Abstract:
A method is provided for making a MEMS structure (69). In accordance with the method, a CMOS substrate (51) is provided which has interconnect metal (53) deposited thereon. A MEMS structure is created on the substrate through the plasma assisted chemical vapor deposition (PACVD) of a material selected from the group consisting of silicon and silicon-germanium alloys. The low deposition temperatures attendant to the use of PACVD allow these materials to be used for MEMS fabrication at the back end of an integrated CMOS process.
Abstract:
A Junction between a flexible conductor and a connection terminal, whose particularity consists of the fact that it comprises: a connection terminal that is shaped substantially like a parallelepiped and has an upper face and a lower face, two side faces and an end face, and has, on the end face, one or more slots shaped substantially like a parallelepiped, which run through the entire thickness of the connection terminal; at least one flexible conductor, in which one end part is shaped so as to mate substantially with the inner walls of the slots; the end part being inserted in the slots, and the flexible conductor protruding substantially at right angles from one of the upper, lower or end faces; at least one laser welding bead, which runs at said slots along at least one of the two faces from which the flexible conductor does not protrude.
Abstract:
A microelectromechanical (MEM) switch is fabricated inexpensively by using processing steps which are standard for fabricating multiple metal layer integrated circuits, such as CMOS. The exact steps may be adjusted to be compatible with the process of a particular foundry, resulting in a device which is both low cost and readily integrable with other circuits. The processing steps include making contacts for the MEM switch from metal plugs which are ordinarily used as viasto connect metal layers which are separated by a dielectric layer. Such contact vias are formed on either side of a sacrificial metallization area, and then the interconnect metallization is removed from between the contact vias, leaving them separated. Dielectric surrounding the contacts is etched back so that they protrude towards each other. Thus, when the contacts are moved towards each other by actuating the MEM switch, they connect firmly without obstruction. Tungsten is typically used to form vias in CMOS processes, and it makes an excellent contact material, but other via metals may also be employed as contacts. Interconnect metallization may be employed for other structural and interconnect needs of the MEM switch, and is preferably standard for the foundry and process used. Various metals and dielectric materials may be used to create the switches, but in a preferred embodiment the interconnect metal layers are aluminum and the dielectric material is SiO2, materials which are fully compatible with standard four-layer CMOS fabrication processes.
Abstract:
The present invention discloses a laminated-based electromechanical device and a method of fabricating laminate-based electromechanical devices. The device includes two or more layers of laminate bonded together to form a unitary laminate structure. The layers of laminate include a layer of organic dielectric material that may have at least a portion of one layer of electrically conductive material adherent thereto. The layers of organic dielectric material are bonded to form a unitary laminate structure through a process of lamination. The structures that make up the electromechanical device may be formed either before or after bonding. In particular, the various electromechanical structures that make up the electromechanical device are formed from the layers of organic dielectric material and the layers of electrically conductive material adherent thereto using a predetermined sequence of additive and subtractive fabrication techniques.
Abstract:
The relay and the method for producing said relay are characterized by their simplicity in terms of production. Instead of using different materials for the coil body, the core device and the elements of the load circuit, the ferromagnetic or electrically conductive metals are replaced at least in part by plastic materials to which ferromagnetic or electrically conductive properties are added. In one embodiment, the whole relay consists of plastic parts except for the winding, which have been produced in a multicomponent injection molding process.
Abstract:
A coil form (1) is injection moulded to form the base body of the relay. At least one fixed contact carrier (3,4), one contact-spring contact pin (5) and coil contact pins (9,10) embodied as wire sections in the form of drawn semi-finished products are introduced into the mould and extrusion-coated. The core (16) can also be embedded into the material of the coil form (1) if so desired. This dispenses with assembly processes involving the abrasion of plastic particles which can later become deposited on the contacts. All connector pieces can be mounted in a cost-effective manner in the injection mould, requiring as little material as possible by virtue of the fact that there is no wastage when the semi-finished wires are separated.
Abstract:
The invention relates to an electromagnet system, comprising a yoke (1) and a round core (2) having a cylindrical shaft and an enlarged conical segment (25) extending outwards, towards a fixing end. The shaft of the core is inserted into a round hole (13) of the yoke from the outside. The conical segment (25) of the core also has a thread used to screw the conical section (25) into the threadless round hole (13) of the yoke (1). This enables the core to be positioned accurately and provides a tight fit and a good magnetic coupling.
Abstract:
The invention relates to an electromagnet system, comprising a yoke (1) and a round core (2) having a cylindrical shaft and an enlarged conical segment (25) extending outwards, towards a fixing end. The shaft of the core is inserted into a round hole (13) of the yoke from the outside. The conical segment (25) of the core also has a thread used to screw the conical section (25) into the threadless round hole (13) of the yoke (1). This enables the core to be positioned accurately and provides a tight fit and a good magnetic coupling.
Abstract:
A method of constructing an encapsulated relay is described in which the relay includes an intensely magnetised actuator/armature formed from a chromium/cobalt/iron alloy after fabrication is assembled and encapsulated in a clean environment before being magnetised and heat treated. A relay construction which includes such an actuator/armature is described in which the relay components are accurately located on an insulating base which itself is moulded out of a sheet of conductive material so as to leave protruding lugs which can be bent upwardly and downwardly to form (or provide supports for) some of the component parts of the relay.