Invention Grant
- Patent Title: Hybrid spacer integration for field-effect transistors
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Application No.: US15800563Application Date: 2017-11-01
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Publication No.: US10283617B1Publication Date: 2019-05-07
- Inventor: Ruilong Xie , Dong-Ick Lee , Min Gyu Sung , Chanro Park
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/768 ; H01L21/02 ; H01L29/78 ; H01L21/321 ; H01L29/417 ; H01L21/311 ; H01L21/3065 ; H01L29/08 ; H01L21/3105

Abstract:
Device structures and fabrication methods for a field-effect transistor. A first dielectric spacer adjacent to a sidewall of a gate placeholder structure. A contact placeholder structure is formed adjacent to the first dielectric spacer such that the first dielectric spacer is arranged laterally between the gate placeholder structure and the contact placeholder structure. The contact placeholder structure and the first dielectric spacer are recessed to open a space over the contact placeholder structure and the first dielectric spacer. A second dielectric spacer is formed in the space adjacent to the sidewall of the gate placeholder structure and over the first dielectric spacer.
Public/Granted literature
- US20190131430A1 HYBRID SPACER INTEGRATION FOR FIELD-EFFECT TRANSISTORS Public/Granted day:2019-05-02
Information query
IPC分类: