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公开(公告)号:US20240048056A1
公开(公告)日:2024-02-08
申请号:US18451094
申请日:2023-08-16
发明人: Kenneth Miller , Timothy Ziemba , John Carscadden , Ilia Slobodov , James Prager
IPC分类号: H02M3/335 , H02M7/5387 , H02M1/08 , H03H7/01 , H05G1/20
CPC分类号: H02M3/33523 , H02M7/5387 , H02M1/08 , H03H7/01 , H05G1/20 , H03K3/57
摘要: Some embodiments include methods and systems for wafer biasing in a plasma chamber. A method, for example, may include: generating a first high voltage by a first pulsed voltage source using DC voltages and coupling the first high voltage to a wafer in the plasma chamber via at least one direct connection, the at least one direct connection enabling ion energy control in the plasma chamber; generating one or more of low and medium voltages by a second pulsed voltage source; coupling, capacitively, the one or more of low and medium voltages to the wafer; and pulsing the first high voltage and the one or more of low and medium voltages to achieve a configurable ion energy distribution in the wafer.
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公开(公告)号:US20230422384A1
公开(公告)日:2023-12-28
申请号:US18111459
申请日:2023-02-17
申请人: Teledyne ETM, Inc.
CPC分类号: H05G2/00 , H05H7/02 , H05G1/20 , H05H9/048 , H05H2007/025 , H05H2007/022
摘要: A linac-based X-ray system for cargo scanning and imaging applications uses linac design, RF power control, beam current control, and beam current pulse duration control to provide stable sequences of pulses having different energy levels or different doses.
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公开(公告)号:US11589449B2
公开(公告)日:2023-02-21
申请号:US17392090
申请日:2021-08-02
摘要: A linac-based X-ray system for cargo scanning and imaging applications uses linac design, RF power control, beam current control, and beam current pulse duration control to provide stable sequences of pulses having different energy levels or different doses.
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公开(公告)号:US11083074B2
公开(公告)日:2021-08-03
申请号:US15601796
申请日:2017-05-22
摘要: A linac-based X-ray system for cargo scanning and imaging applications uses linac design, RF power control, beam current control, and beam current pulse duration control to provide stable sequences of pulses having different energy levels or different doses.
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公开(公告)号:US20210212189A1
公开(公告)日:2021-07-08
申请号:US17057026
申请日:2018-11-28
申请人: MICRO-X LIMITED
发明人: Brian GONZALES , Robert C. SHEEHY
摘要: A device and method for creating beam formed X-Ray radiation using radio frequency (RF) modulated field emission X-ray sources is described. A radio frequency RF source generates a RF control signal which is supplied to an array of phase delay elements to generate multiple individually controlled phase delayed RF signals. These are then directly provided to each of a plurality of field emission sources (via a matching circuit) to generate a plurality of RF modulated electron current, or beam, each at the same frequency and phase delay of the phase delayed RF signals. Each of the electron beams impacts a target anode to generate X-rays also at the same frequency and phase delay of the phase delayed RF signals. By controlling each of the phase delay elements a beamformed X-ray radiation pattern can be generated.
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公开(公告)号:US10856398B2
公开(公告)日:2020-12-01
申请号:US15509348
申请日:2015-08-27
申请人: NIKON METROLOGY NV
发明人: Janusz Zywicki , Roger Hadland
摘要: Disclosed is a high-voltage generator for an x-ray apparatus. The generator comprises a voltage multiplier having a high-voltage output terminal and first and second alternating-current input terminals, an output transformer coil (12) having first and second output terminals respectively electrically connected to the first and second input terminals of the voltage multiplier, and an input transformer coil (11) having first and second input terminals and being arranged coaxially with and inductively coupled to the output transformer coil. The input and output transformer coils are relatively axially movable. Disclosed is also an x-ray apparatus using the high-voltage generator, a method of configuring a high-voltage generator and a method of configuring a high-voltage apparatus.
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公开(公告)号:US10734906B2
公开(公告)日:2020-08-04
申请号:US16250157
申请日:2019-01-17
摘要: A pulse generator is disclosed that includes at least the following stages a driver stage, a transformer stage, a rectifier stage, and an output stage. The driver stage may include at least one solid state switch such as, for example, of one or more IGBTs and/or one or more MOSFETs. The driver stage may also have a stray inductance less than 1,000 nH. The transformer stage may be coupled with the driver stage and/or with a balance stage and may include one or more transformers. The rectifier stage may be coupled with the transformer stage and may have a stray inductance less than 1,000 nH. The output stage may be coupled with the rectifier stage. The output stage may output a signal pulse with a voltage greater than 2 kilovolts and a frequency greater than 5 kHz. In some embodiments, the output stage may be galvanically isolated from a reference potential.
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公开(公告)号:US10571599B2
公开(公告)日:2020-02-25
申请号:US15955263
申请日:2018-04-17
发明人: Philip Teague , Long Yu
摘要: A control mechanism for a high-voltage generator for supplying voltage and current to an electronic radiation source in high-temperature environments is provided, the control mechanism including at least one voltage feedback loop for monitoring the output of the generator; at least one environmental temperature monitor; a control bus; and at least one control processor. A method of controlling a high-voltage generator that powers an electronic radiation source in high-temperature environments is also provided, the method including at least: measuring the output voltage of the generator; measuring the temperature within the generator's environment, using a control mechanism to modify a driving frequency, and using a control mechanism to modify a driving pulse-train, such that changes in properties of the electronic components of the generator as a result of changes in environmental temperature are characterized and the generator's driving signals modified to maintain optimally efficient input parameters for a specific environmental temperature.
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公开(公告)号:US20190393791A1
公开(公告)日:2019-12-26
申请号:US16555948
申请日:2019-08-29
发明人: Timothy Ziemba , Ilia Slobodov , Alex Henson , Morgan Quinley , John Carscadden , James Prager , Kenneth Miller
IPC分类号: H02M3/335 , H02M7/5387 , H05G1/20 , H02M1/08 , H03H7/01
摘要: A high voltage power system is disclosed. In some embodiments, the high voltage power system includes a high voltage pulsing power supply; a transformer electrically coupled with the high voltage pulsing power supply; an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a frequency greater than 1 kHz; and a bias compensation circuit arranged in parallel with the output. In some embodiments, the bias compensation circuit can include a blocking diode; and a DC power supply arranged in series with the blocking diode.
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公开(公告)号:US09330878B2
公开(公告)日:2016-05-03
申请号:US14736973
申请日:2015-06-11
发明人: Scott A Watson , David Platts , Eric B Sorensen
IPC分类号: H05G1/06 , H01J19/24 , H01J21/36 , H01J27/02 , H01J35/06 , G01G1/06 , G01G1/10 , G01G1/20 , H01G5/14 , H05G1/10 , H05G1/20
CPC分类号: H01J19/24 , G01G1/06 , G01G1/10 , G01G1/20 , H01G5/14 , H01J3/027 , H01J21/36 , H01J27/022 , H01J35/065 , H01J35/22 , H01J2235/064 , H05G1/06 , H05G1/10 , H05G1/12 , H05G1/20
摘要: An electro-mechanical x-ray generator configured to obtain high-energy operation with favorable energy-weight scaling. The electro-mechanical x-ray generator may include a pair of capacitor plates. The capacitor plates may be charged to a predefined voltage and may be separated to generate higher voltages on the order of hundreds of kV in the AK gap. The high voltage may be generated in a vacuum tube.
摘要翻译: 一种机电x射线发生器,其被配置为以有利的能量重量缩放来获得高能量运行。 机电X射线发生器可以包括一对电容器板。 电容器板可以被充电到预定电压并且可以被分离以在AK间隙中产生数百kV的数量级的更高的电压。 高压可能在真空管中产生。
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