中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

9 records (took 0.008 seconds)

    METHODS OF FORMING LAYERS
    1.
    发明申请
    METHODS OF FORMING LAYERS 审中-公开
    形成层的方法

    公开(公告)号：WO2014120234A1

    公开(公告)日：2014-08-07

    申请号：PCT/US2013/024274

    申请日：2013-02-01

    Applicant: SEAGATE TECHNOLOGY LLC ,  PITCHER, Philip, George ,  REJDA, Edwin, Frank ,  GREENLEE, Richard, Thomas

    Inventor： PITCHER, Philip, George ,  REJDA, Edwin, Frank ,  GREENLEE, Richard, Thomas

    IPC: C23C14/48 ,  C23C14/06 ,  H01J37/317 ,  C23C14/22

    CPC classification number: C23C14/0605 ,  C23C14/221 ,  H01J2237/31701

    Abstract: A method of forming a layer, the method including providing a substrate having at least one surface adapted for forming a layer thereon; directing a particle beam towards the surface of the substrate, the particle beam including particles, wherein the particle beam has an angle of incidence with respect to the substrate, and is configured so that the particles have implant energies that are not greater than about 100 eV; changing the angle of incidence of the particle beam, the implant energy of the particles, or a combination thereof; and directing the particle beam towards the surface of the substrate a subsequent time, wherein the particles of the particle beam form a layer on the substrate.

    Abstract translation: 一种形成层的方法，所述方法包括提供具有适于在其上形成层的至少一个表面的基底; 将粒子束引导到衬底的表面，所述粒子束包括粒子，其中所述粒子束相对于所述衬底具有入射角，并且被配置为使得所述粒子具有不大于约100eV的注入能量 ; 改变粒子束的入射角，颗粒的植入能量或其组合; 以及随后的时间将粒子束引向衬底的表面，其中粒子束的颗粒在衬底上形成一层。

    METHODS OF FORMING LAYERS
    2.
    发明申请
    METHODS OF FORMING LAYERS 审中-公开
    形成层的方法

    公开(公告)号：WO2013116594A1

    公开(公告)日：2013-08-08

    申请号：PCT/US2013/024267

    申请日：2013-02-01

    Applicant: SEAGATE TECHNOLOGY LLC ,  PITCHER, Philip, George

    Inventor： PITCHER, Philip, George

    IPC: C23C14/00 ,  C23C14/06 ,  C23C14/22 ,  H01J37/317 ,  C23C14/48

    CPC classification number: C23C14/48 ,  C23C14/0605 ,  C23C14/221 ,  H01J37/3171 ,  H01J37/3178 ,  H01J2237/31732

    Abstract: In many thin film applications, surfaces upon which layers are to be formed may include several different materials, some electrically insulating and some electrically conducting; and/or several different topographies. Such surfaces can influence charging effects of the surface and thereby cause different and perhaps unknown interactions with an incoming particle beam containing charged particles. Currently utilized processes merely compensate for the charged particles making up the beam by combining an electron beam with the ion beam, thereby seeking to have a net charge of zero.

    Abstract translation: 在许多薄膜应用中，要形成层的表面可以包括几种不同的材料，一些电绝缘和一些导电的; 和/或几个不同的地形图。 这样的表面可以影响表面的充电效应，从而与含有带电粒子的入射粒子束引起不同的，也可能是未知的相互作用。 目前使用的方法仅通过将电子束与离子束组合来补偿构成束的带电粒子，从而寻求净电荷为零。

    METHODS OF FORMING LAYERS
    3.
    发明申请
    METHODS OF FORMING LAYERS 审中-公开
    形成层的方法

    公开(公告)号：WO2014120233A1

    公开(公告)日：2014-08-07

    申请号：PCT/US2013/024273

    申请日：2013-02-01

    Applicant: SEAGATE TECHNOLOGY LLC ,  PITCHER, Philip, George ,  GREENLEE, Richard, Thomas ,  LIU, Huiwen

    Inventor： PITCHER, Philip, George ,  GREENLEE, Richard, Thomas ,  LIU, Huiwen

    IPC: C23C14/48 ,  C23C14/06 ,  H01J37/317

    CPC classification number: C23C14/0605 ,  C23C14/48 ,  H01J37/3178

    Abstract: A method of forming a layer, the method including providing a substrate having at least one surface adapted for deposition thereon; and directing a particle beam towards the surface of the substrate, the particle beam including small molecule molecular species, wherein the small molecule molecular species break apart upon interaction with atoms at the substrate into atomic components, each of the atomic components having implant energies from about 20 eV to about 100 eV to form a layer.

    Abstract translation: 一种形成层的方法，所述方法包括提供具有适于在其上沉积的至少一个表面的基底; 并且将粒子束引导到衬底的表面，所述粒子束包括小分子分子种类，其中所述小分子分子种类在与所述衬底上的原子相互作用时分裂成原子组分，所述原子组分中的每一个具有从约 20eV至约100eV以形成层。

    SYSTEM FOR LOW ENERGY ION IMPLANTATION AND LAYER FORMATION
    5.
    发明申请
    SYSTEM FOR LOW ENERGY ION IMPLANTATION AND LAYER FORMATION 审中-公开
    低能量离子植入和层形成系统

    公开(公告)号：WO2014120232A1

    公开(公告)日：2014-08-07

    申请号：PCT/US2013/024270

    申请日：2013-02-01

    Applicant: SEAGATE TECHNOLOGY LLC ,  PITCHER, Philip, George

    Inventor： PITCHER, Philip, George

    IPC: H01J37/317 ,  H01J37/04

    CPC classification number: H01J37/3007 ,  H01J37/3171 ,  H01J2237/047 ,  H01J2237/0475 ,  H01J2237/31701

    Abstract: A system that includes an ion source, the ion source configured to produce ions having a first energy; an extractor to extract the ions; an accelerator configured to accelerate the ions; a focusing and steering device configured to focus and/or steer the accelerated ions; and a decelerator configured to decelerate the accelerated ions so that the ions have a second energy when they impact a substrate, wherein the second energy is less than the first energy.

    Abstract translation: 一种包括离子源的系统，所述离子源被配置为产生具有第一能量的离子; 萃取器提取离子; 被配置为加速离子的加速器; 被配置为聚焦和/或引导加速离子的聚焦和转向装置; 以及减速器，其构造成使加速的离子减速，使得当离子冲击衬底时，所述离子具有第二能量，其中所述第二能量小于所述第一能量。

    ARTICLES INCLUDING INTERMEDIATE LAYER AND METHODS OF FORMING
    6.
    发明申请
    ARTICLES INCLUDING INTERMEDIATE LAYER AND METHODS OF FORMING 审中-公开
    包括中间层的文章和形成方法

    公开(公告)号：WO2014062222A1

    公开(公告)日：2014-04-24

    申请号：PCT/US2013/030659

    申请日：2013-03-13

    Applicant: SEAGATE TECHNOLOGY LLC ,  PITCHER, Philip, George ,  BRAND, John, L. ,  REJDA, Edwin, F. ,  FULLER, Richard, M.

    Inventor： PITCHER, Philip, George ,  BRAND, John, L. ,  REJDA, Edwin, F. ,  FULLER, Richard, M.

    IPC: G11B5/31

    CPC classification number: H01F10/30 ,  G11B5/313 ,  G11B5/3133 ,  G11B5/3163 ,  G11B5/3169 ,  H01F41/00 ,  Y10T428/1193 ,  Y10T428/261 ,  Y10T428/265

    Abstract: Articles that include a magnetic structure; an intermediate layer, the intermediate layer positioned on the magnetic structure, the intermediate layer having a thickness from about 3 Å to about 50 Å, the intermediate layer including a bottom interface layer, the bottom interface layer positioned adjacent the magnetic structure, the bottom interface layer including atoms of a metal bonded to atoms, compounds, or both of the magnetic structure; an interlayer, the interlayer positioned on the bottom interface layer, the interlayer including oxides of the metal; and a top interface layer, the top interface layer positioned adjacent the interlayer, the top interface layer including atoms of the metal, oxides of the metal, or some combination thereof bonded to atoms or compounds of the adjacent overcoat layer; and an overcoat layer, the overcoat layer positioned on the top interface layer of the intermediate layer.

    Abstract translation: 包括磁性结构的文章; 中间层，位于磁性结构上的中间层，中间层的厚度约为约至约为50埃，中间层包括底部界面层，底部界面层位于磁性结构附近，底部界面 层，包括键合到原子，化合物或两者的磁性结构的金属的原子; 中间层，位于底部界面层上的中间层，包含金属的氧化物的中间层; 以及顶部界面层，所述顶部界面层位于所述中间层附近，所述顶部界面层包括所述金属的原子，所述金属的氧化物或其结合到所述相邻外涂层的原子或化合物的某些组合; 和外涂层，该外涂层位于中间层的顶部界面层上。

    METHODS OF FORMING LAYERS
    7.
    发明申请
    METHODS OF FORMING LAYERS 审中-公开
    形成层的方法

    公开(公告)号：WO2013116595A1

    公开(公告)日：2013-08-08

    申请号：PCT/US2013/024269

    申请日：2013-02-01

    Applicant: SEAGATE TECHNOLOGY LLC ,  PITCHER, Philip, George

    Inventor： PITCHER, Philip, George

    IPC: H01L21/02 ,  H01L21/265

    CPC classification number: H01J37/3174 ,  C23C14/48 ,  H01J37/3171 ,  H01L21/02115

    Abstract: A method of forming a layer, the method including providing a substrate having at least one surface adapted for deposition thereon; and directing a particle beam towards the surface of the substrate, the particle beam including moderately charged ions (MCIs), substantially all the MCIs independently have charges from ± 2 to ± 6 and kinetic energies of not greater than about 200 eV, wherein the MCIs do not penetrate more than about 30 Å into the surface of the substrate to form a layer on the substrate.

    Abstract translation: 一种形成层的方法，所述方法包括提供具有适于在其上沉积的至少一个表面的基底; 并且将粒子束引导到衬底的表面，包括中等电荷的离子（MCI）的粒子束，基本上所有的MCI独立地具有±2至±6的电荷和不大于约200eV的动能，其中MCI 不要将大于约30埃的渗透到基底的表面上，以在基底上形成一层。

Patent Agency Ranking