公开(公告)号：WO2017100130A1

公开(公告)日：2017-06-15

申请号：PCT/US2016/064980

申请日：2016-12-05

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  GROSS, Kenneth P. ,  PANZER, Matthew ,  CHIMMALGI, Anant ,  WILSON, Lauren ,  WITTENBERG, Joshua

IPC: H01J61/30

CPC classification number: H01J61/025 ,  H01J61/302 ,  H01J61/52 ,  H01J65/04

Abstract: A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.

Abstract translation: 激光维持的等离子灯包括配置成容纳一定体积的气体的气体容纳结构。 气体容纳结构被配置为接收来自泵浦激光器的泵照射以在气体体积内产生等离子体。 气体容纳结构包括一个或多个透射结构，其对泵浦激光器的泵浦照明和由等离子体发射的至少一部分宽带辐射至少部分透明。 一个或多个透射结构具有渐变的吸收分布，以便控制由等离子体发射的宽带辐射引起的一个或多个透射结构的加热。

公开(公告)号：WO2017095787A1

公开(公告)日：2017-06-08

申请号：PCT/US2016/063939

申请日：2016-11-29

Applicant: KLA-TENCOR CORPORATION

Inventor： SHCHEMELININ, Anatoly ,  BEZEL, Ilya ,  GROSS, Kenneth P

IPC: G01J5/48 ,  G01J5/08 ,  G02B27/14

CPC classification number: G01J5/10 ,  G01J5/0003 ,  G01J5/524 ,  G01J2005/0077 ,  G01J2005/103

Abstract: Methods and systems for performing non-contact temperature measurements of optical elements with long wavelength infrared light are described herein. The optical elements under measurement exhibit low emissivity to long wavelength infrared light and are often highly reflective or highly transmissive to long wavelength infrared light. In one aspect, a material coating having high emissivity, low reflectivity, and low transmission at long wavelength IR wavelengths is disposed over selected portions of one or more optical elements of a metrology or inspection system. The locations of the material coating are outside the direct optical path of the primary measurement light employed by the metrology or inspection system to perform measurements of a specimen. Temperature measurements of the front and back surfaces of an IR-transparent optical element are performed with a single IR camera. Temperature measurements are performed through multiple optical elements in an optical path of a primary measurement beam.

Abstract translation: 本文描述了用于执行具有长波长红外光的光学元件的非接触温度测量的方法和系统。 测量中的光学元件对长波长红外光表现出低发射率，并且通常对长波长红外光具有高反射性或高透射性。 在一个方面，在长波长IR波长处具有高发射率，低反射率和低透射率的材料涂层设置在度量衡或检验系统的一个或多个光学元件的选定部分上方。 材料涂层的位置在测量或检查系统用于执行样本测量的主要测量光的直接光路之外。 IR透明光学元件的前后表面的温度测量采用单个红外热像仪进行。 温度测量是通过主测量光束的光路中的多个光学元件进行的。

公开(公告)号：WO2016112326A1

公开(公告)日：2016-07-14

申请号：PCT/US2016/012707

申请日：2016-01-08

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  GROSS, Kenneth P. ,  SOLARZ, Richard ,  WILSON, Lauren ,  YADAV, Rahul ,  WITTENBERG, Joshua ,  CHIMMALGI, Anant ,  LIU, Xiumei ,  BRUGUIER, Brooke

IPC: H01J65/04

CPC classification number: H05G2/008 ,  H01J61/16 ,  H01J65/00 ,  H01J65/04 ,  H05G2/003

Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element. The gas containment element is configured to contain a volume of a gas mixture. The collector element is configured to focus the pump illumination from the pumping source into the volume of the gas mixture contained within the gas containment element in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas mixture filters one or more selected wavelengths of radiation emitted by the plasma.

Abstract translation: 用于形成激光维持等离子体的系统包括气体容纳元件，被配置为产生泵浦照明的照明源和收集器元件。 气体容纳元件构造成容纳一定体积的气体混合物。 收集器元件被配置为将来自泵送源的泵浦照明聚焦到容纳在气体容纳元件内的气体混合物的体积中，以便在发射宽带辐射的气体混合物的体积内产生等离子体。 气体混合物过滤由等离子体发射的一个或多个选定波长的辐射。

公开(公告)号：WO2015153802A1

公开(公告)日：2015-10-08

申请号：PCT/US2015/023939

申请日：2015-04-01

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  SOLARZ, Richard ,  OH, Sebaek ,  DERSTINE, Matthew

IPC: H01J63/08 ,  H01J61/28

CPC classification number: H05G2/003 ,  H01J61/025 ,  H01J61/302 ,  H01J65/042 ,  H05G2/001 ,  H05G2/008

Abstract: A laser-sustained plasma light source for transverse plasma pumping includes a pump source configured to generate pumping illumination, one or more illumination optical elements and a gas containment structure configured to contain a volume of gas. The one or more illumination optical elements are configured to sustain a plasma within the volume of gas of the gas containment structure by directing pump illumination along a pump path to one or more focal spots within the volume of gas. The one or more collection optical elements are configured to collect broadband radiation emitted by the plasma along a collection path. Further, the illumination optical elements are configured to define the pump path such that pump illumination impinges the plasma along a direction transverse to a direction of propagation of the emitted broadband light of the collection path such that the pump illumination is substantially decoupled from the emitted broadband radiation.

Abstract translation: 用于横向等离子体泵浦的激光维持等离子体光源包括被配置为产生泵浦照明的泵浦源，一个或多个照明光学元件和被配置为容纳一定体积的气体的气体容纳结构。 一个或多个照明光学元件被配置为通过沿着泵路径将泵浦照明引导到气体体积内的一个或多个焦点，来维持气体容纳结构的气体体积内的等离子体。 一个或多个收集光学元件被配置为收集由等离子体沿着收集路径发射的宽带辐射。 此外，照明光学元件被配置为限定泵路径，使得泵照明沿着横向于收集路径的发射宽带光的传播方向的方向照射等离子体，使得泵浦照明基本上与发射的宽带 辐射。

公开(公告)号：WO2014160981A1

公开(公告)日：2014-10-02

申请号：PCT/US2014/032260

申请日：2014-03-28

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  DERSTINE, Matthew ,  GROSS, Kenneth P. ,  SHORTT, David W. ,  ZHAO, Wei ,  CHIMMALGI, Anant ,  WANG, Jincheng

IPC: H01J61/02

CPC classification number: H01J65/042 ,  H01J61/28 ,  H01J61/523 ,  H01J65/00 ,  H05H1/24

Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.

Abstract translation: 用于控制光持久等离子体中的对流的系统包括被配置为产生照明的照明源，包括用于容纳一定体积的气体的灯泡的等离子体单元，被布置成将来自照明源的照明聚焦到气体体积中的集电器元件 以便在容纳在灯泡内的气体的体积内产生等离子体。 此外，等离子体单元设置在集电器元件的凹入区域内，其中集电器元件包括用于将等离子体的一部分羽流传播到收集元件的凹入区域外部的区域的开口。

公开(公告)号：WO2013003289A1

公开(公告)日：2013-01-03

申请号：PCT/US2012/044053

申请日：2012-06-25

Applicant: KLA-TENCOR CORPORATION ,  BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  ZHAO, Yanming ,  DERSTINE, Matthew

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  ZHAO, Yanming ,  DERSTINE, Matthew

IPC: H01S3/097 ,  G02B26/00

CPC classification number: G01J3/021 ,  G01J3/0208 ,  G02B26/06 ,  H01J65/04

Abstract: A system for compensating abberative effects caused by a bulb of a plasma cell includes an illumination source configured to generate illumination; a plasma cell, the plasma cell including a bulb for containing a volume of gas; an ellipse configured to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas; and one or more adaptive optical elements configured to compensate for aberrations produced by one or more optical elements, the one or more adaptive optics elements positioned along an illumination pathway between the illumination source and the plasma cell.

Abstract translation: 用于补偿由等离子体电池的灯泡引起的阻尼效应的系统包括被配置为产生照明的照明源; 等离子体电池，所述等离子体电池包括用于容纳一定体积气体的灯泡; 被配置为将来自照明源的照明聚焦到气体体积中以在气体体积内产生等离子体的椭圆形; 以及配置成补偿由一个或多个光学元件产生的像差的一个或多个自适应光学元件，所述一个或多个自适应光学元件沿着照明源和等离子体单元之间的照明路径定位。