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公开(公告)号：WO2007067310A2
公开(公告)日：2007-06-14
申请号：PCT/US2006/044338
申请日：2006-11-15
Applicant: ALIS CORPORATION , WARD, Billy, W. , NOTTE, John, A., IV , FARKAS, Louis, S., III , PERCIVAL, Randall, G. , HILL, Raymond , GROHOLSKI, Alexander , COMUNALE, Richard
Inventor： WARD, Billy, W. , NOTTE, John, A., IV , FARKAS, Louis, S., III , PERCIVAL, Randall, G. , HILL, Raymond , GROHOLSKI, Alexander , COMUNALE, Richard
IPC: H01J9/02 , H01J37/08 , H01J37/252 , H01J37/305 , H01J37/317 , B81B1/00 , G01N23/225 , G12B21/02 , H01J27/26
CPC classification number: H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
Abstract: Ion sources, systems and methods are disclosed.
Abstract translation: 公开了离子源，系统和方法。
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公开(公告)号：WO2007067315A3
公开(公告)日：2007-12-06
申请号：PCT/US2006044439
申请日：2006-11-15
Applicant: ALIS CORP , WARD BILLY W , NOTTE IV JOHN A , FARKAS III LOUIS S , PERCIVAL RANDALL G , HILL RAYMOND , GROHOLSKI ALEXANDER , COMUNALE RICHARD , MCVEY SHAWN , BIHR JOHANNES
Inventor： WARD BILLY W , NOTTE IV JOHN A , FARKAS III LOUIS S , PERCIVAL RANDALL G , HILL RAYMOND , GROHOLSKI ALEXANDER , COMUNALE RICHARD , MCVEY SHAWN , BIHR JOHANNES
IPC: H01J9/02 , B81B1/00 , G01N23/225 , G12B21/02 , H01J27/26 , H01J37/08 , H01J37/252 , H01J37/305 , H01J37/317
CPC classification number: H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
Abstract: Ion sources, systems and methods are disclosed.
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公开(公告)号：WO2007067318A3
公开(公告)日：2007-06-14
申请号：PCT/US2006/044442
申请日：2006-11-15
Applicant: ALIS CORPORATION , WARD, Billy W. , NOTTE IV, John A. , FARKAS III, Louis, S. , PERCIVAL, Randall G. , HILL, Raymond , GROHOLSKI, Alexander , COMUNALE, Richard
Inventor： WARD, Billy W. , NOTTE IV, John A. , FARKAS III, Louis, S. , PERCIVAL, Randall G. , HILL, Raymond , GROHOLSKI, Alexander , COMUNALE, Richard
IPC: H01J9/02 , H01J37/08 , H01J37/252 , H01J37/305 , H01J37/317 , B81B1/00 , G01N23/225 , G12B21/02 , H01J37/26 , H01J37/28 , H01J27/26 , H01J37/20 , B25J7/00
Abstract: Ion sources, systems and methods are disclosed.
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公开(公告)号：WO2007067315A2
公开(公告)日：2007-06-14
申请号：PCT/US2006/044439
申请日：2006-11-15
Applicant: ALIS CORPORATION , WARD, Billy W. , NOTTE IV, John A. , FARKAS, Louis, S., III , PERCIVAL, Randall G. , HILL, Raymond , GROHOLSKI, Alexander , COMUNALE, Richard , MCVEY, Shawn , BIHR, Johannes
Inventor： WARD, Billy W. , NOTTE IV, John A. , FARKAS, Louis, S., III , PERCIVAL, Randall G. , HILL, Raymond , GROHOLSKI, Alexander , COMUNALE, Richard , MCVEY, Shawn , BIHR, Johannes
CPC classification number: H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
Abstract: Ion sources, systems and methods are disclosed.
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公开(公告)号：WO2007067296A2
公开(公告)日：2007-06-14
申请号：PCT/US2006/043621
申请日：2006-11-08
Applicant: ALIS CORPORATION , WARD, Billy W. , NOTTE, John A. IV , MCVEY, Shawn , FARKAS, Louis S. III , PERCIVAL, Randall G. , GROHOLSKI, Alexander , COMUNALE, Richard
Inventor： WARD, Billy W. , NOTTE, John A. IV , MCVEY, Shawn , FARKAS, Louis S. III , PERCIVAL, Randall G. , GROHOLSKI, Alexander , COMUNALE, Richard
CPC classification number: H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
Abstract: Ion sources, systems and methods are disclosed.
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Patent Agency Ranking
公开(公告)号：WO2009151458A1
公开(公告)日：2009-12-17
申请号：PCT/US2008/066933
申请日：2008-06-13
Applicant: CARL ZEISS SMT, INC. , COMUNALE, Richard , GROHOLSKI, Alexander , NOTTE IV, John A. , WARD, Billy W. , PERCIVAL, Randall
Inventor： COMUNALE, Richard , GROHOLSKI, Alexander , NOTTE IV, John A. , WARD, Billy W. , PERCIVAL, Randall
IPC: H01J37/20 , H01J37/26 , H01J37/28 , H01J37/304 , H01J37/305
CPC classification number: H01J37/304 , H01J37/20 , H01J37/265 , H01J37/28 , H01J37/3056 , H01J2237/0216 , H01J2237/0805 , H01J2237/0807 , H01J2237/2007 , H01J2237/204 , H01J2237/2482
Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
Abstract translation: 公开了离子源，系统和方法。 在一些实施例中，离子源，系统和方法可以表现出相对较少的不期望的振动和/或可以充分地抑制不期望的振动。 这可以提高性能（例如，增加可靠性，稳定性等）。 在某些实施方案中，离子源，系统和方法可以增强制备具有期望物理属性的尖端（例如尖端顶点上的原子数）的能力。 这可以提高性能（例如，增加可靠性，稳定性等）。
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公开(公告)号：WO2007067296A8
公开(公告)日：2008-05-29
申请号：PCT/US2006043621
申请日：2006-11-08
Applicant: ALIS CORP , WARD BILLY W , NOTTE JOHN A IV , MCVEY SHAWN , FARKAS LOUIS S III , PERCIVAL RANDALL G , GROHOLSKI ALEXANDER , COMUNALE RICHARD
Inventor： WARD BILLY W , NOTTE JOHN A IV , MCVEY SHAWN , FARKAS LOUIS S III , PERCIVAL RANDALL G , GROHOLSKI ALEXANDER , COMUNALE RICHARD
IPC: H01J37/28
CPC classification number: H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
Abstract: The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample. The figure shows a gas field ion microscope system (100).
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公开(公告)号：WO2007067310A3
公开(公告)日：2008-03-13
申请号：PCT/US2006044338
申请日：2006-11-15
Applicant: ALIS CORP , WARD BILLY W , NOTTE JOHN A IV , FARKAS III LOUIS S , PERCIVAL RANDALL G , HILL RAYMOND , GROHOLSKI ALEXANDER , COMUNALE RICHARD
Inventor： WARD BILLY W , NOTTE JOHN A IV , FARKAS III LOUIS S , PERCIVAL RANDALL G , HILL RAYMOND , GROHOLSKI ALEXANDER , COMUNALE RICHARD
IPC: H01J9/02 , B81B1/00 , G01N23/225 , G12B21/02 , H01J27/26 , H01J37/08 , H01J37/252 , H01J37/305 , H01J37/317
CPC classification number: H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
Abstract: Ion sources, systems and methods are disclosed.
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9.发明申请ROTATING DISK REACTOR WITH FERROFLUID SEAL FOR CHEMICAL VAPOR DEPOSITION 审中-公开旋转盘式反应器，具有氟化氢密封化学蒸气沉积
公开(公告)号：WO2013173152A1
公开(公告)日：2013-11-21
申请号：PCT/US2013/040246
申请日：2013-05-09
Applicant: VEECO INSTRUMENTS INC. , BARRISS, Louise, S. , COMUNALE, Richard, A. , FREMGEN, Roger, P. , GURARY, Alexander, I. , LUSE, Todd, A. , MILGATE, III, Robert, White , POLLOCK, John, D.
Inventor： BARRISS, Louise, S. , COMUNALE, Richard, A. , FREMGEN, Roger, P. , GURARY, Alexander, I. , LUSE, Todd, A. , MILGATE, III, Robert, White , POLLOCK, John, D.
CPC classification number: C23C16/4584 , C23C16/4586 , C23C16/46 , C23C16/52 , H01L21/68785 , H01L21/68792
Abstract: A rotating disk reactor for chemical vapor deposition includes a vacuum chamber and a ferrofluid feedthrough comprising an upper and a lower ferrofluid seal that passes a motor shaft into the vacuum chamber. A motor is coupled to the motor shaft and is positioned in an atmospheric region between the upper and the lower ferrofluid seal. A turntable is positioned in the vacuum chamber and is coupled to the motor shaft so that the motor rotates the turntable at a desired rotation rate. A dielectric support is coupled to the turntable so that the turntable rotates the dielectric support when driven by the shaft. A substrate carrier is positioned on the dielectric support in the vacuum chamber for chemical vapor deposition processing. A heater is positioned proximate to the substrate carrier that controls the temperature of the substrate carrier to a desired temperature for chemical vapor deposition.
Abstract translation: 用于化学气相沉积的旋转盘式反应器包括真空室和铁磁流体馈通，其包括使马达轴进入真空室的上部和下部铁磁流体密封件。 电动机联接到电动机轴并且位于上部和下部铁磁流体密封件之间的大气区域中。 转盘位于真空室中并联接到电动机轴，使得电动机以期望的转速旋转转台。 电介质支撑件联接到转盘，使得转盘在被轴驱动时旋转电介质支架。 衬底载体位于用于化学气相沉积处理的真空室中的电介质支撑体上。 加热器位于基板载体附近，将基板载体的温度控制到用于化学气相沉积的所需温度。
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公开(公告)号：WO2007067318A2
公开(公告)日：2007-06-14
申请号：PCT/US2006044442
申请日：2006-11-15
Applicant: ALIS CORP , WARD BILLY W , NOTTE IV JOHN A , FARKAS LOUIS S III , PERCIVAL RANDALL G , HILL RAYMOND , GROHOLSKI ALEXANDER , COMUNALE RICHARD
Inventor： WARD BILLY W , NOTTE IV JOHN A , FARKAS LOUIS S III , PERCIVAL RANDALL G , HILL RAYMOND , GROHOLSKI ALEXANDER , COMUNALE RICHARD
IPC: H01J9/02 , B81B1/00 , G01N23/225 , G12B21/02 , H01J27/26 , H01J37/08 , H01J37/252 , H01J37/26 , H01J37/28 , H01J37/305 , H01J37/317
CPC classification number: H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
Abstract: Ion sources, systems and methods are disclosed.
Abstract translation: 公开了离子源，系统和方法。
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