Abstract:
Provided is a technique for preventing damage to wafers and transferring means during the transfer of heated wafers, and increasing the number of processable wafers per unit of time. The apparatus for processing wafers according to one embodiment of the present invention comprises: a preheating device which receives a plurality of wafers transferred for heat treatment, and heats the wafers up to a preliminary temperature; a heat-treatment device which receives the plurality of wafers heated by the preheating device, and heat-treats the wafers up to a treatment temperature; and a preliminary cooling device which receives the plurality of wafers heat-treated by the heat-treatment device, and cools the wafers to a temperature lower than the preliminary temperature. The wafers are stored in a boat, and the wafer heat-treatment process is performed while the boat is circulating through the preheating device, heat-treatment device, and preliminary cooling device.
Abstract:
The present invention provides an apparatus for generating microbubbles, the apparatus including a pressure tank (10) including an inlet port and an outlet port, provided at the top and bottom, respectively, and having a predetermined space therein; a fluid supply pump (11 ) for supplying a fluid to be treated to the pressure tank (10); a gas supply means (19) for supplying gas to the pressure tank (10); an injection means (12, 13) connected to the top of the pressure tank and injecting the fluid supplied from the fluid supply pump (11 ) to generate a head and a swirl flow of the fluid so that the gas is dissolved in the fluid and then a centripetal spiral motion of the fluid is created; and a bubble water ejecting (28) means for converting the fluid, discharged through the outlet port of the pressure tank (10) and activated by the centripetal spiral motion, into bubble water containing highly-concentrated microbubbles and discharging the bubble water.
Abstract:
The present invention relates to a lake water purification apparatus using microbubbles, and more particularly, to a lake water purification apparatus which removes, through coagulation and floatation, a variety of contaminants such as floating materials, organic contaminants, nutrient salts, waterweeds, and the like present under water and in bottom sediment from the contaminated lake by using a microbubble generator, an auto fence, and an elution line to restore and improve the water quality of lakes and marshes. The lake water purification apparatus of the present invention includes a fence arranged on the surface of the water to define a predetermined zone; a microbubble generator (hereinafter, MBP) for generating bubble water containing microbubbles and a coagulant from a predetermined depth of water to coagulate and float contaminants into the fence; a collection means arranged in the fence to move, to one side, sludge in which the contaminant is coagulated and floated by the bubble water; a sludge reservoir arranged at one end of the fence to store the sludge collected by the collection means; a first water level sensor for sensing the level of the sludge collected in the sludge reservoir; a control unit for controlling the operation of a sludge delivery pump in accordance with the signal output from the first water level sensor; and a sludge delivery pump arranged in the vicinity of the sludge reservoir to deliver the sludge to a ground reservoir. The bubble water is mixed and reacted with the lake water while maintaining a predetermined flow, and coagulated into flocks such that microbubbles are adsorbed to the flocks, floated on the surface of water, and collected in the fence. The microbubbles are then collected into the sludge reservoir by the collection means.
Abstract:
The present invention relates to a polarising plate and to a liquid-crystal display device comprising the same. More specifically, the present invention relates to a polarising plate which comprises, with respect to 100 parts by weight of a water-soluble polyamide epoxy resin, between 1 and 100 parts by weight (based on solids content) of an acetoacetyl-modified poly(vinyl alcohol) resin, and also comprises an adhesive layer of an adhesive composition having a pH of at least 5, thereby increasing the force of bonding between the functional group of the adhesive composition in the adhesive layer and a protective film (acrylic or propylene based) and a polarizer functional group and hence making it possible to improve durability and reliability by maintaining an adhesive force between the polarizer and the protective film even under high temperature and highly humid conditions. The present invention also relates to a liquid-crystal display device comprising the polarising plate.
Abstract:
The present invention provides an apparatus for generating microbubbles, in which gases such as air, ozone, pure oxygen, etc. are bubbled into water to generate a large amount of highly-concentrated bubble water containing microbubbles having a diameter of less than several micrometers with low power, thus being applicable to various fields such as wastewater treatment, water purification, river and lake water quality improvement, water body disinfection, oxygen supply, food sanitation, and the like. For this purpose, the present invention provides an apparatus for generating microbubbles, the apparatus including a pressure tank including an inlet port and an outlet port, provided at the top and bottom, respectively, and having a predetermined space therein; a fluid supply pump for supplying a fluid to be treated to the pressure tank; a gas supply means for supplying gas to the pressure tank; an injection means connected to the top of the pressure tank and injecting the fluid supplied from the fluid supply pump to generate a head and a swirl flow of the fluid so that the gas is dissolved in the fluid and then a centripetal spiral motion of the fluid is created; and a bubble water ejecting means for converting the fluid, discharged through the outlet port of the pressure tank and activated by the centripetal spiral motion, into bubble water containing highly-concentrated microbubbles and discharging the bubble water.
Abstract:
Disclosed is a multi-plasma generation device for wafer treatment, in which: treatment efficiency and quality of a wafer are improved; and a plasma gas efficiently produces a response such that the gas is deposited on the wafer. Said multi-plasma generation device for wafer treatment comprises: an external coil which is wound along an outer surface of an external cylinder of a wafer treatment device, and heats a deposition gas injected into the inside of an internal cylinder of the wafer treatment device; and an internal coil which is formed between the external cylinder and the internal cylinder, and generates plasma in the deposition gas.
Abstract:
The present invention relates to an integrated semiconductor-processing apparatus comprising: an integrated semiconductor-processing body which has a first space for storing a plurality of FOUPs containing a plurality of wafers, and a second space in which a processing device is installed to process the wafers stored in the first space; a load port module installed in the first space of the integrated semiconductor-processing body to open the FOUPs to enable the extraction of wafers from the FOUPs; and a transfer device which extracts wafers from the FOUPs and transfers the wafers to the processing device in the second space.
Abstract:
The present invention relates to a double boat structure of a wafer processing apparatus in which a first boat is stored in the inside of a second boat, the first and second boats are moved relative to each other in the vertical direction, a first chuck groove is formed at a pillar of the first boat to primarily support a wafer, and a second chuck plate is formed at a pillar of the second boat to secondarily support the wafer so that the vibration and shock transmitted to the wafer are minimized and the wafer processing yield is increased.