Charged-particle-beam microlithography apparatus and methods including proximity-effect correction
    1.
    发明授权
    Charged-particle-beam microlithography apparatus and methods including proximity-effect correction 失效
    带电粒子束微光刻装置及包括邻近效应校正的方法

    公开(公告)号:US06815693B2

    公开(公告)日:2004-11-09

    申请号:US09789402

    申请日:2001-02-20

    IPC分类号: G01J100

    摘要: Methods are disclosed for correcting proximity effects as affected by varying magnitudes of beam blur occurring at different respective locations in an image of a reticle subfield as projected onto the sensitive surface of a substrate. Local resizings of pattern-element profiles as defined on the reticle are made taking into consideration not only proximity effects arising from Coulomb interactions but also different magnitudes of beam blur occurring at different respective locations in a projected subfield. Beam blur is imparted by the projection-optical system and is a function of the magnitude of beam deflection, the location of pattern element(s) within the area of the exposed subfield, and the exposure-energy profile on the surface of the substrate being exposed. A resist-development energy threshold is established such that the edges of pattern elements as transferred to the wafer in response to the exposure-energy profile will be at their desired locations according to design specifications. The corresponding elements as defined on the reticle are adjusted accordingly so that their linewidths as projected will be within design specifications.

    摘要翻译: 公开了用于校正邻近效应的方法,其受到在投影到基板的敏感表面上时在光罩子场的图像中的不同相应位置处发生的波束模糊的变化幅度的影响。 不仅考虑到库仑相互作用产生的邻近效应,还考虑到在投影子场中的不同相应位置发生的波束模糊的不同幅度,进行了在分划板上定义的图形元素分布的局部偏移。 光束模糊由投影光学系统赋予,并且是光束偏转的大小,图案元素在曝光子场的区域内的位置以及衬底表面上的曝光能量分布的函数 裸露。 建立抗蚀剂显影能量阈值,使得响应于曝光能量分布转移到晶片的图案元素的边缘将根据设计规格处于其期望的位置。 相应地调整在掩模版上定义的相应元件,使得其投影的线宽将在设计规格之内。

    Body fluid analyte measurement
    2.
    发明授权
    Body fluid analyte measurement 有权
    体液分析物测量

    公开(公告)号:US06809807B1

    公开(公告)日:2004-10-26

    申请号:US09264786

    申请日:1999-03-09

    IPC分类号: G01J100

    摘要: An analyte (e.g., glucose) is tested in a sample (e.g., blood or blood-free interstitial fluid) having both the analyte and other constituents (e.g., protein). The analyte has an absorption peak over a narrow bandwidth at a characteristic wavelength. The other constituents have an absorption over a broad bandwidth. The broad bandwidth includes and is broader than the narrow bandwidth. Radiant energy (e.g., IR radiation) is directed at the sample. The energy has a source bandwidth including the broad bandwidth. The sample absorbs a portion of the energy. A remainder of the energy is available for analysis. The remainder is analyzed by filtering the remainder into an analyte portion and a reference portion. The analyte portion contains substantially only the narrow bandwidth. The reference portion contains substantially only the broad bandwidth. The analyte portion and the reference portion are measured and compared to calculate an amount of the analyte in the sample.

    摘要翻译: 在具有分析物和其他成分(例如蛋白质)的样品(例如,血液或无血液的间质液)中测试分析物(例如葡萄糖)。 分析物在特征波长处的窄带宽上具有吸收峰。 其他成分在宽带宽上具有吸收。 宽带宽包括窄带宽。 辐射能量(例如,IR辐射)指向样品。 能量具有包括宽带宽的源带宽。 样品吸收一部分能量。 剩余的能量可用于分析。 通过将剩余部分过滤成分析物部分和参考部分来分析剩余部分。 分析物部分基本上仅包含窄带宽。 参考部分基本上仅包含宽带宽。 测量分析物部分和参考部分并比较样品中分析物的量。

    Thermal radiation marker
    3.
    发明授权
    Thermal radiation marker 有权
    热辐射标记

    公开(公告)号:US06777701B1

    公开(公告)日:2004-08-17

    申请号:US09716704

    申请日:2000-11-20

    申请人: Eran Inbar

    发明人: Eran Inbar

    IPC分类号: G01J100

    CPC分类号: G01S7/481 G01S7/484 G08B5/38

    摘要: Emitter controller including a controller, and a power amplifier, the controller being connected to a power source, the power amplifier being connected to the controller, the power source and to an emitter, the controller providing a pulse sequence to the power amplifier for operating the emitter, the controller determining the pulse sequence according to an available power voltage level.

    摘要翻译: 发射器控制器包括控制器和功率放大器,控制器连接到电源,功率放大器连接到控制器,电源和发射器,控制器向功率放大器提供脉冲序列,用于操作 发射器,控制器根据可用功率电压电平确定脉冲序列。

    Radiation detector using polymer-dispersed liquid crystal cell
    4.
    发明授权
    Radiation detector using polymer-dispersed liquid crystal cell 失效
    使用聚合物分散液晶单元的辐射检测器

    公开(公告)号:US06683309B2

    公开(公告)日:2004-01-27

    申请号:US10028353

    申请日:2001-12-21

    申请人: Suresh C. Sharma

    发明人: Suresh C. Sharma

    IPC分类号: G01J100

    CPC分类号: G01T1/204 G02F1/1334

    摘要: Generally, and in one form, the present invention is a device for the measurement of radiant energy using a polymer dispersed liquid crystal cell. In another form, the present invention is a device for the detection of ionizing radiation that uses a polymer dispersed liquid crystal cell and a light source that is optically oriented toward the cell. The cell is connected to an electrical signal generator, and a light detector capable of producing output is optically aligned with the light source. Finally, a computer is connected to the light detector to analyze the output from the light detector.

    摘要翻译: 通常,在一种形式中,本发明是使用聚合物分散液晶单元测量辐射能的装置。 在另一种形式中,本发明是用于检测使用聚合物分散液晶单元的电离辐射的装置和光学取向于电池的光源。 电池连接到电信号发生器,并且能够产生输出的光检测器与光源光学对准。 最后,将计算机连接到光检测器以分析来自光检测器的输出。

    Luminance measuring device for liquid crystal display
    5.
    发明授权
    Luminance measuring device for liquid crystal display 失效
    液晶显示器的亮度测量装置

    公开(公告)号:US06657712B2

    公开(公告)日:2003-12-02

    申请号:US10401562

    申请日:2003-03-31

    申请人: Akira Yamaguchi

    发明人: Akira Yamaguchi

    IPC分类号: G01J100

    摘要: A luminance measuring device for a LCD includes a photometric unit having a contact type luminance meter, a light shielding cushion member surrounding a vicinity of a light receiving portion of the contact type luminance meter and a holding unit for fixing the contact type luminance meter to the LCD a converting unit for converting a first luminance measurement result by the contact type luminance meter into a second luminance measurement result corresponding to a telescopic luminance meter and a processing unit for conducting conversion processing using the converting unit to a luminance measurement result of the LCD by the photometric unit.

    摘要翻译: 一种用于LCD的亮度测量装置包括具有接触型亮度计的光度测量单元,围绕接触型亮度计的光接收部分附近的遮光缓冲部件和用于将接触型亮度计固定到 LCD转换单元,用于将接触型亮度计的第一亮度测量结果转换为对应于伸缩式亮度计的第二亮度测量结果;以及处理单元,用于使用转换单元进行到LCD的亮度测量结果的转换处理, 测光单元。

    Infrared scene projector with current-mirror control electronics
    6.
    发明授权
    Infrared scene projector with current-mirror control electronics 有权
    带电流镜控制电子的红外场景投影机

    公开(公告)号:US06627907B1

    公开(公告)日:2003-09-30

    申请号:US09675750

    申请日:2000-09-29

    IPC分类号: G01J100

    CPC分类号: H04N5/33

    摘要: Infrared scene projectors are useful in testing infrared surveillance and guidance equipment which identify and track objects, such as enemy missiles, based on their infrared emissions or heat-generation characteristics. Infrared scene projectors typically include a thermal pixel array which converts electrical input signals into a desired thermal or infrared image. One problem with conventional thermal pixel arrays is that each pixel has a unique ground voltage based on its point of connection to a ground terminal running through the array, making it difficult to precisely control the pixels. Accordingly, the present inventors devised not only innovative infrared pixel arrays and related control methods, but also infrared scene projectors incorporating them. In one exemplary pixel array, each pixel includes a resistor and a current-mirror circuit which enables control. Operating the array entails receiving a pixel-control voltage, converting the pixel-control voltage to a current, and then coupling the current to the current-mirror circuit in one of the pixels. The current mirror applies an appropriate control current to the resistor and thus enables operation of the pixel independent of ground-voltage variations.

    摘要翻译: 红外场景投影机可用于测试红外线监视和指导设备,根据其红外线辐射或发热特性识别和跟踪敌方导弹等物体。 红外场景投影仪通常包括将电输入信号转换成期望的热或红外图像的热像素阵列。 常规热像素阵列的一个问题是,每个像素具有基于其连接到穿过阵列的接地终端的点的独特接地电压,使得难以精确地控制像素。 因此,本发明人不仅设计了创新的红外像素阵列和相关的控制方法,而且设计了包括它们的红外场景投影仪。 在一个示例性像素阵列中,每个像素包括电阻器和能够进行控制的电流镜电路。 操作阵列需要接收像素控制电压,将像素控制电压转换为电流,然后将电流耦合到其中一个像素中的电流镜像电路。 电流镜对电阻器施加适当的控制电流,因此能够独立于接地电压变化来操作像素。

    Infrared enhanced pulsed solar simulator
    7.
    发明授权
    Infrared enhanced pulsed solar simulator 有权
    红外增强脉冲太阳模拟器

    公开(公告)号:US06548819B1

    公开(公告)日:2003-04-15

    申请号:US09539677

    申请日:2000-03-30

    申请人: James N. Lovelady

    发明人: James N. Lovelady

    IPC分类号: G01J100

    CPC分类号: F21S8/006 F21V13/08 H02S50/10

    摘要: A pulsed solar simulator, and corresponding methods of solar simulation, consists of one or more mirrors and a flashlamp adjacent to the one or more mirrors. The flashlamp produces pulsed light beams comprising wavelengths from 400 nm to 1800 nm, wherein one or more primary pulsed light beams are directed at a target and one or more secondary pulsed light beams are directed at respective ones of the one or more mirrors and are directed toward the target as one or more reflected pulsed light beams by respective ones of the one or more mirrors. And, one or more respective spectral filters are positioned such that the one or more reflected pulsed light beams comprise light having a desired wavelength spectrum directed at the target. The one or more reflected pulsed light beams provide enhanced irradiation in the desired wavelength spectrum at the target compared to the irradiation provided by the one or more primary pulsed light beams alone.

    摘要翻译: 脉冲太阳模拟器和相应的太阳能模拟方法由一个或多个反射镜和与一个或多个反射镜相邻的闪光灯组成。 闪光灯产生包括400nm至1800nm的波长的脉冲光束,其中一个或多个主要脉冲光束被引导到目标,并且一个或多个次级脉冲光束被引导到一个或多个反射镜中的相应的一个或多个反射镜,并被引导 通过一个或多个反射镜中的相应的一个或多个反射镜作为一个或多个反射的脉冲光束朝向目标。 并且,一个或多个相应的光谱滤光器被定位成使得一个或多个反射的脉冲光束包括指向目标的期望波长光谱的光。 与单独的一个或多个主要脉冲光束提供的照射相比,一个或多个反射脉冲光束在目标处的期望波长光谱中提供增强的照射。

    Lamp unit using short-wave light emitting device
    9.
    发明授权
    Lamp unit using short-wave light emitting device 失效
    灯具单元采用短波发光装置

    公开(公告)号:US06501084B1

    公开(公告)日:2002-12-31

    申请号:US09538946

    申请日:2000-03-31

    IPC分类号: G01J100

    摘要: A short-wave light transmitting diode lamp unit has a printed circuit board disposed in a housing. A plurality of short-wave light emitting diode chips is mounted on the printed circuit board so that a light emission side of the light emitting diode chip faces an opening of the housing. An outer glass as a light transmitting plate is attached to the opening of the housing. The outer glass is made of a glass material having high ultraviolet ray transmittance. The outer glass is prevented from degradation caused by the ultraviolet rays. Thus, the light output efficiency is kept in good level and long lifetime is assured. An overall structure becomes simple, thereby reducing the production costs.

    摘要翻译: 短波发光二极管灯单元具有布置在壳体中的印刷电路板。 多个短波发光二极管芯片安装在印刷电路板上,使得发光二极管芯片的发光侧面向壳体的开口。 作为透光板的外部玻璃被附接到壳体的开口。 外玻璃由具有高紫外线透射率的玻璃材料制成。 防止外部玻璃被紫外线引起的劣化。 因此,光输出效率保持在良好的水平,并且确保长的寿命。 总体结构变得简单,从而降低生产成本。

    Multiple infrared missile jammer
    10.
    发明授权
    Multiple infrared missile jammer 失效
    多重红外线导弹干扰

    公开(公告)号:US06429446B1

    公开(公告)日:2002-08-06

    申请号:US05574170

    申请日:1975-04-28

    IPC分类号: G01J100

    摘要: Apparatus for providing simultaneous jamming of a number of missiles is disclosed comprising a plurality of reticles each having a pattern therein which provides necessary spin frequency and carrier frequency (if required) for the missile to be jammed. The reticles are arranged in series and modulate a source of radiation and generate the spin and carrier frequencies by blocking or rejecting radiation within the spectral passband of the missile to be jammed.

    摘要翻译: 公开了一种用于提供同时堵塞多个导弹的装置,其包括多个分隔板,每个导线具有其中的图案,其中提供必要的自旋频率和载波频率(如果需要的话)导弹被卡住。 串联排列并调制辐射源,并通过阻挡或拒绝被卡住的导弹的光谱通带内的辐射产生自旋和载波频率。