公开(公告)号：WO2021225809A1

公开(公告)日：2021-11-11

申请号：PCT/US2021/029053

申请日：2021-04-26

Applicant: LAM RESEARCH CORPORATION ,  SILFEX, INC.

Inventor： TORBATISARRAF, Seyedalireza ,  RAO, Abhinav Shekhar ,  CHEN, Jihong ,  SONG, Yi ,  HUBACEK, Jerome ,  NITHIANANTHAN, Vijay

IPC: B28B1/00 ,  C23C16/24 ,  B33Y10/00 ,  B33Y40/00 ,  B33Y70/00

Abstract: A method of performing 3D printing of a silicon component includes adding powdered silicon to a 3D printing tool. For each layer of the 3D printing, the process includes forming a powder bed of the powdered silicon, forming a layer of the powder bed to a pre-determ ined thickness, directing a high-powered beam in a pre-determ ined pattern into the powder-bed to melt the powdered silicon. After no further layers are needed, the silicon component is cooled at a pre-determ ined temperature ramp-down rate. In a fully dense printing method, buffer layers of silicon are initially printed on a steel substrate, and then layers of silicon for the actual component are printed on top of the buffer layers using a double printing method. In a fully dense and crack free printing method, one or more heaters and thermal insulation are used to minimize temperature gradient during Si printing, in-situ annealing, and cooling.

公开(公告)号：WO2021041115A1

公开(公告)日：2021-03-04

申请号：PCT/US2020/046997

申请日：2020-08-19

Applicant: LAM RESEARCH CORPORATION ,  SILFEX, INC.

Inventor： RAO, Abhinav Shekhar ,  TORBATISARRAF, Seyedalireza ,  HUBACEK, Jerome ,  CHEN, Jihong ,  SONG, Yi

IPC: H05H1/34 ,  H05H1/42 ,  H05H1/28 ,  H01L21/67

Abstract: A system comprises an apparatus having a nozzle. An element is arranged around the apparatus. A feeder is configured to supply a powder of a material into the apparatus. A gas source is configured to supply a precursor gas into the apparatus and to supply an inert gas to circulate through a space between the element and the apparatus and to exit around the nozzle. A plasma generator is arranged in the apparatus and is configured to ionize the precursor gas and atomize the powder and to eject through the nozzle a jet of particles composed of the atomized powder and the ionized precursor gas onto a substrate arranged adjacent to the nozzle.

公开(公告)号：WO2022159278A1

公开(公告)日：2022-07-28

申请号：PCT/US2022/011422

申请日：2022-01-06

Applicant: LAM RESEARCH CORPORATION

Inventor： HAZARIKA, Pankaj Jyotii ,  SAROBOL, Pylin ,  SCHICK, Matthew, Brian ,  TORBATISARRAF, Seyedalireza

IPC: H01L21/687 ,  H01L21/683 ,  C23C16/458 ,  H01J37/32

Abstract: Semiconductor-processing chamber components and methods for making the components are presented. One component includes a base including a metallic material, a metal matrix composite (MMC) layer, and a dielectric layer. The MMC layer at least partially covers the base, and the MMC layer comprises a metallic material as a continuous phase and a non-metallic material as a disperse phase. Further, the MMC layer is formed on the base using solid-state additive manufacturing (SSAM). The dielectric layer is made of a non-metallic material and is directly on the MMC layer.

公开(公告)号：WO2021206950A1

公开(公告)日：2021-10-14

申请号：PCT/US2021/024744

申请日：2021-03-29

Applicant: LAM RESEARCH CORPORATION

Inventor： HAZARIKA, Pankaj Jyoti ,  TORBATISARRAF, Seyedalireza

IPC: H01L21/67 ,  G03F7/00 ,  G03F7/20 ,  C04B35/622

Abstract: A ceramic gas injector and method of fabrication are described. The gas injector has an inlet portion to which a gas is introduced via an inlet hole and contains a conformal channel between the inlet hole and a sidewall, an outlet portion from which the gas is provided from the gas injector and a collar disposed between the inlet and outlet portions. The channel extends into the collar. The channel has channel sections each of which extends through the inlet portion and terminates at both inlet ends before reaching the inlet face and collar ends before reaching the outlet portion. Alternating adjacent pairs of channel sections are connected via the inlet ends with adjacent pairs that are not connected via the inlet ends connected via the collar ends. Ports in a sidewall of the collar are connected with an adjacent pairs of sections not connected via the inlet ends.

公开(公告)号：WO2021081123A1

公开(公告)日：2021-04-29

申请号：PCT/US2020/056710

申请日：2020-10-21

Applicant: LAM RESEARCH CORPORATION

Inventor： TORBATISARRAF, Seyedalireza ,  KERN, Kurt Alan ,  SMITH, Dennis

IPC: H01J37/32 ,  H01L21/67

Abstract: Methods, systems, and computer programs are presented for manufacturing a showerhead for a semiconductor manufacturing system. One method includes an operation for drilling first holes on a faceplate made of a first material, where the first holes have a first diameter. Further, the method includes an operation for cladding the first holes and the faceplate with a second material to cover the first holes and the faceplate with the second material. Further yet, the method includes drilling second holes concentric with the first holes resulting in a part with holes coated with the second material. The second holes have a second diameter that is smaller than the first diameter. Additionally, the method includes an operation for creating the showerhead utilizing the part, where gas is deliverable through the second holes of the faceplate in the showerhead.

公开(公告)号：WO2021118935A1

公开(公告)日：2021-06-17

申请号：PCT/US2020/063637

申请日：2020-12-07

Applicant: LAM RESEARCH CORPORATION

Inventor： MADSEN, Eric Russell ,  TORBATISARRAF, Seyedalireza ,  JIANG, Yu ,  BENYUHMIN, Naradhu Tai

IPC: C23C16/448 ,  B22F10/28 ,  B22F10/64 ,  B33Y10/00 ,  B33Y40/20 ,  B33Y80/00

Abstract: In some examples, a liquid precursor vaporizer comprises an inlet, an outlet, and a first vaporizer core, the first vaporizer core including a plurality of nested cells defining a plurality of tortuous paths through which a liquid precursor can pass in a path between the inlet and the outlet of the liquid precursor vaporizer.

公开(公告)号：WO2022204181A1

公开(公告)日：2022-09-29

申请号：PCT/US2022/021385

申请日：2022-03-22

Applicant: LAM RESEARCH CORPORATION

Inventor： ANTOLIK, Jerrel Kent ,  TORBATISARRAF, Seyedalireza

IPC: H01J37/32

Abstract: A component constructed by an additive manufacturing process includes an assembly body formed during the additive manufacturing process using a first type of powdered material. Hie component further includes a plurality of thermal management channels within the assembly body, lire plurality of thermal management channels may be constructed during the additive manufacturing process using a. second type of powdered material, the plurality of thermal management channels forming a thermal element.