Wafer support plate
    1.
    发明申请
    Wafer support plate 有权
    晶圆支撑板

    公开(公告)号:US20040124413A1

    公开(公告)日:2004-07-01

    申请号:US10736685

    申请日:2003-12-17

    Abstract: A wafer support plate comprises a support surface on which a semiconductor wafer is supported, and a crystal orientation mark which indicates the crystal orientation of the semiconductor wafer. Even the semiconductor wafer thinned by grinding can be stably held on the support surface, and the crystal orientation can be recognized even when the outer periphery of the semiconductor wafer has chipped.

    Abstract translation: 晶片支撑板包括支撑半导体晶片的支撑表面和指示半导体晶片的晶体取向的晶体取向标记。 即使通过研磨而减薄的半导体晶片也能够稳定地保持在支撑面上,即使半导体晶片的外周已经发生切屑,也能够识别晶体取向。

    Card retention system and method
    2.
    发明申请
    Card retention system and method 审中-公开
    卡保留系统和方法

    公开(公告)号:US20040084388A1

    公开(公告)日:2004-05-06

    申请号:US10287889

    申请日:2002-11-05

    CPC classification number: G11B33/127 G06F1/184 G06F1/185 G06F1/186

    Abstract: A card retention system comprises a retainer adapted to apply an increasing level of retention force to an expansion card disposed in a chassis as a size of the expansion card increases. The system also comprises a support member adapted to support the retainer in a plurality of different locations relative to the expansion card.

    Abstract translation: 卡片保持系统包括保持器,其适于随着扩展卡的尺寸增加而将设置在底盘中的扩展卡施加不断增加的保持力。 该系统还包括适于将保持器相对于扩展卡支撑在多个不同位置的支撑构件。

    Apparatus for manufacturing integrated circuit device
    3.
    发明申请
    Apparatus for manufacturing integrated circuit device 失效
    集成电路器件制造装置

    公开(公告)号:US20040022607A1

    公开(公告)日:2004-02-05

    申请号:US10627565

    申请日:2003-07-24

    CPC classification number: H01L21/67313 H01L21/67326 H01L21/68707

    Abstract: An apparatus includes a chamber for containing a fluid, a guide seated in the chamber, and a transfer robot for loading and/or unloading a plurality of wafers to and/or from the guide. The wafers are located on the guide. The guide has a supporting member for supporting a wafer and a stopper member for preventing the wafer from being inclined over a predetermined range. The stopper member is in contact with a wafer edge disposed at a higher position than a wafer edge supported by the supporting member. A wafer guide has a stopper member to prevent adjacent wafers from being inclined and coming in contact with each other. Therefore, it is possible to suppress a poor drying such as water spots (or watermarks) produced when wafers are adhered to each other in a drying process.

    Abstract translation: 一种装置包括用于容纳流体的腔室,位于腔室中的导向器和用于将多个晶片装载和/或从该引导件卸载的传送机器人。 晶片位于导轨上。 引导件具有用于支撑晶片的支撑构件和用于防止晶片倾斜超过预定范围的止动构件。 止动构件与设置在比由支撑构件支撑的晶片边缘更高的位置处的晶片边缘接触。 晶片引导件具有阻止相邻晶片倾斜并彼此接触的止动件。 因此,可以抑制在干燥过程中晶片彼此粘附时产生的水斑(或水印)等干燥不良。

    Disk rack for pot lids
    4.
    发明申请
    Disk rack for pot lids 审中-公开
    锅盖的磁盘架

    公开(公告)号:US20030213759A1

    公开(公告)日:2003-11-20

    申请号:US10430250

    申请日:2003-05-06

    CPC classification number: A47L19/04 A47J47/16

    Abstract: The present invention refers to a disk rack, of the type composed of an equally spaced parallel series of vertical support elements made of thin coated wire, characterised in that each support element is basically composed of two lateral ascending sections joined on top by a shaped crosspiece with downward central portion suitable for housing the knob of pot lids.

    Abstract translation: 本发明涉及一种盘形架,其类型由等间距平行的由薄涂层线制成的垂直支撑元件组成,其特征在于,每个支撑元件基本上由两个横向上升部分组成,所述两个侧向上升部分通过成形的横档 其具有适于容纳罐盖的旋钮的向下中心部分。

    Substrate holding apparatus
    6.
    发明申请
    Substrate holding apparatus 审中-公开
    基板保持装置

    公开(公告)号:US20030178379A1

    公开(公告)日:2003-09-25

    申请号:US10389631

    申请日:2003-03-13

    CPC classification number: H01L21/67313 H01L21/6704 H01L21/68707

    Abstract: A substrate holding apparatus for holding substrates in vertical posture includes a first holder, a second holder and a substrate fall preventing stand arranged along edges of the substrates and located below centers of the substrates. The first holder is disposed in a position for holding the substrates between lower ends and lateral ends of the substrates. The second holder is disposed in a position for holding the substrates at the lower ends of the substrates, or in a position opposed to the first holder across the lower ends for holding the substrates between the lower ends and lateral ends of the substrates. The substrate fall preventing stand being disposed opposite the first holder across the lower ends of the substrates and above the second holder.

    Abstract translation: 用于保持垂直姿势的基板的基板保持装置包括沿着基板的边缘布置并位于基板的中心下方的第一保持器,第二保持器和基板防止台。 第一保持器设置在用于将基板保持在基板的下端和侧端之间的位置。 第二保持器设置在用于将基板保持在基板的下端的位置,或者在与第一保持器相对的位置穿过下端,用于将基板保持在基板的下端和侧端之间。 基板防跌落架跨越基板的下端并且在第二支架上方与第一支架相对设置。

    Adjustable wire storage rack unit for pots, pans and lids
    7.
    发明申请
    Adjustable wire storage rack unit for pots, pans and lids 失效
    适用于锅,平底锅和盖子的可调节线材储存架单元

    公开(公告)号:US20030168417A1

    公开(公告)日:2003-09-11

    申请号:US10194287

    申请日:2002-07-15

    Inventor: Fletcher Morgan

    CPC classification number: A47F5/01 A47J47/16

    Abstract: A wire storage rack for storing pots, pans, skillets and lids comprising a plurality of wire members, each of which is provided with a plurality of sleeve assemblies providing horizontal and vertical adjustment of the wire members. Each sleeve assembly is constructed of a sleeve with a freely rotatable threaded nut mounted on one end. A plurality of anchor legs are mounted to the sleeve assemblies for anchoring the wire storage rack and an offset nullUnull shaped wire member with a plurality of shaped upright rods is secured to said sleeve assemblies.

    Abstract translation: 一种用于储存包括多个线材的罐,平底锅,滑雪板和盖子的线材存放架,每个线材构件设置有多个套筒组件,其提供线材的水平和垂直调节。 每个套筒组件由安装在一端的可自由旋转的螺母的套筒构成。 多个锚腿安装到套筒组件上,用于固定线材存放架,并且具有多个成形直立杆的偏移“U”形线材固定到所述套筒组件上。

    Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
    8.
    发明申请
    Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same 有权
    半导体晶片舟具有可堆叠的独立可更换的船舶部件和包括该艇部件的垂直热处理设备

    公开(公告)号:US20020092815A1

    公开(公告)日:2002-07-18

    申请号:US09970690

    申请日:2001-10-05

    CPC classification number: H01L21/67303 C30B31/14 H01L21/67309

    Abstract: A semiconductor wafer boat has a plurality of discrete boat parts stacked one atop the other. Each of the of the boat parts includes a wafer support in the form of a plurality of columns each having a plurality of vertically spaced apart grooves for use in supporting semiconductor wafers as vertically spaced from one another. Corresponding ones of the grooves in the columns of a boat part can receive the outer peripheral edge of the wafer directly, or a ring plate to which the wafer is mounted. Each adjacent pair of boat parts has confronting end portions forming a joint at which the boat parts of the pair are freely coupled to one another such that each of the boat parts may be replaced independently of the other boat parts. Thus, when any of the boat parts experiences thermal deformation after long periods of use, the boat part may be readily replaced without damaging any part of the boat and without the costs associated with replacing the boat entirely.

    Abstract translation: 半导体晶片舟皿具有彼此叠置的多个分立的舟状部件。 每个船舶部件包括多个列的形式的晶片支撑,每个柱具有多个垂直间隔的槽,用于将半导体晶片彼此垂直间隔地支撑。 舟形部件的列中相应的凹槽中的凹槽可以直接接收晶片的外围边缘,或者可以接收晶片安装的环形板。 每对相邻的船舶部件具有形成接头的相对端部,在该接头处,该对的船形部件彼此自由地连接,使得每个船舶部件可以独立于其他船舶部件进行更换。 因此,当任何船舶部件在长时间使用之后经历热变形时,船部件可以容易地更换,而不损坏船的任何部分,并且没有与完全更换船相关的成本。

    CONVERTIBLE BOARD HOLDER
    9.
    发明申请
    CONVERTIBLE BOARD HOLDER 失效
    可变板持有人

    公开(公告)号:US20020084232A1

    公开(公告)日:2002-07-04

    申请号:US09752030

    申请日:2000-12-29

    Inventor: Chun-Tse Yang

    CPC classification number: B65D81/057 B65D85/48 B65D2581/055 B65D2581/056

    Abstract: The present invmntion relates to a convertible board holder for positioning and cushioning at least one article each having two continuous side walls. The convertible board holder comprises a first portion, a second portion and a hinged portion The first portion has at least one first transverse recess. The second portion has at least one second transverse recess corresponding to the first recess of the first portion. The hinged portion continuously connects between the first portion and the second portion in a corrugated form so that when the first portion and the second portion are rotationally converted about the hinged portion at a certain angle, the first transverse recess and second transverse recess are adapted to receive the two side walls of the article, respectively. Therefore, the convertible board holder of the invention can position and cushion at least two side walls of an article. The convertible board holder can position and cushion a plurality of articles. The cost of the convertible board holder is low and the effect of the convertible board holder can be improved.

    Abstract translation: 本发明涉及一种用于定位和缓冲至少一个具有两个连续侧壁的制品的可转换板支架。 可转换板支架包括第一部分,第二部分和铰接部分。第一部分具有至少一个第一横向凹部。 第二部分具有对应于第一部分的第一凹部的至少一个第二横向凹部。 铰链部分以波纹形式连续地连接在第一部分和第二部分之间,使得当第一部分和第二部分以一定角度围绕铰接部分旋转地转换时,第一横向凹部和第二横向凹部适于 分别接收文章的两个侧壁。 因此,本发明的可转换板支架可以定位和缓冲物品的至少两个侧壁。 可转换板支架可以定位和缓冲多个物品。 可转换板架的成本低,可转换板架的效果可以提高。

    Substrate positioning apparatus and exposure apparatus
    10.
    发明申请
    Substrate positioning apparatus and exposure apparatus 审中-公开
    基板定位装置和曝光装置

    公开(公告)号:US20020079276A1

    公开(公告)日:2002-06-27

    申请号:US10020296

    申请日:2001-12-18

    Inventor: Eiichi Miyake

    CPC classification number: G03F7/707 G03F9/00 G03F9/70 H05K3/0008

    Abstract: A substrate positioning apparatus and an exposure apparatus includes a rotary circular eccentric cam mechanism as an X direction moving mechanism, in contact with one end of a support body holding a substrate, and rotary circular eccentric cam mechanisms as first and second Y direction moving mechanisms, offset in the X direction with each other, to be in contact with another side of the support body. As a result, a substrate positioning apparatus and an exposure apparatus having simple and inexpensive structure that provides satisfactory accuracy and reliability can be provided.

    Abstract translation: 基板定位装置和曝光装置包括作为X方向移动机构的旋转圆偏心凸轮机构,与保持基板的支撑体的一端接触,以及作为第一和第二Y方向移动机构的旋转圆偏心凸轮机构, 在X方向上彼此偏移以与支撑体的另一侧接触。 结果,可以提供一种提供令人满意的精度和可靠性的具有简单且便宜的结构的基板定位装置和曝光装置。

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