公开(公告)号：US20070242342A1

公开(公告)日：2007-10-18

申请号：US11263795

申请日：2005-10-31

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： G02B26/00

CPC分类号： G02B26/0841

摘要： A micro-electro-mechanical system (MEMS) mirror device includes (1) a mirror, (2) a first group of spring elements coupled to one half of the mirror, (3) a first beam coupled to the first group of spring elements, (4) a first spring coupled to the first beam, and (5) a first stationary pad coupled to the first spring. The device further includes (6) a second group of spring elements coupled in parallel to another half of the mirror, (7) a second beam coupled to the second group of spring elements, (8) a second spring coupled to the second beam, (9) and a second stationary pad coupled to the second spring. The device further includes a third beam that rigidly interconnects the first and the second beams so they rotate the mirror in unison.

摘要翻译： 微电子机械系统（MEMS）镜装置包括（1）反射镜，（2）耦合到反射镜的一半的第一组弹簧元件，（3）耦合到第一组弹簧元件的第一光束 ，（4）耦合到所述第一梁的第一弹簧，以及（5）联接到所述第一弹簧的第一固定垫。 该装置还包括（6）平行于反射镜的另一半耦合的第二组弹簧元件，（7）耦合到第二组弹簧元件的第二光束，（8）耦合到第二光束的第二弹簧， （9）和耦合到第二弹簧的第二固定垫。 该装置还包括第三梁，其将第一和第二梁刚性互连，使得它们一致地旋转反射镜。

公开(公告)号：US07034370B2

公开(公告)日：2006-04-25

申请号：US10302413

申请日：2002-11-22

申请人： Ting-Tung Kuo

发明人： Ting-Tung Kuo

IPC分类号： H01L27/14

CPC分类号： G02B26/0841

摘要： In one embodiment of the invention, a MEMS structure includes a first electrode, a second electrode, and a mobile element. The first electrode is coupled to a first voltage source. The second electrode is coupled to a second voltage source. The mobile element includes a third electrode coupled to a third voltage source. A steady voltage difference between the first electrode and the third electrode is used to tune the natural frequency of the structure to a scanning frequency of an application. An oscillating voltage difference between the second electrode and the third electrode at the scanning frequency of the application is used to oscillate the mobile element. In one embodiment, the mobile unit is a mirror.

公开(公告)号：US20060144948A1

公开(公告)日：2006-07-06

申请号：US11298932

申请日：2005-12-08

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： G06K7/10 ,  G02B26/08

CPC分类号： G02B26/0841

摘要： A MEMS scanning mirror device includes a scanning mirror, rotational comb teeth, stationary comb teeth, distributed serpentine springs, and anchors. The scanning mirror and the rotational comb teeth are driven by electrostatic force from stationary in-plane and/or out-of-plane teeth. The mirror is attached to the rotational comb structure by multiple support attachments. Multiple serpentine springs serve as the flexible hinges that link the movable structure to the stationary support structure.

公开(公告)号：US07014115B2

公开(公告)日：2006-03-21

申请号：US10683962

申请日：2003-10-10

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： G06K7/10

CPC分类号： G06K7/10653 ,  G02B26/0841

摘要： A MEMS scanning mirror device includes a scanning mirror, rotational comb teeth, stationary comb teeth, distributed serpentine springs, and anchors. The scanning mirror and the rotational comb teeth are driven by electrostatic force from stationary in-plane and/or out-of-plane teeth. The mirror is attached to the rotational comb structure by multiple support attachments. Multiple serpentine springs serve as the flexible hinges that link the movable structure to the stationary support structure.

摘要翻译： MEMS扫描镜装置包括扫描镜，旋转梳齿，固定梳齿，分布蛇形弹簧和锚。 扫描镜和旋转梳齿由固定的平面内和/或平面外的齿的静电力驱动。 镜子通过多个支撑附件附接到旋转梳结构。 多个蛇形弹簧用作将可移动结构连接到固定支撑结构的柔性铰链。

公开(公告)号：US5741435A

公开(公告)日：1998-04-21

申请号：US512555

申请日：1995-08-08

申请人： Charles P. Beetz, Jr. ,  John Steinbeck ,  Robert W. Boerstler ,  David R. Winn

发明人： Charles P. Beetz, Jr. ,  John Steinbeck ,  Robert W. Boerstler ,  David R. Winn

IPC分类号： G11C11/14 ,  H01F1/00 ,  H01F1/03 ,  B41B27/10 ,  G11C11/414 ,  H01L21/8229 ,  H01L21/8239

CPC分类号： B82Y25/00 ,  G11C11/14 ,  H01F1/0063 ,  H01F1/0306 ,  Y10S428/90 ,  Y10T428/12465 ,  Y10T428/12951

摘要： A static magnetic memory includes a layer having a plurality of vertically oriented and shape-anisotropic elongated ferromagnetic particles. A plurality of writing conductors are adjacent the layer, and the conductors selectively apply magnetic fields to selected regions of the layer by directing electrical current to magnetize the particles in an up or down direction. Static reading means detect the direction of magnetization. The particles may include a soft magnet portion and a hard magnet portion. In another preferred embodiment, a material and a method of making same includes providing a matrix full of elongated holes, depositing a first magnetic material having a first coercivity into the holes, and then depositing a second magnetic material having a second coercivity into the holes to form a composite elongated particle in each hole.

摘要翻译： 静磁存储器包括具有多个垂直取向和形状各向异性的细长铁磁颗粒的层。 多个写入导体与层相邻，并且导体通过引导电流在上或下方向上磁化颗粒而选择性地将磁场施加到层的选定区域。 静态读数意味着检测磁化方向。 颗粒可以包括软磁体部分和硬磁体部分。 在另一优选实施例中，材料及其制造方法包括提供充满细长孔的矩阵，将具有第一矫顽力的第一磁性材料沉积到孔中，然后将具有第二矫顽力的第二磁性材料沉积到孔中 在每个孔中形成复合细长颗粒。

公开(公告)号：US07046421B1

公开(公告)日：2006-05-16

申请号：US10778742

申请日：2004-02-13

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： G02B26/00

CPC分类号： G02B26/0841

摘要： A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.

摘要翻译： 微电子机械系统（MEMS）装置包括具有沟槽的顶表面的反射镜，连接到反射镜的光束，连接到光束的旋转梳齿，以及将光束连接到接合焊盘的一个或多个弹簧。 镜子可以具有用于反射光的底面。 镜子可以包括顶部凸缘和由腹板连接的底部凸缘，其中顶部和底部凸缘分别形成顶部和底部表面。 旋转梳齿可具有锥形形状。 固定梳齿可以与旋转梳齿在平面内或平面外相互交错。 旋转和固定梳齿之间的稳定或振荡电压差可用于振荡或调谐镜子。

公开(公告)号：US07009755B2

公开(公告)日：2006-03-07

申请号：US11201672

申请日：2005-08-10

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： G02B26/00 ,  G02B26/02

CPC分类号： G02B26/0841

摘要： A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to an actuator by a first torsional hinge along a rotational axis. The actuator has a body and a group of rotational teeth extending from the body. An anchor is coupled another end of the actuator by a second torsional hinge along the rotational axis.

摘要翻译： 微机电系统（MEMS）镜装置包括通过沿旋转轴线的第一扭转铰链联接到致动器的反射镜。 致动器具有从主体延伸的主体和一组旋转齿。 锚固体通过沿着旋转轴线的第二扭转铰链联接致动器的另一端。

公开(公告)号：US06985279B1

公开(公告)日：2006-01-10

申请号：US10910384

申请日：2004-08-02

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： G02B7/182

CPC分类号： G02B26/0841

摘要： A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to a rotating frame by a first torsional hinge along a rotational axis. The rotating frame has a body that defines a frame opening, and a group of rotational teeth extending from the body. A first bonding pad is located in the frame opening and coupled to the rotating frame by a second torsional hinge along the rotational axis. A second bonding pad is coupled to the rotating frame by a third torsional hinge along the rotational axis.

摘要翻译： 微机电系统（MEMS）镜装置包括通过第一扭转铰链沿着旋转轴线耦合到旋转框架的反射镜。 旋转框架具有限定框架开口的主体和从主体延伸的一组旋转齿。 第一接合垫位于框架开口中，并通过沿着旋转轴线的第二扭转铰链与旋转框架连接。 第二接合焊盘通过沿着旋转轴线的第三扭转铰链联接到旋转框架。