公开(公告)号：WO2012073086A8

公开(公告)日：2012-06-07

申请号：PCT/IB2011/002794

申请日：2011-11-23

Applicant: GIGAPHOTON INC. ,  MIZOGUCHI, Hakaru ,  WAKABAYASHI, Osamu

Inventor： MIZOGUCHI, Hakaru ,  WAKABAYASHI, Osamu

IPC: G02B5/00 ,  G02B27/09 ,  H01S3/00 ,  G03F7/20

Abstract: An optical device may include: a first beam shaping unit configured to transform a first laser beam incident thereon into a second laser beam having an annular cross section; and a first focusing optical element for focusing the second laser beam in a first predetermined location so as to generate a Bessel beam.

公开(公告)号：WO2012069898A1

公开(公告)日：2012-05-31

申请号：PCT/IB2011/002657

申请日：2011-11-10

Applicant: GIGAPHOTON INC. ,  WAKABAYASHI, Osamu

Inventor： WAKABAYASHI, Osamu

IPC: H05G2/00

CPC classification number: H05G2/003 ,  H05G2/008

Abstract: An apparatus uses first and second laser beams from a laser apparatus to generate extreme ultraviolet light. The apparatus may include a chamber provided with at least one inlet through which at least one of first and second laser beams outputted from the laser apparatus travels into the chamber. A beam shaping unit is provided on a beam path of the first laser beam for transforming the first laser beam into a hollow laser beam. A first focusing optical element is provided downstream of the beam shaping unit for focusing the hollow laser beam in a first location inside the chamber.

Abstract translation: 一种装置使用来自激光装置的第一和第二激光束产生极紫外光。 该设备可以包括设置有至少一个入口的室，激光装置输出的第一和第二激光束中的至少一个行进到室中。 光束整形单元设置在第一激光束的光束路径上，用于将第一激光束变换成空心激光束。 第一聚焦光学元件设置在光束成形单元的下游，用于将中空激光束聚焦在腔室内的第一位置。

公开(公告)号：WO2013144678A1

公开(公告)日：2013-10-03

申请号：PCT/IB2012/002780

申请日：2012-12-21

Applicant: GIGAPHOTON INC.

Inventor： MIZOGUCHI, Hakaru ,  WAKABAYASHI, Osamu

IPC: H01S3/23 ,  H01S3/00 ,  H01S3/0971 ,  H01S3/223 ,  H01S3/03 ,  H01S3/038 ,  H01S3/041 ,  G02F1/35

CPC classification number: H05G2/008 ,  H01S3/0064 ,  H01S3/0315 ,  H01S3/038 ,  H01S3/041 ,  H01S3/0971 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/2366 ,  H05G2/005

Abstract: A laser apparatus may include a master oscillator (310) configured to output a laser beam, at least one amplifier (320) provided in a beam path of the laser beam, at least one saturable absorber gas cell (330) provided downstream from the at least one amplifier (320) and configured to contain a saturable absorber gas for absorbing a part of the laser beam, the part of the laser beam having a beam intensity equal to or lower than a predetermined beam intensity, a fan (3304) provided in the saturable absorber gas cell and configured to cause the saturable absorber gas to circulate, and a heat exchanger (3305) provided in the saturable absorber gas cell and configured to cool the saturable absorber gas (3307).

Abstract translation: 激光装置可以包括被配置为输出激光束的主振荡器（310），设置在激光束的光束路径中的至少一个放大器（320），设置在激光束的下游的至少一个可饱和吸收器气体单元（330） 至少一个放大器（320），并且被配置为容纳用于吸收激光束的一部分的可饱和吸收器气体，所述激光束的一部分具有等于或小于预定光束强度的光束强度;风扇（3304），其设置在 可饱和吸收器气体池并且构造成使饱和吸收剂气体循环;以及热交换器（3305），设置在可饱和吸收器气体单元中并且构造成冷却可饱和吸收剂气体（3307）。

公开(公告)号：WO2013110968A1

公开(公告)日：2013-08-01

申请号：PCT/IB2012/002714

申请日：2012-12-13

Applicant: GIGAPHOTON INC.

Inventor： IGARASHI, Miwa ,  WATANABE, Yukio ,  ASHIKAWA, Kouji ,  IWAI, Norio ,  WAKABAYASHI, Osamu

IPC: H05G2/00

CPC classification number: H05G2/008 ,  G21K5/10 ,  H05G2/003

Abstract: An apparatus for generating extreme ultraviolet light may include a reference member (9), a chamber (2) fixed to the reference member, the chamber including at least one window (38), a laser beam introduction optical system (50) configured to introduce an externally supplied laser beam into the chamber through the at least one window, and a positioning mechanism (10) configured to position the laser beam introduction optical system to the reference member.

Abstract translation: 用于产生极紫外光的装置可以包括参考构件（9），固定到参考构件的腔室（2），所述腔室包括至少一个窗口（38），激光束引入光学系统（50） 外部提供的激光束通过所述至少一个窗口进入所述腔室;以及定位机构（10），其配置成将所述激光束引入光学系统定位到所述参考构件。

公开(公告)号：WO2013136195A1

公开(公告)日：2013-09-19

申请号：PCT/IB2013/001479

申请日：2013-02-20

Applicant: GIGAPHOTON INC.

Inventor： YANAGIDA, Tatsuya ,  WAKABAYASHI, Osamu

IPC: G02F1/09

CPC classification number: G02F1/093 ,  G02F2201/38 ,  G02F2203/60 ,  H01S3/0064 ,  H05G2/008

Abstract: A Faraday rotator (100A) may include a magnetic field forming section (101,102) configured to form a magnetic field at a predetermined magnetic flux density in a predetermined region, a Faraday element (110) disposed in the predetermined region, and a first heat exhaust member (111), disposed on the side of one primary plane of the Faraday element, configured to form an optical contact surface with the Faraday element and configured to allow light (L12) at a predetermined wavelength to pass.

Abstract translation: 法拉第转子（100A）可以包括：磁场形成部（101,102），被配置为在预定区域中以预定的磁通密度形成磁场;布置在预定区域中的法拉第元件（110）和第一热排出部 配置在所述法拉第元件的一个主平面侧的构件（111），其构造成与所述法拉第元件形成光学接触表面，并且被配置为允许在预定波长的光（L12）通过。

公开(公告)号：WO2013144690A1

公开(公告)日：2013-10-03

申请号：PCT/IB2013/000029

申请日：2013-01-09

Applicant: GIGAPHOTON INC.

Inventor： SUGANUMA, Takashi ,  KAMEDA, Hidenobu ,  MORIYA, Masato ,  WAKABAYASHI, Osamu

IPC: H05G2/00 ,  H01S3/23

CPC classification number: H01S3/10 ,  H01S3/005 ,  H01S3/0971 ,  H01S3/10007 ,  H01S3/10023 ,  H01S3/1003 ,  H01S3/104 ,  H01S3/13 ,  H01S3/1301 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/2308 ,  H01S3/2316 ,  H01S3/2325 ,  H01S3/2391 ,  H05G2/008

Abstract: A laser apparatus may include a master oscillator, an optical unit provided in a beam path of a laser beam from the master oscillator, a beam adjusting unit provided upstream from the optical unit in a beam path of the laser beam and configured for adjusting at least one of a beam path and a wavefront of the laser beam, a first detection unit provided between the beam adjusting unit and the optical unit in a beam path of the laser beam and configured for detecting the laser beam, a second detection unit provided downstream from the optical unit in a beam path of the laser beam and configured for detecting the laser beam, and a controller configured for controlling the beam adjusting unit based on outputs from the first and second detection units.

Abstract translation: 激光装置可以包括主振荡器，设置在来自主振荡器的激光束的光束路径中的光学单元，光束调节单元，其设置在激光束的光束路径中的光学单元的上游，并被配置为至少调节 激光束的光束路径和波前的一个;第一检测单元，设置在激光束的光束路径中的光束调整单元和光学单元之间，并且被配置为检测激光束;第二检测单元， 激光束的光束路径中的光学单元，被配置为检测激光束;以及控制器，被配置为基于来自第一和第二检测单元的输出来控制光束调整单元。

公开(公告)号：WO2013144677A1

公开(公告)日：2013-10-03

申请号：PCT/IB2012/002758

申请日：2012-12-19

Applicant: GIGAPHOTON INC.

Inventor： NOWAK, Krzysztof ,  WAKABAYASHI, Osamu

IPC: H01S3/23 ,  H01S3/00 ,  H01S3/0971 ,  H01S3/223 ,  H01S3/03 ,  H01S3/038 ,  H01S3/041 ,  G02F1/35

CPC classification number: H01S3/005 ,  H01S3/0064 ,  H01S3/0315 ,  H01S3/038 ,  H01S3/041 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/2366 ,  H05G2/005 ,  H05G2/008

Abstract: A laser apparatus may include a master oscillator (310) configured to output a laser beam, at least one amplifier (320) provided in a beam path of the laser beam, at least one saturable absorber gas cell (330) provided downstream from the at least one amplifier (321) and configured to contain a saturable absorber gas for absorbing a part of the laser beam, the part having a beam intensity equal to or lower than a predetermined beam intensity, and a cooling unit (3304,3305) for cooling the saturable absorber gas. The saturable absorber gas cell (330) includes a chamber (3301) filled with saturable absorber gas (3308) and delimited by input/output windows (3302,3303). Furthermore, the chamber comprises a pair of cooling plates (3304,3305). The cooling plates have flow channels (3306,3307) for water cooling.

Abstract translation: 激光装置可以包括被配置为输出激光束的主振荡器（310），被提供在激光束的光束路径中的至少一个放大器（320），至少一个可饱和吸收器气体单元 （330），其设置在所述至少一个放大器（321）的下游并且被配置为容纳用于吸收部分激光束的可饱和吸收体气体，所述部分具有等于或低于预定光束强度的光束强度，以及冷却 单元（3304,3305），用于冷却可饱和吸收器气体。 可饱和吸收器气体单元（330）包括填充有可饱和吸收器气体（3308）并由输入/输出窗口（3302,3303）界定的室（3301）。 此外，腔室包括一对冷却板（3304,3305）。 冷却板具有用于水冷的流动通道（3306,3307）。

公开(公告)号：WO2013088214A2

公开(公告)日：2013-06-20

申请号：PCT/IB2012/002486

申请日：2012-11-26

Applicant: GIGAPHOTON INC.

Inventor： KAWASUJI, Yasufumi ,  KOMORI, Masazumi ,  WAKABAYASHI, Osamu

IPC: G05D23/19

CPC classification number: F28F27/02 ,  F28F27/00 ,  F28F2250/08 ,  G05D23/1917 ,  G21K1/062 ,  H05G2/008

Abstract: A cooling water temperature controlling device includes a heat exchanger for heat- exchanging between primary cooling water and secondary cooling water, a tank for storing the secondary cooling water, an injection pipe connecting the tank and a secondary cooling water supply unit, a valve for controlling a flow rate of the secondary cooling water from the secondary cooling water supply unit to the tank, a fluid level detection unit for detecting a level of the secondary cooling water in the tank, a first circulation pipe connecting the tank and the heat exchanger, a second circulation pipe connecting the heat exchanger and a temperature-control target, a third circulation pipe connecting the tank and the temperature- control target, a pump for circulating the secondary cooling water through the first to third circulation pipes, and a controller for controlling the valve and the pump based on the detected fluid level.

Abstract translation: 冷却水温度控制装置包括用于在一次冷却水和二次冷却水之间进行热交换的热交换器，用于存储二次冷却水的罐，用于连接罐的注入管和二次冷却 控制二次冷却水从二次冷却水供给单元到罐的流量的阀，检测罐内的二次冷却水的水位的液位检测单元，连接第一循环管的第一循环管， 罐和热交换器，连接热交换器和温度控制目标的第二循环管，连接罐和温度控制目标的第三循环管，用于使二次冷却水循环通过第一至第三循环的泵 管道和控制器，用于根据检测到的液位控制阀门和泵。