Invention Grant
- Patent Title: Three-dimensional memory device containing plural work function word lines and methods of forming the same
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Application No.: US16710481Application Date: 2019-12-11
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Publication No.: US11063063B2Publication Date: 2021-07-13
- Inventor: Yanli Zhang , Dong-il Moon , Raghuveer S. Makala , Peng Zhang , Wei Zhao , Ashish Baraskar
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L27/11582 ; H01L27/11556 ; H01L23/532 ; H01L21/311 ; H01L27/11526 ; H01L27/11565 ; H01L27/11573 ; H01L21/28 ; H01L23/528 ; H01L27/11519

Abstract:
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, memory openings vertically extending through the alternating stack, and memory stack structures extending through the alternating stack. Each of the memory stack structures contains a memory film and a vertical semiconductor channel. At least one of the electrically conductive layers contains a first conductive material portion having a respective inner sidewall that contacts a respective one of the memory films at a vertical interface, and a second conductive material portion that has a different composition from the first conductive material portion, and contacting the first electrically conductive material portion. The first conductive material portion has a lower work function than the second conductive material portion.
Public/Granted literature
Information query
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