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    APPARATUS AND METHOD FOR INHIBITING PROPAGATION OF A FLAME FRONT
    3.
    发明申请
    APPARATUS AND METHOD FOR INHIBITING PROPAGATION OF A FLAME FRONT 审中-公开
    用于抑制火焰前沿传播的装置和方法

    公开(公告)号：WO2007012894A1

    公开(公告)日：2007-02-01

    申请号：PCT/GB2006/050210

    申请日：2006-07-17

    Applicant: THE BOC GROUP plc ,  BAILEY, Christopher, Mark

    Inventor： BAILEY, Christopher, Mark

    IPC: A62C4/02

    CPC classification number: F17D3/00 ,  A62C4/00 ,  F16L55/1022 ,  F16L55/1026 ,  Y10T137/0318 ,  Y10T137/1963

    Abstract: Apparatus and a method are provided for inhibiting the propagation of a flame front that is ignited by a pumping mechanism which draws a waste stream from a process chamber. The apparatus comprises a foreline for conveying the waste stream which is drawn from the process chamber to the pumping mechanism. The foreline comprises an isolation valve for selectively isolating the pumping mechanism from the process chamber and a bypass positioned around the isolation valve. The apparatus further comprises a controller for actuating the isolation valve. The controller is configured to cause the isolation valve to be closed when the waste stream is initially drawn from the process chamber. During which time the waste stream is conveyed to the pumping mechanism via the bypass, the bypass comprises means for inhibiting propagation of a flame front therethrough. The controller is also configured to cause the isolation valve to be opened once a pressure within a region upstream of the isolation valve has been reduced below a value at which propagation of a flame front within the waste stream can be sustained.

    Abstract translation: 提供了一种装置和方法，用于抑制由泵送机构点燃的火焰前沿的传播，该泵送机构从处理室抽取废物流。 该设备包括用于将从处理室抽出的废物流输送到泵送机构的前级管线。 前级线包括用于选择性地将泵送机构与处理室隔离的隔离阀和位于隔离阀周围的旁路。 该装置还包括用于致动隔离阀的控制器。 控制器被配置为当废物流从处理室中抽出时，使隔离阀关闭。 在此期间，废物流经由旁路输送到泵送机构，旁路包括用于禁止火焰前沿通过其传播的装置。 一旦隔离阀上游的区域内的压力降低到能够维持废物流内的火焰前沿的传播的值，控制器也被配置成使隔离阀打开。

    APPARATUS FOR INHIBITING THE PROPAGATION OF A FLAME FRONT
    5.
    发明申请
    APPARATUS FOR INHIBITING THE PROPAGATION OF A FLAME FRONT 审中-公开
    阻止火焰传播的装置

    公开(公告)号：WO2006095132A1

    公开(公告)日：2006-09-14

    申请号：PCT/GB2006/000592

    申请日：2006-02-21

    Applicant: THE BOC GROUP PLC ,  BAILEY, Christopher, Mark ,  TUNNA, Clive, Marcus, Lloyd

    Inventor： BAILEY, Christopher, Mark ,  TUNNA, Clive, Marcus, Lloyd

    IPC: F04D19/04 ,  F04D27/02

    CPC classification number: F04D19/04 ,  F04D27/0292

    Abstract: Apparatus is described for inhibiting the propagation of a flame front ignited by a pumping mechanism drawing a waste stream from a process chamber. A combustion chamber comprises an inlet for receiving the waste stream exhaust from the pumping mechanism and means for generating a flame for burning a flammable component of the waste stream. A pressure detector detects a pressure at a location through which the waste stream is drawn by the pumping mechanism, and a flame detector detects the presence of a flame in th combustion chamber. A controller regulates the delivery of at least one process fluid to the process chamber if the detected pressure is greater than a pressure above which the flame front can be sustained by the waste stream, or if there is no flame present in the combustion chamber.

    Abstract translation: 描述了用于抑制由从处理室抽取废物流的泵送机构点燃的火焰前沿的传播的装置。 燃烧室包括用于接收来自泵送机构的废物流排气的入口和用于产生用于燃烧废物流的可燃组分的火焰的装置。 压力检测器检测通过泵送机构吸引废物流的位置处的压力，并且火焰检测器检测燃烧室中是否存在火焰。 如果检测到的压力大于其中火焰前端可被废物流维持的压力，或者如果在燃烧室中不存在火焰，则控制器调节至少一个过程流体向处理室的输送。

    VACUUM PUMPING SYSTEM
    7.
    发明申请
    VACUUM PUMPING SYSTEM 审中-公开
    真空泵系统

    公开(公告)号：WO2007119077A3

    公开(公告)日：2008-03-20

    申请号：PCT/GB2007050174

    申请日：2007-03-30

    Applicant: EDWARDS LTD ,  BAILEY CHRISTOPHER MARK

    Inventor： BAILEY CHRISTOPHER MARK

    IPC: C23C16/44 ,  C23C16/56 ,  F04B41/00

    CPC classification number: F04B41/06 ,  C23C16/4412 ,  C23C16/45525 ,  C23C16/45544

    Abstract: A vacuum pumping system comprises a primary foreline for receiving a gas stream from an outlet of a chamber, a first vacuum pump for evacuating the chamber, a second vacuum pump for evacuating the chamber, a first secondary foreline for conveying gas from the primary foreline to the first vacuum pump, a second secondary foreline for conveying gas from the primary foreline to the second vacuum pump, and valve means for selectively connecting a chosen one of the first and second secondary forelines to the primary foreline. The condition of the vacuum pumps is monitored during use. When both vacuum pumps are operating normally, the valve means is controlled to divert a first reactant-rich gas from the primary foreline into the first secondary foreline, and to divert a second reactant-rich gas from the primary foreline to the second secondary foreline, thereby inhibiting mixing of the first and second reactants within the vacuum pumps. However, in the event that the condition of one of the vacuum pumps indicates that one of the pumps is likely to fail during a current process within the chamber, the valve means is controlled to divert both the first reactant-rich gas and the second reactant-rich gas to the other vacuum pump, thereby preventing the potentially costly loss of a batch of substrates within the chamber.

    Abstract translation: 真空泵系统包括用于从腔室的出口接收气流的主要前级管线，用于抽空腔室的第一真空泵，用于抽空腔室的第二真空泵，用于将气体从主要前级管线输送到第一副管路 第一真空泵，用于将气体从初级前级管线输送到第二真空泵的第二辅助前级管线，以及用于选择性地将第一和第二辅助前级管线中选定的一条线连接到主要前级管路的阀门装置。 在使用过程中监控真空泵的状态。 当两个真空泵正常运行时，阀装置被控制以将第一富含反应物的气体从初级前级管线转移到第一次级前级管线中，并且将第二富含反应物的气体从主要前级管线转移到第二辅助前级管线， 从而抑制真空泵内的第一和第二反应物的混合。 然而，在其中一个真空泵的状态表示在室内的当前过程中泵中的一个可能失效的情况下，阀装置被控制以使第一富反应物气体和第二反应物 从而防止在室内的一批衬底潜在的昂贵的损失。

    VACUUM PUMPING SYSTEM
    8.
    发明申请
    VACUUM PUMPING SYSTEM 审中-公开
    真空泵系统

    公开(公告)号：WO2007119077A2

    公开(公告)日：2007-10-25

    申请号：PCT/GB2007/050174

    申请日：2007-03-30

    Applicant: EDWARDS LIMITED ,  BAILEY, Christopher Mark

    Inventor： BAILEY, Christopher Mark

    IPC: C23C16/44 ,  C23C16/56 ,  F04B41/00

    CPC classification number: F04B41/06 ,  C23C16/4412 ,  C23C16/45525 ,  C23C16/45544

    Abstract: A vacuum pumping system comprises a primary foreline for receiving a gas stream from an outlet of a chamber, a first vacuum pump for evacuating the chamber, a second vacuum pump for evacuating the chamber, a first secondary foreline for conveying gas from the primary foreline to the first vacuum pump, a second secondary foreline for conveying gas from the primary foreline to the second vacuum pump, and valve means for selectively connecting a chosen one of the first and second secondary forelines to the primary foreline. The condition of the vacuum pumps is monitored during use. When both vacuum pumps are operating normally, the valve means is controlled to divert a first reactant-rich gas from the primary foreline into the first secondary foreline, and to divert a second reactant-rich gas from the primary foreline to the second secondary foreline, thereby inhibiting mixing of the first and second reactants within the vacuum pumps. However, in the event that the condition of one of the vacuum pumps indicates that one of the pumps is likely to fail during a current process within the chamber, the valve means is controlled to divert both the first reactant-rich gas and the second reactant-rich gas to the other vacuum pump, thereby preventing the potentially costly loss of a batch of substrates within the chamber.

    Abstract translation: 真空泵系统包括用于从腔室的出口接收气流的主要前级管线，用于抽空腔室的第一真空泵，用于抽空腔室的第二真空泵，用于将气体从主要前级管线输送到第一辅助管线 第一真空泵，用于将气体从主前级管线输送到第二真空泵的第二副前级管线，以及用于选择性地将第一和第二辅助前级管线中选定的一个管路连接到主要前级管路的阀门装置。 在使用过程中监控真空泵的状态。 当两个真空泵正常运行时，阀装置被控制以将第一富含反应物的气体从初级前级管线转移到第一辅助前级管线中，并将第二富含反应物的气体从主要前级管线转移到第二辅助前级管线， 从而抑制真空泵内的第一和第二反应物的混合。 然而，在其中一个真空泵的状态表明泵内的一个可能在室内的当前过程中可能失效的情况下，阀装置被控制以使第一富反应物气体和第二反应物 从而防止在室内的一批衬底潜在的昂贵的损失。

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