METHOD AND SYSTEM FOR LITHOGRAPHY SIMULATION AND MEASUREMENT OF CRITICAL DIMENSIONS
    3.
    发明申请
    METHOD AND SYSTEM FOR LITHOGRAPHY SIMULATION AND MEASUREMENT OF CRITICAL DIMENSIONS 审中-公开
    关键尺寸的算术模拟和测量方法与系统

    公开(公告)号:WO2008064151A2

    公开(公告)日:2008-05-29

    申请号:PCT/US2007085090

    申请日:2007-11-19

    CPC classification number: G03F7/2061 G03F1/36 G03F1/68

    Abstract: A method and system for lithography simulation is disclosed. The method and system specify a subject region of a lithography image with a CD marker, specify a threshold intensity over the lithography image, specify a gradient to a threshold value of the threshold intensity, and calculate a sensitivity or ratio of change of an image boundary of the lithography image to lithography process variation.

    Abstract translation: 公开了一种用于光刻仿真的方法和系统。 该方法和系统使用CD标记指定光刻图像的主题区域,在光刻图像上指定阈值强度,指定到阈值强度的阈值的梯度,并计算图像边界的灵敏度或变化率 的光刻图像到光刻工艺的变化。

    SENSOR MOUNT FOR A MOBILE REFRIGERATION SYSTEM
    6.
    发明申请
    SENSOR MOUNT FOR A MOBILE REFRIGERATION SYSTEM 审中-公开
    用于移动制冷系统的传感器

    公开(公告)号:WO2011084800A2

    公开(公告)日:2011-07-14

    申请号:PCT/US2010061571

    申请日:2010-12-21

    CPC classification number: F25D29/005 F25B2500/13 F25B2700/21172

    Abstract: A refrigeration system for a mobile unit includes a refrigeration loop, an air duct, a sensor and a shock absorption unit. The refrigeration loop includes a compressor, a condenser, a refrigerant regulator and an evaporator. The air duct directs air from an air inlet to the evaporator, which air duct is defined by first and second panels. The sensor is disposed in the air duct. The shock absorption unit mounts the sensor to and provides a limited thermal conduction path between the sensor and the first panel.

    Abstract translation: 用于移动单元的制冷系统包括制冷回路,空气管道,传感器和减震单元。 制冷回路包括压缩机,冷凝器,制冷剂调节器和蒸发器。 空气管道将空气从空气入口引导到蒸发器,该空气管道由第一和第二面板限定。 传感器设置在风道中。 减震单元安装传感器并在传感器和第一面板之间提供有限的热传导路径。

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