Abstract:
본 발명은 전류측정소자 및 전류측정소자 어셈블리의 제조방법에 관한 것으로, 더욱 상세하게는 레이저 또는 전자빔 용접으로 저항소자와 접속편을 접합시키기 때문에 용접변형을 최대한 방지할 수 있으며, 측정단자를 프레싱 및 벤딩하는 간단한 공정으로 제조할 수 있는 전류측정소자 및 전류측정소자 어셈블리의 제조방법에 관한 것이다.
Abstract:
Es wird ein elektrisches Vielschichtbauelement angegeben, aufweisend einen Stapel (1) von übereinander angeordneten dielektrischen Schichten (2) und Elektrodenschichten (3), wobei elektrisch gleichpolige Elektrodenschichten gemeinsam mit einem an einer Seitenfläche des Stapelsangeordneten Außenkontakt (5a, 5b) kontaktiert sind, und wobei ein mit dem Stapel versinterter Widerstand (4), der keramisches Widerstandsmaterial enthält, auf einer Stirnfläche des Stapels angeordnet ist.
Abstract:
An energy beam machining system includes an emitter for emitting an energy beam and beam adjusting optics, such as a zoom telescope, for adjusting the pupil size of the system to multiple values. The adjusting of the pupil size can be carried out automatically, semi-automatically, or manually. In manual modes, instructions can be presented to the operator (e.g., via a monitor or pre-programmed audio instruction) indicating how to adjust pupil size. A focus lens focuses the adjusted beam directed along each path at a different focal point within a scan field encompassed in the field of view of the focus lens. Beam directing optics are configured to enable multiple scan fields within the field of view of the focus lens.
Abstract:
An energy beam machining system includes an emitter for emitting an energy beam and beam adjusting optics, such as a zoom telescope, for adjusting the pupil size of the system to multiple values. The adjusting of the pupil size can be carried out automatically, semi-automatically, or manually. In manual modes, instructions can be presented to the operator (e.g., via a monitor or pre-programmed audio instruction) indicating how to adjust pupil size. A focus lens focuses the adjusted beam directed along each path at a different focal point within a scan field encompassed in the field of view of the focus lens. Beam directing optics are configured to enable multiple scan fields within the field of view of the focus lens.
Abstract:
Bei einem Verfahren zum Herstellen von Dünnschicht-Chipwiderständen, bei welchem Verfahren auf die Oberseite eines flächigen Substrats (10) eine Widerstandsschicht (14) und eine Kontaktschicht (15, 16) aufgebracht und mittels Laserlicht so strukturiert wird, dass auf dem Substrat (10) nebeneinander eine Mehrzahl von separaten Widerstandsbahnen (24) mit einem näherungsweise vorbestimmten Widerstandswert entstehen, wird eine vereinfachte und kostengünstiger Herstellung dadurch erreicht, dass die elektrische Isolation der Widerstandelemente (13) und die Strukturierung der einzelnen Widerstandsbahnen (24) für die gesamte Widerstandsbahn gleichzeitig mittels eines laserlithographischen Direcktbelichtungsverfahrens erfolgt.
Abstract:
The invention relates to a method of iteratively, selectively tuning the impedance of an integrated semiconductor device (1) by modifying the dopant profile of a region of low dopant concentration by controlled diffusion of dopants from one or more adjacent regions of higher dopant concentration through the melting action of a focussed heating source, such as a laser. For instance, the focussed heating source is directed to a selected area which encompasses a portion of a first and a second doped region, one of which have a higher dopant concentration than the other. At least one heating pulse is applied to the selected area so as to melt it. The selected area is allowed to solidify between each successive application of the heating pulse or pulses. The method is used for increasing as well as decreasing the dopant concentration of the selected area in order to tune the resistance value of the integrated semiconductor device (1) without requiring any additional manufacturing steps.
Abstract:
A method of laser trimming a passive resistive component changes its resistance value while leaving substantially unchanged coverage of the substrate area the component occupies to maintain its power dissipation capacity or preserve its high frequency response characteristics. In a preferred embodiment, the output of a 266 nm or 355 nm, Q-switched YAG laser or a 349 nm, Q-switched YLF laser is controlled so that no single output pulse completely removes thick-film resistor material depthwise at any given location. The laser output is moved in a line scan or raster scan fashion across an area of the resistor material to ablate a portion of its surface area to a depth that is less than the height of the resistor material. Varying the laser fluence, scan speed, bite size, repetition rate, and pitch makes possible the control of the amount of material, and particularly the depth of material, removed by the laser. The laser output is scanned across the exposed surface of the resistor until its resistance value reaches a desired value. Partly removing the resistor material allows resistance tuning with no damage to the substrate. Leaving substantially unchanged the substrate area that the resistor covers maintains its power dissipation capacity and preserves its frequency response characteristics.
Abstract:
A method for high and low temperature laser trimming of resistors is provided. The method includes a ceramic heating plate for heating resistors to a designated temperature before trimming the resistors.