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1.发明授权Titania-doped quartz glass and making method, EUV lithographic member and photomask substrate 有权二氧化钛掺杂石英玻璃和制备方法，EUV光刻元件和光掩模基板公开(公告)号：US07585598B2
公开(公告)日：2009-09-08
申请号：US11634270
申请日：2006-12-06
Applicant: Shigeru Maida , Motoyuki Yamada
Inventor： Shigeru Maida , Motoyuki Yamada
CPC classification number: C03B19/1407 , B82Y10/00 , B82Y40/00 , C03B19/1415 , C03B19/1446 , C03B19/1453 , C03B19/1484 , C03B2201/42 , C03C3/06 , C03C2201/11 , C03C2201/21 , C03C2201/23 , C03C2201/42 , G03F1/24 , G03F1/60 , G21K2201/067
Abstract: A titania-doped quartz glass containing 3-12 wt % of titania at a titania concentration gradient less than or equal to 0.01 wt %/μm and having an apparent transmittance to 440 nm wavelength light of at least 30% at a thickness of 6.35 mm is of such homogeneity that it provides a high surface accuracy as required for EUV lithographic members, typically EUV lithographic photomask substrates.
Abstract translation: 在二氧化钛浓度梯度小于或等于0.01重量％/重量的情况下，含有3-12重量％的二氧化钛的二氧化钛掺杂的石英玻璃，并且对于440nm波长具有至多30％的表观透射率，厚度为6.35mm 具有这样的同质性，其提供了EUV光刻元件（通常为EUV光刻光掩模基板）所需的高表面精度。
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公开(公告)号：US06238462B1
公开(公告)日：2001-05-29
申请号：US09353202
申请日：1999-07-14
Applicant: Steven A. Dunwoody , Lei Jiang , Dale R. Powers , Freddie G. Prince
Inventor： Steven A. Dunwoody , Lei Jiang , Dale R. Powers , Freddie G. Prince
IPC: B01D5314
CPC classification number: B01D53/64 , C03B19/1446 , C03B37/0144 , C03B37/01846 , C03B2201/31
Abstract: A method is disclosed for recovering germanium from a gaseous mixture which includes a germanium-containing compound in vapor or particulate form, acid in vapor form, and water vapor. The gaseous mixture is contacted with a liquid containing water under conditions effective to dissolve the germanium-containing compound in the liquid. The acidity of the resulting liquid mixture is increased under conditions effective to vaporize the germanium-containing compound. The vaporized germanium-containing compound is contacted with one or more aqueous solutions under conditions effective to dissolve and precipitate the germanium-containing compound in at least one of the one or more aqueous solutions, and the resulting precipitate is separated from the at least one of the one or more aqueous solutions. The methods described herein are particularly well suited for recovering germanium from the waste gases produced during optical waveguide manufacturing processes. Germanium recovered by this method can thereafter be used in the production of semiconductors, optical waveguide fibers and optical components.
Abstract translation: 公开了一种用于从气体混合物中回收锗的方法，所述气体混合物包括蒸气或颗粒形式的含锗化合物，蒸汽形式的含酸化合物和水蒸气。 在有效溶解含锗化合物的液体中的条件下，气态混合物与含有液体的液体接触。 所得液体混合物的酸度在有效蒸发含锗化合物的条件下增加。 蒸发的含锗化合物在有效溶解和沉淀至少一种一种或多种水溶液中的含锗化合物的条件下与一种或多种水溶液接触，并将所得沉淀物从至少一种 一种或多种水溶液。 本文描述的方法特别适用于从光波导制造过程中产生的废气中回收锗。 然后通过该方法回收的锗可以用于半导体，光波导纤维和光学部件的制造。
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公开(公告)号：USRE40586E1
公开(公告)日：2008-11-25
申请号：US11880424
申请日：2007-07-20
Applicant: Kenneth E. Hrdina , John E. Maxon , Brent R. Mclean
Inventor： Kenneth E. Hrdina , John E. Maxon , Brent R. Mclean
CPC classification number: B82Y10/00 , B82Y40/00 , C03B19/1446 , C03B19/1484 , C03B2201/42 , C03B2207/62 , C03B2207/66 , C03C3/06 , C03C4/0085 , C03C2201/42 , C03C2203/40 , G03F1/24 , G03F7/70958
Abstract: Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.
Abstract translation: 公开了含有二氧化钛的二氧化硅玻璃体和具有低水平条纹的极紫外线元件。 还公开了用于制造和测量玻璃元件和极紫外元件中的条纹的方法和装置。
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公开(公告)号：US20020028300A1
公开(公告)日：2002-03-07
申请号：US09852139
申请日：2001-05-09
Inventor： Takuya Komatsu , Kazutaka Nara , Kazuhisa Kashihara
IPC: B05D005/06 , B05D003/08
CPC classification number: C03B19/1446 , C23C16/4412 , C23C16/453 , Y02P40/57
Abstract: The invention provides a manufacturing method of an optical waveguide able to precisely manufacture the optical waveguide having a waveguide construction as designed, and improve yield as one example. In this manufacturing method, a hydrolysis reaction of raw material gas of glass is caused within an oxygen-hydrogen flame by flowing the raw material gas, oxygen gas and hydrogen gas from a burner, and an optical waveguide forming area is formed by depositing glass particulates on a substrate. The oxygen-hydrogen flame is injected toward the optical waveguide forming area in a slanting direction on the substrate. An exhaust pipe is arranged on the discharging side of an injecting flow. Surplus glass particulates unattached to the optical waveguide forming area are sucked and exhausted by the exhaust pipe. The surplus glass particulates are sucked and exhausted by the exhaust pipe by inclining a suction port side of the exhaust pipe by an angle within a range from 5null to 30null with respect to a face of the substrate.
Abstract translation: 本发明提供一种光波导的制造方法，其能够精确地制造具有设计的波导结构的光波导，并且作为一个示例提高产量。 在该制造方法中，通过使来自燃烧器的原料气体，氧气和氢气流动而在氧 - 氢火焰内引起玻璃原料气体的水解反应，并且通过沉积玻璃微粒形成光波导形成区域 在基板上。 在基板上沿着倾斜方向朝向光波导形成区域注入氧 - 氢火焰。 排气管布置在喷射流的排放侧。 未连接到光波导形成区域的剩余玻璃微粒被排气管吸引并排出。 通过使排气管的吸入口侧相对于基板的表面倾斜5°〜30°的范围内的角度，将多余的玻璃微粒吸引排气。
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5.发明申请ELECTROSTATIC METHOD AND APPARATUS TO FORM LOW-PARTICULATE DEFECT THIN GLASS SHEETS 有权形成低颗粒缺陷薄膜的静电方法和装置公开(公告)号：US20130316136A1
公开(公告)日：2013-11-28
申请号：US13477566
申请日：2012-05-22
Applicant: Daniel Warren Hawtof , Brenton Allen Noll , Srinivas Vemury
Inventor： Daniel Warren Hawtof , Brenton Allen Noll , Srinivas Vemury
CPC classification number: C03B19/1446 , C03B19/1423 , C03B19/1492 , Y02P40/57 , Y10T428/24355 , Y10T428/268
Abstract: A high-surface quality glass sheet is formed using a roll-to-roll glass soot deposition and sintering process. The glass sheet formation involves providing glass soot particles, depositing a first fraction of the glass soot particles on a deposition surface to form a supported soot layer, electrostatically attracting and collecting a second fraction of the glass soot particles onto a surface of a charged plate, removing the soot layer from the deposition surface to form a soot sheet, and heating at least a portion of the soot sheet to sinter the glass soot particles to form a glass sheet.
Abstract translation: 使用辊对辊玻璃烟灰沉积和烧结工艺形成高表面质量的玻璃板。 玻璃板形成包括提供玻璃烟灰颗粒，在沉积表面上沉积玻璃烟灰颗粒的第一部分以形成支撑的烟灰层，静电吸引并将玻璃烟灰颗粒的第二部分收集到带电板的表面上， 从沉积表面除去烟灰层以形成烟灰片，并且加热至少一部分烟灰片以烧结玻璃烟灰颗粒以形成玻璃板。
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Patent Agency Ranking
公开(公告)号：US07053017B2
公开(公告)日：2006-05-30
申请号：US10378391
申请日：2003-03-03
Applicant: Kenneth E. Hrdina , John E. Maxon , Brent R. Mclean
Inventor： Kenneth E. Hrdina , John E. Maxon , Brent R. Mclean
CPC classification number: B82Y10/00 , B82Y40/00 , C03B19/1446 , C03B19/1484 , C03B2201/42 , C03B2207/62 , C03B2207/66 , C03C3/06 , C03C4/0085 , C03C2201/42 , C03C2203/40 , G03F1/24 , G03F7/70958
Abstract: Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.
Abstract translation: 公开了含有二氧化钛的二氧化硅玻璃体和具有低水平条纹的极紫外线元件。 还公开了用于制造和测量玻璃元件和极紫外元件中的条纹的方法和装置。
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7.发明授权Method of treating gaseous waste from an optical fiber preform fabrication unit 失效从光纤预制棒制造单元处理废气的方法公开(公告)号：US06792774B2
公开(公告)日：2004-09-21
申请号：US10379690
申请日：2003-03-06
Applicant: Laurent Calvo , Cyril Gallardo
Inventor： Laurent Calvo , Cyril Gallardo
IPC: F25J100
CPC classification number: C03B37/01846 , B01D53/002 , C03B19/1446 , C03B37/0144
Abstract: A method of treating gaseous waste from an optical fiber preform fabrication unit containing halogenated compounds includes a step of forming a liquid effluent from the gaseous waste by condensing the gaseous waste. The gaseous waste is preferably condensed by cooling it. Plant for implementing the method includes a condenser and a container for collecting condensate. The condenser is preferably a refrigerating device. The plant can further include a soot box.
Abstract translation: 从含有卤化化合物的光纤预制棒制造单元处理气体废物的方法包括通过冷凝气态废物从气体废料形成液体流出物的步骤。 气体废物优选通过冷却而冷凝。 用于实施该方法的装置包括冷凝器和用于收集冷凝物的容器。 冷凝器优选为冷藏装置。 工厂可以进一步包括一个烟灰箱。
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公开(公告)号：US06339940B1
公开(公告)日：2002-01-22
申请号：US09553392
申请日：2000-04-20
Applicant: Motoyuki Yamada , Hisatoshi Otsuka , Koji Matsuo
Inventor： Motoyuki Yamada , Hisatoshi Otsuka , Koji Matsuo
IPC: C03B1906
CPC classification number: C03B37/0144 , C03B19/1407 , C03B19/1446
Abstract: A process for manufacturing synthetic quartz glass involves feeding a quartz glass-forming raw material to a high-temperature gas zone within a chamber, converting the quartz glass-forming raw material into quartz soot, and forming synthetic quartz glass from the soot. A suspended soot-discharging gas which has been flow-straightened in a suspended soot discharging direction flows through the chamber in the vicinity of the high-temperature gas zone. This process keeps free suspended soot from settling onto the surface of the quartz ingot where fusion and growth take place, thereby preventing the formation of bubbles within the quartz glass under growth.
Abstract translation: 制造合成石英玻璃的方法包括将石英玻璃形成原料进料到室内的高温气体区域，将石英玻璃形成原料转化成石英烟灰，并从烟灰形成合成石英玻璃。 在悬浮烟炱排出方向上流动整流的悬浮的烟灰排出气体在高温气体区域附近流过室。 该过程保持游离的悬浮烟灰沉降到熔融和生长发生的石英锭的表面上，从而防止石英玻璃生长过程中的气泡形成。
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9.发明授权Electrostatic method and apparatus to form low-particulate defect thin glass sheets 有权静电法和装置形成低颗粒缺陷薄玻璃板公开(公告)号：US09199870B2
公开(公告)日：2015-12-01
申请号：US13477566
申请日：2012-05-22
Applicant: Daniel Warren Hawtof , Brenton Allen Noll , Srinivas Vemury
Inventor： Daniel Warren Hawtof , Brenton Allen Noll , Srinivas Vemury
IPC: C03B19/14
CPC classification number: C03B19/1446 , C03B19/1423 , C03B19/1492 , Y02P40/57 , Y10T428/24355 , Y10T428/268
Abstract: A high-surface quality glass sheet is formed using a roll-to-roll glass soot deposition and sintering process. The glass sheet formation involves providing glass soot particles, depositing a first fraction of the glass soot particles on a deposition surface to form a supported soot layer, electrostatically attracting and collecting a second fraction of the glass soot particles onto a surface of a charged plate, removing the soot layer from the deposition surface to form a soot sheet, and heating at least a portion of the soot sheet to sinter the glass soot particles to form a glass sheet.
Abstract translation: 使用辊对辊玻璃烟灰沉积和烧结工艺形成高表面质量的玻璃板。 玻璃板形成包括提供玻璃烟灰颗粒，在沉积表面上沉积玻璃烟灰颗粒的第一部分以形成支撑的烟灰层，静电吸引并将玻璃烟灰颗粒的第二部分收集到带电板的表面上， 从沉积表面除去烟灰层以形成烟灰片，并且加热至少一部分烟灰片以烧结玻璃烟灰颗粒以形成玻璃板。
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10.发明授权Titania-doped quartz glass and making method, EUV lithographic member and photomask substrate 有权二氧化钛掺杂石英玻璃和制备方法，EUV光刻元件和光掩模基板公开(公告)号：US07849711B2
公开(公告)日：2010-12-14
申请号：US12512436
申请日：2009-07-30
Applicant: Shigeru Maida , Motoyuki Yamada
Inventor： Shigeru Maida , Motoyuki Yamada
CPC classification number: C03B19/1407 , B82Y10/00 , B82Y40/00 , C03B19/1415 , C03B19/1446 , C03B19/1453 , C03B19/1484 , C03B2201/42 , C03C3/06 , C03C2201/11 , C03C2201/21 , C03C2201/23 , C03C2201/42 , G03F1/24 , G03F1/60 , G21K2201/067
Abstract: A titania-doped quartz glass containing 3-12 wt % of titania at a titania concentration gradient less than or equal to 0.01 wt %/μm and having an apparent transmittance to 440 nm wavelength light of at least 30% at a thickness of 6.35 mm is of such homogeneity that it provides a high surface accuracy as required for EUV lithographic members, typically EUV lithographic photomask substrates.
Abstract translation: 含有3-12重量％二氧化钛的二氧化钛掺杂的石英玻璃，其二氧化钛浓度梯度小于或等于0.01重量％/μm，并且对于440nm波长具有至多30％的表观透射率，厚度为6.35mm 具有这样的同质性，其提供了EUV光刻元件（通常为EUV光刻光掩模基板）所需的高表面精度。
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