Abstract:
There is provided an actinic ray-sensitive or radiation-sensitive resin composition containing a compound represented by Formula (1): wherein R 1 represents a polycyclic aromatic group or a polycyclic heterocyclic aromatic group, R 2 represents a (n+2)-valent saturated hydrocarbon group, R 3 represents a (m+2)-valent saturated hydrocarbon group, R 4 and R 5 each independently represent a substituent, Q represents a linking group containing a heteroatom, m and n each independently represent an integer of 0 to 12, when n is 2 or more, R 4 's may be the same or different, R 4 's may be linked to each other to form a non-aromatic ring together with R 2 , when m is 2 or more, R 5 's may be the same or different, and R 5 's may be linked to each other to form a non-aromatic ring together with R 3 , and X - represents a non-nucleophilic anion.
Abstract:
A direct resistance heating method includes placing a first electrode and a second electrode such that a space is provided between the first electrode and the second electrode and such that each of the first electrode and the second electrode extends across a heating target region of a workpiece, moving at least one of the first electrode and the second electrode with an electric current being applied between the first electrode and the second electrode, and adjusting a time during which the electric current is applied for each segment region of the heating target region, the segment regions being defined by dividing the heating target region and are arranged side by side along a direction in which the at least one of the first electrode and the second electrode is moved.
Abstract:
There is provided a pattern forming method comprising (1) a step of forming a film by using an actinic ray-sensitive or radiation-sensitive resin composition containing (P) a resin having a repeating unit represented by the specific formula, (2) a step of exposing the film by using an actinic ray or radiation, and (3) a step of developing the exposed film by using an organic solvent-containing developer to form a negative pattern, wherein the content of the repeating unit represented by the specific formula is 25 mol% or more based on all repeating units in the resin (P).
Abstract:
A direct resistance heating method includes placing a first electrode and a second electrode on a plate-shaped workpiece such that the first electrodes and the second electrode extend across the workpiece in a direction substantially perpendicular to a center line of a heating target region of the workpiece, the center line connecting a middle portion of one side of the heating target region and a middle portion of the other side of the heating target region; and moving at least one of the first electrode and the second electrode along the center line while applying electric current between the first electrode and the second electrode.
Abstract:
A current applying apparatus includes a pair of electrodes configured to contact a workpiece to apply an electric current to the workpiece, and a bus bar arranged to extend along the workpiece. At least one of the electrodes includes a moving electrode configured to move relative to the bus bar and the workpiece such that an electric current flows between the bus bar and the workpiece through the moving electrode, the moving electrode being connected to the bus bar so as to be movable relative to the bus bar, and the moving electrode being configured to contact the workpiece so as to be movable relative to the workpiece.
Abstract:
There is provided a pattern forming method, including: (a) forming a film by an actinic ray-sensitive or radiation-sensitive resin composition containing: (A) a resin capable of increasing polarity by an action of an acid to decrease solubility in an organic solvent-containing developer, (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation, (C) a solvent, and (D) a resin, which contains substantially no fluorine atom and silicon atom and is other than the resin (A), (b) exposing the film; and (c) performing development using the organic solvent-containing developer to form a negative type pattern, wherein a receding contact angle of water on the film formed by (a) is 70C or more.
Abstract:
There is provided an actinic ray-sensitive or radiation-sensitive resin composition, having: (A) a resin having a repeating unit represented by formula (I); (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation; and (C) a resin having at least one repeating unit (x) out of a repeating unit represented by formula (II) and a repeating unit represented by formula (III) and containing substantially neither fluorine atom nor silicon atom, wherein the content of the repeating unit (x) is 90% or more by mole based on all repeating units in the resin (C): wherein Xa represents a hydrogen atom, an alkyl group, a cyano group or a halogen atom, each of R 1a , R 1b and R 1c independently represents an alkyl group or a cycloalkyl group, two members of R 1a , R 1b and R 1c may combine to form a ring structure, X b1 represents a hydrogen atom, an alkyl group, a cyano group or a halogen atom, R 2 represents an organic group having one or more CH 3 partial structures and being stable to acid, X b2 represents a hydrogen atom, an alkyl group, a cyano group or a halogen atom, R 3 represents an organic group having one or more CH 3 partial structures and being stable to acid, and n represents an integer of 1 to 5.
Abstract:
A hydrophilic member includes a base material; and a layer containing a hydrophilic material (1) and an oligomer or polymer (2), the layer is a composition gradient layer in which a composition of (1) and (2) continuously changes in a thickness direction of the layer in such a manner that a ratio of (1) becomes large, whereas a ratio of (2) becomes small, from the nearest side to the base material toward the farthest side to the base material, the hydrophilic material (1) is a hydrophilic material containing a hydrolyzable silyl group-containing hydrophilic polymer, the polymer having at least one hydrolyzable silyl group represented by the formula (a) as defined herein at a main chain end or side chain of a molecule thereof and having at least one hydrophilic group in the molecule, and the oligomer or polymer (2) is different from the hydrophilic polymer (1).
Abstract:
The invention is directed to a colored composition for forming a green color filter, containing a color pigment, wherein a content of the color pigment to a total solid content of the colored composition is 60% by weight or more, and a layer having a thickness of 0.6 µm formed from the colored composition has light transmittance of 80% or more at a wavelength of 550 nm and light transmittance of 50% or less at a wavelength of 450 nm, and a method of producing a color filter including (A) forming a first colored layer containing a first colored composition and (B) patterning with dry etching so as to from a through-hole group in the first colored layer, wherein the first colored composition is the colored composition as defined herein.
Abstract:
A resist pattern forming method contains: in the following order, (1) forming a resist film by using a negative chemical amplification resist composition containing (A) a polymer compound having a repeating unit represented by formula (1) as defined in the specification, (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation and (C) a crosslinking agent capable of crosslinking the polymer compound (A) by an action of an acid; (2) exposing the resist film, so as to form an exposed resist film; and (4) developing the exposed resist film by using a developer containing an organic solvent.