SEMICONDUCTOR DEVICE FOR DETECTING FLUORESCENT PARTICLES
    2.
    发明申请
    SEMICONDUCTOR DEVICE FOR DETECTING FLUORESCENT PARTICLES 审中-公开
    用于检测荧光颗粒的半导体器件

    公开(公告)号:WO2015177373A1

    公开(公告)日:2015-11-26

    申请号:PCT/EP2015/061479

    申请日:2015-05-22

    申请人: IMEC VZW

    IPC分类号: G01N21/64

    摘要: The invention provides an integrated semiconductor device (100) for detecting fluorescent tags, comprising a first layer (101) comprising a detector element (107), a second layer (102) located on top of the first layer (101) and comprising a rejection filter, a third layer (103) located on top of the second layer (102) and being fabricated from a dielectric material, a fourth layer (104) located on top of the third layer (103) and comprising an optical waveguide, and furthermore a fifth layer located on top of the fourth layer comprising a microfluidic channel (106). The optical waveguide is configured and positioned such that the micro-fluidic channel (106) is illuminated with an evanescent tail of excitation light guided by the optical waveguide. The rejection filter is positioned such that fluorescence from activated fluorescent tags present on top of the fourth layer (104) is filtered before falling onto the detector element (107). The rejection filter is configured to reject the wavelength range of the excitation light and configured to transmit the wavelength range of fluorescence from the activated fluorescent tags towards the detector element (107).

    摘要翻译: 本发明提供了一种用于检测荧光标签的集成半导体器件(100),包括:第一层(101),包括检测器元件(107),位于第一层(101)顶部的第二层(102) 过滤器,位于第二层(102)的顶部并由电介质材料制成的第三层(103),位于第三层(103)的顶部上并包括光波导的第四层(104),此外 位于第四层顶部的第五层包括微流体通道(106)。 光波导被配置和定位成使得微流体通道(106)被由光波导引导的激发光的渐逝尾部照亮。 排斥滤光器被定位成使得存在于第四层(104)的顶部上的来自活化荧光标签的荧光在落到检测器元件(107)之前被过滤。 拒绝滤波器被配置为拒绝激发光的波长范围并且被配置为将荧光的波长范围从激活的荧光标签朝向检测器元件(107)传输。