Invention Grant
- Patent Title: External resistance reduction with embedded bottom source/drain for vertical transport FET
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Application No.: US16775726Application Date: 2020-01-29
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Publication No.: US10903318B2Publication Date: 2021-01-26
- Inventor: Choonghyun Lee , Reinaldo Vega , Jingyun Zhang , Miaomiao Wang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent L. Jeffrey Kelly
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/66 ; H01L21/02 ; H01L21/768 ; H01L29/08 ; H01L29/78 ; H01L29/49 ; H01L29/51 ; H01L21/28

Abstract:
A method is presented for reducing external resistance of a vertical field-effect-transistor (FET). The method includes forming a plurality of fins over a sacrificial layer disposed over a substrate, selectively removing the sacrificial layer to form an etch stop layer in direct contact with the substrate, disposing embedded bottom source/drain regions between a bottom portion of the plurality of fins and the etch stop layer, disposing encapsulation layers over the plurality of fins, recessing at least one of the encapsulation layers to expose top portions of the plurality of fins, forming top spacers adjacent the top portions of the plurality of fins, and forming top source/drain regions over the top portions of the plurality of fins.
Public/Granted literature
- US20200168706A1 EXTERNAL RESISTANCE REDUCTION WITH EMBEDDED BOTTOM SOURCE/DRAIN FOR VERTICAL TRANSPORT FET Public/Granted day:2020-05-28
Information query
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