DUAL MANUFACTURING PROCESS AND CALIBRATION TO ACHIEVE HIGH ACCURACY THERMAL COUPLE SUBSTRATES

    公开(公告)号:US20250072290A1

    公开(公告)日:2025-02-27

    申请号:US18809681

    申请日:2024-08-20

    Abstract: Embodiments herein are generally directed to a system and process for manufacturing temperature measurement devices for use in semiconductor and display manufacturing. A bifurcated thermocouple substrate is provided and includes a primary substrate with a substrate aperture, a secondary substrate disposed within the substrate aperture, and a thermocouple disposed within a thermocouple aperture of the secondary substrate. A method of calibrating a bifurcated thermocouple substrate includes placing a secondary substrate with an embedded thermocouple of a bifurcated thermocouple substrate into a calibrator, heating the calibrator, the secondary substrate, and the thermocouple to a number “n” of temperature points and recording the temperature readings of the calibrator and the thermocouple The method includes then performing a mathematical conversion using the recorded temperature readings, storing using the stored mathematical conversion to correct thermocouple readings during use in a substrate processing chamber.

    THERMOELECTRIC CONVERSION MODULE AND MANUFACTURING METHOD THEREFOR

    公开(公告)号:US20250048931A1

    公开(公告)日:2025-02-06

    申请号:US18696481

    申请日:2022-09-28

    Abstract: The thermoelectric conversion module includes a substrate having a first main face and a second main face, a thermoelectric conversion part located on the first main face, and a first thermal conduction part and a second thermal conduction part located on the second main face. The thermoelectric conversion part has a p-type thermoelectric conversion element and an n-type thermoelectric conversion element, a first end part of the p-type thermoelectric conversion element in the first direction is in contact with a first end part of the n-type thermoelectric conversion element in the first direction, each thickness of the n-type thermoelectric conversion element and the p-type thermoelectric conversion element is 3 μm or more and 30 μm or less, and an interval between the first thermal conduction part and the second thermal conduction part in the first direction is 3 mm or more and 15 mm or less.

    Thermoelectric element, thermoelectric generator, Peltier element, Peltier cooler, and methods manufacturing thereof

    公开(公告)号:US20250008840A1

    公开(公告)日:2025-01-02

    申请号:US18683054

    申请日:2022-09-01

    Applicant: NIKOLAY IOSAD

    Inventor: NIKOLAY IOSAD

    Abstract: A thermoelectric element (40), comprising a dielectric substrate (100) having a hole (120), wherein the hole has a first opening on a first side of the dielectric substrate and a second opening on a second side of the dielectric substrate; a first metallisation pad (111) and a second metallisation pad (112) on the first side, wherein the first opening is between the first metallisation pad and the second metallisation pad; a planar thermoelectric layer (101) above the hole, wherein the planar thermoelectric layer has an interface with the first metallisation pad and an interface with the second metallisation pad, wherein both interfaces are in the same plane.

    Power generation apparatus
    5.
    发明授权

    公开(公告)号:US12171145B2

    公开(公告)日:2024-12-17

    申请号:US17758774

    申请日:2021-01-11

    Abstract: A power generation apparatus according to one embodiment of the present invention, comprises: a cooling unit, a first thermoelectric module including a first thermoelectric element disposed on a first surface of the cooling unit, and a first heat sink disposed on the first thermoelectric element; and a first wiring part connected to the first thermoelectric element, wherein the cooling unit has a fluid receiving part formed in a first area thereof and a tunnel formed in a second area thereof, and the first wiring part passes through the tunnel.

    Thermoelectric power generation module and method of manufacturing thermoelectric power generation module

    公开(公告)号:US12150383B2

    公开(公告)日:2024-11-19

    申请号:US18005070

    申请日:2021-06-08

    Abstract: Provided is a thermoelectric power generation module that includes a heat-dissipating body that dissipates heat generated by a heat-generating body, a thermoelectric power generation element disposed at an approximately central section of a top surface of the heat-dissipating body, and a thermally-responsive body that is disposed on an outer peripheral section of the top surface of the heat-dissipating body and whose thermal resistance changes according to temperature. The thermoelectric power generation element and the thermally-responsive body are disposed on a bottom surface of the heat-generating body, and the thermally-responsive body is formed such that the thermal resistance of the thermally-responsive body becomes larger than that for the thermoelectric power generation element when the heat-generating body has a low temperature and that the thermal resistance of the thermally-responsive body becomes equal to or smaller than that for the thermoelectric power generation element when the heat-generating body has a high temperature.

Patent Agency Ranking