Inspection device and method for operating inspection device

    公开(公告)号:US11614477B2

    公开(公告)日:2023-03-28

    申请号:US16975506

    申请日:2019-02-13

    IPC分类号: G01R31/26 G01N25/68

    摘要: An inspection device according to an embodiment can conduct high temperature inspection and low temperature inspection on an object to be inspected. The inspection device includes an inspection chamber in which inspection is conducted on the object; a dry air supply section that is connected to the inspection chamber via a first valve and that is configured to supply dry air into the inspection chamber; a dew point meter that is connected to the inspection chamber via a second valve and that is configured to measure a dew point in the inspection chamber; and a bypass pipe connecting the dry air supply section and the dew point meter via a third valve.

    Dew point measuring method and dew point measuring device

    公开(公告)号:US11454603B2

    公开(公告)日:2022-09-27

    申请号:US16306967

    申请日:2017-06-06

    摘要: The purpose of the present invention is to realize a dew point measurement in which the generation of dew condensation is directly detected and the detection can be performed without using any optical system. In particular, the purpose of the present invention is to realize a dew point measuring device that is compact and has a high sensitivity. According to one embodiment of the present invention, a sudden change in current values before and after the dew point is detected by detecting the dew condensation to detect a galvanic current that flows due to a water droplet attached onto a surface of an insulating substrate on which thin wires of dissimilar metals are juxtaposed, and by controlling the temperature on the surface of the substrate. In this way, the dew point measurement in which the dew point can be directly measured and a measurement with simple configuration and high accuracy can be performed can be realized.

    Chilled mirror hygrometer
    3.
    发明授权

    公开(公告)号:US10444172B2

    公开(公告)日:2019-10-15

    申请号:US15349058

    申请日:2016-11-11

    发明人: Donald Doucet

    IPC分类号: G01N25/00 G01N25/68

    摘要: A chilled mirror hygrometer may comprise a thermoelectric module, a polished mirror surface, two light emitting diodes, and a single photo-transistor or optical detector. A software controller may be employed to rapidly alternate between illuminating the two light emitting diodes. The software controller may allow the single photo-transistor or optical detector to rapidly alternate between observing the light from the first light emitting diode or the second light emitting diode. The chilled mirror hygrometer may further comprise a wand portion and an electrical housing.

    DEW POINT MEASURING METHOD AND DEW POINT MEASURING DEVICE

    公开(公告)号:US20190310213A1

    公开(公告)日:2019-10-10

    申请号:US16306967

    申请日:2017-06-06

    IPC分类号: G01N25/68 G01N27/04

    摘要: The purpose of the present invention is to realize a dew point measurement in which the generation of dew condensation is directly detected and the detection can be performed without using any optical system. In particular, the purpose of the present invention is to realize a dew point measuring device that is compact and has a high sensitivity. According to one embodiment of the present invention, a sudden change in current values before and after the dew point is detected by detecting the dew condensation to detect a galvanic current that flows due to a water droplet attached onto a surface of an insulating substrate on which thin wires of dissimilar metals are juxtaposed, and by controlling the temperature on the surface of the substrate. In this way, the dew point measurement in which the dew point can be directly measured and a measurement with simple configuration and high accuracy can be performed can be realized.

    CMOS-COMPATIBLE DEW POINT SENSOR DEVICE AND METHOD OF DETERMINING A DEW POINT

    公开(公告)号:US20190094164A1

    公开(公告)日:2019-03-28

    申请号:US16079080

    申请日:2017-02-21

    申请人: ams AG

    IPC分类号: G01N25/68

    摘要: The dew point sensor device comprises a semiconductor substrate (1), a Peltier element (2), which may be integrated in the substrate (1), a temperature sensor (3), a capacitor (4) at an exposed surface (9) above the substrate (1) and in the vicinity of the temperature sensor (3), and an electronic circuit (5), which may also be integrated in the substrate (1). The capacitor (4) comprises a plurality of capacitor elements (40) each having a capacitance, and the electronic circuit (5) is provided for an individual determination of the capacitances. The dew point is determined by a measurement of the variation of the capacitances at decreasing temperatures and a measurement of the relevant temperature.

    Accelerated life testing device and method
    6.
    发明授权
    Accelerated life testing device and method 有权
    加速寿命试验装置及方法

    公开(公告)号:US09267875B2

    公开(公告)日:2016-02-23

    申请号:US14086750

    申请日:2013-11-21

    IPC分类号: G01N17/00 G01M99/00 G01N25/68

    CPC分类号: G01N17/002 H01L21/67

    摘要: An accelerated life testing device and method including an accelerated life testing method for a test piece within a test chamber, the method including: establishing a first atmosphere within the test chamber; changing the first atmosphere to a second atmosphere to form a deposition layer on the test piece; changing the second atmosphere to the first atmosphere to remove the deposition layer from the test piece; and repeating the changing the first atmosphere to the second atmosphere and the changing the second atmosphere to the first atmosphere to form an oxidation layer on the test piece.

    摘要翻译: 一种加速寿命试验装置及方法,其特征在于,包括在试验室内的试验片的加速寿命试验方法,所述方法包括:在所述试验室内建立第一气氛; 将第一气氛变为第二气氛,以在试片上形成沉积层; 将第二气氛改变到第一气氛以从测试片上除去沉积层; 并重复将第一气氛改变为第二气氛,并将第二气氛改变为第一气氛,以在试验片上形成氧化层。

    Method of and equipment for checking support means
    7.
    发明申请
    Method of and equipment for checking support means 有权
    检查支持手段的方法和设备

    公开(公告)号:US20050063449A1

    公开(公告)日:2005-03-24

    申请号:US10974607

    申请日:2004-10-27

    摘要: A method and equipment for checking a support device such as used in an elevator installation. The method and equipment detects reductions in cross-section of the tensile supports in the support device by heating the tensile supports with electrical current flow and determining the temperature at surface of surrounding sheathing. An increase in the temperature from an original measurement is an indicator of damage to the tensile supports.

    摘要翻译: 一种用于检查诸如在电梯安装中使用的支撑装置的方法和设备。 该方法和设备通过用电流流动加热拉伸载体并确定周围护套表面的温度来检测支撑装置中的拉伸支撑件横截面的减小。 来自原始测量值的温度升高是对拉伸支撑件损坏的指标。

    Cryogenic hygrometer
    8.
    发明授权
    Cryogenic hygrometer 失效
    低温湿度计

    公开(公告)号:US5460450A

    公开(公告)日:1995-10-24

    申请号:US221945

    申请日:1994-04-01

    申请人: Arden L. Buck

    发明人: Arden L. Buck

    IPC分类号: G01N25/68 G01N25/02

    CPC分类号: G01N25/68

    摘要: A dew or frost point temperature hygrometer wherein a reflective surface, which is cooled by a cryogenic source and held at the dew or frost point temperature by a servo control, reflects light from a light source to a light detector. Very low concentrations of moisture or frost which condense on the reflective surface are measured very rapidly as a change in light reflected from that surface. No re-calibration is needed throughout its exceedingly wide moisture measurement range of from less than 1 part per billion to about 30 parts per thousand within a range of temperature from about -110.degree. C. to about 30.degree. C.

    摘要翻译: 露点或霜点温湿度计,其中由低温源冷却并通过伺服控制保持在露点或霜点温度的反射表面将来自光源的光反射到光检测器。 在反射表面上凝结的非常低浓度的水分或霜冻被非常迅速地测量为从该表面反射的光的变化。 在大约-110℃至大约30℃的温度范围内,在其非常宽的水分测量范围内不需要重新校准,其范围从小于1ppm到约30ppm。

    Method and apparatus for determining relative humidity
    9.
    发明授权
    Method and apparatus for determining relative humidity 失效
    用于确定相对湿度的方法和装置

    公开(公告)号:US5435146A

    公开(公告)日:1995-07-25

    申请号:US311229

    申请日:1994-09-23

    申请人: Daniel R. Clark

    发明人: Daniel R. Clark

    IPC分类号: G01N25/68 G05D22/02 G05D22/00

    摘要: A method for determining the relative humidity of the air entering the cooling heat exchanger of an air conditioning system as well as an apparatus for implementing the method. The cooling capacity of the system is varied and, if occurring, the transition between a condition where moisture is condensing in the heat exchanger and a condition where moisture is not condensing in the heat exchanger. At this transition, the temperatures of the exiting air and the entering air are measured. From the measured exiting air temperature, state point of the saturated exiting air can be determined. From the exiting air state point and the entering air state point, the entering air relative humidity can be determined. If no condensation occurs even at maximum cooling capacity, the maximum that the relative humidity of the entering air can be determined. If condensation continues even at minimum cooling capacity, the minimum that the relative humidity of the entering air can be determined.

    摘要翻译: 用于确定进入空调系统的冷却热交换器的空气的相对湿度的方法以及用于实施该方法的装置。 系统的冷却能力是变化的,并且如果发生的话,在热交换器中水分冷凝的状态与在热交换器中没有冷凝的状态之间的转变。 在此过渡时,测量出口空气和进入空气的温度。 从测量出来的空气温度可以确定饱和排出空气的状态点。 从离开的空气状态点和进入空气状态点可以确定进入的空气相对湿度。 即使在最大冷却能力下也不发生冷凝,可以确定进入空气的相对湿度的最大值。 如果即使在最小冷却能力下继续冷凝,也可以确定进入空气的相对湿度的最小值。

    Humidity sensing apparatus
    10.
    发明授权
    Humidity sensing apparatus 失效
    湿度传感装置

    公开(公告)号:US4677416A

    公开(公告)日:1987-06-30

    申请号:US801173

    申请日:1985-11-22

    CPC分类号: H01L35/08 G01N25/68

    摘要: An integrated circuit cooling device and a dew point hygrometer employing such a cooling device having a substrate with a peripheral region surrounding a central aperture, the substrate being overlaid by an insulating layer with a Peltier cooling device formed thereon. The Peltier device includes a plurality of alternate metallic segments of dissimilar metals arranged and joined to form first and second groups of corresponding junctions of which the first group is located over the peripheral region of the substrate and the second group is located over the central aperture.

    摘要翻译: 采用这种冷却装置的集成电路冷却装置和露点湿度计,其具有围绕中心孔的周边区域的基板,所述基板由形成在其上的珀耳帖冷却装置的绝缘层覆盖。 珀尔帖装置包括多个不同金属的交替金属段,其布置和连接以形成第一组和第二组对应结,其中第一组位于衬底的周边区域上方,第二组位于中心孔的上方。