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    PIEZOELECTRIC RESONATOR HAVING COMBINED THICKNESS AND WIDTH VIBRATIONAL MODES
    1.
    发明申请
    PIEZOELECTRIC RESONATOR HAVING COMBINED THICKNESS AND WIDTH VIBRATIONAL MODES 审中-公开
    具有组合厚度和宽度振动模式的压电谐振器

    公开(公告)号：WO2013044262A1

    公开(公告)日：2013-03-28

    申请号：PCT/US2012/056962

    申请日：2012-09-24

    Applicant: QUALCOMM Incorporated ,  ZUO, Chengjie ,  LO, Chi Shun ,  JOO, Sanghoon ,  YUN, Changhan ,  KIM, Jonghae

    Inventor： ZUO, Chengjie ,  LO, Chi Shun ,  JOO, Sanghoon ,  YUN, Changhan ,  KIM, Jonghae

    IPC: H03H9/56 ,  H03H9/02

    CPC classification number: H03H9/02157 ,  H03H9/02062 ,  H03H9/56

    Abstract: A method and apparatus for a piezoelectric resonator (200) having combined thickness (220T) and width (220W) vibrational modes are disclosed. A piezoelectric resonator may include a piezoelectric substrate (210) and a first electrode (205) coupled to a first surface of the piezoelectric substrate. The piezoelectric resonator may further include a second electrode (215) coupled to a second surface of the piezoelectric substrate, where the first surface and the second surface are substantially parallel and define a thickness dimension of the piezoelectric substrate. Furthermore, the thickness dimension (T) and the width (W) dimension of the piezoelectric substrate are configured to produce a resonance from a coherent combination of a thickness vibrational mode and a width vibrational mode when an excitation signal is applied to the electrodes.

    Abstract translation: 公开了一种具有组合厚度（220T）和宽度（220W）振动模式的压电谐振器（200）的方法和装置。 压电谐振器可以包括压电基板（210）和耦合到压电基板的第一表面的第一电极（205）。 压电谐振器还可以包括耦合到压电基板的第二表面的第二电极（215），其中第一表面和第二表面基本上平行并且限定压电基板的厚度尺寸。 此外，当将激励信号施加到电极时，压电基板的厚度尺寸（T）和宽度（W）尺寸被配置为从厚度振动模式和宽度振动模式的相干组合产生谐振。

    PIEZOELECTRIC LATERALLY VIBRATING RESONATOR STRUCTURES WITH ACOUSTICALLY COUPLED SUB-RESONATORS
    2.
    发明申请
    PIEZOELECTRIC LATERALLY VIBRATING RESONATOR STRUCTURES WITH ACOUSTICALLY COUPLED SUB-RESONATORS 审中-公开
    具有声学耦合子谐振器的压电侧向振动谐振器结构

    公开(公告)号：WO2013012633A1

    公开(公告)日：2013-01-24

    申请号：PCT/US2012/046242

    申请日：2012-07-11

    Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  ZUO, Chengjie ,  LO, Chi Shun ,  YUN, Changhan ,  KIM, Jonghae

    Inventor： ZUO, Chengjie ,  LO, Chi Shun ,  YUN, Changhan ,  KIM, Jonghae

    IPC: H03H9/17 ,  H03H9/02

    CPC classification number: H03H9/173 ,  H03H9/02228

    Abstract: This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. A resonator structure generally includes a first conductive layer with an input electrode, an output electrode, and a ground electrode. The ground electrode is disposed between the input electrode and the output electrode. In some implementations, the second conductive layer includes an input electrode, an output electrode, and a ground electrode. In some other implementations, a second conductive layer includes a pair of ground electrodes and a signal electrode in the form of an input or output electrode disposed between the ground electrodes. A piezoelectric layer is disposed between the first conductive layer and the second conductive layer. Sub-resonators can be defined in different regions of the structure, such that the piezoelectric layer is capable of moving to produce an output signal having frequencies at a first resonant frequency and a second resonant frequency.

    Abstract translation: 本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。 谐振器结构通常包括具有输入电极，输出电极和接地电极的第一导电层。 接地电极设置在输入电极和输出电极之间。 在一些实施方案中，第二导电层包括输入电极，输出电极和接地电极。 在一些其他实施方案中，第二导电层包括一对接地电极和设置在接地电极之间的输入或输出电极形式的信号电极。 压电层设置在第一导电层和第二导电层之间。 次谐振器可以在结构的不同区域中定义，使得压电层能够移动以产生具有第一谐振频率和第二谐振频率的频率的输出信号。

    ELECTROMECHANICAL SYSTEMS PIEZOELECTRIC CONTOUR MODE DIFFERENTIAL AND SINGLE -ENDED RESONATORS AND FILTERS
    3.
    发明申请
    ELECTROMECHANICAL SYSTEMS PIEZOELECTRIC CONTOUR MODE DIFFERENTIAL AND SINGLE -ENDED RESONATORS AND FILTERS 审中-公开
    电动系统压电轮廓模式差分和单向谐振器和滤波器

    公开(公告)号：WO2012030727A1

    公开(公告)日：2012-03-08

    申请号：PCT/US2011/049568

    申请日：2011-08-29

    Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  LO, Chi Shun ,  KIM, Jonghae ,  PARK, Sang-June ,  JOO, Sanghoon ,  ZUO, Chengjie ,  YUN, Changhan

    Inventor： LO, Chi Shun ,  KIM, Jonghae ,  PARK, Sang-June ,  JOO, Sanghoon ,  ZUO, Chengjie ,  YUN, Changhan

    IPC: H03H9/00 ,  H03H9/24 ,  H03H9/56

    CPC classification number: H03H9/0095 ,  G09G3/3493 ,  G09G2310/0267 ,  G09G2310/027 ,  H01P1/2135 ,  H03H9/0014 ,  H03H9/02228 ,  H03H9/2431 ,  H03H9/2436 ,  H03H9/2463 ,  H03H9/564 ,  H03H2003/027 ,  H03H2009/02496 ,  H03H2009/02527 ,  H03H2009/241

    Abstract: This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a contour mode resonator device includes a first conductive layer with a plurality of first layer electrodes including a first electrode (2124) at which a first input signal can be provided and a second electrode (2144) at which a first output signal can be provided. A second conductive layer includes a plurality of second layer electrodes including a first electrode (2134) proximate the first electrode of the first conductive layer and a second electrode (2154) proximate the second electrode of the first conductive layer. A second signal can be provided at the first electrode or the second electrode of the second conductive layer to cooperate with the first input signal or the first output signal to define a differential signal. A piezoelectric layer (2108) is disposed between the first conductive layer and the second conductive layer. The piezoelectric layer includes a piezoelectric material. The piezoelectric layer is substantially oriented in a plane and capable of movement in the plane responsive to an electric field between the first electrodes or the second electrodes. The device can be used in the transmission (TX) or receiver (RX) path of a duplexer or as balun.

    Abstract translation: 本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。 在一个方面，轮廓模式谐振器装置包括具有多个第一层电极的第一导电层，所述第一导电层包括能够提供第一输入信号的第一电极（2124）和第二电极（2144），第二电极 可以提供。 第二导电层包括多个第二层电极，其包括靠近第一导电层的第一电极的第一电极（2134）和靠近第一导电层的第二电极的第二电极（2154）。 可以在第二导电层的第一电极或第二电极处提供第二信号，以与第一输入信号或第一输出信号配合以限定差分信号。 压电层（2108）设置在第一导电层和第二导电层之间。 压电层包括压电材料。 压电层基本上定向在平面中并且能够响应于第一电极或第二电极之间的电场在平面中移动。 该设备可用于双工器的传输（TX）或接收机（RX）路径或平衡 - 不平衡变换器。

    THREE DIMENSIONAL INDUCTOR AND TRANSFORMER DESIGN METHODOLOGY OF GLASS TECHNOLOGY
    4.
    发明申请
    THREE DIMENSIONAL INDUCTOR AND TRANSFORMER DESIGN METHODOLOGY OF GLASS TECHNOLOGY 审中-公开
    玻璃技术的三维电感器和变压器设计方法

    公开(公告)号：WO2011119947A1

    公开(公告)日：2011-09-29

    申请号：PCT/US2011/029978

    申请日：2011-03-25

    Applicant: QUALCOMM Incorporated ,  KIM, Jonghae ,  SHAH, Milind P. ,  LO, Chi Shun ,  LAN, Je-Hsiung ,  LI, Xia ,  NOWAK, Matthew Michael

    Inventor： KIM, Jonghae ,  SHAH, Milind P. ,  LO, Chi Shun ,  LAN, Je-Hsiung ,  LI, Xia ,  NOWAK, Matthew Michael

    IPC: H01L21/02 ,  H01L23/64 ,  H01L27/08 ,  H01L27/12 ,  H01L21/84 ,  H01F17/00 ,  H01F5/00 ,  H01L21/68

    CPC classification number: H01L28/10 ,  H01F2017/004 ,  H01L21/84 ,  H01L23/645 ,  H01L27/12 ,  H01L2924/0002 ,  H01L2924/00

    Abstract: Disclosed is an inductor or transformer for use in integrated circuit devices that includes a high - resistivity substrate. The inductor (1100) includes a plurality of conductive traces (1110, 1112, 1114) around the substrate forming a continuous conductive path from a first to a second port. The conductive path can be solenoid- shaped. Some of the conductive traces can be formed during back- end- of - line processing or backside plating of an integrated circuit die. The transformer includes a first inductor with input and output ports, and a first continuous conductive path therebetween; and a second inductor with input and output ports, and a second continuous conductive path therebetween. The second inductor is independent of and electromagnetically coupled to the first inductor. The first and second conductive paths can be solenoid- shaped. The first conductive path can be interleaved with the second conductive path.

    Abstract translation: 公开了一种用于集成电路器件的电感器或变压器，其包括高电阻率衬底。 电感器（1100）包括围绕衬底的多个导电迹线（1110,1112,1114），其形成从第一端口到第二端口的连续导电路径。 导电路径可以是螺线管形的。 一些导电迹线可以在集成电路管芯的后端处理或背面电镀中形成。 变压器包括具有输入和输出端口的第一电感器和它们之间的第一连续导电路径; 以及具有输入和输出端口的第二电感器以及它们之间的第二连续导电路径。 第二电感器与第一电感器无关并与其电磁耦合。 第一和第二导电路径可以是螺线管形的。 第一导电路径可以与第二导电路径交错。

    ELECTROMECHANICAL SYSTEMS OSCILLATOR WITH PIEZOELECTRIC CONTOUR MODE RESONATOR FOR MULTIPLE FREQUENCY GENERATION
    5.
    发明申请
    ELECTROMECHANICAL SYSTEMS OSCILLATOR WITH PIEZOELECTRIC CONTOUR MODE RESONATOR FOR MULTIPLE FREQUENCY GENERATION 审中-公开
    电磁系统振荡器，具有用于多个频率发生的压电轮廓模式谐振器

    公开(公告)号：WO2012158544A1

    公开(公告)日：2012-11-22

    申请号：PCT/US2012/037599

    申请日：2012-05-11

    Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  KIM, Jonghae ,  LAN, Je-Hsiung ,  YUN, Changhan ,  LO, Chi Shun ,  NOWAK, Matthew

    Inventor： KIM, Jonghae ,  LAN, Je-Hsiung ,  YUN, Changhan ,  LO, Chi Shun ,  NOWAK, Matthew

    IPC: H03H9/24

    CPC classification number: H03H9/2426 ,  H03H9/02228 ,  H03H9/2405 ,  H03H9/462 ,  H03H2009/241

    Abstract: Electromechanical systems resonator structures, devices, circuits, and systems are disclosed. In one aspect, an oscillator (1200) includes an active component (1204) and a passive component (1212) connected in a feedback configuration. The passive component (1212) includes one or more contour mode resonators (CMR). A CMR includes a piezoelectric layer (208) disposed between a first conductive layer (104a, 104b) and a second conductive layer (204a, 204b). The conductive layers include an input electrode and an output electrode. The passive component (1212) is configured to output a first resonant frequency and a second resonant frequency, which is an odd integer harmonic of the first resonant frequency. The active component (1204) is configured to output a signal including the first resonant frequency and the second resonant frequency. This output signal can be a substantially square wave signal, which can serve as a clock in various applications.

    Abstract translation: 公开了机电系统谐振器结构，器件，电路和系统。 在一个方面，振荡器（1200）包括以反馈配置连接的有源部件（1204）和无源部件（1212）。 无源部件（1212）包括一个或多个轮廓模式谐振器（CMR）。 CMR包括设置在第一导电层（104a，104b）和第二导电层（204a，204b）之间的压电层（208）。 导电层包括输入电极和输出电极。 无源部件（1212）被配置为输出第一谐振频率和第二谐振频率，其是第一谐振频率的奇整数谐波。 有源部件（1204）被配置为输出包括第一谐振频率和第二谐振频率的信号。 该输出信号可以是基本上为方波信号，其可以用作各种应用中的时钟。

    PIEZOELECTRIC LATERALLY VIBRATING RESONATOR STRUCTURE GEOMETRIES FOR SPURIOUS FREQUENCY SUPPRESSION
    7.
    发明申请
    PIEZOELECTRIC LATERALLY VIBRATING RESONATOR STRUCTURE GEOMETRIES FOR SPURIOUS FREQUENCY SUPPRESSION 审中-公开
    压电式横向振动谐振器结构几何形状的频率抑制

    公开(公告)号：WO2013012638A1

    公开(公告)日：2013-01-24

    申请号：PCT/US2012/046293

    申请日：2012-07-11

    Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  ZUO, Chengjie ,  YUN, Changhan ,  LO, Chi Shun ,  KIM, Jonghae

    Inventor： ZUO, Chengjie ,  YUN, Changhan ,  LO, Chi Shun ,  KIM, Jonghae

    IPC: H03H9/02 ,  H03H9/17 ,  H03H3/02

    CPC classification number: H03H9/02228 ,  H03H3/02 ,  H03H9/02055 ,  H03H9/173 ,  H03H2003/021 ,  Y10T29/42

    Abstract: This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a resonator structure includes a first conductive layer of electrodes and a second conductive layer of electrodes. A piezoelectric layer including a piezoelectric material is disposed between the first conductive layer and the second conductive layer. One or more trenches can be formed in the piezoelectric layer on one or both sides in space regions between the electrodes. In some implementations, a process for forming the resonator structure includes removing an exposed portion of the piezoelectric layer to define a trench, for instance, by partial etching or performing an isotropic release etch using a XeF2 gas or SF6 plasma. In some other implementations, a portion of a sacrificial layer is removed to define a trench in the piezoelectric layer.

    Abstract translation: 本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。 一方面，谐振器结构包括电极的第一导电层和电极的第二导电层。 包括压电材料的压电层设置在第一导电层和第二导电层之间。 一个或多个沟槽可以在电极之间的空间区域的一侧或两侧的压电层中形成。 在一些实施方案中，用于形成谐振器结构的工艺包括去除压电层的暴露部分以限定沟槽，例如通过部分蚀刻或使用XeF 2气体或SF 6等离子体进行各向同性释放蚀刻。 在一些其他实施方案中，去除牺牲层的一部分以在压电层中限定沟槽。

    PIEZOELECTRIC RESONATORS WITH CONFIGURATIONS HAVING NO GROUND CONNECTIONS TO ENHANCE ELECTROMECHANICAL COUPLING
    8.
    发明申请
    PIEZOELECTRIC RESONATORS WITH CONFIGURATIONS HAVING NO GROUND CONNECTIONS TO ENHANCE ELECTROMECHANICAL COUPLING 审中-公开
    具有无接地连接的配置的压电谐振器，以增强机电耦合

    公开(公告)号：WO2012158889A1

    公开(公告)日：2012-11-22

    申请号：PCT/US2012/038308

    申请日：2012-05-17

    Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  YUN, Changhan ,  PARK, Sang-June ,  LO, Chi Shun ,  KIM, Jonghae ,  LAN, Je-Hsiung ,  JOO, Sanghoon

    Inventor： YUN, Changhan ,  PARK, Sang-June ,  LO, Chi Shun ,  KIM, Jonghae ,  LAN, Je-Hsiung ,  JOO, Sanghoon

    IPC: H03H9/17 ,  H03H9/02

    CPC classification number: H03H9/173 ,  H03H9/02228

    Abstract: This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, resonator apparatus includes a first conductive layer including a first electrode and a second electrode. The first electrode is coupled to receive a first input signal, and the second electrode is coupled to provide a first output signal. A piezoelectric layer includes a piezoelectric material. The piezoelectric layer has a first side and a second side opposite the first side. The first side is proximate the first conductive layer, and the second side is electrically isolated from ground. In some examples, the second side of the piezoelectric layer can be exposed and/or electrically de-coupled from one or more components.

    Abstract translation: 本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。 在一个方面，谐振器装置包括包括第一电极和第二电极的第一导电层。 第一电极被耦合以接收第一输入信号，并且第二电极被耦合以提供第一输出信号。 压电层包括压电材料。 压电层具有与第一侧相对的第一侧和第二侧。 第一侧靠近第一导电层，第二侧与地电隔离。 在一些示例中，压电层的第二面可以暴露和/或从一个或多个部件电脱耦合。

    CROSS-SECTIONAL DILATION MODE RESONATORS
    10.
    发明申请
    CROSS-SECTIONAL DILATION MODE RESONATORS 审中-公开
    交叉分段模式谐振器

    公开(公告)号：WO2013048842A1

    公开(公告)日：2013-04-04

    申请号：PCT/US2012/056197

    申请日：2012-09-20

    Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  ZUO, Chengjie ,  YUN, Changhan ,  LO, Chi Shun ,  ALLEN, Wesley Nathaniel ,  VELEZ, Mario Francisco ,  KIM, Jonghae

    Inventor： ZUO, Chengjie ,  YUN, Changhan ,  LO, Chi Shun ,  ALLEN, Wesley Nathaniel ,  VELEZ, Mario Francisco ,  KIM, Jonghae

    IPC: H03H9/24 ,  H03H9/02 ,  H03H9/46

    CPC classification number: H03H9/462 ,  H03H9/02228 ,  H03H9/2405 ,  H03H9/2426 ,  H03H2009/02503 ,  H03H2009/241

    Abstract: Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.

    Abstract translation: 公开了机电系统扩张模式谐振器（DMR）结构。 DMR包括第一电极层，第二电极层和由压电材料形成的压电层。 压电体层具有在与X轴正交的X轴和Y轴的平面内的横向距离（D）和与X轴正交的Z轴的厚度（T） 。 厚度和横向距离T / D的数值比被配置为提供压电层的振动模式，其具有沿着Z轴的位移并且沿着X轴和Y轴的平面响应所提供的信号 到一个或多个电极。 梯形滤波器电路可以用DMR构造为串联和/或分流元件，并且谐振器可以具有螺旋配置。

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