公开(公告)号：WO2010008924A3

公开(公告)日：2010-01-21

申请号：PCT/US2009/049011

申请日：2009-06-29

Applicant: CARL ZEISS SMT INC. ,  NOTTE, John A., IV ,  PERCIVAL, Randall G. ,  SANFORD, Colin A. ,  GROHOLSKI, Alexander

Inventor： NOTTE, John A., IV ,  PERCIVAL, Randall G. ,  SANFORD, Colin A. ,  GROHOLSKI, Alexander

IPC: H01J37/08 ,  H01J27/26

Abstract: Disclosed are charged particle systems that include a tip (504), at least one gas inlet (512a-f) configured to supply gas particles to the tip, and a element (506) having a curved surface (514) positioned to adsorb un-ionized gas particles (182a-d), and to direct desorbing gas particles to propagate toward the tip. The charged particle systems can include a field shunt connected to the tip, and configured to adjust an electric field at an apex of the tip.

公开(公告)号：WO2007067318A3

公开(公告)日：2007-06-14

申请号：PCT/US2006/044442

申请日：2006-11-15

Applicant: ALIS CORPORATION ,  WARD, Billy W. ,  NOTTE IV, John A. ,  FARKAS III, Louis, S. ,  PERCIVAL, Randall G. ,  HILL, Raymond ,  GROHOLSKI, Alexander ,  COMUNALE, Richard

Inventor： WARD, Billy W. ,  NOTTE IV, John A. ,  FARKAS III, Louis, S. ,  PERCIVAL, Randall G. ,  HILL, Raymond ,  GROHOLSKI, Alexander ,  COMUNALE, Richard

IPC: H01J9/02 ,  H01J37/08 ,  H01J37/252 ,  H01J37/305 ,  H01J37/317 ,  B81B1/00 ,  G01N23/225 ,  G12B21/02 ,  H01J37/26 ,  H01J37/28 ,  H01J27/26 ,  H01J37/20 ,  B25J7/00

Abstract: Ion sources, systems and methods are disclosed.

公开(公告)号：WO2007067316A2

公开(公告)日：2007-06-14

申请号：PCT/US2006/044440

申请日：2006-11-15

Applicant: ALIS CORPORATION ,  WARD, Billy W. ,  NOTTE IV, John A. ,  FARKAS III, Louis S. ,  PERCIVAL, Randall G. ,  HILL, Raymond ,  MARKWORT, Lars ,  ADERHOLD, Dirk

Inventor： WARD, Billy W. ,  NOTTE IV, John A. ,  FARKAS III, Louis S. ,  PERCIVAL, Randall G. ,  HILL, Raymond ,  MARKWORT, Lars ,  ADERHOLD, Dirk

IPC: H01J37/28 ,  H01J9/02 ,  H01J37/08 ,  H01J37/252 ,  H01J37/305 ,  H01J37/317 ,  B81B1/00 ,  G01N23/225 ,  G12B21/02 ,  H01J27/26

CPC classification number: H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

Abstract: Ion sources, systems and methods are disclosed.

公开(公告)号：WO2007067315A2

公开(公告)日：2007-06-14

申请号：PCT/US2006/044439

申请日：2006-11-15

Applicant: ALIS CORPORATION ,  WARD, Billy W. ,  NOTTE IV, John A. ,  FARKAS, Louis, S., III ,  PERCIVAL, Randall G. ,  HILL, Raymond ,  GROHOLSKI, Alexander ,  COMUNALE, Richard ,  MCVEY, Shawn ,  BIHR, Johannes

Inventor： WARD, Billy W. ,  NOTTE IV, John A. ,  FARKAS, Louis, S., III ,  PERCIVAL, Randall G. ,  HILL, Raymond ,  GROHOLSKI, Alexander ,  COMUNALE, Richard ,  MCVEY, Shawn ,  BIHR, Johannes

CPC classification number: H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

Abstract: Ion sources, systems and methods are disclosed.

公开(公告)号：WO2007067296A2

公开(公告)日：2007-06-14

申请号：PCT/US2006/043621

申请日：2006-11-08

Applicant: ALIS CORPORATION ,  WARD, Billy W. ,  NOTTE, John A. IV ,  MCVEY, Shawn ,  FARKAS, Louis S. III ,  PERCIVAL, Randall G. ,  GROHOLSKI, Alexander ,  COMUNALE, Richard

Inventor： WARD, Billy W. ,  NOTTE, John A. IV ,  MCVEY, Shawn ,  FARKAS, Louis S. III ,  PERCIVAL, Randall G. ,  GROHOLSKI, Alexander ,  COMUNALE, Richard

CPC classification number: H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

Abstract: Ion sources, systems and methods are disclosed.

公开(公告)号：WO2007067314A3

公开(公告)日：2008-03-06

申请号：PCT/US2006044389

申请日：2006-11-15

Applicant: ALIS CORP ,  WARD BILLY W ,  NOTTE IV JOHN A ,  FARKAS III LOUIS S ,  PERCIVAL RANDALL G ,  HILL RAYMOND

Inventor： WARD BILLY W ,  NOTTE IV JOHN A ,  FARKAS III LOUIS S ,  PERCIVAL RANDALL G ,  HILL RAYMOND

IPC: H01J9/02 ,  B81B1/00 ,  G01N23/225 ,  G12B21/02 ,  H01J27/26 ,  H01J37/08 ,  H01J37/252 ,  H01J37/305 ,  H01J37/317

CPC classification number: H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

Abstract: Ion sources, systems and methods are disclosed.

公开(公告)号：WO2007067310A2

公开(公告)日：2007-06-14

申请号：PCT/US2006/044338

申请日：2006-11-15

Applicant: ALIS CORPORATION ,  WARD, Billy, W. ,  NOTTE, John, A., IV ,  FARKAS, Louis, S., III ,  PERCIVAL, Randall, G. ,  HILL, Raymond ,  GROHOLSKI, Alexander ,  COMUNALE, Richard

Inventor： WARD, Billy, W. ,  NOTTE, John, A., IV ,  FARKAS, Louis, S., III ,  PERCIVAL, Randall, G. ,  HILL, Raymond ,  GROHOLSKI, Alexander ,  COMUNALE, Richard

IPC: H01J9/02 ,  H01J37/08 ,  H01J37/252 ,  H01J37/305 ,  H01J37/317 ,  B81B1/00 ,  G01N23/225 ,  G12B21/02 ,  H01J27/26

CPC classification number: H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

Abstract: Ion sources, systems and methods are disclosed.

Abstract translation: 公开了离子源，系统和方法。

公开(公告)号：WO2010132265A2

公开(公告)日：2010-11-18

申请号：PCT/US2010/033844

申请日：2010-05-06

Applicant: CARL ZEISS NTS, LLC. ,  WARD, Billy W. ,  NOTTE, John A., IV ,  PERCIVAL, Randall

Inventor： WARD, Billy W. ,  NOTTE, John A., IV ,  PERCIVAL, Randall

IPC: H01J37/08

CPC classification number: H01J37/28 ,  H01J37/08 ,  H01J2237/006 ,  H01J2237/038 ,  H01J2237/061 ,  H01J2237/0807

Abstract: Disclosed are systems and methods for applying a voltage gradient to a gas delivery system, delivering a gas through a length of the gas delivery system having the voltage gradient, the gas having a pressure-distance product of less than about 1x10 -2 Torr-inches or greater than about 100 Torr-inches, and delivering the gas into a housing of an ion microscope, the housing including an emitter and an extractor.

Abstract translation: 公开了用于向气体输送系统施加电压梯度的系统和方法，将气体输送通过具有电压梯度的气体输送系统的一段长度，该气体的压力距离积小于约1×10 -2 Torr-英寸 或大于约100托/英寸，并且将气体输送到离子显微镜的壳体中，所述壳体包括发射器和提取器。

公开(公告)号：WO2009151458A1

公开(公告)日：2009-12-17

申请号：PCT/US2008/066933

申请日：2008-06-13

Applicant: CARL ZEISS SMT, INC. ,  COMUNALE, Richard ,  GROHOLSKI, Alexander ,  NOTTE IV, John A. ,  WARD, Billy W. ,  PERCIVAL, Randall

Inventor： COMUNALE, Richard ,  GROHOLSKI, Alexander ,  NOTTE IV, John A. ,  WARD, Billy W. ,  PERCIVAL, Randall

IPC: H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J37/304 ,  H01J37/305

CPC classification number: H01J37/304 ,  H01J37/20 ,  H01J37/265 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/0216 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/2007 ,  H01J2237/204 ,  H01J2237/2482

Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).

Abstract translation: 公开了离子源，系统和方法。 在一些实施例中，离子源，系统和方法可以表现出相对较少的不期望的振动和/或可以充分地抑制不期望的振动。 这可以提高性能（例如，增加可靠性，稳定性等）。 在某些实施方案中，离子源，系统和方法可以增强制备具有期望物理属性的尖端（例如尖端顶点上的原子数）的能力。 这可以提高性能（例如，增加可靠性，稳定性等）。

公开(公告)号：WO2007067296A8

公开(公告)日：2008-05-29

申请号：PCT/US2006043621

申请日：2006-11-08

Applicant: ALIS CORP ,  WARD BILLY W ,  NOTTE JOHN A IV ,  MCVEY SHAWN ,  FARKAS LOUIS S III ,  PERCIVAL RANDALL G ,  GROHOLSKI ALEXANDER ,  COMUNALE RICHARD

Inventor： WARD BILLY W ,  NOTTE JOHN A IV ,  MCVEY SHAWN ,  FARKAS LOUIS S III ,  PERCIVAL RANDALL G ,  GROHOLSKI ALEXANDER ,  COMUNALE RICHARD

IPC: H01J37/28

CPC classification number: H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

Abstract: The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample. The figure shows a gas field ion microscope system (100).