APPARATUS AND METHOD FOR PROCESSING WAFERS
    1.
    发明申请
    APPARATUS AND METHOD FOR PROCESSING WAFERS 审中-公开
    装置及其处理方法

    公开(公告)号:WO2011139126A3

    公开(公告)日:2012-03-01

    申请号:PCT/KR2011003413

    申请日:2011-05-06

    Inventor: YOO JEONG-HO

    CPC classification number: H01L21/324 H01L21/67109

    Abstract: Provided is a technique for preventing damage to wafers and transferring means during the transfer of heated wafers, and increasing the number of processable wafers per unit of time. The apparatus for processing wafers according to one embodiment of the present invention comprises: a preheating device which receives a plurality of wafers transferred for heat treatment, and heats the wafers up to a preliminary temperature; a heat-treatment device which receives the plurality of wafers heated by the preheating device, and heat-treats the wafers up to a treatment temperature; and a preliminary cooling device which receives the plurality of wafers heat-treated by the heat-treatment device, and cools the wafers to a temperature lower than the preliminary temperature. The wafers are stored in a boat, and the wafer heat-treatment process is performed while the boat is circulating through the preheating device, heat-treatment device, and preliminary cooling device.

    Abstract translation: 提供了一种防止在加热的晶片传送期间对晶片和转印装置的损坏以及每单位时间增加可处理晶片数量的技术。 根据本发明的一个实施例的用于处理晶片的装置包括:预热装置,其接收转移用于热处理的多个晶片,并将晶片加热到初步温度; 接收由预热装置加热的多个晶片的热处理装置,并将晶片加热处理至处理温度; 以及接收由所述热处理装置热处理的所述多个晶片的预冷却装置,并且将所述晶片冷却至低于所述预备温度的温度。 将晶片储存在舟皿中,并且在舟皿循环通过预热装置,热处理装置和初步冷却装置的同时进行晶片热处理工艺。

    APPARATUS OF GENERATING MICROBUBBLES
    2.
    发明申请
    APPARATUS OF GENERATING MICROBUBBLES 审中-公开
    产生微生物的装置

    公开(公告)号:WO2009116711A3

    公开(公告)日:2010-06-03

    申请号:PCT/KR2008005665

    申请日:2008-09-24

    Abstract: The present invention provides an apparatus for generating microbubbles, the apparatus including a pressure tank (10) including an inlet port and an outlet port, provided at the top and bottom, respectively, and having a predetermined space therein; a fluid supply pump (11 ) for supplying a fluid to be treated to the pressure tank (10); a gas supply means (19) for supplying gas to the pressure tank (10); an injection means (12, 13) connected to the top of the pressure tank and injecting the fluid supplied from the fluid supply pump (11 ) to generate a head and a swirl flow of the fluid so that the gas is dissolved in the fluid and then a centripetal spiral motion of the fluid is created; and a bubble water ejecting (28) means for converting the fluid, discharged through the outlet port of the pressure tank (10) and activated by the centripetal spiral motion, into bubble water containing highly-concentrated microbubbles and discharging the bubble water.

    Abstract translation: 本发明提供了一种用于产生微泡的装置,该装置包括分别设置在其顶部和底部并具有预定空间的包括入口和出口的压力罐(10) 用于将待处理流体供应到压力罐(10)的流体供应泵(11); 用于向压力罐(10)供应气体的气体供给装置(19); 连接到压力罐顶部的喷射装置(12,13),并且喷射从流体供给泵(11)供应的流体以产生流体的头部和涡流,使得气体溶解在流体中, 然后产生流体的向心螺旋运动; 以及用于将通过压力罐(10)的出口排出并通过向心螺旋运动激活的流体转换成包含高浓度微泡的气泡水并排出气泡水的泡沫水喷射装置(28)。

    LAKE WATER PURIFICATION APPARATUS USING MICROBUBBLES
    3.
    发明申请
    LAKE WATER PURIFICATION APPARATUS USING MICROBUBBLES 审中-公开
    湖水净化装置使用微生物

    公开(公告)号:WO2010008197A3

    公开(公告)日:2010-05-14

    申请号:PCT/KR2009003884

    申请日:2009-07-15

    Abstract: The present invention relates to a lake water purification apparatus using microbubbles, and more particularly, to a lake water purification apparatus which removes, through coagulation and floatation, a variety of contaminants such as floating materials, organic contaminants, nutrient salts, waterweeds, and the like present under water and in bottom sediment from the contaminated lake by using a microbubble generator, an auto fence, and an elution line to restore and improve the water quality of lakes and marshes. The lake water purification apparatus of the present invention includes a fence arranged on the surface of the water to define a predetermined zone; a microbubble generator (hereinafter, MBP) for generating bubble water containing microbubbles and a coagulant from a predetermined depth of water to coagulate and float contaminants into the fence; a collection means arranged in the fence to move, to one side, sludge in which the contaminant is coagulated and floated by the bubble water; a sludge reservoir arranged at one end of the fence to store the sludge collected by the collection means; a first water level sensor for sensing the level of the sludge collected in the sludge reservoir; a control unit for controlling the operation of a sludge delivery pump in accordance with the signal output from the first water level sensor; and a sludge delivery pump arranged in the vicinity of the sludge reservoir to deliver the sludge to a ground reservoir. The bubble water is mixed and reacted with the lake water while maintaining a predetermined flow, and coagulated into flocks such that microbubbles are adsorbed to the flocks, floated on the surface of water, and collected in the fence. The microbubbles are then collected into the sludge reservoir by the collection means.

    Abstract translation: 本发明涉及一种使用微泡的湖泊水净化装置,更具体地涉及一种通过凝结和浮选除去浮选材料,有机污染物,营养盐,水草等各种污染物的湖水净化装置,以及 如通过使用微泡发生器,自动围栏和洗脱线从受污染的湖泊中沉积在水中和底部沉积物中,以恢复和改善湖泊和沼泽的水质。 本发明的湖水净化装置包括设置在水面上以限定预定区域的挡板; 用于产生含有微泡的气泡水和来自预定深度的水的凝结剂的微泡发生器(以下称为MBP),以将污染物凝结并漂浮到栅栏中; 设置在围栏中的收集装置,一侧移动污物,其中污染物被气泡水凝结和漂浮; 设置在围栏一端的污泥储存器,用于储存由收集装置收集的污泥; 用于感测在污泥池中收集的污泥水平的第一水位传感器; 控制单元,用于根据从第一水位传感器输出的信号来控制污泥输送泵的操作; 以及布置在污泥池附近的污泥输送泵,以将污泥输送到地面储存器。 将泡沫水与湖水混合,同时保持预定的流动,并凝结成鸡群,使微泡吸附到群体上,漂浮在水面上,并收集在围栏中。 然后通过收集装置将微泡收集到污泥储存器中。

    POLARISING PLATE AND A LIQUID-CRYSTAL DISPLAY DEVICE COMPRISING THE SAME
    4.
    发明申请
    POLARISING PLATE AND A LIQUID-CRYSTAL DISPLAY DEVICE COMPRISING THE SAME 审中-公开
    偏振板和包含该液晶显示装置的液晶显示装置

    公开(公告)号:WO2011129531A3

    公开(公告)日:2012-01-19

    申请号:PCT/KR2011001884

    申请日:2011-03-18

    CPC classification number: G02B5/3033

    Abstract: The present invention relates to a polarising plate and to a liquid-crystal display device comprising the same. More specifically, the present invention relates to a polarising plate which comprises, with respect to 100 parts by weight of a water-soluble polyamide epoxy resin, between 1 and 100 parts by weight (based on solids content) of an acetoacetyl-modified poly(vinyl alcohol) resin, and also comprises an adhesive layer of an adhesive composition having a pH of at least 5, thereby increasing the force of bonding between the functional group of the adhesive composition in the adhesive layer and a protective film (acrylic or propylene based) and a polarizer functional group and hence making it possible to improve durability and reliability by maintaining an adhesive force between the polarizer and the protective film even under high temperature and highly humid conditions. The present invention also relates to a liquid-crystal display device comprising the polarising plate.

    Abstract translation: 本发明涉及一种偏振片及其制造方法。 更具体地说,本发明涉及一种偏振片,其特征在于,相对于100重量份的水溶性聚酰胺环氧树脂,包含1至100重量份(基于固体含量)乙酰乙酰基改性的聚( 乙烯醇)树脂,并且还包含具有至少5的pH的粘合剂组合物的粘合剂层,从而增加粘合剂层中的粘合剂组合物的官能团与保护膜(丙烯酸或丙烯基)之间的粘结力 )和偏光板官能团,因此即使在高温高湿条件下也能够通过保持偏振片与保护膜之间的粘合力而提高耐久性和可靠性。 本发明还涉及包括偏振片的液晶显示装置。

    APPARATUS OF GENERATING MICROBUBBLES
    5.
    发明申请
    APPARATUS OF GENERATING MICROBUBBLES 审中-公开
    产生微生物的装置

    公开(公告)号:WO2009116711A2

    公开(公告)日:2009-09-24

    申请号:PCT/KR2008/005665

    申请日:2008-09-24

    Abstract: The present invention provides an apparatus for generating microbubbles, in which gases such as air, ozone, pure oxygen, etc. are bubbled into water to generate a large amount of highly-concentrated bubble water containing microbubbles having a diameter of less than several micrometers with low power, thus being applicable to various fields such as wastewater treatment, water purification, river and lake water quality improvement, water body disinfection, oxygen supply, food sanitation, and the like. For this purpose, the present invention provides an apparatus for generating microbubbles, the apparatus including a pressure tank including an inlet port and an outlet port, provided at the top and bottom, respectively, and having a predetermined space therein; a fluid supply pump for supplying a fluid to be treated to the pressure tank; a gas supply means for supplying gas to the pressure tank; an injection means connected to the top of the pressure tank and injecting the fluid supplied from the fluid supply pump to generate a head and a swirl flow of the fluid so that the gas is dissolved in the fluid and then a centripetal spiral motion of the fluid is created; and a bubble water ejecting means for converting the fluid, discharged through the outlet port of the pressure tank and activated by the centripetal spiral motion, into bubble water containing highly-concentrated microbubbles and discharging the bubble water.

    Abstract translation: 本发明提供一种用于产生微泡的装置,其中诸如空气,臭氧,纯氧等的气体被鼓泡入水中以产生大量直径小于几微米的含有微泡的高度浓缩的泡沫水, 低功耗,适用于废水处理,水净化,河湖水质改善,水体消毒,供氧,食品卫生等各个领域。 为此,本发明提供一种用于产生微泡的装置,该装置包括分别设置在顶部和底部并具有预定空间的压力罐,该压力罐包括入口和出口; 用于将待处理流体供应到压力罐的流体供应泵; 用于向压力罐供给气体的气体供给装置; 连接到压力罐的顶部的注射装置,并且注入从流体供应泵供应的流体以产生流体的头部和涡流,使得气体溶解在流体中,然后流体的向心螺旋运动 创建; 以及用于将通过压力罐的出口排出并通过向心螺旋运动激活的流体转换成含有高浓度微泡的气泡水并排出气泡水的气泡水喷射装置。

    MULTI-PLASMA GENERATION DEVICE FOR WAFER TREATMENT
    6.
    发明申请
    MULTI-PLASMA GENERATION DEVICE FOR WAFER TREATMENT 审中-公开
    用于水处理的多等离子体生成装置

    公开(公告)号:WO2011139128A3

    公开(公告)日:2012-01-12

    申请号:PCT/KR2011003415

    申请日:2011-05-06

    Inventor: YOO JEONG-HO

    CPC classification number: H05H1/46 H01J37/321

    Abstract: Disclosed is a multi-plasma generation device for wafer treatment, in which: treatment efficiency and quality of a wafer are improved; and a plasma gas efficiently produces a response such that the gas is deposited on the wafer. Said multi-plasma generation device for wafer treatment comprises: an external coil which is wound along an outer surface of an external cylinder of a wafer treatment device, and heats a deposition gas injected into the inside of an internal cylinder of the wafer treatment device; and an internal coil which is formed between the external cylinder and the internal cylinder, and generates plasma in the deposition gas.

    Abstract translation: 公开了一种用于晶片处理的多等离子体产生装置,其中提高了晶片的处理效率和质量; 并且等离子体气体有效地产生使得气体沉积在晶片上的响应。 用于晶片处理的所述多等离子体产生装置包括:沿着晶片处理装置的外筒的外表面卷绕的外部线圈,并且加热注入到晶片处理装置的内筒内部的沉积气体; 以及形成在外筒和内筒之间的内部线圈,并且在沉积气体中产生等离子体。

    INTEGRATED SEMICONDUCTOR-PROCESSING APPARATUS
    7.
    发明申请
    INTEGRATED SEMICONDUCTOR-PROCESSING APPARATUS 审中-公开
    集成半导体加工设备

    公开(公告)号:WO2011139124A2

    公开(公告)日:2011-11-10

    申请号:PCT/KR2011003411

    申请日:2011-05-06

    Inventor: YOO JEONG-HO

    CPC classification number: H01L21/67769 H01L21/67772

    Abstract: The present invention relates to an integrated semiconductor-processing apparatus comprising: an integrated semiconductor-processing body which has a first space for storing a plurality of FOUPs containing a plurality of wafers, and a second space in which a processing device is installed to process the wafers stored in the first space; a load port module installed in the first space of the integrated semiconductor-processing body to open the FOUPs to enable the extraction of wafers from the FOUPs; and a transfer device which extracts wafers from the FOUPs and transfers the wafers to the processing device in the second space.

    Abstract translation: 本发明涉及一种集成半导体处理装置,包括:集成半导体处理体,其具有用于存储多个包含多个晶片的FOUP的第一空间,以及第二空间,其中安装有处理装置来处理 存储在第一空间中的晶片; 安装在集成半导体处理体的第一空间中的负载端口模块以打开FOUP以使得能够从FOUP中提取晶片; 以及从FOUP提取晶片并将晶片传送到第二空间中的处理装置的转移装置。

    DOUBLE BOAT STRUCTURE OF WAFER PROCESSING APPARATUS
    8.
    发明申请
    DOUBLE BOAT STRUCTURE OF WAFER PROCESSING APPARATUS 审中-公开
    波浪加工设备双层船结构

    公开(公告)号:WO2011139127A2

    公开(公告)日:2011-11-10

    申请号:PCT/KR2011003414

    申请日:2011-05-06

    Inventor: YOO JEONG-HO

    CPC classification number: H01L21/67303

    Abstract: The present invention relates to a double boat structure of a wafer processing apparatus in which a first boat is stored in the inside of a second boat, the first and second boats are moved relative to each other in the vertical direction, a first chuck groove is formed at a pillar of the first boat to primarily support a wafer, and a second chuck plate is formed at a pillar of the second boat to secondarily support the wafer so that the vibration and shock transmitted to the wafer are minimized and the wafer processing yield is increased.

    Abstract translation: 本发明涉及一种晶片处理装置的双舟结构,其中第一船被存储在第二船的内部,第一船和第二船相对于彼此在垂直方向上移动,第一卡盘槽是 形成在第一船的支柱上以主要支撑晶片,并且第二卡盘板形成在第二船的支柱处,以二次支撑晶片,使得传递到晶片的振动和冲击最小化,并且晶片加工产量 增加了。

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