METHOD AND APPARATUS FOR CONTROLLING THE TEMPERATURE OF A SEMICONDUCTOR WAFER

    公开(公告)号:US20220034708A1

    公开(公告)日:2022-02-03

    申请号:US17278736

    申请日:2019-09-18

    申请人: METRYX LIMITED

    摘要: A semiconductor wafer mass metrology method comprising: controlling the temperature of a semiconductor wafer by: detecting information relating to the temperature of the semiconductor wafer; and controlling cooling or heating of the semiconductor wafer based on the detected information relating to the temperature of the semiconductor wafer; wherein controlling the cooling or heating of the semiconductor wafer comprises controlling a duration of the cooling or heating of the semiconductor wafer; and subsequently loading the semiconductor wafer onto a measurement area of a semiconductor wafer mass metrology apparatus.

    GRAVIMETRIC MEASURING SYSTEM
    3.
    发明申请

    公开(公告)号:US20210364343A1

    公开(公告)日:2021-11-25

    申请号:US17394787

    申请日:2021-08-05

    IPC分类号: G01G23/48 G01G21/28

    摘要: A gravimetric measuring system (10), includes a balance (12) with a weighing chamber (22), surrounded by a weighing chamber wall (23, 24, 26, 28); an electromechanical weighing system (181); and an electronic control apparatus (36) for controlling the system operation according to algorithms stored in a memory (363) thereof; and a plurality of functional modules (14, 16), configured to be inserted, into module receptacles (283), arranged on the weighing chamber wall (28). Each module receptacle (283) has a device-side identification interface component (30a); and each functional module has a corresponding module-side identification interface component (306). The control apparatus (36) identifies each functional module (14, 16) inserted into a module receptacle (283), through interaction between the respective device-side and module-side identification interface components (30a, b) and selects one of a plurality of operating routines according to algorithms stored in the memory.

    Aerospace vehicle weight and balance estimation system and method

    公开(公告)号:US10712196B2

    公开(公告)日:2020-07-14

    申请号:US16091488

    申请日:2017-03-23

    摘要: A weight estimation system for estimating weight of an aerospace vehicle while grounded, the weight estimation system comprising a measurement subsystem including at least one sensor configured to measure a physical property in an interface that interfaces at least one of a fuselage and a wing with an undercarriage of said aerospace vehicle, in at least one area exhibiting a measurable change in geometry that is at least partly due to said weight, said measurement subsystem configured to produce measured data indicative of said weight of said aerospace vehicle; and a processor for receiving at least part of said measured data, said processor configured to estimate said weight, by relating said measured data with predetermined physical-property-to-weight correspondence data associated with said aerospace vehicle.

    Dosing device with integrated balance and climate module

    公开(公告)号:US10281319B2

    公开(公告)日:2019-05-07

    申请号:US15149909

    申请日:2016-05-09

    摘要: A dosing device with a balance, which includes a weighing chamber (16); a processor (32); a climate module (34), which is disposed in the weighing chamber (16); a data transmission path, over which data is exchanged between the climate module (34) and the processor (32); and a mixing formulation display (30). Also disclosed are a climate module configured to electrically couple to a dosing device in a detachable manner, wherein the climate module (34) forms a self-contained modular unit and includes various sensors (52, 54, 62) and a path over which data is transmitted to a processor external to the climate module, and a method for mixing a formulation, using a dosing device, wherein ambient conditions are detected during dosage of the substances to be combined, and the mixing ratio is adjusted in accordance with the detected ambient conditions.

    Method for the temperature-correction of a force-measuring device, and force-measuring device
    7.
    发明授权
    Method for the temperature-correction of a force-measuring device, and force-measuring device 有权
    力测量装置的温度校正方法和力测量装置

    公开(公告)号:US09074925B2

    公开(公告)日:2015-07-07

    申请号:US13355980

    申请日:2012-01-23

    摘要: An exemplary method for the temperature correction of a force-measuring device such as a balance is disclosed. The method includes generating, by means of a force-measuring cell, a force measurement signal corresponding to the input force; generating an electrical temperature measurement signal by means of a temperature sensor that is arranged at a distance from the heat-generating components of the force-measuring device, processing the force measurement signal into a temperature-corrected output signal based on the temperature measurement signal and the force measurement signal; and transmitting the output signal to an indicator unit and/or to a further processing unit.

    摘要翻译: 公开了用于诸如天平的力测量装置的温度校正的示例性方法。 该方法包括通过力测量单元产生对应于输入力的力测量信号; 通过距离力测量装置的发热部件一定距离的温度传感器产生电温度测量信号,基于温度测量信号将力测量信号处理成温度校正的输出信号;以及 力测量信号; 以及将所述输出信号发送到指示器单元和/或另外的处理单元。

    Balance with a heat removing device
    8.
    发明授权
    Balance with a heat removing device 有权
    与散热装置平衡

    公开(公告)号:US06951989B2

    公开(公告)日:2005-10-04

    申请号:US10654781

    申请日:2003-09-04

    IPC分类号: G01G21/28 G01G23/00 G01G23/48

    摘要: A balance (1) with a weighing pan (3) inside a weighing compartment (2) enclosed by a draft shield (4) has at least one thermoelectric module (16) that is arranged outside of the weighing compartment (2) and thermally connected to a stationary part of the balance (1). At least one vertical wall (8) of the draft shield (4) has a lower end portion in thermal connection with the thermoelectric module (16). The vertical wall (8) is configured in such a way that a temperature gradient develops in the vertical wall (8), wherein the temperature increases from the bottom to the top of the wall (8).

    摘要翻译: 在由防风罩(4)包围的称重隔间(2)内的称重盘(3)的余量(1)具有至少一个热电模块(16),该热电模块布置在称量隔间(2)的外部并热连接 到天平(1)的静止部分。 防风罩(4)的至少一个垂直壁(8)具有与热电模块(16)热连接的下端部。 垂直壁(8)构造成使得在垂直壁(8)中形成温度梯度,其中温度从壁(8)的底部向顶部增加。

    Vehicle occupant weight estimation apparatus having controlled volume
seat bladder
    9.
    发明授权
    Vehicle occupant weight estimation apparatus having controlled volume seat bladder 失效
    具有受控体积座椅膀胱的车辆乘员体重估计装置

    公开(公告)号:US06058341A

    公开(公告)日:2000-05-02

    申请号:US39238

    申请日:1998-03-16

    摘要: A weight estimation apparatus for the passenger seat of a motor vehicle, in which a single bladder substantially encompassing the seat bottom is evacuated and then inflated with a known volume of air. The average pressure in the bladder is determined to estimate the passenger weight. According to a first embodiment, the apparatus continues to monitor the average pressure, and the process is re-initiated if the average pressure changes by at least a predetermined percentage. According to a second embodiment, a bleed valve allows the pressure in the bladder to slowly escape, and the apparatus monitors the rate of change in pressure as a corresponding indication of passenger weight; in this embodiment, the process of evacuating and inflating is re-initiated if the monitored change in pressure does not correspond with the estimated weight. The sides of the bladder may be pleated to permit the bladder to expand under the weight of an occupant without stretching the bladder, and thereby affecting the average pressure. A temperature sensor may be disposed in proximity to the bladder provides a temperature signal for compensating the weight estimation for temperature variations. Also, the pressure sensor may be configured to sense the gage pressure--that is, the differential pressure between the bladder pressure and atmospheric pressure; alternatively, the pressure sensor may be configured to detect absolute pressure, and a second absolute pressure sensor responsive to atmospheric pressure may be used to compensate for changes in atmospheric pressure.

    摘要翻译: 一种用于机动车辆的乘客座椅的重量估计装置,其中基本上围绕座椅底部的单个囊被抽真空,然后用已知体积的空气充气。 确定膀胱中的平均压力以估计乘客体重。 根据第一实施例,设备继续监视平均压力,并且如果平均压力改变至少预定百分比,则重新启动该过程。 根据第二实施例,排气阀允许气囊中的压力缓慢地逸出,并且该装置监测作为乘客重量的相应指示的压力变化率; 在该实施例中,如果所监视的压力变化与所估计的重量不对应,则重新启动排气和充气过程。 膀胱的侧面可以打褶以允许膀胱在乘员的重量下膨胀而不拉伸膀胱,从而影响平均压力。 温度传感器可以设置在靠近气囊的位置,提供用于补偿温度变化的重量估计的温度信号。 此外,压力传感器可以被配置为感测压力压力,即,气囊压力和大气压力之间的压差; 或者,压力传感器可以被配置为检测绝对压力,并且可以使用响应于大气压力的第二绝对压力传感器来补偿大气压力的变化。

    Load cell type, weight-measuring device
    10.
    发明授权
    Load cell type, weight-measuring device 失效
    称重传感器类型,重量测量装置

    公开(公告)号:US4796212A

    公开(公告)日:1989-01-03

    申请号:US799122

    申请日:1985-11-18

    申请人: Tohru Kitagawa

    发明人: Tohru Kitagawa

    CPC分类号: G01G23/48 G01G23/3714

    摘要: A load cell type, weight-measuring device includes a load cell for generating an electrical signal corresponding to an applied weight, an analog-to-digital converting circuit for converting an output signal from the load cell to a digital data, and a data processing unit for generating weight data on the basis of output data from the A/D converting circuit. This weight-measuring device further has a memory in which data indicative of the temperature characteristic of the output signal of the load cell is stored, and a temperature sensor for detecting the temperature of the load cell and generating a corresponding output signal. The data processing unit corrects the output data from the A/D converting circuit on the basis of the output signal from the temperature sensor and the data in the memory.

    摘要翻译: 称重传感器类型的重量测量装置包括用于产生对应于施加的重量的电信号的测力传感器,用于将来自测力传感器的输出信号转换为数字数据的模数转换电路,以及数据处理 基于来自A / D转换电路的输出数据产生权重数据的单元。 该重量测量装置还具有存储表示测力传感器的输出信号的温度特性的数据的存储器,以及用于检测测力传感器的温度并产生对应的输出信号的温度传感器。 数据处理单元基于来自温度传感器的输出信号和存储器中的数据来校正来自A / D转换电路的输出数据。