    HEATER FOR SOLVENTS AND FLAMMABLE FLUIDS
    9.
    发明申请
    HEATER FOR SOLVENTS AND FLAMMABLE FLUIDS 有权
    用于溶剂和易燃液体的加热器

    公开(公告)号:US20160061489A1

    公开(公告)日:2016-03-03

    申请号:US14473148

    申请日:2014-08-29

    IPC分类号: F24H1/00 H05B3/04 H05B3/00

    摘要: A heater for solvents and flammable fluids having a heater core, an hermetically sealed electrical chamber, and a housing cap. The heater core includes a process fluid tube, a heating element, and a thermal well, all enclosed within a cast aluminum billet. The heating element, the process fluid tube, and the thermal well are all thermally associated with one another. The electrical chamber is embedded in a first end of the cast aluminum billet. Electrodes from the heating element extend into the electrical chamber and are connected to electrical wires. The electrical chamber is filled with a non-conducting epoxy that covers and encloses the electrical connections. The housing cap is sealingly disposed on the first end of the cast aluminum billet covering the electrical chamber.

    摘要翻译: 一种用于溶剂和易燃流体的加热器,其具有加热器芯,密封电气室和壳体盖。 加热器芯包括处理流体管,加热元件和热井,全部封装在铸铝坯中。 加热元件,过程流体管和热阱都彼此热相关。 电气室嵌入铸铝坯料的第一端。 来自加热元件的电极延伸到电室中并连接到电线。 电室填充有覆盖并封闭电连接的非导电环氧树脂。 壳体盖密封地设置在覆盖电室的铸铝坯的第一端上。