公开(公告)号：WO2022212106A1

公开(公告)日：2022-10-06

申请号：PCT/US2022/021206

申请日：2022-03-21

Applicant: RESONANT INC.

Inventor： YANG, Wei ,  ZHANG, Kuan ,  MYERS, Luke ,  KAY, Andrew

IPC: H03H9/56 ,  H03H9/02 ,  H03H9/13 ,  H03H9/17 ,  H03H3/02 ,  H03H9/02015 ,  H03H9/02228 ,  H03H9/205 ,  H03H9/568

Abstract: An acoustic resonator has a piezoelectric plate attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm spanning a cavity in the substrate. An interdigital transducer (IDT) formed on the plate has interleaved fingers on the diaphragm with first parallel fingers extending from a first busbar and second parallel fingers extending from a second busbar of the IDT. The first and second busbars of the IDT terminate in beveled corners that extend off of the diaphragm as side edges of the busbars that form angles with a perimeter of the cavity.

公开(公告)号：WO2022236185A2

公开(公告)日：2022-11-10

申请号：PCT/US2022/028378

申请日：2022-05-09

Applicant: RESONANT INC.

Inventor： MCHUGH, Sean ,  FENZI, Neal ,  KOULAKIS, John ,  DYER, Greg

IPC: H03H9/02 ,  H03H3/02 ,  H03B5/32 ,  G01N29/04 ,  H03H9/15 ,  H03H9/02228 ,  H03H9/13 ,  H03H9/132 ,  H03H9/17 ,  H03H9/174 ,  H03H9/568

Abstract: Acoustic resonator devices, filters, and methods. An acoustic resonator includes a substrate and a piezoelectric plate, a portion of the piezoelectric plate being a diaphragm spanning a cavity in the substrate. A conductor pattern on a front surface of the piezoelectric plate includes concentric interleaved interdigital transducer (IDT) fingers connected alternately to first and second busbars. The IDT fingers are on the diaphragm.

公开(公告)号：WO2022212041A1

公开(公告)日：2022-10-06

申请号：PCT/US2022/020442

申请日：2022-03-15

Applicant: PSEMI CORPORATION

Inventor： SMITH, William Richard ,  SEZAN, Muhammed Ibrahim ,  NOBBE, Dan William

IPC: H03H9/54 ,  H03H9/64 ,  H03H9/56 ,  H03H9/542 ,  H03H9/547 ,  H03H9/568 ,  H03H9/6403 ,  H03H9/6409 ,  H03H9/6483 ,  H04B1/0483 ,  H04B1/1036 ,  H04B2001/1063 ,  H04B2001/1072

Abstract: Radio frequency (RF) acoustic wave resonator (AWR) filter circuits and methods. Embodiments essentially de-couple the stopband or notch characteristics of an RF filter from the passband characteristics. Accordingly, the de-coupled parameters can be individually designed to meet the specifications of a particular application. Partially-hybridized or fully-hybridized series-arm and parallel-arm AWR filter building blocks enable "de-coupled" RF filters having (1) wideband and low insertion loss passbands and (2) wideband deep notches (stopbands) with a specifically placed notch center frequency, without compromising the passband characteristics. The AWR filter building blocks include an inductance L (LMS,LMP) that matches (resonates with) the electrostatic capacitance CO of the corresponding AWR (SAWR, PAWR) within a desired passband. The resonance and anti-resonance frequencies of the building block AWRs are selected to be spaced apart from the specified passband in order to provide independent stopband or notch characteristics without substantially affecting the passband characteristics. Further passive elements (CMS,CMP,LTP,LTS,CTP,CTS) are added to tune notch width, depth and position.

公开(公告)号：WO2022212757A1

公开(公告)日：2022-10-06

申请号：PCT/US2022/022908

申请日：2022-03-31

Applicant: RESONANT INC.

Inventor： DYER, Greg ,  YANG, Wei ,  MUKANDATIMANA, Marie Chantal ,  MYERS, Luke ,  FENZI, Neal ,  GUYETTE, Andrew ,  GARCIA, Bryant

IPC: H03H9/64 ,  H03H3/02 ,  H03H9/17 ,  H03H9/205 ,  H03H9/54 ,  H03H9/568

Abstract: Tiled filters are disclosed. A filter includes an n x m array of sub-filters, where n is a number of sub-filters in parallel and m is a number of sub-filters in series. n and m are non-zero positive integers and at least one of n and m is greater than one. All of the nm sub-filters are bandpass filters with substantially the same passbands.

公开(公告)号：WO2022212569A1

公开(公告)日：2022-10-06

申请号：PCT/US2022/022632

申请日：2022-03-30

Applicant: RESONANT INC.

Inventor： YANG, Wei ,  GUYETTE, Andrew ,  DYER, Gregory

IPC: H03H9/00 ,  H01L41/00 ,  H04B7/00 ,  H03H9/02228 ,  H03H9/205 ,  H03H9/568

Abstract: A 6 GHz Wi-Fi bandpass filter includes a ladder filter circuit with two or more shunt transversely-excited film bulk acoustic resonators (XBARs) and two or more series XBARs. Each of the two or more shunt XBARS includes a diaphragm having an LN-equivalent thickness greater than or equal to 310 nm, and each of the two or more series XBARS includes a diaphragm having an LN-equivalent thickness less than or equal to 305 nm.

公开(公告)号：WO2022056138A2

公开(公告)日：2022-03-17

申请号：PCT/US2021/049679

申请日：2021-09-09

Applicant: RAYTHEON COMPANY

Inventor： SORIC, Jason C. ,  LAROCHE, Jeffrey R. ,  CHUMBES, Eduardo M. ,  PECZALSKI, Adam E.

IPC: H03H9/05 ,  H03H3/02 ,  H03H9/17 ,  H03H9/56 ,  H03H3/04 ,  H01L29/20 ,  H01L29/778 ,  H01L21/02378 ,  H01L21/0254 ,  H01L27/20 ,  H01L29/2003 ,  H01L29/201 ,  H01L29/205 ,  H01L29/4175 ,  H01L29/66462 ,  H01L29/7786 ,  H03F2200/294 ,  H03F2200/451 ,  H03F3/195 ,  H03H2003/023 ,  H03H2003/0442 ,  H03H9/0542 ,  H03H9/174 ,  H03H9/545 ,  H03H9/562 ,  H03H9/564 ,  H03H9/568 ,  H04B1/06 ,  H04B1/10

Abstract: Embodiments of a single-chip ScAIN tunable filter bank include a plurality of switching elements, and a plurality of channel filters integrated on a monolithic platform. The monolithic platform comprises a single crystal base (202) and each of the switching elements comprises at least one of a scandium aluminum nitride (ScAIN) or other Group Ill-Nitride transistor structure (204) fabricated on the single crystal base (202). In these embodiments, each channel filter comprises a multi-layered ScAIN structure (206) comprising one or more a single-crystal epitaxial ScAIN layers fabricated on the single crystal base (202). The ScAIN layers for each channel filter are based on desired frequency characteristics of an associated one of the RF channels.