TRANSDUCERS, SYSTEMS, AND MANUFACTURING TECHNIQUES FOR FOCUSED ULTRASOUND THERAPIES
    1.
    发明申请
    TRANSDUCERS, SYSTEMS, AND MANUFACTURING TECHNIQUES FOR FOCUSED ULTRASOUND THERAPIES 审中-公开
    用于聚焦超声治疗的传感器,系统和制造技术

    公开(公告)号:WO2014164363A1

    公开(公告)日:2014-10-09

    申请号:PCT/US2014/022141

    申请日:2014-03-07

    Abstract: A system to apply ultrasound energy to a region surrounding blood flow in a blood vessel from a position outside a patient includes: a therapeutic ultrasound transducer comprising a plurality of transducer elements; and a processor configured to control the plurality of transducer elements; wherein the processor is configured to change phase inputs to the transducer elements to move a focus of the transducer at least 1 cm in a first plane which is substantially along a plane of the transducer elements of the therapeutic ultrasound transducer and at least 1 cm in a second plane orthogonal to the first plane; and wherein the processor is further configured to position the focus of the transducer in sequential positions offset from the blood flow in the blood vessel according to a pattern pre-determined by an operator of the system.

    Abstract translation: 将超声波能量施加到患者外部位置处的血管周围的血流周围的区域的系统包括:包括多个换能器元件的治疗性超声换能器; 以及处理器,被配置为控制所述多个换能器元件; 其中所述处理器被配置为改变到所述换能器元件的相位输入,以使所述换能器的焦点在基本上沿着所述治疗性超声换能器的换能器元件的平面的第一平面中移动至少1cm,并且在 与第一平面正交的第二平面; 并且其中所述处理器还被配置为根据由所述系统的操作者预先确定的模式将所述换能器的焦点定位在与所述血管中的血流偏离的顺序位置。

    MULTIPLE MATCHING REFERENCE SPECTRA FOR IN-SITU OPTICAL MONITORING
    2.
    发明申请
    MULTIPLE MATCHING REFERENCE SPECTRA FOR IN-SITU OPTICAL MONITORING 审中-公开
    用于原位光学监测的多重匹配参考光谱

    公开(公告)号:WO2012054263A3

    公开(公告)日:2012-06-28

    申请号:PCT/US2011055814

    申请日:2011-10-11

    CPC classification number: B24B37/013 B24B49/12

    Abstract: A method of controlling polishing includes storing a plurality libraries, each library including a plurality of reference spectra, polishing a substrate, measuring a sequence of spectra of light from the substrate during polishing, and for each measured spectrum of the sequence of spectra, finding a best matching first reference spectrum from a first library from the plurality of libraries and finding a best matching second reference spectrum from a different second library from the plurality of libraries, determining a first value associated with the best matching first reference spectrum and determining a second value from the best matching second reference spectrum, and calculating a third value from the first value and the second value to generate a sequence of calculated third values. At least one of a polishing endpoint or an adjustment for a polishing rate can be determined based on the sequence of calculated third values.

    Abstract translation: 控制抛光的方法包括存储多个库,每个库包括多个参考光谱,抛光衬底,在抛光期间测量来自衬底的光的光谱序列,并且对于光谱序列的每个测量光谱,找到 最佳匹配来自所述多个库中的第一库的第一参考谱,并且从所述多个库中的不同第二库找到最佳匹配的第二参考谱,确定与所述最佳匹配的第一参考谱相关联的第一值,以及确定第二值 从最佳匹配的第二参考频谱中计算第三值,并且从第一值和第二值计算第三值以生成计算的第三值的序列。 基于所计算的第三值的顺序,可以确定抛光终点或抛光速率的调整中的至少一个。

    ENDPOINT CONTROL OF MULTIPLE SUBSTRATES WITH MULTIPLE ZONES ON THE SAME PLATEN IN CHEMICAL MECHANICAL POLISHING
    3.
    发明申请
    ENDPOINT CONTROL OF MULTIPLE SUBSTRATES WITH MULTIPLE ZONES ON THE SAME PLATEN IN CHEMICAL MECHANICAL POLISHING 审中-公开
    在化学机械抛光中在同一板上具有多个区域的多个基板的端点控制

    公开(公告)号:WO2011146213A3

    公开(公告)日:2012-02-23

    申请号:PCT/US2011034212

    申请日:2011-04-27

    CPC classification number: B24B37/013 B24B37/042

    Abstract: A plurality of substrates are polished simultaneously on the same polishing pad. A sequence of spectra is measured from each zone of each substrate, and for each measured spectrum in the sequence of spectra for each zone of each substrate, a best matching reference spectrum is determined from a library of reference spectra. For each zone of each substrate, a linear function is fit to a sequence of index values associated with the best matching reference spectra. For at least one zone, a projected time at which the zone will reach a target index value is determined based on the linear function, and the polishing parameter for at least one zone on at least one substrate is adjusted such that the at least one zone of the at least one substrate has closer to the target index at the projected time than without such adjustment.

    Abstract translation: 多个基板在同一抛光垫上同时被抛光。 从每个底物的每个区域测量光谱序列,并且对于每个底物的每个区域的光谱序列中的每个测量的光谱,从参考光谱库确定最佳匹配的参考光谱。 对于每个衬底的每个区域,线性函数适合于与最佳匹配参考光谱相关联的索引值序列。 对于至少一个区域,基于线性函数确定区域将达到目标指标值的预计时间,并且调整至少一个基底上的至少一个区域的抛光参数,使得至少一个区域 的至少一个基板在投影时间比没有这种调整更接近于目标指标。

    TECHNIQUES FOR MATCHING MEASURED SPECTRA TO REFERENCE SPECTRA FOR IN-SITU OPTICAL MONITORING
    4.
    发明申请
    TECHNIQUES FOR MATCHING MEASURED SPECTRA TO REFERENCE SPECTRA FOR IN-SITU OPTICAL MONITORING 审中-公开
    将测量的光谱与现场光学监测参考光谱进行匹配的技术

    公开(公告)号:WO2012019044A2

    公开(公告)日:2012-02-09

    申请号:PCT/US2011/046646

    申请日:2011-08-04

    Abstract: A method of controlling polishing includes storing a library having a plurality of reference spectra, polishing a substrate, measuring a sequence of spectra of light from the substrate during polishing, for each measured spectrum of the sequence of spectra, finding a best matching reference spectrum using a matching technique other than sum of squared differences to generate a sequence of best matching reference spectra, and determining at least one of a polishing endpoint or an adjustment for a polishing rate based on the sequence of best matching reference spectra. Finding a best matching reference spectrum may include performing a cross-correlation of the measured spectrum with each of two or more of the plurality of reference spectra from the library and selecting a reference spectrum with the greatest correlation to the measured spectrum as a best matching reference spectrum.

    Abstract translation: 控制抛光的方法包括存储具有多个参考光谱的库,抛光衬底,在抛光期间测量来自衬底的光的光谱序列,对于光谱序列的每个测量光谱 ,使用不同于平方差平方和的匹配技术来找到最佳匹配参考谱以产生最佳匹配参考谱的序列,以及基于最佳匹配序列来确定抛光终点或抛光速率的调整中的至少一个 参考光谱。 寻找最佳匹配参考光谱可以包括执行测量光谱与来自库的多个参考光谱中的两个或更多个中的每一个的互相关,并选择与测量光谱具有最大相关性的参考光谱作为最佳匹配参考 谱。

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