公开(公告)号：WO2009131883A3

公开(公告)日：2010-05-06

申请号：PCT/US2009040716

申请日：2009-04-15

Applicant: BIOSCALE INC ,  FALB PETER W ,  BRANCAZIO DAVID ,  FRANCE ERIC ,  MASTERS BRETT P ,  MILLER MICHAEL F ,  ORMSBY JOSHUA R ,  SLOAN WALKER

Inventor： FALB PETER W ,  BRANCAZIO DAVID ,  FRANCE ERIC ,  MASTERS BRETT P ,  MILLER MICHAEL F ,  ORMSBY JOSHUA R ,  SLOAN WALKER

IPC: B01L3/00 ,  G01N35/00

CPC classification number: G01N35/00029 ,  B01L3/5025 ,  B01L3/502715 ,  B01L3/502738 ,  B01L2200/025 ,  B01L2200/16 ,  B01L2300/0654 ,  B01L2300/0816 ,  B01L2400/0487 ,  B01L2400/0655 ,  G01N2035/00148 ,  Y10T29/49

Abstract: A system for processing analytes in samples includes an instrument and a cartridge. The cartridge includes fluid inputs, input and output valve assemblies, processing devices, fluid reservoirs, and channels for carrying samples from the fluid inputs to the fluid reservoirs. The valve assemblies include valves adapted to form a sealed fluid chamber in response to force applied by a movable head assembly of the instrument. Each fluid reservoir is adapted to mate and align with an air displacement pump interface member. A valve assembly includes a recess wall surrounding a recess and a valve assembly wall surrounding both the recess and the recess wall. The recess wall and the valve assembly walls are adapted to mate with and seal against a flexible sheet covering the recess, the recess wall, and the valve assembly wall. The cartridge and instrument include complementary features for finely and coarsely aligning instrument assemblies with portions of the cartridge.

Abstract translation: 用于处理样品中分析物的系统包括仪器和墨盒。 墨盒包括流体输入，输入和输出阀组件，处理装置，流体储存器和用于将样品从流体输入传送到流体储存器的通道。 阀组件包括适于响应由仪器的可移动头组件施加的力而形成密封流体室的阀。 每个流体储存器适于与排气泵接口构件配合和对准。 阀组件包括围绕凹部的凹陷壁和围绕凹部和凹陷壁的阀组件壁。 凹陷壁和阀组件壁适于与覆盖凹部，凹陷壁和阀组件壁的柔性薄片配合并密封。 墨盒和仪器包括用于精细和粗略地对准具有部分墨盒的仪器组件的互补特征。

公开(公告)号：WO2006107961A2

公开(公告)日：2006-10-12

申请号：PCT/US2006012491

申请日：2006-04-05

Applicant: BIOSCALE INC ,  MASTERS BRETT P ,  MILLER MICHAEL F

Inventor： MASTERS BRETT P ,  MILLER MICHAEL F

IPC: H03H3/00 ,  H03H3/04 ,  H03H3/10 ,  H03H9/02

CPC classification number: G01N29/036 ,  G01N9/002 ,  G01N2291/0256

Abstract: Electrically responsive devices and methods for fabricating electrically responsive devices involves applying an electrically responsive material (e.g., an electroactive material) over at least a portion of a surface of a substrate material and applying an electrode material over at least a portion of a surface of the electrically responsive material. At least one region of the electrode material is selectively removed exposing the electrically responsive material. At least some of the electrically responsive material is selectively removed in a region corresponding to the at least one region of the electrode material.

Abstract translation: 用于制造电响应装置的电响应装置和方法包括在基底材料的表面的至少一部分上施加电响应材料（例如，电活性材料），并将电极材料施加到至少一部分表面上 电响应材料。 选择性地去除电极材料的至少一个区域，暴露出电响应材料。 在对应于电极材料的至少一个区域的区域中选择性地去除至少一些电响应材料。

公开(公告)号：WO2007021907A3

公开(公告)日：2009-04-16

申请号：PCT/US2006031329

申请日：2006-08-10

Applicant: BIOSCALE INC ,  MASTERS BRETT P ,  MILLER MICHAEL F

Inventor： MASTERS BRETT P ,  MILLER MICHAEL F

IPC: G01N15/06 ,  G01N11/10 ,  G01N29/00 ,  G01N29/02

CPC classification number: G01N29/036 ,  B82Y15/00 ,  B82Y30/00 ,  G01N2291/0256 ,  G01N2291/0257

Abstract: A system having reduced gas interference that includes a fluid chamber and a resonant sensor device in fluid communication with a fluid in the fluid chamber. The system includes a fluid control device adapted to change at least one of the fluid flow or pressure within the fluid chamber to achieve substantial wetting of surfaces in proximity to the resonant sensor device. Fluid surfaces of the system can include a material to increase the wettability (e.g., hydrophilicity) of the fluid surfaces.

Abstract translation: 具有减小的气体干扰的系统，其包括与流体室中的流体流体连通的流体室和谐振传感器装置。 该系统包括流体控制装置，其适于改变流体室内的流体流动或压力中的至少一个，以实现靠近谐振传感器装置的表面的显着润湿。 系统的流体表面可以包括增加流体表面的润湿性（例如亲水性）的材料。

公开(公告)号：WO2007127107A2

公开(公告)日：2007-11-08

申请号：PCT/US2007009399

申请日：2007-04-17

Applicant: BIOSCALE INC ,  BAKSHI SHIVALIK ,  MILLER MICHAEL F

Inventor： BAKSHI SHIVALIK ,  MILLER MICHAEL F

CPC classification number: B81B2201/0214 ,  B81B2207/115

Abstract: Microfabricated devices for operation in a fluid that include a substrate that has a first and second surface and a first electrode material layer located over the first surface of the substrate. The devices have a piezoelectric material layer located over the first electrode material layer and a second electrode material layer located over the piezoelectric material layer. The devices also include a layer of isolation material located over the second electrode material layer that at least one of chemically or electrically isolates a portion of the second electrode material layer from a fluid. Some devices include a layer of conductive material located over the layer of isolation material.

Abstract translation: 在包括具有第一和第二表面的基底和位于基底的第一表面上的第一电极材料层的流体中操作的微型装置。 这些器件具有位于第一电极材料层上方的压电材料层和位于压电材料层上方的第二电极材料层。 所述装置还包括位于所述第二电极材料层上方的隔离材料层，所述隔离材料层中的至少一个化学或电化学地将所述第二电极材料层的一部分与流体隔离。 一些设备包括位于隔离层上方的导电材料层。

公开(公告)号：WO02052329A3

公开(公告)日：2002-09-06

申请号：PCT/US0149412

申请日：2001-12-19

Applicant: AXSUN TECH INC ,  ATIA WALID A ,  NAGLE STEVEN F ,  MILLER MICHAEL F

Inventor： ATIA WALID A ,  NAGLE STEVEN F ,  MILLER MICHAEL F

IPC: B81B3/00 ,  B81B7/02 ,  G01J3/26 ,  G02B26/00 ,  G02B26/02 ,  G02B26/08 ,  G02B7/188

CPC classification number: G02B26/02 ,  B81B7/02 ,  G01J3/26 ,  G02B26/001

Abstract: A MOEMS Fabry-Perot tunable filter 100 includes an optical membrane structure 150. Two electrostatic cavities 136, 138 are provided, one on either side of the membrane structure 150. As a result, electrostatic attractive forces can be exerted on the optical membrane to enable deflection in either direction, typically, along the optical axis 10. This is useful in calibrating the tunable filter during operation to a lambd° set point. It is also useful in controlling the membrane to avoid unstable operation and increasing a deflection range.

Abstract translation: MOEMS法布里 - 珀罗可调滤波器100包括光学膜结构150.设置两个静电空腔136,138，一个在膜结构150的两侧。结果，可以在光学膜上施加静电吸引力，以使得能够 通常沿着光轴10在任一方向上偏转。这在将操作期间的可调谐滤波器校准到羔羊设定点时是有用的。 它也可用于控制膜以避免不稳定的操作和增加偏转范围。

公开(公告)号：WO0233458A3

公开(公告)日：2003-08-14

申请号：PCT/US0132512

申请日：2001-10-17

Applicant: AXSUN TECH INC ,  MILLER MICHAEL F ,  LE MINH VAN ,  COOK CHRISTOPHER C ,  FLANDERS DALE C ,  NAGLE STEVEN F

Inventor： MILLER MICHAEL F ,  LE MINH VAN ,  COOK CHRISTOPHER C ,  FLANDERS DALE C ,  NAGLE STEVEN F

IPC: B81B3/00 ,  G02B26/00 ,  G02B1/10

CPC classification number: B81B3/0083 ,  B81B2201/042 ,  B81B2201/047 ,  B81C1/0038 ,  B81C2201/0159 ,  B81C2201/053 ,  B81C2201/056 ,  G02B26/001

Abstract: A process for patterning dielectric layers of the type typically found in optical coatings in the context of MEMS manufacturing is disclosed. A dielectric coating is deposited over a device layer, which has or will be released, and patterned using a mask layer. In one example, the coating is etched using the mask layer as a protection layer. In another example, a lift-off process is shown. The primary advantage of photolithographic patterning of the dielectric layers in optical MEMS devices is that higher levels of consistency can be achieved in fabrication, such as size, location, and residual material stress.

Abstract translation: 公开了一种用于在MEMS制造的上下文中通常在光学涂层中发现的类型的介电层图案的工艺。 电介质涂层沉积在器件层上，器件层已经或将被释放，并使用掩模层进行图案化。 在一个实例中，使用掩模层作为保护层来蚀刻涂层。 在另一示例中，示出了剥离过程。 光学MEMS器件中电介质层的光刻图案的主要优点是可以在诸如尺寸，位置和残余材料应力的制造中实现更高水平的稠度。

公开(公告)号：WO0167171A3

公开(公告)日：2002-03-14

申请号：PCT/US0106577

申请日：2001-03-01

Applicant: AXSUN TECH INC ,  FLANDERS DALE C ,  WHITNEY PETER S ,  MILLER MICHAEL F

Inventor： FLANDERS DALE C ,  WHITNEY PETER S ,  MILLER MICHAEL F

IPC: G01J3/26 ,  G02B7/188 ,  G02B26/00 ,  G02B26/02

CPC classification number: G02B26/02 ,  G01J3/26 ,  G02B7/188 ,  G02B26/00 ,  G02B26/001

Abstract: A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. Voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.

Abstract translation: 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 跨过静电腔施加到电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺由集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 图案可以是直的或径向的系绳将内膜与外体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。

公开(公告)号：WO0167158A2

公开(公告)日：2001-09-13

申请号：PCT/US0106944

申请日：2001-03-02

Applicant: AXSUN TECH INC ,  FLANDERS DALE C ,  WHITNEY PETER S ,  MILLER MICHAEL F ,  SHANFIELD STANLEY R ,  LE MINH VAN

Inventor： FLANDERS DALE C ,  WHITNEY PETER S ,  MILLER MICHAEL F ,  SHANFIELD STANLEY R ,  LE MINH VAN

IPC: G01J3/26 ,  G02B26/00 ,  G02B26/02

CPC classification number: G02B26/001 ,  G01J3/26 ,  G02B26/00 ,  G02B26/02 ,  Y10S359/90

Abstract: A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. Voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.

Abstract translation: 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 跨过静电腔施加到电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺由集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 图案可以是直的或径向的系绳将内膜与外体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。