公开(公告)号：US10480974B2

公开(公告)日：2019-11-19

申请号：US16017917

申请日：2018-06-25

申请人： Liji Huang ,  Chih-Chang Chen

发明人： Liji Huang ,  Chih-Chang Chen

IPC分类号： G01F1/692 ,  G01F1/708 ,  G01F7/00 ,  G01F1/684 ,  G01F1/696

摘要： The present invention disclosed a micromachined composite silicon flow sensor that is comprised of calorimetric flow sensing elements, time-of-flight sensing elements as well as independent temperature sensing element on a silicon-on-insulator device where the device layer is used for the thermal isolation membrane. The disclosed composite silicon flow sensor can measure mass flowrate, volumetric flowrate and flow medium temperature simultaneously, from which a full spectrum of flow parameters including flow pressure can be obtained. The sensor can be further used to alert any changes in physical properties of flow medium during operation. The disclosed manufacture process details the micromachining process of making such a sensor.

公开(公告)号：US20120216629A1

公开(公告)日：2012-08-30

申请号：US13035639

申请日：2011-02-25

申请人： Liji Huang ,  Chih-Chang Chen ,  Yahong Yao ,  Xiaozhong Wu

发明人： Liji Huang ,  Chih-Chang Chen ,  Yahong Yao ,  Xiaozhong Wu

IPC分类号： G01F1/708

CPC分类号： G01F1/7084 ,  G01F1/72

摘要： An apparatus comprising a micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon flow sensor, a flow channel package, and a driving circuitry, which operates in a working principle of thermal time-of-flight (TOF) to measure gas or liquid flow speed, is disclosed in the present invention. The micromachining technique for fabricating this MEMS time-of-flight silicon thermal flow sensor can greatly reduce the sensor fabrication cost by batch production. This microfabrication process for silicon time-of-flight thermal flow sensors provides merits of small feature size, low power consumption, and high accuracy compared to conventional manufacturing methods. Thermal time-of-flight technology in principle can provide accurate flow speed measurements for gases regardless of its gas compositions. In addition, the present invention further discloses the package design and driving circuitry which is utilized by the correlated working principle.

摘要翻译： 一种包括微加工（也称为MEMS，微机电系统）硅流量传感器，流动通道封装和驱动电路的装置，其以热时间飞行（TOF）的工作原理工作以测量气体或液体流量 速度，在本发明中公开。 用于制造这种MEMS飞行时间硅热流量传感器的微加工技术可以通过批量生产大大降低传感器制造成本。 与传统的制造方法相比，这种用于硅时间飞行热流传感器的微加工工艺具有小特征尺寸，低功耗和高精度的优点。 原理上，热时间飞行技术可以为气体提供准确的流速测量，无论其气体成分如何。 此外，本发明还公开了通过相关工作原理利用的封装设计和驱动电路。

公开(公告)号：US20070017285A1

公开(公告)日：2007-01-25

申请号：US11157604

申请日：2005-06-21

申请人： Gaofeng Wang ,  Chih-Chang Chen ,  Yahong Yao ,  Liji Huang

发明人： Gaofeng Wang ,  Chih-Chang Chen ,  Yahong Yao ,  Liji Huang

IPC分类号： G01F1/68

CPC分类号： G01F1/6845

摘要： An integrated mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or P-type silicon substrate with orientation . This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the sensors out of contact with the substrate base. The mass flow sensor is arranged for integration on a same silicon substrate to form a one-dimensional or two-dimensional array in order to expand the dynamic measurement range. For each sensor, the thermally isolated membrane is formed by a process that includes a step of first depositing dielectric thin-film layers over the substrate and then performing a backside etching process on a bulk silicon with TMAH or KOH or carrying out a dry plasma etch until the bottom dielectric thin-film layer is exposed. Before backside etching the bulk silicon, rectangular openings are formed on the dielectric thin-film layers by applying a plasma etching to separate the area of heater and sensing elements from the rest of the membrane. This mass flow sensor is operated with two sets of circuits, a first circuit for measuring a flow rate in a first range of flow rates and a second circuit for measuring a flow rate in a second range of flow rates, to significantly increase range of flow rate measurements, while maintains a high degree of measurement accuracy.

摘要翻译： 通过在取向<100>的N型或P型硅衬底上进行微加工工艺的方法制造集成的质量流量传感器。 该质量流量传感器包括中央薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器的热隔离膜和与基板基板接触的传感器。 质量流量传感器布置成集成在相同的硅衬底上以形成一维或二维阵列，以便扩大动态测量范围。 对于每个传感器，热隔离膜通过包括首先在衬底上沉积电介质薄膜层然后用TMAH或KOH对体硅进行背面蚀刻工艺或进行干等离子体蚀刻的步骤来形成 直到底部介电薄膜层暴露。 在背面蚀刻体硅之前，通过施加等离子体蚀刻在电介质薄膜层上形成矩形开口，以将加热器的区域和感测元件与膜的其余部分分开。 该质量流量传感器用两组电路操作，第一电路用于测量第一流量范围内的流量，以及用于测量在第二流量范围内的流量的第二电路，以显着增加流量范围 速率测量，同时保持高度的测量精度。

公开(公告)号：US11927555B2

公开(公告)日：2024-03-12

申请号：US17330269

申请日：2021-05-25

申请人： Liji Huang ,  Yahong Yao ,  Li Chen ,  Chih-Chang Chen

发明人： Liji Huang ,  Yahong Yao ,  Li Chen ,  Chih-Chang Chen

IPC分类号： G01N25/18 ,  G01F1/68 ,  G01F1/684 ,  G01F1/69 ,  G01F1/692 ,  G01F1/699 ,  G01F15/14

CPC分类号： G01N25/18 ,  G01F1/6845 ,  G01F1/6847 ,  G01F1/69 ,  G01F1/692 ,  G01F1/699 ,  G01F15/14

摘要： The design and structure of a fluidic concentration metering device with a full dynamic range utilizing micro-machined thermal time-of-flight sensing elements is exhibited in this disclosure. With an additional identical sensing chip but packaged at the different locations in the measurement fluidic chamber with a closed conduit, the device can simultaneously measure the fluidic concentration and the fluidic flowrate. With a temperature thermistor integrated on the same micro-machined thermal sensing chip, the disclosed device will be able to provide the key processing parameters for the fluidic applications.

公开(公告)号：US10240723B2

公开(公告)日：2019-03-26

申请号：US15609518

申请日：2017-05-31

申请人： Liji Huang ,  Chih-Chang Chen

发明人： Liji Huang ,  Chih-Chang Chen

IPC分类号： F17C13/02 ,  F17C13/04 ,  G01F1/684 ,  G01F1/696 ,  A61M16/10 ,  A61M16/16 ,  A61M16/00

摘要： The design and structure of a regulated digital gas dispense apparatus is exhibited in this disclosure. The MEMS mass flow meter embedded with a Bluetooth communication device and powered by a battery pack is designed to replace the mechanical low pressure gauge in a conventional gas dispense regulator such that the dispensed gas flowrate as well as totalized dispensed gas volume in each session or in consequent sessions can be continuously and precisely registered. The measured data are further relayed to local users via the local display or physical data port as well as via a paired smart device running a customized APP that can further relay the data to a designated cloud for cloud data processing, and the data can be streamed reversely. This disclosure shall assist and realize the ultimate optimized management for the users, distributors and/or gas manufacturers in the gas dispensing industry.

公开(公告)号：US20120024054A1

公开(公告)日：2012-02-02

申请号：US12847881

申请日：2010-07-30

申请人： Liji Huang ,  Kai Peng ,  Changming Jiang ,  Wenhong Deng ,  Chih-Chang Chen

发明人： Liji Huang ,  Kai Peng ,  Changming Jiang ,  Wenhong Deng ,  Chih-Chang Chen

IPC分类号： G01F1/692

CPC分类号： G01F1/6845

摘要： With increasing demands on data communication and remote control in current industrial processes or gas measurement applications, development of new technologies would be necessary. The current invention presents a MEMS mass flow meter that are cost compatible with conventional variable area flow meters while providing all digital data process including accumulated flow rate measurements, user programmable flow rate alarm and flow data storage. These in-line meters provide packages in pipe diameter from 4 mm up to 100 mm. It is powered with battery and can be used as a stand-alone hand-held option. The meter is also equipped with the industrial standard RS485 Modbus communication interface for easy network and remote management.

摘要翻译： 随着当前工业过程或气体测量应用中对数据通信和远程控制的需求不断增加，新技术的开发将是必要的。 本发明提出了一种MEMS质量流量计，其与传统的可变区域流量计成本兼容，同时提供所有数字数据处理，包括累积流量测量，用户可编程流量报警和流量数据存储。 这些直列式仪表提供管直径从4 mm到100 mm的包装。 它由电池供电，可用作独立的手持选项。 该仪表还配有工业标准RS485 Modbus通讯接口，便于网络和远程管理。

公开(公告)号：US20110283812A1

公开(公告)日：2011-11-24

申请号：US12786233

申请日：2010-05-24

申请人： Liji Huang ,  Wei Ching ,  Chih-Chang Chen

发明人： Liji Huang ,  Wei Ching ,  Chih-Chang Chen

IPC分类号： G01F1/44

CPC分类号： G01F1/692 ,  F41G1/40 ,  F41G1/46 ,  F41G1/473 ,  G01F1/6845

摘要： An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon sensor to measure air flow velocity on targeting correction for projectiles arms is disclosed in the present invention. The air flow velocity component perpendicular to the travel direction of bullets with respect to projectile arm body (e.g. bullets, shells, or arrows) has main effect to the targeting accuracy. Such effect is pretty much determined by the wind speed and the projectile travel distance. The integration with MEMS mass flow sensor has made the invented apparatus possible to be compact, low power consumption, low cost and high accuracy. The low power consumption characteristic of MEMS mass flow sensor is especially crucial for making the apparatus of present invention feasible by battery operated.

摘要翻译： 在本发明中公开了一种与微机械（即微机电微机电系统）微机电系统集成的装置，用于测量针对射弹臂的目标校正的空气流速。 相对于射弹臂体（例如子弹，外壳或箭头），子弹的行进方向垂直的气流速度分量对瞄准精度有主要影响。 这种影响几乎取决于风速和射弹行程距离。 与MEMS质量流量传感器的集成使得本发明的设备可以紧凑，低功耗，低成本和高精度。 MEMS质量流量传感器的低功耗特性对于通过电池供电使本发明的装置变得可行是特别关键的。

公开(公告)号：USD1032386S1

公开(公告)日：2024-06-25

申请号：US29850163

申请日：2022-08-17

申请人： Liji Huang

设计人： Liji Huang

摘要： FIG. 1 is a front right perspective view of a MEMS mass flow controller in accordance with the present design.
FIG. 2 is a front view for the MEMS mass flow controller.
FIG. 3 is a rear view thereof.
FIG. 4 is a left side plan view thereof.
FIG. 5 is a right side plan view thereof.
FIG. 6 is a top view thereof; and,
FIG. 7 is a bottom view thereof.
Broken lines are used to show environment and boundaries that form no part of the claimed design.

公开(公告)号：US08644693B2

公开(公告)日：2014-02-04

申请号：US12796565

申请日：2010-06-08

申请人： Liji Huang ,  Jiliang Ruan ,  Jian Luo ,  Chih-Chang Chen

发明人： Liji Huang ,  Jiliang Ruan ,  Jian Luo ,  Chih-Chang Chen

IPC分类号： F24H1/10

CPC分类号： G01N33/2888 ,  G01N25/18

摘要： An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon thermal sensor as a proximity switch sensor in air/oil Lubricators is disclosed in the present invention. The present invention relates to mass flow sensing and measurement for both gas and liquid phase and relates to air/oil lubrication process for multi-point lubrication machine. The invented apparatus is utilized as an alarm device to prevent mechanical system failures caused by the discontinuity of oil lubrication. The MEMS silicon thermal sensor is distinguished with a variety of advantages of small size, low power consumption, high reliability and high accuracy. In addition to the above benefits, the most significant and critical advantage is its fast response time of less than 20 msec, which makes the proximity switch control become viable for preventing equipment damage from oil lubricants discontinuity.

摘要翻译： 本发明公开了一种与微加工（即微机电MEMS机械系统）硅热传感器集成的装置，作为空气/油中的接近开关传感器。 本发明涉及气相和液相的质量流量感测和测量，涉及多点润滑机的空气/油润滑过程。 本发明的装置用作报警装置，以防止油润滑不连续引起的机械系统故障。 MEMS硅热传感器具有体积小，功耗低，可靠性高，精度高等优点。 除了上述优点之外，最重要和最关键的优点是其快速响应时间小于20毫秒，这使得接近开关控制变得可行，以防止油润滑剂不连续的设备损坏。

公开(公告)号：US08544320B2

公开(公告)日：2013-10-01

申请号：US12782521

申请日：2010-05-18

申请人： Liji Huang ,  Jialuo Jack Xuan ,  Chih-Chang Chen

发明人： Liji Huang ,  Jialuo Jack Xuan ,  Chih-Chang Chen

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  F41G1/40 ,  G01F1/692

摘要： A wind or gas velocity profiler integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon sensors in an open or enclosed space is disclosed in the present invention. There are three main embodiments disclosed in the present invention. Through the preambles of the independent claims, the advantages and merits of such measurement apparatus with MEMS flow sensor will be demonstrated as well. A silicon-based MEMS flow sensor can greatly reduce the sensor fabrication cost by a batch production. The integration with MEMS flow sensor makes the invented anemometer operate in the ways of better measurement accuracy, lower power consumption, higher reliability and a compact dimension compared to traditional anemometers such as cup anemometer, thermal anemometer and ultrasonic anemometer.

摘要翻译： 在本发明中公开了与开放式或封闭空间中的微机械（微机电，微机电系统）硅传感器集成的风或气体速度分析仪。 在本发明中公开了三个主要实施例。 通过独立权利要求的前序，也将证明具有MEMS流量传感器的这种测量装置的优点和优点。 硅基MEMS流量传感器可以通过批量生产大大降低传感器制造成本。 与传统的风速计，比如杯式风速计，热风速计和超声波风速计相比，与MEMS流量传感器的集成使得本发明的风速计以更好的测量精度，更低的功耗，更高的可靠性和紧凑的尺寸运行。