公开(公告)号：WO2016011294A2

公开(公告)日：2016-01-21

申请号：PCT/US2015/040808

申请日：2015-07-16

Applicant: APPLIED MATERIALS, INC.

Inventor： RAMASWAMY, Kartik ,  SUBRAMANI, Anantha K. ,  KRISHNAN, Kasiraman ,  SUN, Jennifer Y. ,  BREZOCZKY, Thomas B. ,  ROWLAND, Christopher A. ,  NEMANI, Srinivas D. ,  SRINIVASAN, Swaminathan ,  YAVELBERG, Simon ,  YIEH, Ellie Y. ,  NG, Hou T.

CPC classification number: B22F3/1055 ,  B22F1/0088 ,  B22F2003/1056 ,  B22F2003/1057 ,  B23K26/1464 ,  B23K26/342 ,  B23K26/702 ,  B28B1/001 ,  B28B17/0081 ,  B29C64/153 ,  B29C64/20 ,  B29C64/386 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y40/00 ,  B33Y50/02 ,  Y02P10/295

Abstract: An additive manufacturing system includes a platen, a feed material dispenser apparatus configured to deliver a feed material onto the platen, a laser source configured to produce a laser beam during use of the additive manufacturing system, a controller configured to direct the laser beam to locations on the platen specified by a computer aided design program to cause the feed material to fuse, a gas source configured to supply gas, and a nozzle configured to accelerate and direct the gas to substantially the same location on the platen as the laser beam.

Abstract translation: 增材制造系统包括台板，构造成将进给材料传送到台板上的进给材料分配器设备，构造成在使用增材制造系统期间产生激光束的激光源，控制器 ，其被配置为将激光束引导至由计算机辅助设计程序指定的台板上的位置以引起供给材料熔合;配置成供给气体的气体源;以及配置成加速并引导气体到基本上相同位置的喷嘴 作为激光束的台板。

公开(公告)号：WO2016011290A1

公开(公告)日：2016-01-21

申请号：PCT/US2015/040803

申请日：2015-07-16

Applicant: APPLIED MATERIALS, INC.

Inventor： RAMASWAMY, Kartik ,  SUBRAMANI, Anantha K. ,  KRISHNAN, Kasiraman ,  SUN, Jennifer Y. ,  NEMANI, Srinivas D. ,  BREZOCZKY, Thomas B. ,  ROWLAND, Christopher A. ,  YAVELBERG, Simon ,  SRINIVASAN, Swaminathan ,  PATIBANDLA, Nag B. ,  YIEH, Ellie Y. ,  NG, Hou T.

IPC: B29C67/00 ,  B33Y30/00 ,  B33Y50/02

CPC classification number: B22F3/1055 ,  B22F1/0003 ,  B22F2003/1051 ,  B22F2003/1057 ,  B22F2202/13 ,  B22F2301/205 ,  B22F2998/10 ,  B23K10/006 ,  B23K10/027 ,  B23K26/0006 ,  B23K26/342 ,  B23K26/702 ,  B23K2203/14 ,  B28B1/001 ,  B29C64/153 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02

Abstract: An additive manufacturing system includes a platen, a feed material dispenser apparatus configured to deliver a feed material over the platen, a laser configured to produce a laser beam, a controller configured to direct the laser beam to locations specified by data stored in a computer-readable medium to cause the feed material to fuse, and a plasma source configured to produce ions that are directed to substantially the same location on the platen as the laser beam.

Abstract translation: 添加剂制造系统包括压板，配置成将进给材料输送到压板上的进料分配器装置，配置成产生激光束的激光器，被配置为将激光束引导到存储在计算机可读介质中的数据指定的位置的控制器， 可引导进料材料熔化的等离子体源，以及被配置为产生离子的等离子体源，该离子被引导到与激光束基本相同的压板上的位置。

公开(公告)号：WO2016007672A1

公开(公告)日：2016-01-14

申请号：PCT/US2015/039609

申请日：2015-07-08

Applicant: APPLIED MATERIALS, INC.

Inventor： ROWLAND, Christopher A. ,  SUBRAMANI, Anantha K. ,  KRISHNAN, Kasiraman ,  RAMASWAMY, Kartik ,  BREZOCZKY, Thomas B. ,  SRINIVASAN, Swaminathan ,  SUN, Jennifer Y. ,  YAVELBERG, Simon ,  NEMANI, Srinivas D. ,  PATIBANDLA, Nag B. ,  NG, Hou T.

IPC: B29C67/00 ,  B33Y30/00 ,  B33Y50/02

CPC classification number: B22F3/008 ,  B22F2003/1051 ,  B22F2003/1057 ,  B22F2998/10 ,  B23K10/006 ,  B23K10/027 ,  B28B1/001 ,  B29C64/153 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  H05B3/0061

Abstract: An additive manufacturing system that includes a platen, a feed material delivery system configured to deliver feed material to a location on the platen specified by a computer aided design program and a heat source configured to raise a temperature of the feed material simultaneously across all of the layer or across a region that extends across a width of the platen and scans the region across a length of the platen. The heat source can be an array of heat lamps, or a plasma source.

Abstract translation: 一种添加剂制造系统，包括压板，进料输送系统，其被配置为将进料输送到由计算机辅助设计程序指定的压板上的位置;以及热源，该热源被配置为将所述进料的温度同时跨越所有 层或跨越压板的宽度延伸的区域，并跨越压板的长度扫描该区域。 热源可以是加热灯阵列或等离子体源。

公开(公告)号：WO2014151791A1

公开(公告)日：2014-09-25

申请号：PCT/US2014/026455

申请日：2014-03-13

Applicant: APPLIED MATERIALS, INC.

Inventor： ALAGARSAMY, Rajkumar ,  HU, Yongqi ,  YAVELBERG, Simon ,  GOPALAN, Periya ,  MAHON, Christopher R.

IPC: H01L21/304

CPC classification number: B24B37/205 ,  B24B37/22

Abstract: A polishing article has a polishing surface and an aperture, the aperture including a first section and a second section. The polishing article includes a projection extending inwardly into the aperture. The polishing article includes a lower portion on a side of the first surface farther from the polishing surface. A window has a first portion positioned in the first section of the aperture and a second portion extending into the second section of the aperture. The window has a second surface substantially parallel to the polishing surface. A first adhesive adheres the first surface of the projection to the second surface of the window to secure the window to the projection and a second adhesive of different material composition than the first adhesive. The second adhesive is positioned laterally between the second portion of the window and the lower portion of the polishing article.

Abstract translation: 抛光制品具有抛光表面和孔，该孔包括第一部分和第二部分。 抛光制品包括向内延伸到孔中的突起。 抛光制品包括在离研磨表面更远的第一表面的一侧的下部。 窗口具有位于孔的第一部分中的第一部分和延伸到孔的第二部分中的第二部分。 窗口具有基本上平行于抛光表面的第二表面。 第一粘合剂将突起的第一表面粘附到窗口的第二表面以将窗口固定到突起，并且将第二粘合剂与不同于第一粘合剂的材料组合物粘合。 第二粘合剂横向定位在窗的第二部分和抛光制品的下部之间。

公开(公告)号：WO2013188213A1

公开(公告)日：2013-12-19

申请号：PCT/US2013/044538

申请日：2013-06-06

Applicant: APPLIED MATERIALS, INC.

Inventor： YAVELBERG, Simon

IPC: H01L21/66 ,  H01L21/02

CPC classification number: G06F12/00 ,  G01D9/005 ,  H01L21/67253

Abstract: Embodiments of the invention are directed toward systems and/or methods that buffer data from various sensors with a high sampling rate in a semiconductor processing system. Such sampling can provide better data about the processing for diagnosing the conditions leading up to a processing fault in the system.

Abstract translation: 本发明的实施例涉及在半导体处理系统中缓冲具有高采样率的各种传感器的数据的系统和/或方法。 这种采样可以提供关于用于诊断导致系统中的处理故障的条件的处理的更好的数据。

公开(公告)号：WO2011043866A4

公开(公告)日：2011-04-14

申请号：PCT/US2010/045709

申请日：2010-08-17

Applicant: APPLIED MATERIALS, INC. ,  KARUPPIAH, Lakshmanan ,  ZHANG, Dan ,  YAVELBERG, Simon ,  ATKINSON, Jim K. ,  CHEN, Hung Chih ,  MANTO, Noel ,  DOMIN, Jonathan

Inventor： KARUPPIAH, Lakshmanan ,  ZHANG, Dan ,  YAVELBERG, Simon ,  ATKINSON, Jim K. ,  CHEN, Hung Chih ,  MANTO, Noel ,  DOMIN, Jonathan

IPC: H01L21/302

Abstract: Embodiments described herein relate to an apparatus and method for a roller assembly that may be utilized in a brush cleaning module. In one embodiment, a roller assembly is described. The roller assembly includes an annular groove having at least two substantially parallel opposing sidewalls adapted to contact the major surfaces of a substrate along a periphery of the substrate, each of the opposing sidewalls comprising a compressible material having a pre-compressed dimension that is less than a thickness of the periphery of the substrate.