-
公开(公告)号:US10020157B2
公开(公告)日:2018-07-10
申请号:US15717364
申请日:2017-09-27
Applicant: NIKON METROLOGY NV
Inventor: Roger Hadland
IPC: H01J35/10 , H01J35/02 , H01J29/48 , F16C33/76 , H02M1/32 , H05G1/12 , H02M7/10 , H01J35/04 , F16J15/16 , H01J35/16 , F16C35/04
CPC classification number: H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/116 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
Abstract: Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerized tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
-
公开(公告)号:US10102997B2
公开(公告)日:2018-10-16
申请号:US15717393
申请日:2017-09-27
Applicant: NIKON METROLOGY NV
Inventor: Roger Hadland
IPC: H01J35/10 , H01J35/02 , H01J35/04 , H02M7/10 , H05G1/12 , H02M1/32 , F16C33/76 , F16C35/04 , F16J15/16 , H01J29/48 , H01J35/16 , H01J35/06 , H01J37/065
Abstract: Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerized tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
-
公开(公告)号:US10008357B2
公开(公告)日:2018-06-26
申请号:US15717384
申请日:2017-09-27
Applicant: NIKON METROLOGY NV
Inventor: Roger Hadland
IPC: H01J35/10 , H01J35/02 , H01J35/16 , F16J15/16 , H01J29/48 , F16C35/04 , F16C33/76 , H02M1/32 , H05G1/12 , H02M7/10 , H01J35/04
CPC classification number: H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/116 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
Abstract: Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
-
公开(公告)号:US10856398B2
公开(公告)日:2020-12-01
申请号:US15509348
申请日:2015-08-27
Applicant: NIKON METROLOGY NV
Inventor: Janusz Zywicki , Roger Hadland
Abstract: Disclosed is a high-voltage generator for an x-ray apparatus. The generator comprises a voltage multiplier having a high-voltage output terminal and first and second alternating-current input terminals, an output transformer coil (12) having first and second output terminals respectively electrically connected to the first and second input terminals of the voltage multiplier, and an input transformer coil (11) having first and second input terminals and being arranged coaxially with and inductively coupled to the output transformer coil. The input and output transformer coils are relatively axially movable. Disclosed is also an x-ray apparatus using the high-voltage generator, a method of configuring a high-voltage generator and a method of configuring a high-voltage apparatus.
-
公开(公告)号:US10096446B2
公开(公告)日:2018-10-09
申请号:US14774424
申请日:2014-03-12
Applicant: NIKON METROLOGY NV
Inventor: Roger Hadland
IPC: H01J35/04 , H01J35/02 , H01J35/10 , H02M7/10 , H05G1/12 , H02M1/32 , F16C33/76 , F16C35/04 , F16J15/16 , H01J29/48 , H01J35/16 , H01J35/06 , H01J37/065
Abstract: Disclosed herein are a high-voltage generator (120) for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target (500), and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerized tomography. In particular, the high-voltage generator includes a shield electrode (123a, 123b) electrically connected intermediate of a first voltage multiplier (122a, 122b) and a second voltage multiplier (122b, 122c). The electron beam apparatus includes control photodetectors (202a, 202b—not shown) and photo emitters (201a, 202a) having a transparent conductive shield (203a and 203b, 203c—not shown) arranged therebetween. The rotary vacuum seal includes a pumpable chamber (302) at a position intermediate between high-pressure and low-pressure ends of a bore (301) for a rotating shaft (401). The rotary target assembly is configured such that when a torque between a bearing housing (403) and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target (500) has a plurality of target plates (560) supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode (123a) maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
-
公开(公告)号:US09966217B2
公开(公告)日:2018-05-08
申请号:US15717388
申请日:2017-09-27
Applicant: NIKON METROLOGY NV
Inventor: Roger Hadland
IPC: H01J35/10 , H01J35/02 , H01J35/16 , F16J15/16 , H01J29/48 , F16C35/04 , F16C33/76 , H02M1/32 , H05G1/12 , H02M7/10 , H01J35/04
CPC classification number: H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/087 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
Abstract: Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
-
公开(公告)号:US09947501B2
公开(公告)日:2018-04-17
申请号:US15717372
申请日:2017-09-27
Applicant: NIKON METROLOGY NV
Inventor: Roger Hadland
IPC: H01J35/06 , H01J35/02 , H01J35/16 , F16J15/16 , H01J29/48 , F16C35/04 , F16C33/76 , H02M1/32 , H05G1/12 , H02M7/10 , H01J35/10 , H01J35/04 , H01J37/065
CPC classification number: H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/087 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
Abstract: Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
-
公开(公告)号:US09941090B2
公开(公告)日:2018-04-10
申请号:US15717402
申请日:2017-09-27
Applicant: NIKON METROLOGY NV
Inventor: Roger Hadland
IPC: H01J35/10 , H01J35/02 , H01J35/16 , F16J15/16 , H01J29/48 , F16C35/04 , F16C33/76 , H02M1/32 , H05G1/12 , H02M7/10 , H01J35/04
CPC classification number: H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/087 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
Abstract: Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
-
-
-
-
-
-
-