Invention Grant
- Patent Title: Multiple deep trench isolation (MDTI) structure for CMOS image sensor
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Application No.: US16661166Application Date: 2019-10-23
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Publication No.: US10861894B2Publication Date: 2020-12-08
- Inventor: Wei Chuang Wu , Ching-Chun Wang , Dun-Nian Yaung , Feng-Chi Hung , Jen-Cheng Liu , Yen-Ting Chiang , Chun-Yuan Chen , Shen-Hui Hong
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H04N5/369 ; H04N5/374

Abstract:
The present disclosure relates to a CMOS image sensor having a multiple deep trench isolation (MDTI) structure, and an associated method of formation. In some embodiments, a plurality of photodiodes is formed from a front-side of a substrate. A plurality of boundary deep trench isolation (BDTI) trenches having a first depth and a plurality of multiple deep trench isolation (MDTI) trenches having a second depth are formed from a back-side of the substrate. A stack of dielectric layers is formed in the BDTI trenches and the MDTI trenches. A plurality of color filters is formed overlying the stack of dielectric layers corresponding to the plurality of photodiodes.
Public/Granted literature
- US20200058686A1 MULTIPLE DEEP TRENCH ISOLATION (MDTI) STRUCTURE FOR CMOS IMAGE SENSOR Public/Granted day:2020-02-20
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