Abstract:
A wafer support plate comprises a support surface on which a semiconductor wafer is supported, and a crystal orientation mark which indicates the crystal orientation of the semiconductor wafer. Even the semiconductor wafer thinned by grinding can be stably held on the support surface, and the crystal orientation can be recognized even when the outer periphery of the semiconductor wafer has chipped.
Abstract:
A card retention system comprises a retainer adapted to apply an increasing level of retention force to an expansion card disposed in a chassis as a size of the expansion card increases. The system also comprises a support member adapted to support the retainer in a plurality of different locations relative to the expansion card.
Abstract:
An apparatus includes a chamber for containing a fluid, a guide seated in the chamber, and a transfer robot for loading and/or unloading a plurality of wafers to and/or from the guide. The wafers are located on the guide. The guide has a supporting member for supporting a wafer and a stopper member for preventing the wafer from being inclined over a predetermined range. The stopper member is in contact with a wafer edge disposed at a higher position than a wafer edge supported by the supporting member. A wafer guide has a stopper member to prevent adjacent wafers from being inclined and coming in contact with each other. Therefore, it is possible to suppress a poor drying such as water spots (or watermarks) produced when wafers are adhered to each other in a drying process.
Abstract:
The present invention refers to a disk rack, of the type composed of an equally spaced parallel series of vertical support elements made of thin coated wire, characterised in that each support element is basically composed of two lateral ascending sections joined on top by a shaped crosspiece with downward central portion suitable for housing the knob of pot lids.
Abstract:
The combination of a shipping container and a plurality of parallel planar panels having a pallet with a horizontal platform frame perpendicularly fixed to a rear frame, a rear wall support which is tilted obliquely and rearwardly extending from the rear of the horizontal platform frame to the top of the rear frame and a planar rear wall attached to the rear wall support. A laminated corrugated paperboard wedge having an inclined load bearing surface in conjunction with a shipping container having an obliquely tilted and rearwardly extending rear wall which provides an economical, reusable, recyclable and efficient transport container for vertically standing parallel planar panels, such as multi-glazed glass units. The shipping container is particularly useful for transporting refrigerator and freezer doors and insulating window units.
Abstract:
A substrate holding apparatus for holding substrates in vertical posture includes a first holder, a second holder and a substrate fall preventing stand arranged along edges of the substrates and located below centers of the substrates. The first holder is disposed in a position for holding the substrates between lower ends and lateral ends of the substrates. The second holder is disposed in a position for holding the substrates at the lower ends of the substrates, or in a position opposed to the first holder across the lower ends for holding the substrates between the lower ends and lateral ends of the substrates. The substrate fall preventing stand being disposed opposite the first holder across the lower ends of the substrates and above the second holder.
Abstract:
A wire storage rack for storing pots, pans, skillets and lids comprising a plurality of wire members, each of which is provided with a plurality of sleeve assemblies providing horizontal and vertical adjustment of the wire members. Each sleeve assembly is constructed of a sleeve with a freely rotatable threaded nut mounted on one end. A plurality of anchor legs are mounted to the sleeve assemblies for anchoring the wire storage rack and an offset nullUnull shaped wire member with a plurality of shaped upright rods is secured to said sleeve assemblies.
Abstract:
A semiconductor wafer boat has a plurality of discrete boat parts stacked one atop the other. Each of the of the boat parts includes a wafer support in the form of a plurality of columns each having a plurality of vertically spaced apart grooves for use in supporting semiconductor wafers as vertically spaced from one another. Corresponding ones of the grooves in the columns of a boat part can receive the outer peripheral edge of the wafer directly, or a ring plate to which the wafer is mounted. Each adjacent pair of boat parts has confronting end portions forming a joint at which the boat parts of the pair are freely coupled to one another such that each of the boat parts may be replaced independently of the other boat parts. Thus, when any of the boat parts experiences thermal deformation after long periods of use, the boat part may be readily replaced without damaging any part of the boat and without the costs associated with replacing the boat entirely.
Abstract:
The present invmntion relates to a convertible board holder for positioning and cushioning at least one article each having two continuous side walls. The convertible board holder comprises a first portion, a second portion and a hinged portion The first portion has at least one first transverse recess. The second portion has at least one second transverse recess corresponding to the first recess of the first portion. The hinged portion continuously connects between the first portion and the second portion in a corrugated form so that when the first portion and the second portion are rotationally converted about the hinged portion at a certain angle, the first transverse recess and second transverse recess are adapted to receive the two side walls of the article, respectively. Therefore, the convertible board holder of the invention can position and cushion at least two side walls of an article. The convertible board holder can position and cushion a plurality of articles. The cost of the convertible board holder is low and the effect of the convertible board holder can be improved.
Abstract:
A substrate positioning apparatus and an exposure apparatus includes a rotary circular eccentric cam mechanism as an X direction moving mechanism, in contact with one end of a support body holding a substrate, and rotary circular eccentric cam mechanisms as first and second Y direction moving mechanisms, offset in the X direction with each other, to be in contact with another side of the support body. As a result, a substrate positioning apparatus and an exposure apparatus having simple and inexpensive structure that provides satisfactory accuracy and reliability can be provided.