公开(公告)号：US06749688B2

公开(公告)日：2004-06-15

申请号：US09270781

申请日：1999-03-17

Applicant: Kiyohisa Tateyama ,  Kimio Motoda ,  Noriyuki Anai

Inventor： Kiyohisa Tateyama ,  Kimio Motoda ,  Noriyuki Anai

IPC: B05B716

CPC classification number: B05C11/08 ,  B05D1/005 ,  B05D3/104 ,  G03F7/16 ,  G03F7/161

Abstract: A coating apparatus has a spin chuck for attracting and holding a semiconductor wafer in a horizontal state by means of vacuum. A movable beam is arranged above the spin chuck. The movable beam includes first and second nozzles integrally formed. The first nozzle is used for supplying a photo-resist liquid while the second nozzle is used for supplying a solvent for the photo-resist liquid. When a coating process is performed, the movable beam above the wafer is horizontally moved in one direction. The solvent is first supplied onto the wafer from the second nozzle, and the coating or photo-resist liquid is then supplied from the first nozzle, following the solvent. Wettability of the wafer relative to the photo-resist is increased by the solvent, prior to supply of the photo-resist liquid.

Abstract translation: 涂布装置具有用于通过真空吸引并保持水平状态的半导体晶片的旋转卡盘。 可移动光束布置在旋转卡盘上方。 可动梁包括一体形成的第一和第二喷嘴。 第一喷嘴用于供应光致抗蚀剂液体，而第二喷嘴用于供应用于光致抗蚀剂液体的溶剂。 当执行涂覆处理时，晶片上方的可移动光束在一个方向上水平移动。 首先从第二喷嘴将溶剂供应到晶片上，然后在溶剂之后从第一喷嘴提供涂层或光致抗蚀剂液体。 在提供光致抗蚀剂液体之前，晶片相对于光致抗蚀剂的润湿性由溶剂增加。

公开(公告)号：US06544336B1

公开(公告)日：2003-04-08

申请号：US09580621

申请日：2000-05-30

Applicant: Fernando Luis De Souza Lopes

Inventor： Fernando Luis De Souza Lopes

IPC: B05B716

CPC classification number: B05B7/0408 ,  B05B7/066 ,  B05B7/162 ,  B05B12/36 ,  B05B14/30 ,  B05B15/52 ,  B05B15/55 ,  Y02P70/36

Abstract: Several components are used in combination to effect an apparatus for a spray system, which improves the transfer characteristics and efficiency of polymer applied to the surface of a printing plate. In accordance with this invention, the apparatus comprises: a nozzle for spraying a solid stream of polymer, a circumferential conduit surrounding the polymer spray that carries heated, high-pressure air, which heats, atomizes and improves the transfer efficiency of the polymer, a mixer that allows the mixing of the polymer's constituent reagents immediately prior to the polymer entering the spray nozzle, a fast shut-off valve that allows precision control of the spray nozzle's output, a shroud equipped with vacuum to remove and recycle “overspray”, and a cleaning arm, equipped with a vacuum, that may be activated to clean unused polymer from the components of the nozzle, and to prime the spray nozzle with fresh polymer.

Abstract translation: 组合使用几种组分来实现喷雾系统的装置，其改善施加到印刷板表面上的聚合物的转印特性和效率。 根据本发明，该装置包括：用于喷射固体聚合物流的喷嘴，围绕聚合物喷雾的周向导管，其承载加热，雾化并提高聚合物的转移效率的加热的高压空气， 混合器，其允许在聚合物进入喷嘴之前立即混合聚合物组分试剂，快速截止阀，其允许精确控制喷嘴的输出，配备有真空以除去和再循环“过喷”的护罩，以及 配有真空的清洁臂，其可以被激活以从喷嘴的部件清洁未使用的聚合物，并用新鲜的聚合物填充喷嘴。

公开(公告)号：US06827782B2

公开(公告)日：2004-12-07

申请号：US10353151

申请日：2003-01-28

Applicant: Shigehiro Goto ,  Katsushi Yoshioka ,  Minobu Matsunaga

Inventor： Shigehiro Goto ,  Katsushi Yoshioka ,  Minobu Matsunaga

IPC: B05B716

CPC classification number: H01L21/6715 ,  B05B7/1666 ,  B05B12/1472 ,  B05C5/001 ,  H01L21/67051

Abstract: A chemical treating apparatus for performing a predetermined treatment of a principal surface of a substrate by delivering a treating solution thereto. The apparatus includes a treating solution delivery nozzle for delivering the treating solution to the principal surface of a substrate. The nozzle has a treating solution reservoir adjacent a tip end thereof for storing the treating solution. A temperature control device holds the treating solution reservoir to control the temperature of the treating solution in the treating solution reservoir through heat exchange with the treating solution.

Abstract translation: 一种化学处理装置，用于通过将处理溶液输送到基板的主表面进行预定处理。 该设备包括用于将处理溶液输送到基底的主表面的处理溶液输送喷嘴。 喷嘴具有邻近其顶端的处理溶液储存器，用于存储处理溶液。 温度控制装置保持处理液储存器，以通过与处理溶液的热交换来控制处理溶液储存器中处理溶液的温度。

公开(公告)号：US06796793B2

公开(公告)日：2004-09-28

申请号：US10107849

申请日：2002-03-27

Applicant: Russell Brynolf ,  Michael D. Elberson

Inventor： Russell Brynolf ,  Michael D. Elberson

IPC: B05B716

CPC classification number: C08J7/12 ,  B29C59/085

Abstract: A method and device of treating an irregularly shaped article to prepare the article for painting is provided. The device includes a burner which can produce an adjustable flame tongue which can fit into crevices, openings and other irregular topographical features of an item to be painted or otherwise coated. The burner device further provides means to apply a grafting chemical on a freshly oxidized surface. Further, the invention provides means to colorize treated objects so that they may be recognized as having been treated. In another embodiment, the grafting chemicals may be enhanced with electrolytic solutions such that electrostatic methods of painting may be subsequently employed on the item. In an alternate embodiment, the burner is adapted to spray a powder inside of a generally enclosed flame, and is used in conjunction with chop guns to manufacture glass or carbon fiber preforms. In a preferred embodiment all of the main systems of the present invention are provided with redundancies that allow the continuous operation of the device. Further, the device provides means to run and modify the process either locally or by remote communication means.

Abstract translation: 提供了一种处理不规则形状的物品以制备用于涂装的物品的方法和装置。 该装置包括能够产生可调节的火焰舌头的燃烧器，其可以装配成待涂漆或以其他方式涂覆的物品的缝隙，开口和其它不规则形貌特征。 燃烧器装置还提供了在新鲜氧化的表面上施加接枝化学品的方法。 此外，本发明提供了对被处理物进行着色的方法，使得它们可被认为已被处理。 在另一个实施方案中，可以用电解溶液来增强接枝化学品，使得可以随后在该物品上使用静电喷涂方法。 在替代实施例中，燃烧器适于在通常封闭的火焰内喷射粉末，并且与斩枪结合使用以制造玻璃或碳纤维预制件。 在优选实施例中，本发明的所有主要系统都具有允许设备的连续操作的冗余。 此外，该装置提供在本地或通过远程通信装置运行和修改过程的装置。

公开(公告)号：US06488773B1

公开(公告)日：2002-12-03

申请号：US09637546

申请日：2000-08-11

Applicant: Walter L. Ehrhardt ,  Dennis L. Turocy

Inventor： Walter L. Ehrhardt ,  Dennis L. Turocy

IPC: B05B716

CPC classification number: B05B7/0861 ,  B05B1/26 ,  B05B7/0807 ,  B05B7/10

Abstract: A method of and apparatus for spraying a molten thermoplastic polymer composition onto a substrate. The thermal spray apparatus of the present invention includes a source of pressurized molten polymer material, a source of pressurized hot gas, and a spray head which is in fluid communication with the source of pressurized molten polymer material and a source of pressurized hot gas. The pressurized hot gas forms a flowstream as it exits the spray head and acts to atomize and transport the molten polymer material, in a molten state, to the substrate so that the substrate is coated. The molten polymer is atomized into relatively uniform particulates of molten plastic which aids in applying a uniform coating to the subject substrate. It is emphasized that this abstract is provided to comply with the rules requiring an abstract which will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. 37 C.F.R. § 1.72(b).

Abstract translation: 一种将熔融的热塑性聚合物组合物喷涂到基材上的方法和装置。 本发明的热喷涂装置包括加压熔融聚合物材料源，加压热气源和与加压熔融聚合物材料源和加压热气体源流体连通的喷头。 加压的热气体在离开喷头时形成流动流，并且用于将熔融聚合物材料以熔融状态雾化并输送到基底，从而涂覆基底。 熔融的聚合物被雾化成相对均匀的熔融塑料的微粒，这有助于将主体基底施加均匀的涂层。 要强调的是，该摘要被提供以符合要求摘要的规则，这将允许搜索者或其他读者快速确定技术公开的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。 37 C.F.R. §1.72（b）。