公开(公告)号：US12123893B2

公开(公告)日：2024-10-22

申请号：US17820127

申请日：2022-08-16

申请人： Honeywell International Inc.

发明人： Paul W. Dwyer ,  Stephen F. Becka

IPC分类号： G01P15/13 ,  G01P1/00 ,  G01P1/02 ,  G01P15/08

CPC分类号： G01P15/132 ,  G01P1/006 ,  G01P1/023 ,  G01P15/0802

摘要： An example transducer includes an upper magnetic circuit assembly including an upper excitation ring, a lower magnetic circuit assembly including a lower excitation ring, and a proof mass assembly positioned between the upper and lower magnetic circuit assemblies. A coefficient of thermal expansion (CTE) of the proof mass assembly is lower than a CTE of each of the upper and lower excitation rings. The transduces also includes an outer support structure coupled to an outer surface of each of the upper and lower excitation rings, and the outer support structure includes at least one cutout configured to reduce a circumferential stiffness of the outer support structure.

公开(公告)号：US20240094238A1

公开(公告)日：2024-03-21

申请号：US17947002

申请日：2022-09-16

申请人： Simmonds Precision Products, Inc.

发明人： Richard A. Hull ,  Vasileios Tsachouridis

IPC分类号： G01P15/13 ,  G01P15/08 ,  G01P15/125

CPC分类号： G01P15/131 ,  G01P15/0802 ,  G01P15/125

摘要： A MEMS accelerometer system can include a proof mass device having a proof mass configured to move from an initial position in response to an input acceleration, a transducer operatively connected to the proof mass device to output a transducer signal correlating to a movement and/or position of the proof mass, a driver operatively connected to the proof mass device and configured to drive the proof mass, and a controller operatively connected to the driver to control the driver. The controller is operatively connected to the transducer to receive the transducer signal and output a drive signal to the driver to drive the proof mass toward an initial position. The system can include an observer module operatively connected to the controller to receive the drive signal. The observer module can be operatively connected to the transducer to receive the transducer signal. The observer module can be configured to deterministically estimate the input acceleration based on the transducer signal and the drive signal based on a deterministic model. The observer module can be configured to output an estimated input acceleration signal.

公开(公告)号：US20240044933A1

公开(公告)日：2024-02-08

申请号：US17817263

申请日：2022-08-03

申请人： Honeywell International Inc.

发明人： Paul W. Dwyer

IPC分类号： G01P15/13 ,  G01P1/02

CPC分类号： G01P15/132 ,  G01P1/023

摘要： An example accelerometer includes a first excitation ring comprising a first material having a first coefficient of thermal expansion (CTE), a second excitation ring comprising the first material having the first CTE; and a proof mass assembly disposed between and in contact with the first excitation ring and the second excitation ring. The proof mass assembly comprises a second material having a second CTE, wherein a difference between the first CTE and the second CTE is equal to or less than 0.5 parts per million per degree Celsius (ppm/° C.).

公开(公告)号：US20230204621A1

公开(公告)日：2023-06-29

申请号：US17926915

申请日：2021-05-18

申请人： Cambridge Enterprise Limited

发明人： Ashwin SESHIA ,  Chun ZHAO ,  Milind PANDIT

IPC分类号： G01P15/097 ,  G01P15/13

CPC分类号： G01P15/097 ,  G01P15/13 ,  G01P2015/0814

摘要： An accelerometer comprising: a frame; one or more proof masses suspended from the frame by one or more flexures and movable relative to the frame along a sensing axis; a resonant element assembly, the resonant element assembly comprising a first resonant element and a second resonant element coupled to one another, the first resonant element connected between the one or more proof masses and the frame, the second resonant element connected between the one or more proof masses and the frame, such that movement of the one or more proof masses relative to the frame along the sensing axis results in one of the first and second resonant elements undergoing compression and the other of the first and second resonant elements undergoing tension; and drive circuitry configured to drive the resonant element assembly and a sensing circuit configured to determine a measure of acceleration.

公开(公告)号：US11275099B1

公开(公告)日：2022-03-15

申请号：US16512091

申请日：2019-07-15

申请人： HRL Laboratories, LLC

发明人： Logan D. Sorenson ,  Lian X. Huang ,  Raviv Perahia ,  Hung Nguyen ,  David T. Chang

IPC分类号： G01P15/18 ,  G01P15/13 ,  G01P1/02

摘要： A resonant accelerometer includes a proof mass, one or more springs connecting the proof mass to an anchor, and one or more capacitive transduction gaps providing a void or space between the movable proof mass and a corresponding fixed electrode, wherein the static displacement of the proof mass in response to acceleration applied to the anchor modifies the electrostatic stiffness imparted by one or more of the capacitive transduction gaps on the proof mass, resulting in a corresponding change in the resonance frequency of the resonant accelerometer.

公开(公告)号：US11150265B2

公开(公告)日：2021-10-19

申请号：US17082024

申请日：2020-10-28

申请人： MEMSIC Semiconductor (TIANJIN) Co., Ltd.

发明人： Leyue Jiang ,  Yang Zhao

IPC分类号： G01P15/125 ,  G01P15/08 ,  G01P15/13

摘要： The present invention discloses a three-axis accelerometer. The three-axis accelerometer comprises: a substrate; at least one anchor block fixedly disposed on the substrate; a first X-axis electrode, a second X-axis electrode, a first Y-axis electrode, a second Y-axis electrode, a first Z-axis electrode and a second Z-axis electrode all fixedly disposed on the substrate; a framework suspended above the substrate and comprising a first beam column, a second beam column disposed opposite to the first beam column and at least one connecting beam connecting the first beam column and the second beam column; a proof mass suspended above the substrate; and at least one elastic connection component configured to elastically connect to the at least anchor block, the connecting beam, and the proof mass. The three-axis accelerometer can realize high-precision acceleration detection on three axes with only one proof mass, and in particular, can provide a fully differential detection signal for the Z axis, thereby greatly improving detection precision.

公开(公告)号：US20200369513A1

公开(公告)日：2020-11-26

申请号：US16928851

申请日：2020-07-14

申请人： Eric HENNES ,  Alessandro BERTOLINI ,  Johannes Franciscus VAN DEN BRAND

发明人： Eric HENNES ,  Alessandro BERTOLINI ,  Johannes Franciscus VAN DEN BRAND

IPC分类号： B81B3/00 ,  G01P15/13 ,  G01P15/08 ,  G01P15/09 ,  G01P15/125

摘要： A MEMS sensor comprising preloaded suspension springs and a method for mechanically preloading suspension springs of a MEMS sensor are described. The MEMS sensor comprises a MEMS support structure; a plurality of suspension springs connected to said support structure; and, a proof mass flexibly suspended by said suspension springs; wherein at least one of said suspension springs is mechanically preloaded with a compressive force for reducing the natural frequency of said proof mass.

公开(公告)号：US20200264210A1

公开(公告)日：2020-08-20

申请号：US16794952

申请日：2020-02-19

申请人： INVENSENSE, INC.

发明人： Sriraman Dakshinamurthy ,  Vadim Tsinker ,  Matthew Julian Thompson

IPC分类号： G01P15/13 ,  G01P15/08

摘要： A MEMS accelerometer includes a suspended spring-mass system that has a frequency response to accelerations experienced over a range of frequencies. The components of the suspended spring-mass system such as the proof masses respond to acceleration in a substantially uniform manner at frequencies that fall within a designed bandwidth for the MEMS accelerometer. Digital compensation circuitry compensates for motion of the proof masses outside of the designed bandwidth, such that the functional bandwidth of the MEMS accelerometer is significantly greater than the designed bandwidth.

公开(公告)号：US20200256677A1

公开(公告)日：2020-08-13

申请号：US16753617

申请日：2018-07-25

申请人： TOKYO INSTITUTE OF TECHNOLOGY ,  OSAKA UNIVERSITY ,  JAPAN AVIATION ELECTRONICS INDUSTRY, LIMITED ,  MITSUBISHI HEAVY INDUSTRIES, LTD.

发明人： Mikio KOZUMA ,  Ryotaro INOUE ,  Takashi MUKAIYAMA ,  Seiichi MORIMOTO ,  Kazunori YOSHIOKA ,  Atsushi TANAKA ,  Yuichiro KAMINO

IPC分类号： G01C19/72 ,  G01P15/13

摘要： A gyroscope includes an atomic beam source to generate an atomic beam in which individual atoms are in the same state, a moving standing light wave generator to generate M moving standing light waves, an interference device to obtain an atomic beam resulting from the interaction between the atomic beam and the M moving standing light waves, a monitor to detect angular velocity by monitoring the atomic beam from the interference device and an accelerometer. The accelerometer acquires information on acceleration applied to the gyroscope and the moving standing light wave generator adjusts the drift velocity of at least M−1 moving standing light waves among the M moving standing light waves in response to the acceleration information.

公开(公告)号：US10571485B2

公开(公告)日：2020-02-25

申请号：US15316679

申请日：2015-06-05

申请人： Atlantic Inertial Systems Limited

发明人： Michael Durston ,  Kevin Townsend

IPC分类号： G01P15/125 ,  G01P15/13 ,  G01P21/00 ,  G01P15/08

摘要： In a method for open loop operation of a capacitive accelerometer, a first mode of operation comprises electrically measuring a deflection of a proof mass (204) from the null position under an applied acceleration using a pickoff amplifier (206) set to a reference voltage Vcm. A second mode of operation comprises applying electrostatic forces in order to cause the proof mass (204) to deflect from the null position, and electrically measuring the forced deflection so caused. In the second mode of operation the pickoff amplifier (206) has its input (211) switched from Vcm to Vss, using a reference control circuit (209), so that drive amplifiers (210) can apply different voltages Vdd to the proof mass (204) and associated fixed electrodes (202).